A motion stage slide table guide rail

Abstract

The utility model belongs to five -axis super -precision air bearing motion platform application technical field, specifically discloses a motion platform sliding table guide rail, including marble bed body, plate -type sliding table, a group of vertical roof beam, crossbeam, installation clamping groove, countersunk screw hole, fixed base, screw groove, bolt, transition support plate and guide rail etc.

Description

Technical Field

[0001] This utility model belongs to the field of five-axis ultra-precision air-bearing motion table application technology, specifically relating to a motion table slide guide rail. Background Technology

[0002] The five-axis ultra-precision air-bearing motion stage provides high positioning accuracy and axial and radial runout error, meeting the needs of ultra-precision surface machining, surface measurement, or spatial angle adjustment. The product is mainly used in semiconductor processing, photonics, scanning, and flat panel display manufacturing.

[0003] The five-axis precision motion table has three axes for product positioning. The Z-axis uses a servo motor for vertical position adjustment, and the crossbeam double-acting sub-axis is equipped with a camera for product position calibration and correction.

[0004] Currently, traditional motion table slide rails typically employ a multi-bolt, threaded-hole fixing method. This involves horizontally installing multiple sets of threaded holes on the plate slide, and then securing the rail to the slide with bolts. This installation method is inconvenient in two ways: firstly, assembly is time-consuming, and disassembly and maintenance are also difficult (it's time-consuming and requires removing bolts under the crossbeam, which is inconvenient); secondly, during assembly or reassembly after disassembly and maintenance, it's impossible to monitor the horizontal position of the rails, leading to potential large assembly errors. This restricts the overall accuracy of the equipment and increases the risk of safety issues during operation.

[0005] Therefore, based on the above problems, this utility model provides a motion table slide guide rail. Utility Model Content

[0006] Purpose of the utility model: The purpose of this utility model is to provide a motion table slide guide rail to solve the problems existing in the background art.

[0007] Technical Solution: This utility model discloses a motion table slide rail, comprising a marble bed, a plate slide, a set of vertical beams and horizontal beams. A mounting groove is provided within the symmetrical center line of the plate slide and below the horizontal beam. Countersunk screw holes that mate with the mounting grooves are provided at both ends of the plate slide. A fixing seat is mounted on one side of the plate slide via the mounting groove. Threaded grooves that mate with the countersunk screw holes are provided on both end faces of the fixing seat. The plate slide and the fixing seat are fixed together by bolts through the countersunk screw holes and threaded grooves. A transition support plate is provided on one side of the fixing seat, and a guide rail is provided on one side of the transition support plate.

[0008] In this technical solution, the motion table slide rail further includes several perforated baffles disposed on the outer wall of the same side as the transition support plate, a laser displacement emitting end and a laser displacement reflecting end disposed on the same side of the plate slide and used in conjunction with each other, a PLC controller connected to the laser displacement emitting end, and a warning unit connected to the PLC controller; wherein, the PLC controller is used to receive information from the laser displacement emitting end and issue warning reminders through the warning unit.

[0009] In this technical solution, the mounting slot and the fixing seat are configured as rectangular structures that work together.

[0010] In this technical solution, the warning unit is any one of a horn, a strobe light, or a stainless steel belt with a vibration motor.

[0011] In this technical solution, at least three perforated baffles are provided for use in conjunction with the laser displacement emitting end and the laser displacement reflecting end.

[0012] Compared with the prior art, the beneficial effects of the motion table slide guide rail of this utility model are as follows: 1. Through reasonable layout design, the guide rail and the plate slide can be quickly assembled and disassembled, improving work efficiency. At the same time, it is easy to operate and will not cause damage to the plate slide. 2. The PLC controller, laser displacement emitting end, laser displacement reflecting end and perforated baffle used in conjunction can perform corresponding horizontal alignment monitoring of the guide rail and the plate slide during the rapid assembly process, realize precise assembly between the guide rail and the plate slide, reduce errors, and also realize corresponding horizontal displacement monitoring between the guide rail and the plate slide during operation, ensuring the safety and accuracy of the overall equipment operation. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the main structural part of a motion table slide guide rail according to this utility model; Figure 2 This is a top view of the structure of a motion table slide guide rail according to this utility model. Figure 3 This is a top view schematic diagram of the plate slide, mounting slot, countersunk screw hole and bolt of this utility model; Figure 4 This is a top view of the fixed base, transition support plate, guide rail, screw groove and perforated baffle of this utility model. The numbers in the diagram are as follows: 100-Marble bed, 101-Plate slide, 102-Vertical beam, 103-Horizontal beam, 104-PLC controller, 10-Mounting slot, 11-Fixed seat, 12-Transition support plate, 13-Guide rail, 14-Bolt, 15-Counterhead screw hole, 16-Screw groove, 17-Laser displacement emitting end, 18-Laser displacement reflecting end, 19-Baffle with perforation, 20-Warning unit. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0016] In the description of this utility model, it should be noted that the terms "top," "bottom," "one side," "the other side," "front," "back," "middle part," "inner," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0017] Example 1 like Figure 1 , Figure 2 , Figure 3 and Figure 4 The illustrated motion table slide rail includes a marble bed 100, a plate slide 101, a set of vertical beams 102 and horizontal beams 103. A mounting slot 10 is provided within the symmetrical center line of the plate slide table 101 and below the crossbeam 103. The plate slide 101 has countersunk screw holes 15 at both ends for use with mounting slots 10. One side of the plate slide 101 is fitted with a fixed base 11 via a mounting slot 10. The two end faces of the fixing base 11 are provided with threaded grooves 16 that mate with countersunk screw holes 15. The plate slide 101 and the fixed base 11 are fixed together by bolts 14 through countersunk screw holes 15 and screw grooves 16. A transition support plate 12 is provided on one side of the fixed base 11. A guide rail 13 is provided on one side of the transition support plate 12.

