Reticle storage box opening device

Abstract

The application discloses a mask storage box opening device, a main body, a lock opening assembly and a cover opening assembly, the main body is provided with a working platform, the working platform is provided with a positioning assembly and a suction assembly; the positioning assembly encloses a positioning space; the suction assembly is located at the bottom of the positioning space and is used for suction of the bottom of a box body of the mask storage box; the lock opening assembly is located at one side of the positioning space and is used for opening of a cover lock buckle of the mask storage box; the cover opening assembly comprises a cover opening driving piece, a cover opening power piece and a cover opening suction piece, one end of the cover opening driving piece is pivotally connected to the main body, the cover opening power piece is arranged on the main body and an output end of the cover opening power piece is connected to the cover opening driving piece, and the cover opening suction piece is connected to one end, away from the main body, of the cover opening driving piece; the driving force of the cover opening power piece is directly loaded on the pivot shaft of the cover opening driving piece and the main body; the cover opening suction piece is used for suction of the cover body of the mask storage box and is driven by the cover opening driving piece to be turned up and opened, so that the volume of the device is remarkably reduced, and the installation of the device is flexible and convenient.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a photomask storage box opening device. Background Technology

[0002] A photomask, also known in the industry as a photomask or photomask (English name MASK or PHOTOMASK), is made of quartz glass, metallic chromium, and photosensitive emulsion. This product uses quartz glass as a substrate, on which a layer of metallic chromium and photosensitive emulsion are deposited, creating a photosensitive material. A pre-designed circuit pattern is exposed onto the photosensitive emulsion using an electron laser. The exposed area is developed, forming the circuit pattern on the metallic chromium, creating a photomask similar to an exposed film. This photomask is then used for projecting and positioning integrated circuits. The projected circuit is then photo-etched using an integrated circuit lithography machine. The manufacturing process involves: exposure, development, removal of the photosensitive emulsion, and finally, photo-etching. Just as the type and quality of film affect the quality of a photograph, the quality of a photomask affects the quality of semiconductor wafers or LCD mirror panels.

[0003] Because photomasks require a high degree of accuracy and precision, they are transported and handled using photomask cases. Moving or removing a photomask requires corresponding mechanisms to ensure that it can be removed stably and quickly without damaging it.

[0004] A photomask retrieval device, with application number TW202106581A, mainly comprises a main body with a locking component. A supporting component containing a storage element and a driving element is located on the side of the locking component. A cover-opening component and a clamping component are located on the side of the supporting component. The fork in the photomask holder (Stocker) allows the photomask to be placed in the supporting component. The locking component unlocks the photomask, and the cover-opening component opens the cover, allowing the clamping component to remove the photomask element from the holder and place it on the corresponding mechanism. This achieves the function of quickly and conveniently retrieving the photomask element from the holder. However, this device is relatively large, and the placement and positioning of the photomask storage box are unstable, requiring further solutions. Summary of the Invention

[0005] The purpose of this invention is to provide a photomask storage box opening device, which aims to enable the photomask storage box to be opened quickly and placed on a work platform quickly and stably, while having a smaller size, thus facilitating flexible installation.

[0006] To solve the above-mentioned technical problems, the objective of this invention is achieved as follows: A photomask storage box opening device includes a main body, an unlocking component, and a lid opening component. The main body is provided with a working platform, and the working platform is provided with a positioning component and an adsorption component. The positioning component encloses a positioning space. The adsorption component is located at the bottom of the positioning space and adsorbs the bottom of the photomask storage box when it is placed inside. The unlocking component is located on one side of the positioning space and is used to open the cover latch of the photomask storage box; The lid-opening assembly includes a lid-opening drive component, a lid-opening power component, and a lid-opening suction component. One end of the lid-opening drive component is pivotally connected to the main body. The lid-opening power component is disposed on the main body and its output end is connected to the lid-opening drive component. The lid-opening suction component is connected to the end of the lid-opening drive component away from the main body. The driving force of the lid-opening power component is directly applied to the pivot shaft between the lid-opening drive component and the main body. The lid-opening suction component adsorbs the lid of the photomask storage box and is driven by the lid-opening drive component to flip upward and open.

