Modular assembly calibration apparatus for semiconductor vacuum gauges

Abstract

The utility model discloses a modular assembly calibration device of semiconductor vacuum gauge relates to the modular assembly calibration device field of vacuum gauge, the utility model discloses a welding correction mechanism, assembly mechanism, the welding correction mechanism includes linear motor, laser welding gun, the both sides of laser welding gun are connected with the mounting ear through the damping pivot rotation, through setting protection mechanism, its first magnetic attraction piece and second magnetic attraction piece and welding correction mechanism mounting frame front end's magnetic attraction groove, adopt the quick -witted connection mode of magnetic attraction plug -in, this fast -change design lets transparent baffle can conveniently and stably cover in the front of visual sensor probe, when laser welding, electric spark temperature is high, and impurity kinetic energy is big, and visual sensor is easily damaged, and transparent baffle can effectively block, guarantee visual sensor protection is good, solved the problem that laser welding easily damaged visual sensor and traditional protection device inconveniently replaced.

Description

Technical Field

[0001] This utility model relates to the field of modular assembly and calibration devices for vacuum gauges, specifically a modular assembly and calibration device for semiconductor vacuum gauges. Background Technology

[0002] In the semiconductor manufacturing field, semiconductor vacuum gauges are critical equipment, and the accuracy and reliability of their modular assembly and calibration directly affect the quality and stability of the semiconductor production process. Laser welding technology, with its significant advantages such as high welding precision and a small heat-affected zone, has been widely used in the modular assembly and calibration of semiconductor vacuum gauges. To achieve precise monitoring and quality control of the welding process, a vision probe is often installed near the laser head during laser welding. The vision probe can capture image information of the welding area in real time, providing operators with intuitive feedback on the welding status. This helps to promptly detect problems such as weld misalignment and welding defects during the welding process, thereby adjusting welding parameters and ensuring welding quality.

[0003] However, the existing method of mounting the vision probe next to the laser head is problematic because the welding process generates intense electric sparks, along with the splashing of impurities. These electric sparks are extremely hot, and the splashed impurities have high kinetic energy. Vision probes are typically composed of delicate optical and electronic components, and their surfaces are relatively fragile and require a high degree of environmental cleanliness. When the electric sparks and splashed impurities come into contact with the vision probe, the high-temperature electric sparks may burn the probe surface, damaging the optical components and affecting the clarity of image acquisition. Meanwhile, the splashed impurities will adhere to the probe surface, forming a dirt layer that blocks the normal passage of light and reduces the imaging quality of the vision probe. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide a modular assembly and calibration device for semiconductor vacuum gauges, in order to solve the technical problems that when a vision probe is installed next to a laser head, the strong electric sparks generated during the welding process may burn the probe surface, causing damage to optical components and affecting the clarity of image acquisition, as well as the problem that splashed impurities adhere to the probe surface, forming a dirt layer that blocks the normal passage of light and reduces the imaging quality of the vision probe.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a modular assembly and calibration device for a semiconductor vacuum gauge, comprising a welding correction mechanism and an assembly mechanism. The welding correction mechanism includes a linear motor and a laser welding gun. The laser welding gun has mounting ears rotatably connected to both sides via damping shafts, and a vision sensor is rotatably connected to the upper inner side of the two mounting ears via damping shafts. Two mounting brackets are provided on the outer side of the two mounting ears, and magnetic suction grooves are provided at the front ends of the two mounting brackets. A protective mechanism is inserted into the front end of the magnetic suction grooves.

[0006] The protective mechanism includes a first magnetic block and a second magnetic block. A transparent baffle is installed between the first magnetic block and the second magnetic block through a frame. The first magnetic block and the second magnetic block are inserted into two magnetic slots and magnetically attracted to each other.

[0007] By adopting the above technical solutions, a basic framework is provided for the modular assembly and calibration of semiconductor vacuum gauges, which is conducive to subsequent precise operation and efficient assembly.

[0008] Furthermore, the mounting bracket is made of engineering plastic, and a transparent baffle covers the vision sensor probe.

[0009] By adopting the above technical solution, the mounting bracket is made of engineering plastic, which is sturdy, durable, and cost-effective. The transparent baffle covers the vision sensor probe, effectively blocking welding impurities, protecting the sensor, ensuring its normal image acquisition, and facilitating accurate assembly and calibration of the semiconductor vacuum gauge.

[0010] Furthermore, the assembly mechanism includes a base, with two grippers at the top front end of the base, and the top rear end of the base is fixedly connected to the welding straightening mechanism.

