Dual-mode module driven planar motion platform

Abstract

The application discloses a double-module driving planar motion platform, which comprises a workbench, a first driving assembly and a second driving assembly are arranged on the workbench at intervals, a first motion platform is arranged between the first driving assembly and the second driving assembly, the first motion platform can move along a first direction on the workbench, a second motion platform is arranged on the first motion platform, the second motion platform can move along a second direction on the first motion platform, and the first driving assembly and the second driving assembly are respectively slidably connected with the second motion platform.

Description

Technical Field

[0001] This utility model relates to the field of planar motion platform technology, and in particular to a planar motion platform driven by dual modules. Background Technology

[0002] In high-end manufacturing, semiconductor packaging, bioengineering, and precision testing, there is often a need for high-precision movement and positioning of a platform or workpiece on a two-dimensional plane (XY axis). Traditional solutions mainly include: (1) Single-axis module series structure (XY cross slide): This is the most common form, in which one linear module is mounted on top of another. However, the motion error of the Y-axis module (such as straightness, pitch, and yaw error) will be directly transmitted to the X-axis module above it, ultimately affecting the end-positioning accuracy. Moreover, the motion of the two modules is mutually influential. The acceleration and deceleration of one axis will generate interference force on the other axis, affecting dynamic accuracy and stability.

[0003] (2) Planar motor / magnetic levitation platform: The load is driven to move without contact on a planar magnetic plate directly by electromagnetic force, but the cost is extremely high, the technology is complex, and the requirements for the use environment are high. In many industrial scenarios, the cost performance is too low.

[0004] Therefore, there is an urgent need to design a dual-module driven planar motion platform to solve one or more technical problems that are lacking in the existing technology. Utility Model Content

[0005] The technical solution adopted by this utility model to solve the above-mentioned technical problems is: a dual-module driven planar motion platform, characterized in that it includes: a worktable, on which a first driving component and a second driving component are spaced apart, a first motion platform is provided between the first driving component and the second driving component, the first motion platform can move on the worktable along a first direction, a second motion platform is provided on the first motion platform, the second motion platform can move on the first motion platform along a second direction, the first driving component and the second driving component are slidably connected to the second motion platform respectively, the first driving component and the second driving component drive the second motion platform to move on the first motion platform, and drive the first motion platform to move on the worktable.

[0006] In a preferred embodiment, both the first drive assembly and the second drive assembly include: a drive motor, the output of which is connected to a lead screw, a slider is fitted on the lead screw, the slider is connected to a bottom surface connector, the bottom surface connector is slidably connected to the worktable, and a side surface connector is provided on the bottom surface connector, which is slidably connected to the second motion platform.

[0007] In a preferred embodiment, the side connector is bent at a predetermined angle.

[0008] In a preferred embodiment, the first motion platform includes: two spaced-apart first motion slide rails, a first movable plate above the two first motion slide rails, a first motion slider adapted to the first motion slide rails on the bottom surface of the first movable plate, and the first movable plate being slidably connected to the first motion slide rails via the first motion slider.

[0009] In a preferred embodiment, the second motion platform includes: two second motion slide rails spaced apart on the first movable plate, a second movable plate above the two second motion slide rails, and a second motion slider adapted to the second motion slide rails on the bottom surface of the second movable plate. The second movable plate is slidably connected to the second motion slide rails through the second motion slider.

[0010] In a preferred embodiment, the drive motor is a servo motor.

[0011] The beneficial effects of this utility model are as follows: By adopting a floating structure with two sets of four guide rails in a crisscross pattern for the first and second motion platforms, this application eliminates the cumulative error of the serial structure, resulting in more accurate positioning, avoids internal stress, and is more stable when stationary. The dual servo motors are also lower in cost, and the structure is simple. The use of standard parts makes it easy to integrate and maintain in an industrial environment. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the structure of the first driving component of this utility model; Figure 3 This is a schematic diagram of the structure of the first motion platform of this utility model.