[0007] Based on the above scheme and as a preferred embodiment of the above scheme: the positioning component includes multiple positioning blocks, and the inner end face of the positioning block encloses the positioning space for accommodating the photomask storage box.

[0008] Based on the above scheme and as a preferred embodiment of the above scheme: on the working platform, a through installation channel is provided in the area where the positioning space is located, and the adsorption end of the adsorption component is exposed upward through the installation channel.

[0009] Based on the above scheme and as a preferred embodiment of the above scheme: multiple adsorption elements are arranged in a centrally symmetrical manner.

[0010] Based on the above scheme and as a preferred embodiment of the above scheme: the unlocking component includes two unlocking claws and a finger cylinder, wherein the finger cylinder drives the two unlocking claws to move toward or away from each other.

[0011] Based on the above scheme and as a preferred embodiment of the above scheme, it further includes a maximum opening limit component and a minimum opening limit component to limit the maximum / minimum opening limit positions of the two unlocking claws.

[0012] Based on the above scheme and as a preferred embodiment of the above scheme: the unlocking claw has a slot, the cover latch of the photomask storage box is inserted into the slot, and the unlocking is achieved by the unlocking claw driving the opposite or opposite movements.

[0013] Based on the above scheme and as a preferred embodiment of the above scheme: the opening power component includes a drive motor and a transmission component, the drive motor drives the transmission to the pivot shaft via the transmission component; the opening drive component is fixedly connected to the pivot shaft.

[0014] Based on the above scheme and as a preferred embodiment of the above scheme: the opening drive component has an L-shaped structure, and a connecting plate is fixedly connected to the end of the opening drive component away from the main body. The opening suction component is connected to the connecting plate through an elastic element.

[0015] Based on the above scheme and as a preferred embodiment of the above scheme: the elastic element is a U-shaped sheet structure.

[0016] The outstanding and beneficial technical effects of this invention compared to the prior art are as follows: by setting a positioning component to define a positioning space, and setting an adsorption component within the positioning space, when the photomask storage box is placed in the positioning space and positioned, its bottom is firmly adsorbed by the adsorption component, thereby reliably positioning the photomask storage box; the opening component's opening drive is pivotally connected to the main body, and the power of the opening power component is directly loaded onto the pivot shaft, thereby driving the opening drive to rotate around the pivot shaft. Compared with the prior art, this significantly reduces the size of the device, making the installation of the device more flexible and convenient. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a right view of the overall structure of the present invention; Figure 3 This is a front view of the overall structure of the present invention; Figure 4 This is a top view of the overall structure of the present invention; Figure 5 This is the main view of the lid opening component structure; Figure 6 This is a 3D schematic diagram of the opening component structure; Figure 7 This is a 3D schematic diagram of the unlocking component structure; Figure 8 This is the main view of the unlocking component structure; Figure 9 It is a 3D view of the photomask storage box in the positioning space and in the open state; Figure 10 It is a 3D view of the photomask storage box in the positioning space and in the open state. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the given embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0020] In the description of this application, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0021] See details Figure 1-10 As shown, this application discloses a photomask storage box opening device, which includes a main body 10, an unlocking component 30, and a cover opening component 40. The main body 10 is provided with a working platform 11, and the working platform 11 is provided with a positioning component 12 and an adsorption component 20. The positioning component 12 includes a plurality of positioning blocks 121, and the inner end face of the positioning block 121 encloses a positioning space for accommodating the photomask storage box 50. Of course, in order to facilitate the placement of the photomask storage box 50 into the positioning space, a guide bevel is obliquely cut at the upper edge of the positioning block 121 facing the positioning space, so that when the photomask storage box 50 is placed into the positioning space, it can achieve self-centering, which is conducive to the rapid and accurate positioning of the photomask storage box 50.