[0011] By adopting the above technical solution, the assembly mechanism has a gripper at the front end of the top of the base, and the rear end is fixed to the welding straightening mechanism. This layout makes the gripper position reasonable, facilitates coordination with the welding straightening mechanism, and accurately clamps the workpiece, providing a stable foundation for the assembly and calibration of semiconductor vacuum gauges.

[0012] Furthermore, a fixing frame is provided on both sides of the two grippers, and two third electric push rods are provided at the bottom of the fixing frame, and a pressure block for pressing the weldment is installed at the bottom output end of the third electric push rod.

[0013] By adopting the above technical solution, fixed frames are provided on both sides of the gripper, and a third electric push rod and pressure block are located at the bottom. The third electric push rod drives the pressure block to press down, which can firmly press the weldment, and together with the gripper, achieve reliable fixation of the workpiece, ensuring the assembly and calibration quality of the semiconductor vacuum gauge.

[0014] Furthermore, a first electric actuator is installed at the top moving end of the linear motor, and an adjusting motor is provided at the output end of the first electric actuator.

[0015] By adopting the above technical solution, a first electric actuator is installed at the top moving end of the linear motor, and an adjustment motor is provided at its output end. This combination enables the device to achieve multi-dimensional adjustment through the first electric actuator and the adjustment motor on the basis of horizontal movement, meeting the complex requirements of semiconductor vacuum gauge assembly and calibration.

[0016] Furthermore, the output end of the regulating motor is provided with a second electric push rod, and the output end of the second electric push rod is detachably connected to a laser welding gun.

[0017] By adopting the above technical solution, a second electric actuator is installed at the output end of the adjusting motor, and its output end is detachably connected to the laser welding gun. This design allows for quick replacement of the laser welding gun, adapting to different welding requirements, improving the versatility of the device, and ensuring efficient assembly and calibration of semiconductor vacuum gauges.

[0018] Furthermore, the assembly mechanism achieves clamping, positioning, and pressing of the workpiece to be welded through the cooperation of the gripper and the third electric push rod.

[0019] By adopting the above technical solution, the assembly mechanism uses grippers and a third electric actuator to clamp, position, and secure the workpiece to be welded. The synergistic effect of these two mechanisms ensures workpiece stability, guaranteeing precise welding and assembly of semiconductor vacuum gauges and improving overall quality.

[0020] Furthermore, the base of the assembly mechanism is fixedly connected to the linear motor of the welding straightening mechanism, so that the workpiece clamping position of the gripper is located below the movement path of the laser welding gun.

[0021] By adopting the above technical solution, the base of the assembly mechanism is fixed to the linear motor of the welding straightening mechanism, so that the workpiece clamping position of the gripper is below the movement path of the laser welding gun. This layout ensures welding precision, facilitates efficient assembly and calibration of semiconductor vacuum gauges, and improves production efficiency and quality.

[0022] In summary, the present invention has the following main advantages:

[0023] This invention features a protective mechanism in which the first and second magnetic blocks of the protective mechanism are quickly connected to the magnetic groove at the front end of the mounting bracket on the welding straightening mechanism using a magnetic insertion method. This quick-change design allows the transparent baffle to be conveniently and stably placed in front of the vision sensor probe. During laser welding, the intense electric sparks generated by welding generate extremely high temperatures, and the splashed impurities have high kinetic energy, which can easily damage the vision sensor. The transparent baffle can effectively block electric sparks and impurities, preventing them from directly contacting the vision sensor. When the transparent baffle becomes worn or dirty due to long-term use, it can be quickly pulled out of the magnetic groove for replacement, ensuring that the vision sensor is always in a good protective state. This solves the technical problems of electric sparks and splashed impurities easily damaging the vision sensor during laser welding, leading to damage to optical components, affecting image acquisition clarity, and reducing imaging quality, as well as the inconvenience of replacing traditional protective devices. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0025] Figure 2 This is a side view of the three-dimensional structure of the present invention;

[0026] Figure 3 This utility model Figure 2 Enlarged structural diagram at point A;

[0027] Figure 4 This is a partial three-dimensional structural diagram of the protective mechanism of this utility model.

