A column target mounting structure for a vacuum coating apparatus

Abstract

The utility model discloses a kind of column target installation structures for vacuum coating equipment, including shell and lifting mechanism, coating vacuum chamber is equipped in shell interior, and coating vacuum chamber top is equipped with opening;Lifting mechanism includes lifting cover plate and at least one column target, lifting cover plate is detachably sealed cover and is equipped in opening, the upper end of column target is connected with lifting cover plate, and lower end is suspended and is arranged, and the top of lifting cover plate is equipped with at least one hoisting part for being connected with external lifting drive equipment, to drive lifting cover plate and column target together to move upwards.In workpiece trolley is pushed into or pushed out coating vacuum chamber, by external lifting drive equipment and hoisting part connection, drive lifting cover plate and column target together to move upwards, to separate column target from coating vacuum chamber upwards, to avoid workpiece trolley, to facilitate the in-out of workpiece trolley, column target can be removed from coating vacuum chamber simultaneously, to facilitate maintenance replacement to column target.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a target mounting structure for vacuum coating equipment. Background Technology

[0002] Vacuum coating is a technology that produces thin film materials using physical or chemical methods. In a vacuum chamber, atoms of the material are separated from a heating source and deposited onto the surface of the object being coated. A sputtering target is placed in the coating vacuum chamber. To improve efficiency and coating uniformity, the target needs to be vertically positioned in the center of the chamber. Currently, coating machines use a workpiece carrier to load the workpiece, push it into the vacuum chamber for coating, and then remove it after coating. However, fixing the target in the center would obstruct the movement of the workpiece carrier and require entry into the vacuum chamber for maintenance and repair, making operation inconvenient. Utility Model Content The purpose of this utility model is to provide a target mounting structure for vacuum coating equipment, so as to solve one or more technical problems existing in the prior art, and at least provide a beneficial option or create conditions.

[0003] The technical solution adopted to solve the above-mentioned technical problems is as follows: This utility model provides a target mounting structure for vacuum coating equipment, comprising: The housing has a coating vacuum chamber inside, and the top of the coating vacuum chamber has an opening in the middle. The lifting mechanism includes a lifting cover plate and at least one target. The lifting cover plate is detachably and sealingly installed over the opening. The at least one target is vertically installed in the coating vacuum chamber. The upper end of the at least one target is connected to the lifting cover plate, while the lower end is suspended. The top of the lifting cover plate is provided with at least one hoisting part for connecting to an external lifting drive device to drive the lifting cover plate and the target to move upward together.

[0004] The beneficial effects of the target mounting structure of this utility model are: When pushing or pushing the workpiece carrier into or out of the coating vacuum chamber, the external lifting drive device is first connected to the hoisting unit to move the lifting cover and the target upwards together, so as to pull the target away from the coating vacuum chamber and make way for the workpiece carrier to facilitate its entry and exit. At the same time, the target can be moved out of the coating vacuum chamber for easy maintenance and replacement. After maintenance or after the workpiece carrier is pushed into place, the lifting cover and the target are hoisted together to the top of the machine housing and then lowered so that the target extends into the coating vacuum chamber. Then the lifting cover seals the opening. The operation is convenient and simple.

[0005] As a further improvement to the above technical solution, the lifting cover plate is provided with at least one rotating component, which is used to drive the target to rotate.

[0006] As a further improvement to the above technical solution, a rotating bearing is connected to the upper end of the target, the rotating bearing is installed on the lifting cover plate, and the rotating assembly is connected to the upper end of the target in a transmission manner.

[0007] As a further improvement to the above technical solution, a sealing gasket is provided between the opening and the lifting cover plate.

[0008] As a further improvement to the above technical solution, the sealing gasket is disposed at the top around the perimeter of the opening, and the bottom of the perimeter of the lifting cover plate abuts against the sealing gasket.

[0009] As a further improvement to the above technical solution, the side of the coating vacuum chamber is provided with an inlet and outlet, and the inlet and outlet are provided with an openable coating sealing door.

[0010] As a further improvement to the above technical solution, the bottom surface of the coating vacuum chamber is provided with multiple guide rails, which extend toward the inlet and outlet.

[0011] As a further improvement to the above technical solution, the target column is provided with multiple columns, and the hoisting part is located in the middle of the multiple target columns.

[0012] As a further improvement to the above technical solution, the side of the coating vacuum chamber is provided with a vacuum port, and the vacuum port is provided with a vacuum valve for adjusting the opening degree.