[0022] The adsorption assembly 20 is located at the bottom of the positioning space and adsorbs the bottom of the photomask storage box 50. The adsorption assembly 20 includes at least one adsorption element 21. Multiple adsorption elements 21 are arranged symmetrically at the center. The adsorption elements 21 are preferably suction cups, which are connected to an external vacuum device via a solenoid valve and necessary piping to achieve adsorption of the bottom of the photomask storage box 50. In this embodiment, a through-hole installation channel can be provided on the working platform 11 in the area of ​​the positioning space. The adsorption element 21 is fixedly installed in the installation channel by a support member, with the adsorption end of the adsorption element 21 exposed upwards through the installation channel. For example, the adsorption surface of the adsorption element 21 can be raised a certain height above the working platform 11 to ensure that the photomask storage box 50 can fully contact the adsorption element 21 after placement. This height also provides sufficient deformation space for the adsorption element 21 (suction cup) to securely adsorb the bottom of the photomask storage box 50. The unlocking assembly 30 is located on one side of the positioning space and is used to open the cover latch of the photomask storage box 50. Specifically, the unlocking assembly 30 includes two unlocking claws 31 and a finger cylinder 32. The unlocking claws 31 are fixedly connected to the output end of the finger cylinder 32 via an adapter 321. The finger cylinder 32, also called a double-acting parallel finger cylinder, drives the two unlocking claws 31 to move towards or away from each other. In this embodiment, the unlocking assembly 30 has two unlocking methods. Figure 9 As shown, the latch 53 of the photomask storage box 50 is unlocked and locked by sliding. When locked, the latch 53 slides in so that the locking claw 521 is partially embedded in the latch 53, thereby restricting the opening of the cover 52 and locking the cover. Conversely, when the latch 53 slides in the opposite direction, it will release the locking claw 521, thereby unlocking the cover 52. The photomask storage box 50 is no different from the prior art. Here, we will only briefly explain its locking and unlocking principle. In one unlocking method, after the photomask storage box 50 is placed into the positioning space, the unlocking claw 31 is positioned precisely between the two latches 53. When the finger cylinder 32 drives the unlocking claw 31 to move in opposite directions, the side of the unlocking claw 31 abuts against the protruding ridge 53a on the side of the latch 53, thereby pushing the two latches 53 to move in opposite directions. According to the aforementioned upper cover unlocking principle, when the latches 53 have moved a sufficient distance to fully release the locking claw 521, the upper cover 52 unlocks, and can then be opened by rotating relative to the box body 51 around their connecting axis. In another method, a slot 311 is provided on the unlocking claw 31. When the photomask storage box 50 is placed into the positioning space, the latches of the photomask storage box 50's cover are precisely embedded in the slot 311. Thus, by controlling the finger cylinder 32 to drive the unlocking claw 31 to move in opposite directions, the unlocking claw 31 drives the two latches 53 to move in opposite directions, thereby unlocking the box. Of course, it should be noted that if the same optical mask storage box that locks and unlocks via sliding is used, but its unlocking and unlocking directions are opposite to the aforementioned unlocking and unlocking sliding directions, then the finger cylinder 32 can be controlled to move the unlocking claws 31 towards each other, thus achieving unlocking. The two actions are opposite. It is important to note the initial position of the unlocking claws 31. For unlocking via opposite movements, the initial position of the unlocking claws 31 is the position with the minimum distance between the two claws 31; while for unlocking via opposite movements, the initial position of the unlocking claws 31 is the position with the maximum distance between the two claws 31. Of course, the initial position of the unlocking claws 31 can also be adjusted adaptively according to the actual position of the latch 53. The specific control method of the finger cylinder 32 is existing technology and will not be elaborated here.

