Grounding substrate based on spiral-shaped gasket and discharge mechanism for ozone generation

Abstract

The utility model discloses a grounding substrate and discharge mechanism for ozone generation based on spiral line gasket relates to ozone production technical field, this grounding substrate includes substrate main part, the discharge cavity for ionizing oxygen -containing gas is seted up on the substrate main part, still includes spiral gasket, spiral gasket fixed setting is in the inside of discharge cavity, and spiral gasket is used for separating spiral channel in discharge cavity, the utility model relies on spiral gasket and forms spiral channel in discharge cavity, and the fixed path flow of gas along spiral channel through whole discharge area is prompted, it is convenient for prolonging flow path, realizes that all gas stays time is consistent and sufficient in discharge cavity, thereby it is convenient for gas to be fully subjected to electric field effect, and it is favorable to improve the uniformity and generation efficiency of ozone generation concentration.

Description

Technical Field

[0001] This utility model relates to the field of ozone production technology, and in particular to a grounding substrate based on a spiral gasket and a discharge mechanism for ozone generation. Background Technology

[0002] Ozone plays multiple roles in semiconductor manufacturing processes. For example, ozone is an excellent precursor in the ALD (Alternating Discharge) process. When depositing high-dielectric-constant materials or metal oxides, ozone provides a sufficient oxygen source to ensure accurate stoichiometry, high purity, good density, and controllable growth rate of the thin film. Therefore, ozone generation devices are required in semiconductor manufacturing processes.

[0003] Ozone generating devices generally mainly include a discharge mechanism. The discharge mechanism discharges oxygen-containing gas to produce ozone for use in semiconductor manufacturing. Existing ozone generating discharge mechanisms consist of conductive plates, ceramic separators, ceramic pads, tungsten plates, and base plates arranged sequentially from top to bottom. The tungsten plate and base plate form the grounding electrode. The ceramic pads are generally arranged in multiple circular pieces, distributed between the tungsten plate and the conductive plate or the dielectric plate below the conductive plate. They support the conductive plate and facilitate the formation of a discharge gap between the tungsten plate and the conductive plate, allowing the incoming oxygen-containing gas to react and generate ozone.

[0004] The shortcomings of existing ozone generation discharge mechanisms are as follows: Because the existing discharge mechanisms use multiple ceramic gaskets as supports at the edge of the discharge gap between the conductive plate and the grounding electrode, they only serve a supporting function. After oxygen-containing gas is directly injected into the discharge gap through the pipe, it cannot be effectively guided to flow and diffuse evenly. Most of the gas tends to flow directly from the inlet to the outlet via the shortest path, resulting in a short residence time and insufficient ionization by the electric field in the discharge gap. Furthermore, the airflow into the discharge gap is disordered and unevenly distributed due to the lack of effective guidance, easily creating dead zones. This affects the uniformity of ozone generation concentration and reduces generation efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grounding substrate based on a spiral gasket and a discharge mechanism for ozone generation, so as to solve the technical problem in the prior art that the grounding substrate of the discharge mechanism is not conducive to the full and uniform passage of oxygen-containing gas through the entire discharge gap, the residence time is short, and the uniformity of ozone generation concentration is affected.

[0006] The technical problem to be solved by this utility model can be achieved through the following technical solution: A grounding substrate based on a spiral gasket includes a substrate body, on which a discharge cavity for ionizing oxygen-containing gas is formed, and also includes a spiral gasket. The spiral gasket is fixedly disposed inside the discharge cavity, and the spiral gasket is used to separate a spiral channel inside the discharge cavity; an air inlet is provided on the inner wall of the discharge cavity to deliver oxygen-containing gas into the spiral channel, and an ozone outlet is provided on the inner side of the discharge cavity to communicate with the spiral channel.

[0007] Preferably, the air inlet is aligned with the starting end of the spiral channel, and the ozone outlet is aligned with the ending end of the spiral channel.

[0008] Preferably, the inner ring sidewall of the discharge cavity is in contact with the outer ring portion of the spiral gasket.