[0013] As a further improvement to the above technical solution, the bottom of the housing is provided with multiple support feet, the height of which is adjustable.

[0014] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a schematic diagram of an embodiment of the target mounting structure provided by this utility model; Figure 2 This is a schematic diagram of the target mounting structure provided by this utility model after the coating seal is removed in one embodiment; Figure 3 This is a schematic diagram of an embodiment of the lifting mechanism provided by this utility model; Figure 4This is a top view of an embodiment of the target mounting structure provided by this utility model; Figure 5 yes Figure 4 Sectional view of section AA; Icon labels: 100 housing; 110 coating vacuum chamber; 111 opening; 112 inlet and outlet; 113 guide rail; 114 vacuum port; 120 coating sealing door; 130 vacuum valve; 140 support feet; Lifting mechanism 200; lifting cover plate 210; column target 220; rotating bearing 221; hoisting part 230; rotating assembly 240; sealing gasket 250. Detailed Implementation

[0016] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0017] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0018] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0019] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0020] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of this utility model, not all embodiments.

[0021] Currently, existing coating equipment fixes the target 220 in the middle of the coating vacuum chamber 110. However, when loading the workpiece using a workpiece rotating frame, the target 220 obstructs the entry and exit of the workpiece rotating frame. Furthermore, it is necessary to enter the coating vacuum chamber 110 to maintain and repair the target 220, which is inconvenient. Therefore, this utility model proposes a target installation structure to solve the above problems.

[0022] like Figures 1 to 5 As shown, the target mounting structure of this utility model includes: a housing 100 and a lifting mechanism 200.

[0023] like Figure 1 and Figure 2 As shown, the housing 100 has a columnar structure, and the interior of the housing 100 is equipped with a coating vacuum chamber 110, such as... Figure 5 As shown, an opening 111 is provided at the middle position of the top of the coating vacuum chamber 110.

[0024] like Figure 3 As shown, the lifting mechanism 200 of this utility model includes a lifting cover plate 210 and a target 220, as... Figure 1 and Figure 2 As shown, the lifting cover plate 210 is detachably sealed to the opening 111, and the target 220 is vertically arranged in the coating vacuum chamber 110. The upper end of the target 220 is connected to the lifting cover plate 210, while the lower end is suspended. The top of the lifting cover plate 210 is provided with a hoisting part 230 for connecting with an external lifting drive device to drive the lifting cover plate 210 and the target 220 to move upward together.

[0025] like Figure 3 As shown, in this embodiment, four pillar targets 220 are provided, which are distributed around the perimeter. Two lifting parts 230 are provided, which are positioned between the four pillar targets 220. During the lifting operation, the lifting cover plate 210 can be subjected to more even force.

[0026] In this embodiment, the hoisting part 230 is installed on the top surface of the lifting cover plate 210 by welding, and the hoisting part 230 is provided with a hoisting hole.

[0027] like Figure 1 , Figure 2 and Figure 5 As shown, the coating vacuum chamber 110 of this embodiment is provided with an inlet and outlet 112 on its side. The inlet and outlet 112 is provided with an openable coating sealing door 120. The workpiece rotating frame is pushed into and pushed out of the coating vacuum chamber 110 from the inlet and outlet 112.

[0028] Furthermore, such as Figure 2As shown, in this embodiment, multiple guide rails 113 are provided on the bottom surface of the coating vacuum chamber 110. The multiple guide rails 113 extend toward the inlet and outlet 112. The workpiece rotating frame is guided by the multiple guide rails 113 to facilitate the entry and exit of the workpiece rotating frame.

[0029] like Figure 5 As shown, a vacuum port 114 is provided on the side of the coating vacuum chamber 110. The vacuum port 114 is equipped with a vacuum valve 130 for adjusting the opening degree. The opening degree of the vacuum port 114 is adjusted by the vacuum valve 130 to adjust the vacuuming speed.

[0030] In this embodiment, multiple support feet 140 are provided at the bottom of the housing 100. The height of the support feet 140 is adjustable, and the horizontal position of the housing 100 can be adjusted according to the ground conditions so that the workpiece rotating frame can be set horizontally.

[0031] like Figure 3 As shown, the lifting cover plate 210 of this embodiment is provided with a rotating component 240. The number of rotating components 240 corresponds one-to-one with the target 220. The rotating component 240 is used to drive the target 220 to rotate, thereby improving the uniformity of target material consumption.