[0028] In the diagram: 1. Welding calibration mechanism; 101. Linear motor; 102. First electric actuator; 103. Adjustment motor; 104. Second electric actuator; 105. Laser welding gun; 106. Mounting ear; 107. Vision sensor; 108. Mounting bracket; 109. Magnetic slot; 2. Protective mechanism; 201. First magnetic insertion block; 202. Second magnetic insertion block; 203. Transparent baffle; 3. Assembly mechanism; 301. Base; 302. Gripper; 303. Fixing bracket; 304. Third electric actuator. Detailed Implementation

[0029] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0030] A modular assembly calibration device for semiconductor vacuum gauges, such as Figure 1-4 As shown, it includes a welding straightening mechanism 1 and an assembly mechanism 3. The welding straightening mechanism 1 includes a linear motor 101 and a laser welding gun 105. The two sides of the laser welding gun 105 are rotatably connected to mounting ears 106 via damping shafts. Visual sensors 107 are rotatably connected to the upper inner side of the two mounting ears 106 via damping shafts. Two mounting brackets 108 are provided on the outer side of the two mounting ears 106. Magnetic suction grooves 109 are opened at the front end of the two mounting brackets 108. A protective mechanism 2 is inserted into the front end of the magnetic suction grooves 109.

[0031] The protective mechanism 2 includes a first magnetic block 201 and a second magnetic block 202. A transparent baffle 203 is installed between the first magnetic block 201 and the second magnetic block 202 through a frame. The first magnetic block 201 and the second magnetic block 202 are inserted into and magnetically attracted to two magnetic slots 109. The linear motor 101 in the welding straightening mechanism 1 can drive the movement of related components. The laser welding gun 105 is used for welding operations, and the vision sensor 107 can assist in observation. The mounting ears 106 and the mounting bracket 108 provide support for the components, and the magnetic slots 109 cooperate with the protective mechanism 2 to achieve protection. The base 301 of the assembly mechanism 3 is connected to the welding straightening mechanism 1, and the grippers 302, etc., are used for workpiece operation. This overall structure provides a stable framework for the modular assembly and calibration of semiconductor vacuum gauges. The cooperation of each component ensures the smooth progress of assembly and calibration work.

[0032] See Figure 3 , Figure 4 The mounting bracket 108 is made of engineering plastic, and the transparent baffle 203 covers the probe of the vision sensor 107. The mounting bracket 108, made of engineering plastic, has advantages such as light weight, high strength, and corrosion resistance, and can stably support various components in complex working environments. The transparent baffle 203 covers the probe of the vision sensor 107. During the assembly and calibration of the semiconductor vacuum gauge, electrical sparks and impurities generated during welding can easily damage the vision sensor 107. The transparent baffle 203 effectively blocks these hazards without affecting the image acquisition of the welding process by the vision sensor 107. This design ensures the normal operation of the vision sensor 107, provides accurate data support for assembly and calibration, and improves the reliability and stability of the entire device.

[0033] See Figure 1 , Figure 4 The assembly mechanism 3 includes a base 301 with two grippers 302 at its top front end. The rear end of the top of the base 301 is fixedly connected to the welding straightening mechanism 1. This structural design allows the workpiece clamping position of the grippers 302 to closely cooperate with the welding straightening mechanism 1. During the modular assembly and calibration process of the semiconductor vacuum gauge, the grippers 302 can accurately clamp the workpiece to be welded and position it appropriately. Because the base 301 is fixed to the welding straightening mechanism 1, the stability of the gripper 302's position is ensured, allowing the workpiece to maintain an accurate position during welding, providing reliable assurance for subsequent welding and assembly work, and improving the accuracy and efficiency of assembly calibration.

[0034] See Figure 1 , Figure 2 The device comprises two grippers 302 with fixing frames 303 on both sides. Two third electric actuators 304 are mounted at the bottom of the fixing frames 303, and pressure blocks for pressing the workpiece are installed at the bottom output ends of the third electric actuators 304. During the assembly and calibration of the semiconductor vacuum gauge, the grippers 302 first perform initial clamping and positioning of the workpiece to be welded. Then, the third electric actuators 304 operate, driving the pressure blocks downwards to press firmly onto the workpiece. This design allows for precise contact between the pressure blocks and the workpiece, achieving stable pressing, by adjusting the stroke of the third electric actuators 304, according to different shapes and sizes of workpieces. In conjunction with the grippers 302, it ensures the workpiece remains stable during welding, preventing a decrease in welding quality due to vibration or displacement, and effectively guaranteeing the quality of the semiconductor vacuum gauge assembly and calibration.