[0018] The working principle is as follows: The fixed seat 11 is placed horizontally on the mounting slot 10 on one side of the plate slide 101. Then, the plate slide 101 and the fixed seat 11 are fixed by bolts 14 through the countersunk screw holes 15 and screw grooves 16. Only two bolts 14 are needed for the whole assembly. At the same time, no additional alignment is required during installation. The fixed seat 11 and the mounting slot 10 are directly aligned, which improves the overall assembly efficiency and convenience. In addition, disassembly and maintenance are also convenient. A set of vertical beams 102 and horizontal beams 103 will not interfere with the disassembly and assembly of the plate slide 101 and the fixed seat 11.

[0019] Example 2 Based on Embodiment 1, the motion table slide rail also includes several perforated baffles 19 disposed on the outer wall of the same side as the transition support plate 12, a laser displacement emitting end 17 and a laser displacement reflecting end 18 disposed on the same side as the plate slide 101 and used in conjunction with each other, a PLC controller 104 connected to the laser displacement emitting end 17, and a warning unit 20 connected to the PLC controller 104; wherein, the PLC controller 104 is used to receive information from the laser displacement emitting end 17 and issue a warning reminder through the warning unit 20.

[0020] The working principle is as follows: the horizontal alignment signal of the laser displacement emitting end 17 passes through several perforated baffles 19 and reaches the laser displacement reflecting end 18; when a large offset occurs between the plate slide 101 and the fixed base 11 during assembly, and the allowable offset error is greater than the preset offset value of the PLC controller 104 (the horizontal alignment signal of the laser displacement emitting end 17 cannot pass through the perforated baffles 19 and reach the laser displacement reflecting end 18), the PLC controller 104 issues a warning reminder through the connected warning unit 20. The same monitoring function is performed during the overall operation of the equipment.

[0021] In addition, the mounting slot 10 and the fixing seat 11 are preferably configured as rectangular structures for use in conjunction with each other, so as to adapt to the guide rail installation of the five-axis ultra-precision air-bearing motion table.

[0022] In addition, the warning unit 20 is preferably any one of a horn, a strobe light, or a stainless steel belt with a vibration motor, to meet the reminder requirements in different usage scenarios.

[0023] In addition, preferably, at least three perforated baffles 19 are provided to cooperate with the laser displacement emitting end 17 and the laser displacement reflecting end 18, so as to realize the horizontal assembly offset monitoring and precise monitoring during the operation of the large-sized plate slide 101 adapted to the five-axis ultra-precision air-bearing motion table.

[0024] The motion table slide rails of this structure, including the marble bed 100, the plate slide 101, a set of vertical beams 102, horizontal beams 103, laser displacement emitting end 17, laser displacement reflecting end 18, PLC controller 104, and warning unit 20, are all conventional components. This application will not elaborate on them.

[0025] It should be noted that, in this document, terms such as "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0026] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A motion table slide rail, comprising a marble bed (100), a plate slide (101), a set of vertical beams (102) and horizontal beams (103), characterized in that: An installation slot (10) is provided within the symmetrical center line of the plate slide (101) and below the crossbeam (103). The plate slide (101) has countersunk screw holes (15) at both ends that are used in conjunction with the mounting slots (10). One side of the plate slide (101) is fitted with a fixed seat (11) via a mounting slot (10). The fixed base (11) has threaded grooves (16) on both end faces that are used to cooperate with countersunk screw holes (15). The plate slide (101) and the fixed base (11) are fixed together by bolts (14) through countersunk screw holes (15) and screw grooves (16). A transition support plate (12) is provided on one side of the fixed base (11). One side of the transition support plate (12) is provided with a guide rail (13).

2. The motion table slide guide rail according to claim 1, characterized in that: The motion table slide rail also includes several perforated baffles (19) on the outer wall of the same side as the transition support plate (12), a laser displacement emitting end (17) and a laser displacement reflecting end (18) on the same side as the plate slide (101) and used in conjunction with each other, a PLC controller (104) connected to the laser displacement emitting end (17), and a warning unit (20) connected to the PLC controller (104). The PLC controller (104) is used to receive information from the laser displacement transmitter (17) and issue a warning through the warning unit (20).

3. The motion table slide guide rail according to claim 1, characterized in that: The mounting slot (10) and the fixing base (11) are configured as rectangular structures for use together.

4. The motion table slide guide rail according to claim 2, characterized in that: The warning unit (20) is any one of a horn, a strobe light, or a stainless steel belt vibrating motor.

5. A motion table slide guide rail according to claim 2, characterized in that: At least three perforated baffles (19) are provided to cooperate with the laser displacement emitting end (17) and the laser displacement reflecting end (18).

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