[0032] Specifically, such as Figure 5 As shown, a rotating bearing 221 is connected to the upper end of the target 220. The rotating bearing 221 is installed on the lifting cover plate 210. The rotating assembly 240 is connected to the upper end of the target 220 through a transmission connection. In this embodiment, the rotating assembly 240 includes a motor and a transmission gear structure. The motor drives the target 220 to rotate through the transmission gear structure.

[0033] like Figures 1 to 5 As shown, a sealing gasket 250 is provided between the opening 111 and the lifting cover plate 210 in this embodiment to improve the sealing between the opening 111 and the lifting cover plate 210.

[0034] In this embodiment, the sealing gasket 250 is disposed at the top around the opening 111, while the bottom of the lifting cover plate 210 abuts against the sealing gasket 250. The lifting cover plate 210 is pressed against the sealing gasket 250 by its own weight and the weight of the target 220.

[0035] The working principle of the target mounting structure of this utility model is as follows: When the workpiece rotating frame is pushed into or out of the coating vacuum chamber 110, it is first connected to the hoisting part 230 through the external lifting drive device, which drives the lifting cover plate 210 and the target 220 to move upward together, so as to pull the target 220 out of the coating vacuum chamber 110, so that there is no obstruction in the coating vacuum chamber 110, and the workpiece rotating frame is avoided, so as to facilitate the entry and exit of the workpiece rotating frame. Simultaneously, the target 220 can be removed from the coating vacuum chamber 110 to facilitate maintenance and replacement of the target 220. After maintenance or after the workpiece rotating frame is pushed into place, the lifting cover 210 and the target 220 are hoisted together to the top of the housing 100 and then lowered so that the target 220 extends into the coating vacuum chamber 110 through the opening 111. Then the lifting cover 210 seals the opening 111. At this time, the lifting cover 210 is pressed against the sealing gasket 250 by its own weight and the weight of the target 220. The operation is convenient and simple.

[0036] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0037] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A target mounting structure for a vacuum coating equipment, characterized in that, include: The housing (100) has a coating vacuum chamber (110) inside, and the coating vacuum chamber (110) has an opening (111) at the middle position of the top of the top. The lifting mechanism (200) includes a lifting cover plate (210) and at least one target (220). The lifting cover plate (210) is detachably sealed to the opening (111). At least one target (220) is vertically arranged in the coating vacuum chamber (110). The upper end of the at least one target (220) is connected to the lifting cover plate (210), while the lower end is suspended. The top of the lifting cover plate (210) is provided with at least one hoisting part (230) for connecting to an external lifting drive device to drive the lifting cover plate (210) and the target (220) to move upward together.

2. The target mounting structure according to claim 1, characterized in that: The lifting cover plate (210) is provided with at least one rotating component (240), which is used to drive the target (220) to rotate.

3. The target mounting structure according to claim 2, characterized in that: The upper end of the target (220) is connected to a rotating bearing (221), the rotating bearing (221) is installed on the lifting cover plate (210), and the rotating assembly (240) is connected to the upper end of the target (220) in a transmission connection.

4. The target mounting structure according to claim 1, characterized in that: A sealing gasket (250) is provided between the opening (111) and the lifting cover plate (210).

5. The target mounting structure according to claim 4, characterized in that: The sealing gasket (250) is disposed at the top around the opening (111), and the bottom around the lifting cover plate (210) abuts against the sealing gasket (250).

6. The target mounting structure according to claim 1, characterized in that: The coating vacuum chamber (110) has an inlet and outlet (112) on its side, and the inlet and outlet (112) is equipped with an openable coating sealing door (120).

7. The target mounting structure according to claim 6, characterized in that: The bottom surface of the coating vacuum chamber (110) is provided with multiple guide rails (113), which extend toward the inlet and outlet (112).

8. The target mounting structure according to claim 1, characterized in that: The target column (220) is provided with multiple columns, and the hoisting part (230) is located in the middle of the multiple targets column (220).

9. The target mounting structure according to claim 1, characterized in that: The side of the coating vacuum chamber (110) is provided with a vacuum port (114), and the vacuum port (114) is provided with a vacuum valve (130) for adjusting the opening degree.

10. The target mounting structure according to claim 1, characterized in that: The bottom of the housing (100) is provided with multiple support feet (140), and the height of the support feet (140) is adjustable.

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