[0009] Preferably, the substrate body is a stainless steel structure.

[0010] Preferably, the height of the spiral gasket is equal to the depth of the discharge cavity.

[0011] An ozone generation discharge mechanism, including a grounding substrate based on a helical pad.

[0012] The beneficial effects of this utility model are: 1. This utility model relies on the spiral gasket to form a spiral channel in the discharge cavity, which causes the gas to flow along the fixed path of the spiral channel through the entire discharge area. This facilitates the extension of the flow path and ensures that all gases have a consistent and sufficient residence time in the discharge cavity. This allows the gas to be fully subjected to the electric field, which is beneficial to improving the uniformity of ozone generation concentration and generation efficiency.

[0013] 2. This utility model guides the gas flow through the discharge area through a single, continuous path formed by the spiral gasket, ensuring that the gas flow is orderly and predictable, thereby facilitating accurate simulation and optimization, and making corresponding adjustments based on actual production needs.

[0014] 3. The spiral gasket of this utility model can achieve a large range of support by relying on its continuous linear spiral shape, thereby effectively providing stable support for components such as conductive sheets of the discharge mechanism. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the grounding substrate based on the spiral gasket in this utility model; Figure 2 This is a schematic diagram showing the relative positions of the substrate body, conductive sheet, and spiral gasket in this utility model. Figure 3 This is a schematic diagram of the overall structure of the discharge mechanism for ozone generation in this utility model; Figure 4 This is a schematic diagram of the overall structure of the discharge mechanism after the cooling plate is assembled in this utility model.

[0016] Explanation of reference numerals in the attached figures: 1. Conductive sheet; 2. Power cord; 3. Gas supply pipe; 4. Dielectric board; 5. Substrate body; 6. Discharge cavity; 7. Spiral gasket; 8. Ozone outlet; 9. Cooling plate; 10. Air inlet; 11. Through hole; 12. Spiral channel. Detailed Implementation

[0017] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0018] Example 1

[0019] like Figures 1-2 As shown, a grounding substrate based on a spiral pad is used to be installed in an ozone generation discharge mechanism used in semiconductor manufacturing processes. The grounding substrate serves as a grounding electrode, and a potential difference can be generated between it and the conductive sheet 1 of the ozone generation discharge mechanism to facilitate ozone generation through discharge. The grounding substrate includes a substrate body 5, which is a conductive metal body and grounded through a wire. A discharge cavity 6 for ionizing oxygen-containing gas is formed on the substrate body 5. Under the operation of the entire ozone generation discharge mechanism, the discharge cavity 6 generates an alternating electric field. This alternating electric field acts on the oxygen-containing gas in the discharge cavity 6, causing the oxygen molecules to ionize and form plasma. The oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. The grounding substrate also includes a spiral gasket 7, which is a spiral disc-shaped body. The spiral gasket 7 is fixedly disposed inside the discharge cavity 6 and is used to divide the discharge cavity 6 into a spiral channel 12. An air inlet 10 for supplying oxygen-containing gas into the spiral channel 12 is provided on the inner wall of the discharge cavity 6, and the air inlet 10 is aligned with the starting end of the spiral channel 12. An ozone outlet 8, aligned with and connected to the ending end of the spiral channel 12, is provided at the middle position inside the discharge cavity 6 to allow the generated ozone to be discharged. Here, the starting end of the spiral channel 12 corresponds to the position of the outer ring end of the spiral gasket 7, and the ending end of the spiral channel 12 corresponds to the position of the inner ring end of the spiral gasket 7. The specific gas flow is described below: When oxygen-containing gas enters the discharge cavity 6 through the air inlet 10, it directly enters the spiral channel 12 formed by the spiral gasket 7 within the discharge cavity 6. Then, it flows along the fixed path of the spiral channel 12 to the location of the ozone outlet 8, ensuring that all gas flow paths are fixed and residence times are consistent. This facilitates the full passage of oxygen-containing gas through the entire area of ​​the discharge cavity 6 and also allows the gas to be fully subjected to the electric field, which helps to improve the uniformity and efficiency of ozone generation concentration, ensuring that ozone is fully generated. Finally, the generated ozone is discharged through the ozone outlet 8 at the center.