[0013] In the picture: 10. Worktable; 11. First drive assembly; 111. Drive motor; 112. Lead screw; 113. Drive slider; 114. Bottom connector; 115. Side connector; 12. Second drive assembly; 13. First motion platform; 131. First motion slide rail; 132. First moving plate; 133. First motion slider; 14. Second motion platform; 141. Second motion slide rail; 142. Second moving plate; 143. Second motion slider. Detailed Implementation

[0014] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0015] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection" and "installation" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. Furthermore, "connection" can be a direct connection or an indirect connection through an intermediate medium. "Fixed" means that the relative positional relationship remains unchanged after the connection. The directional terms mentioned in the embodiments of this utility model, such as "inner," "outer," "top," and "bottom," are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this utility model, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model.

[0016] In this embodiment of the invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" and "second" may explicitly or implicitly include one or more of that feature.

[0017] In this embodiment of the utility model, "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0018] References to "one embodiment" or "some embodiments" as used in this specification mean that one or more embodiments of the present invention include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] like Figures 1-3 As shown, this utility model provides a dual-module driven planar motion platform, including: a worktable 10, on which a first driving component 11 and a second driving component 12 are spaced apart, and a first motion platform 13 is provided between the first driving component 11 and the second driving component 12. The first motion platform 13 can move along a first direction on the worktable 10, and a second motion platform 14 is provided on the first motion platform 13. The second motion platform 14 can move along a second direction on the first motion platform 13. The first driving component 11 and the second driving component 12 are slidably connected to the second motion platform 14, and the first driving component 11 and the second driving component 12 drive the second motion platform 14 to move on the first motion platform 13, and drive the first motion platform 13 to move on the worktable 10. Specifically, the worktable 10 is fixedly connected to the external structure. A first drive assembly 11 and a second drive assembly 12 are spaced apart on the worktable 10. Each of the first drive assembly 11 and the second drive assembly 12 includes a drive motor 111. The drive motor 111 is fixedly connected to the worktable 10. A lead screw 112 is connected to the output end of the drive motor 111 through a coupling. A drive slider 113 is connected to the lead screw 112. When the drive motor 111 runs, it drives the lead screw 112 to rotate, and the lead screw 112 causes the drive slider 113 to reciprocate. A bottom connecting piece 114 is provided on the opposite side of each of the two drive sliders 113. The bottom connecting piece 114 is slidably connected to the worktable 10 through a slide rail and a slider, thereby preventing the drive slider 113 from rotating. A side connecting piece 115 is also fixedly connected to the bottom connecting piece 114. A first motion platform 13 is provided between the first drive assembly 11 and the second drive assembly 12. The first motion platform 13 includes two spaced first motion slide rails 131, which are arranged in parallel and are also parallel to the Y-axis direction of the worktable 10. A first moving plate 132 is provided above the two first motion slide rails 131. The bottom surface of the first moving plate 132 is provided with a first motion slider 133 that is adapted to the first motion slide rails 131. The first motion slider 133 slides with the first motion slide rails 131, so that the first moving plate 132 can move back and forth along the Y-axis on the worktable 10 along the first motion slide rails 131. Above the first movable plate 132, a second motion platform 14 is provided. The second motion platform 14 includes two spaced-apart second motion slide rails 141, which are parallel to each other and also parallel to the X-axis of the worktable 10. The two second motion slide rails 141 are fixedly mounted on the first movable plate 132. Above the two second motion slide rails 141, a second movable plate 142 is provided. The bottom surface of the second movable plate 142 is provided with a second motion slider 143 that slides along the second motion slide rails 141, allowing the second movable plate 142 to reciprocate along the X-axis on the first movable plate 132 along the second motion slide rails 141. The moving plate 142 is provided with slide rails on both sides adjacent to each other, and a slider adapted to the slide rail is provided on the side connector 115. The side connector 115 is slidably connected to the slide rail of the second moving plate 142 through the slider. The operation of the first drive assembly 11 and / or the second drive assembly 12 drives the second moving plate 142 to move along the X-axis through the side connector 115, and drives the first moving plate 132 to move along the Y-axis when the predetermined stroke is reached, so as to realize the motion and positioning on the plane. The drive motors 111 of the first drive assembly 11 and the second drive assembly 12 are servo motors, which can output motion accurately according to the command and have multiple modes, including torque mode, speed mode, displacement mode, etc.