[0023] In addition, in order to limit the extreme positions of the unlocking claws 31 and thus avoid excessive movement of them in opposite directions, which could lead to equipment damage or damage to the lock of the photomask storage box, this embodiment preferably also includes a maximum opening limit component 331 and a minimum opening limit component 332 to limit the maximum / minimum opening limit positions of the two unlocking claws 31. The maximum opening limit component 331 includes a limit rod 3311 and a fixed seat. The fixed seat has a threaded hole, and the limit rod 3311 has a thread. The limit rod 3311 is threaded into the threaded hole of the fixed seat. The fixed seat is fixedly installed on the outside of the unlocking claw 31. By rotating the limit rod 3311, the distance between the head end 3311a of the limit rod 3311 and the adapter 321 can be changed. When the distance is adjusted to an appropriate position, when the finger cylinder 32 drives the unlocking claw 31 to move to the set maximum position, the head end 3311a of the limit rod 3311 will abut against the adapter 321, restricting its continued movement and achieving the maximum position limit. The minimum opening limit assembly 332 includes an adjusting rod 3321, two adjusting nuts 3322, and two limit blocks 3323. The limit blocks 3323 are fixedly mounted on the two adapters 321. One limit block 3323 has a threaded hole, and the other limit block 3323 has a through hole 33231. The threaded hole and the through hole 33231 are coaxial. The adjusting rod 3321 has threads. After the adjusting rod 3321 passes through the through hole 33231, the two adjusting nuts 3322 are screwed onto the adjusting rod 3321. To position the two adjusting nuts 3322 between the two limiting blocks 3323, the adjusting rod 3321 is then tightened into the threaded hole of the opposing limiting block 3323. The adjusting rod 3321 is clearance-fitted with the through hole 33231. At this time, the adjusting nut 3322 adjacent to the threaded hole is tightened. By rotating, the distance between the other adjusting nut 3322 and the other limiting block away from the limiting block with the threaded hole is adjusted so that when the two limiting blocks 3323 are at their minimum distance, the other limiting block just abuts against the adjusting nut 3322, thereby achieving the minimum opening limit.

[0024] The lid opening assembly 40 includes a lid opening drive 42, a lid opening power component 43, and a lid opening suction component 41. One end of the lid opening drive 42 is pivotally connected to the main body 10. The lid opening power component 43 is disposed on the main body 10 and its output end is connected to the lid opening drive 42. The lid opening suction component 41 is connected to the end of the lid opening drive 42 away from the main body 10. The driving force of the lid opening power component 43 is directly applied to the pivot shaft 422 between the lid opening drive 42 and the main body 10. The lid opening suction component 41 adsorbs the lid 52 of the photomask storage box 50 and is driven by the lid opening drive 42 to flip upward and open. Specifically, the opening power component 43 includes a drive motor 431 and a transmission component 432. The transmission component 432 includes a driving synchronous pulley 4321, a driven synchronous pulley 4322, and a synchronous belt 4323. Considering the requirements of rotational speed and torque, a reducer is provided at the output end of the drive motor 431 in this embodiment. The reducer can be a planetary gear reducer in the prior art, and only needs to be reasonably selected according to the size and reduction ratio. The driving synchronous pulley 4321 is fixedly mounted on the output shaft of the reducer, and the driven synchronous pulley 4322 is fixedly connected to the pivot shaft 422. The synchronous belt 4323 surrounds the outside of the driving synchronous pulley 4321 and the driven synchronous pulley 4322. The pivot shaft 422 is mounted on the main body 10 through a mounting base 44. A bearing is provided in the mounting base 44 so that the pivot shaft 422 can rotate flexibly relative to the main body 10. Thus, the drive motor 431 transmits power to the pivot shaft 422 via the transmission component 432. The opening drive component 42 is fixedly connected to the pivot shaft 422. It should be noted that since the opening drive component 42 and the opening suction component 41 and other accessories have a certain weight, in order to ensure that the opening drive component 42 can remain in the current position after adsorbing the cover 52, the drive motor 431 is preferably a stepper motor or servo motor with brake. With the help of a reducer, the opening drive component 42 can still complete stable positioning and movement under load, thereby ensuring the accurate opening of the photomask storage box.