[0020] It should also be noted that, since the path of the spiral channel 12 is fixed, the gas flow is highly ordered and predictable, which facilitates accurate simulation and optimization through computational fluid dynamics, and makes it easy to set parameters such as the number of spiral turns and pitch of the spiral gasket 7 according to actual needs.

[0021] In some specific implementations of this embodiment, refer to Figure 1 As shown, the inner ring sidewall of the discharge cavity 6 is in contact with the outer ring portion of the spiral gasket 7, that is, the starting end of the spiral gasket 7 is connected to the inner sidewall of the discharge cavity 6, and a certain length of the outer ring portion is kept in contact with the inner ring sidewall of the discharge cavity 6. This can avoid the existence of excess gap space between the outer ring of the spiral gasket 7 and the inner sidewall of the discharge cavity 6, which would affect the utilization of the discharge area or the gas flow.

[0022] In some specific embodiments of this example, the substrate body 5 is a stainless steel structure that is conductive.

[0023] In some specific embodiments of this example, the spiral pad 7 and the substrate body 5 are an integrated metal structure, which can be stamped in one go by a stamping process. This makes it easy to ensure that the spiral pad 7 has uniform size and facilitates the spiral pad 7 to support the dielectric plate 4 and conductive sheet 1 of the discharge mechanism, ensuring that the discharge cavity 6 is uniform and improving discharge efficiency and stability. Compared with the existing multiple ceramic pads for support, this avoids problems such as ceramic debris. In addition, the integrated spiral pad 7 and the substrate body 5 are made of the same material, which also facilitates the provision of a heat dissipation path with extremely low thermal resistance.

[0024] In addition, when the spiral gasket 7 is a metal structure, in order to avoid short circuit to ground of the high voltage electrode, a through hole 11 with the same shape as the spiral gasket 7 is opened on the conductive plate 1 of the discharge mechanism.

[0025] In some other specific embodiments of this example, the spiral gasket 7 may also be a non-metallic material, such as a Teflon material. If it is a non-metallic material, then there is no need to open a through hole 11 on the conductive sheet 1 of the discharge mechanism.

[0026] In some specific embodiments of this example, the height of the spiral gasket 7 may be equal to the depth of the discharge cavity 6.

[0027] Example 2

[0028] refer to Figure 3As shown, a discharge mechanism for ozone generation includes a conductive sheet 1, a dielectric plate 4, a gas supply pipe 3, and a grounding substrate as described in Embodiment 1. One side of the conductive sheet 1 is electrically connected to a power line 2, which energizes the conductive sheet 1. The dielectric plate 4 is disposed between the conductive sheet 1 and the substrate body 5 of the grounding substrate. The dielectric plate 4 is a ceramic sheet, but other insulating materials can also be selected according to actual needs. The gas supply pipe 3 is connected to the air inlet 10 and is used to transport oxygen-containing gas, so that the oxygen-containing gas enters the discharge cavity 6 through the air inlet 10. Here, the gas supply pipe 3 avoids the dielectric plate 4 and is connected to the edge of the substrate body 5. It should be noted that the diameter of the dielectric plate 4 is larger than the diameter of the discharge cavity 6, so that the edge of the dielectric plate 4 can be supported on the edge of the discharge cavity 6. The diameter of the conductive sheet 1 is smaller than the diameter of the discharge cavity 6, ensuring that the electric field is effectively generated in the discharge cavity 6.