[0020] It should be noted that, since the first drive assembly 11 and the second drive assembly 12 can only move in opposite directions, in order to ensure that the first drive platform 13 can be translated by the second drive platform 14, the second moving plate 142 is arranged in a rhombus shape between the first drive assembly 11 and the second drive assembly 12, so that the movement direction of the drive slider 113 intersects with the movement direction of the slider of the side connector 115 on the second moving plate 142, thereby ensuring that when the drive slider 113 moves to a predetermined stroke, the side connector 115 generates a squeezing or pulling force on the second moving plate 142. In addition, in order to facilitate the sliding connection between the slider of the side connector 115 and the second moving plate 142, the side connector 115 is bent at a predetermined angle so that one end is parallel to the corresponding side of the second moving plate 142, so as to facilitate the sliding engagement between the side connector 115 and the second moving plate 142.

[0021] In this embodiment, the traditional "series" connection is transformed into a "parallel" connection, using two independent high-precision servo motors for driving. This results in more efficient motion and real-time feedback on the current position of the motion platform. The first motion platform 13 and the second motion platform 14 adopt a floating structure with two sets of four intersecting guide rails. This structure not only ensures stability but also supports higher weight. Furthermore, the driving points of the first drive component 11 and the second drive component 12 are not rigidly fixed but connected through guide rail sliders, preventing jamming. The floating structure also eliminates the cumulative errors of the "series" structure. The dual servo motor drive ensures extremely high positioning accuracy and repeatability, and the floating structure avoids internal stress, resulting in greater stability when stationary.

[0022] In summary, this application eliminates the cumulative error of the serial structure by adopting a floating structure with two sets of four guide rails in a crisscross pattern for the first motion platform 13 and the second motion platform 14. This results in more accurate positioning, avoids internal stress, and is more stable when stationary. The dual servo motors are also less expensive, and the structure is simple. The use of standard parts makes it easy to integrate and maintain in an industrial environment.

[0023] This invention is not limited to the description in the specification and embodiments. Therefore, other advantages and modifications can be readily realized by those skilled in the art. Thus, without departing from the spirit and scope of the general concept as defined by the claims and their equivalents, this invention is not limited to the specific details, representative devices and illustrated examples shown and described herein.

Claims

1. A planar motion platform driven by dual modules, characterized in that, include: A workbench is provided with a first driving component and a second driving component spaced apart. A first motion platform is provided between the first driving component and the second driving component. The first motion platform can move along a first direction on the workbench. A second motion platform is provided on the first motion platform. The second motion platform can move along a second direction on the first motion platform. The first driving component and the second driving component are slidably connected to the second motion platform. The first driving component and the second driving component drive the second motion platform to move on the first motion platform and drive the first motion platform to move on the workbench.

2. The dual-module driven planar motion platform according to claim 1, characterized in that, Both the first drive assembly and the second drive assembly include: a drive motor, the output of the drive motor is connected to a lead screw, a slider is fitted on the lead screw, the slider is connected to a bottom surface connector, the bottom surface connector is slidably connected to the worktable, and a side surface connector is provided on the bottom surface connector, the side surface connector is slidably connected to the second motion platform.

3. The dual-module driven planar motion platform according to claim 2, characterized in that, The side connector is bent at a predetermined angle.

4. The dual-module driven planar motion platform according to claim 1, characterized in that, The first motion platform includes: two spaced-apart first motion slide rails, a first movable plate above the two first motion slide rails, a first motion slider adapted to the first motion slide rails on the bottom surface of the first movable plate, and the first movable plate being slidably connected to the first motion slide rails through the first motion slider.

5. The dual-module driven planar motion platform according to claim 4, characterized in that, The second motion platform includes: two second motion slide rails spaced apart on the first moving plate; a second moving plate is provided above the two second motion slide rails; a second motion slider adapted to the second motion slide rails is provided on the bottom surface of the second moving plate; and the second moving plate is slidably connected to the second motion slide rails through the second motion slider.

6. The dual-module driven planar motion platform according to claim 2, characterized in that, The drive motor is a servo motor.

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