[0025] See Figure 5-6 As shown, the cover-opening actuator 42 has an L-shaped structure. A connecting plate 421 is fixedly connected to the end of the cover-opening actuator 42 away from the main body 10. The cover-opening suction component 41 is connected to the connecting plate 421 through an elastic component 423. Preferably, the elastic component 423 is a U-shaped sheet structure. For example, it is made of manganese steel, which has good support and a certain degree of elasticity. During the process of the cover-opening suction component 41 contacting and adsorbing the cover, it can provide good buffering, avoiding large impacts on the photomask storage box and preventing damage to the internal photomask. At the same time, choosing a U-shaped sheet structure made of manganese steel with sufficient thickness can provide sufficient elastic deformation capacity and sufficient strength to provide sufficient support for opening the cover.

[0026] Traditional air circuits typically use external air tubes for connection. However, the opening process involves a large range of motion, and for centralized control, the air circuit control solenoid valve of the opening suction component 41 needs to be located inside the main body. Therefore, connecting the opening suction component 41 via an external air tube during use is prone to entanglement or large movements, leading to poor connection and air leakage due to pulling or twisting of the air tube. This can result in abnormal opening or even insufficient suction, potentially causing the lid to fall off. Therefore, this embodiment preferably features a first gas channel along the extension direction of the opening drive component 42, and a second gas channel on the connecting plate 421. One end of the first gas channel is connected to a rotary joint 45, and the other end connects to the second gas channel at the connection point between the connecting plate 421 and the opening drive component 42. The opening suction component 41 is connected to the end of the second gas channel furthest from the first gas channel. The specific processing of the first and second gas channels can be achieved using existing processing techniques. This involves machining intersecting deep holes along the L-shaped arms of the cover-opening actuator 42, or machining deep holes on the connecting plate 421. For example, deep-hole drilling can be used. The holes are connected inside the cover-opening actuator 42 to form a complete and unobstructed gas path. Of course, any unnecessary openings need to be sealed to form a closed gas path. This gas path structure solves many problems associated with traditional gas pipe connections, and the cover-opening device has a simpler appearance. It also eliminates the problem of interference between the pipes and external equipment.

[0027] Furthermore, to protect the opening limit position, this embodiment preferably has an opening angle trigger plate 461 fixedly connected to the opening drive member 42 near the pivot shaft 422, and a sensor 462 is provided on the main body 10. When the opening drive member 42 rotates to the limit position, the opening angle trigger plate 461 triggers the sensor 462, limiting the maximum rotation angle of the opening drive member. In addition, an opening limit member 47 is provided on the main body 10. When the opening drive member 42 rotates towards the photomask storage box 50 to the limit position, the side 42a of the opening drive member 42 contacts the opening limit member 47, thereby limiting the opening drive member 42 from moving to the limit position of grasping the top cover. Of course, it also includes an opening detection sensor 71 and a mask detection sensor 72 provided on the working platform 11, which provide feedback on the opening status and detect whether there is a light mask 60 in the photomask storage box 50.

[0028] The photomask storage box 50 is placed into the positioning space, and the adsorption component 21 (i.e., suction cup) of the adsorption assembly 20 is connected to the vacuum equipment to adsorb the bottom of the box body 51 of the photomask storage box 50. At the same time, the box body sensor 13 located on the working platform 11 is triggered, thereby enabling the controller to detect that the box body 51 has been positioned. Preferably, the box body sensor 13 can be a pressure sensor, micro switch, or other existing technology that can trigger and generate an electrical signal when the box body 51 contacts, approaches, or applies sufficient pressure to it; the opening power component 43 drives the opening belt. The actuator 42 and the lid-opening suction member 41 rotate until the lid-opening suction member 41 contacts the upper surface of the cover 52 of the photomask storage box 50, and control the suction member 411 (i.e., vacuum suction cup) of the lid-opening suction member 41 to connect with the vacuum device, so that the suction member 411 adsorbs the cover 52; then, the finger cylinder of the unlocking assembly 30 is activated, driving the unlocking claw 31 to move, which in turn drives the latch 53 to slide, releasing the locking claw 521 and completing the unlocking; immediately afterward, the lid-opening power member 43 drives the cover 52 to flip upward to a set angle through the lid-opening actuator 42 and the lid-opening suction member 41, and the photomask storage box 50 is opened. It should be noted that in the initial state, the lid-opening actuator 42 drives the lid-opening suction member 41 to be in the open position, for example Figure 1 The placement of the photomask storage box 50 in this configuration avoids obstruction or interference from the opening assembly 40 when the photomask storage box 50 is placed into the positioning space, preventing the photomask storage box 50 from being difficult to insert. Furthermore, considering the ease of removing the photomask storage box 50, this embodiment preferably features recessed channels 14 on both sides of the work platform 11, with the outer edge of the bottom of the photomask storage box 50 protruding slightly outward from the innermost edge of the channel 14. This ensures that the operator's hand or other robotic arm can smoothly enter and hold the box 51 without colliding with the worktable or the main body 10.