[0029] The specific principle behind ozone generation is as follows: When high-voltage electricity is applied to the conductive plate 1 through the power line 2, the current cannot flow directly to the grounding electrode due to the obstruction of the dielectric plate 4. Charge accumulates on the side of the dielectric plate 4 closest to the conductive plate 1; this accumulated charge induces an opposite charge on the other side of the dielectric plate 4. This generates an alternating electric field that acts on the discharge cavity 6 filled with oxygen-containing gas. The alternating electric field ionizes the oxygen molecules in the discharge cavity 6, forming plasma. Oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. In addition, since the height of the spiral gasket 7 can be equal to the depth of the discharge cavity 6, and the spiral gasket 7 is a continuous linear structure, it is convenient to provide stable and effective support for the dielectric plate 4 and conductive sheet 1 stacked above.

[0030] Example 3

[0031] Based on Example 2, and referring to Figure 4 To ensure the normal operation of the entire discharge mechanism, cooling plates 9 can be installed on both the upper and lower sides of the entire discharge mechanism to dissipate the heat generated during the ozone generation process. In addition, a layer of dielectric material can be installed above the conductive sheet 1, and a ceramic partition can be installed above the dielectric material. A cylindrical sleeve of matching size can also be fixed between the upper and lower cooling plates 9 to fix and limit the internal dielectric material, conductive sheet 1, grounding substrate and other components, ensuring that the whole is effectively pressed together.

[0032] To facilitate understanding of the embodiments of this solution by those skilled in the art, the working principle of this solution will now be briefly explained in conjunction with specific application scenarios: The tungsten plate and ceramic gasket of the original discharge mechanism are removed, so that the substrate body 5 is made of conductive metal material and grounded through a wire, so as to facilitate the generation of a voltage difference between it and the conductive sheet 1, and facilitate the generation of an electric field in the discharge cavity 6. At the same time, a spiral gasket 7 is fixedly installed in the discharge cavity 6. When the conductive sheet 1 and dielectric plate 4 are pressed onto the substrate body 5 in sequence, they can be effectively supported by the support ring. Then, oxygen-containing gas is supplied into the discharge cavity 6 through the gas supply pipe 3. The oxygen-containing gas enters the discharge cavity 6 through the air inlet 10 and energizes the conductive sheet 1. When oxygen-containing gas enters the discharge cavity 6 through the inlet 10, it directly enters the spiral channel 12 formed by the spiral gasket 7 within the discharge cavity 6. Then, it flows along the fixed path of the spiral channel 12 to the location of the ozone outlet 8, ensuring that all gas flow paths are fixed and residence times are consistent. This facilitates the full passage of oxygen-containing gas through the entire area of ​​the discharge cavity 6 and also allows the gas to be fully subjected to the electric field, which helps to improve the uniformity and efficiency of ozone generation concentration, ensuring that ozone is fully generated. Finally, the generated ozone is discharged through the ozone outlet 8 at the center.

[0033] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A grounding substrate based on a spiral gasket, comprising a substrate body (5), wherein a discharge cavity (6) for ionizing oxygen-containing gas is formed on the substrate body (5), characterized in that, It also includes a spiral gasket (7); The spiral gasket (7) is fixedly disposed inside the discharge cavity (6), and the spiral gasket (7) is used to separate the spiral channel (12) inside the discharge cavity (6); the inner wall of the discharge cavity (6) is provided with an air inlet (10) for conveying oxygen-containing gas into the spiral channel (12), and the inner side of the discharge cavity (6) is provided with an ozone outlet (8) communicating with the spiral channel (12).

2. The grounding substrate based on a spiral gasket according to claim 1, characterized in that, The air inlet (10) is aligned with the starting end of the spiral channel (12), and the ozone outlet (8) is aligned with the ending end of the spiral channel (12).

3. The grounding substrate based on a spiral gasket according to claim 1, characterized in that, The inner ring sidewall of the discharge cavity (6) is in contact with the outer ring portion of the spiral gasket (7).

4. The grounding substrate based on a spiral gasket according to claim 1, characterized in that, The substrate body (5) is a stainless steel structure.

5. The grounding substrate based on a spiral gasket according to claim 1, characterized in that, The height of the spiral gasket (7) is equal to the depth of the discharge cavity (6).

6. A discharge mechanism for ozone generation, characterized in that, The grounding substrate based on a spiral pad as described in any one of claims 1 to 5.

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