[0035] See Figure 3 , Figure 4 The linear motor 101 has a first electric actuator 102 mounted on its top moving end. An adjusting motor 103 is installed at the output end of the first electric actuator 102. Fixing frames 303 are located on both sides of the two grippers 302. Two third electric actuators 304 are mounted at the bottom of the fixing frames 303, and pressure blocks are installed at the bottom output ends of the third electric actuators 304. In the modular assembly and calibration device for semiconductor vacuum gauges, the linear motor 101 enables horizontal movement of the device, providing approximate positional adjustments for operations such as welding. The first electric actuator 102 can be further extended and retracted in the vertical direction, changing the height of related components. The adjusting motor 103 enables angular rotational adjustment. This multi-component design allows for flexible adjustment in multiple dimensions, including horizontal, vertical, and angular dimensions, meeting the precise operational requirements for different positions and angles during the assembly and calibration of semiconductor vacuum gauges, thus improving the adaptability and operational accuracy of the device.

[0036] See Figure 1 , Figure 2 The output end of the adjusting motor 103 is equipped with a second electric actuator 104, and the output end of the second electric actuator 104 is detachably connected to a laser welding gun 105. A first electric actuator 102 is mounted on the top moving end of the linear motor 101, and the output end of the first electric actuator 102 is equipped with the adjusting motor 103. The output end of the adjusting motor 103 is equipped with the second electric actuator 104, and the output end of the second electric actuator 104 is detachably connected to the laser welding gun 105. During the assembly and calibration of the semiconductor vacuum gauge, different welding scenarios may have different requirements for the power, type, etc., of the laser welding gun 105. Through this detachable connection design, when it is necessary to replace the laser welding gun 105, the operator can quickly and easily remove the original laser welding gun 105 from the second electric actuator 104 and install a suitable laser welding gun 105. This greatly improves the versatility and flexibility of the device, enabling it to quickly adapt to different welding needs, ensuring the efficient execution of the semiconductor vacuum gauge assembly and calibration work, and reducing the time wasted due to welding gun replacement.

[0037] See Figure 1 , Figure 4The assembly mechanism 3, through the cooperation of the gripper 302 and the third electric push rod 304, achieves clamping, positioning, and pressing fixation of the workpiece to be welded. A second electric push rod 104 is installed at the output end of the adjusting motor 103. The output end of the second electric push rod 104 is detachably connected to the laser welding gun 105. In the assembly and calibration process of the semiconductor vacuum gauge, the gripper 302 first initially clamps the workpiece, positioning it in a suitable position. Then, the third electric push rod 304 drives the pressure block to move downwards, pressing it against the workpiece to further fix it. This synergistic approach allows for flexible adjustment of the clamping and pressing force and position according to the shape and size of different workpieces, ensuring the workpiece remains stable during welding. A stable workpiece position is the foundation for accurate welding and assembly, helping to improve the overall quality of the semiconductor vacuum gauge and reduce welding defects and assembly errors caused by workpiece movement.

[0038] See Figure 1 , Figure 2 The base 301 of the assembly mechanism 3 is fixedly connected to the linear motor 101 of the welding straightening mechanism 1, so that the workpiece clamping position of the gripper 302 is located below the movement path of the laser welding gun 105. This layout is significant in the modular assembly and calibration process of semiconductor vacuum gauges. When the linear motor 101 drives the laser welding gun 105 to move for welding, the workpiece held by the gripper 302 is precisely below the movement path of the laser welding gun 105, ensuring that the laser accurately irradiates the welding area of ​​the workpiece, achieving precise welding. This reasonable layout design avoids welding inaccuracies caused by positional deviations, facilitates efficient assembly and calibration of semiconductor vacuum gauges, improves production efficiency and product quality, and reduces scrap and rework rates.

[0039] The implementation principle of this embodiment is as follows: First, in the welding straightening mechanism 1, a first electric push rod 102 is installed at the top moving end of the linear motor 101. An adjustment motor 103 is set at the output end of the first electric push rod 102, and a second electric push rod 104 is set at the output end of the adjustment motor 103. The laser welding gun 105 is installed at the output end of the second electric push rod 104 in a detachable connection manner. This detachable design allows the laser welding gun 105 to be quickly replaced according to different welding needs. For example, when facing weldments of different materials and specifications, and needing to use different types or powers of laser welding guns 105, the operator can quickly remove the original laser welding gun 105 from the second electric push rod 104 and install the appropriate laser welding gun 105, which greatly improves the versatility and flexibility of the equipment and meets the requirements of diverse welding scenarios.