[0029] The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A photomask storage box opening device, characterized in that: The main body (10), the unlocking component (30), and the cover opening component (40) are provided. The main body (10) is provided with a working platform (11). The working platform (11) is provided with a positioning component (12) and an adsorption component (20). The positioning component (12) encloses a positioning space. The adsorption component (20) is located at the bottom of the positioning space and adsorbs the bottom of the box body placed in the photomask storage box (50). The unlocking component (30) is located on one side of the positioning space and is used to open the cover latch of the photomask storage box (50); The opening assembly (40) includes an opening drive (42), an opening power component (43), and an opening suction component (41). One end of the opening drive (42) is pivotally connected to the main body (10). The opening power component (43) is disposed on the main body (10) and its output end is connected to the opening drive (42). The opening suction component (41) is connected to the end of the opening drive (42) away from the main body (10). The driving force of the opening power component (43) is directly applied to the pivot shaft (422) between the opening drive (42) and the main body (10). The opening suction component (41) adsorbs the cover (52) of the photomask storage box (50) and is driven by the opening drive (42) to flip upward and open.

2. The photomask storage box opening device according to claim 1, characterized in that: The positioning component (12) includes multiple positioning blocks (121), the inner end face of which encloses the positioning space for accommodating the photomask storage box (50).

3. The photomask storage box opening device according to claim 1, characterized in that: On the working platform (11), a through installation channel is provided in the area where the positioning space is located, and the adsorption end of the adsorption component (20) is exposed upward through the installation channel.

4. The photomask storage box opening device according to claim 3, characterized in that: The adsorption assembly (20) includes adsorption elements (21), and multiple adsorption elements (21) are arranged symmetrically at the center.

5. The photomask storage box opening device according to claim 1, characterized in that: The unlocking assembly (30) includes two unlocking claws (31) and a finger cylinder (32), wherein the finger cylinder (32) drives the two unlocking claws (31) to move toward or away from each other.

6. The photomask storage box opening device according to claim 5, characterized in that: It also includes a maximum opening limit component (331) and a minimum opening limit component (332) to limit the maximum / minimum opening limit positions of the two unlocking claws (31).

7. The photomask storage box opening device according to claim 6, characterized in that: The unlocking claw (31) has a slot (311) and the cover latch of the photomask storage box (50) is inserted into the slot (311). The unlocking is achieved by the unlocking claw (31) moving towards or away from each other.

8. The photomask storage box opening device according to claim 1, characterized in that: The opening power component (43) includes a drive motor (431) and a transmission component (432). The drive motor (431) drives the transmission component (432) to the pivot shaft (422). The opening drive component (42) is fixedly connected to the pivot shaft (422).

9. The photomask storage box opening device according to claim 8, characterized in that: The opening drive (42) has an L-shaped structure. A connecting plate (421) is fixedly connected to the end of the opening drive (42) away from the main body (10). The opening suction member (41) is connected to the connecting plate (421) through an elastic member (423).

10. The photomask storage box opening device according to claim 9, characterized in that: The elastic element (423) has a U-shaped sheet structure.

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