[0040] Meanwhile, the laser welding gun 105 is rotatably connected to mounting ears 106 on both sides via damping shafts. Vision sensors 107 are rotatably connected to the upper inner sides of the two mounting ears 106 via damping shafts. Mounting brackets 108 are provided on the outer sides of the two mounting ears 106. A magnetic suction groove 109 is formed at the front end of the mounting bracket 108. A protective mechanism 2 is inserted into the front end of the magnetic suction groove 109. A transparent baffle 203 is installed between the first magnetic block 201 and the second magnetic block 202 of the protective mechanism 2 via a frame. The first magnetic block 201 and the second magnetic block 202 are inserted into and magnetically attracted to the magnetic suction groove 109. During the welding process, the electric sparks and spatter generated during welding can damage the vision sensor 107. The transparent baffle 203 can effectively block these hazards. The magnetic connection method allows the protective mechanism 2 to be quickly replaced. When the transparent baffle 203 is worn or contaminated due to long-term use, affecting its protective effect and the image acquisition quality of the vision sensor 107, the operator can easily pull the protective mechanism 2 out of the magnetic slot 109 and replace it with a new protective mechanism 2, ensuring that the vision sensor 107 is always in good working condition.

[0041] Regarding the assembly mechanism 3, two grippers 302 are provided at the top front end of the base 301. The top rear end of the base 301 is fixedly connected to the welding correction mechanism 1, so that the workpiece clamping position of the grippers 302 is located below the movement path of the laser welding gun 105, realizing the precise positioning of the workpiece in the welding position. Fixing frames 303 are provided on both sides of the two grippers 302. Two third electric push rods 304 are provided at the bottom of the fixing frames 303. A pressure block for pressing the weldment is installed at the bottom output end of the third electric push rod 304. The connection design between the third electric push rod 304 and the pressure block also facilitates the quick replacement of the pressure block. When facing workpieces of different shapes and sizes to be welded, different types or sizes of pressure blocks are required to better achieve clamping and fixing. Operators can quickly disassemble and replace the appropriate pressure block to ensure that the workpiece remains stable during the welding process, improve welding accuracy and assembly quality. Through the coordinated work of the welding correction mechanism 1 and the assembly mechanism 3, the efficient modular assembly and calibration of the semiconductor vacuum gauge is realized.

[0042] Although embodiments of the present invention have been shown and described, these specific embodiments are merely explanations of the present invention and are not intended to limit the invention. The specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions, and variations to the embodiments as needed without departing from the principles and spirit of the present invention, provided that such modifications, substitutions, and variations are within the scope of the claims of the present invention and are protected by patent law.

Claims

1. A modular assembly and calibration device for a semiconductor vacuum gauge, characterized in that: The assembly includes a welding straightening mechanism (1) and an assembly mechanism (3). The welding straightening mechanism (1) includes a linear motor (101) and a laser welding gun (105). The laser welding gun (105) has mounting ears (106) rotatably connected to both sides via a damping shaft. A vision sensor (107) is rotatably connected to the upper inner side of the two mounting ears (106) via a damping shaft. Two mounting brackets (108) are provided on the outer side of the two mounting ears (106). A magnetic suction groove (109) is opened at the front end of the two mounting brackets (108). A protective mechanism (2) is inserted into the front end of the magnetic suction groove (109). The protective mechanism (2) includes a first magnetic block (201) and a second magnetic block (202). A transparent baffle (203) is installed between the first magnetic block (201) and the second magnetic block (202) through a frame. The first magnetic block (201) and the second magnetic block (202) are inserted into and magnetically attracted to two magnetic slots (109).

2. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 1, characterized in that: The mounting bracket (108) is made of engineering plastic, and the transparent baffle (203) covers the vision sensor (107) probe.

3. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 1, characterized in that: The assembly mechanism (3) includes a base (301), with two grippers (302) at the top front end of the base (301), and the top rear end of the base (301) is fixedly connected to the welding straightening mechanism (1).

4. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 3, characterized in that: The two grippers (302) are provided with a fixing frame (303) on both sides. The bottom of the fixing frame (303) is provided with two third electric push rods (304), and the bottom output end of the third electric push rod (304) is equipped with a pressure block for pressing the weldment.

5. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 1, characterized in that: The linear motor (101) has a first electric actuator (102) installed at the top moving end, and the output end of the first electric actuator (102) is provided with an adjusting motor (103).

6. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 5, characterized in that: The output end of the regulating motor (103) is provided with a second electric push rod (104), and the output end of the second electric push rod (104) is detachably connected to a laser welding gun (105).

7. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 1, characterized in that: The assembly mechanism (3) achieves clamping, positioning and pressing of the workpiece to be welded through the cooperation of the gripper (302) and the third electric push rod (304).

8. The modular assembly and calibration device for semiconductor vacuum gauges according to claim 1, characterized in that: The base (301) of the assembly mechanism (3) is fixedly connected to the linear motor (101) of the welding straightening mechanism (1), so that the workpiece clamping position of the gripper (302) is located below the movement path of the laser welding gun (105).

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