AMOLED evaporation source crucible with uniform temperature rise

Abstract

The utility model discloses a kind of AMOLED evaporation source crucibles of temperature uniformity promotion, including sleeve shell and the inner container placed in sleeve shell, sleeve shell includes outer shell body, the inside of outer shell body is provided with the coil pipe of two ends intercommunication as loop, the outer ring of outer shell body top is equipped with annular positioning slot, inner container includes inner shell body, a kind of temperature uniformity promotion AMOLED evaporation source crucible of the utility model, by being provided with the coil pipe of two ends intercommunication as loop in outer shell body interior, heating medium can be circulated in coil pipe Flow, to sleeve shell is heated uniformly in this way;Annular positioning ring of inner container and sleeve shell's annular positioning slot are engaged connection, the lower heat conduction net of base bottom embedding and the side heat conduction net of side embedding adopt asbestos net material, with good heat conduction performance, the heat of sleeve shell can be evenly conducted to the inside of base, to make the material in crucible heated uniformly in this way, effectively improve the working efficiency and product quality of AMOLED evaporation source.

Description

Technical Field

[0001] This utility model relates to the field of crucible technology, specifically to an AMOLED evaporation source crucible with uniform temperature enhancement. Background Technology

[0002] In the production of AMOLED display panels, the evaporation source crucible is one of the core components of the vapor deposition process, and its performance directly affects the evaporation rate of the deposited material and the quality of the film layer. Traditional evaporation source crucibles mostly use external heating, with heat conducted to the internal material through the crucible wall. However, due to uneven distribution of the heating source or differences in the thermal conductivity of the crucible itself, significant temperature differences can easily occur in different areas within the crucible. This temperature inhomogeneity leads to inconsistent material evaporation rates, resulting in uneven film thickness and deviations from expected composition on the substrate, severely impacting the display effect and product yield of AMOLED panels. Furthermore, after long-term use, the contact stability between the heating element and the crucible body decreases in some crucibles, further exacerbating temperature fluctuations and increasing the difficulty and cost of process control during production. Utility Model Content

[0003] The purpose of this invention is to provide an AMOLED evaporation source crucible with uniform temperature enhancement to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: an AMOLED evaporation source crucible with uniform temperature enhancement, comprising a shell and an inner liner placed inside the shell. The shell includes an outer body, and a coil with its two ends connected in a loop is disposed inside the outer body. An annular positioning groove is formed on the outer ring of the top of the outer body. The inner liner includes an inner shell, and an integral annular positioning ring is fixedly connected to the top of the inner shell. The annular positioning ring engages with the annular positioning groove. The inner shell includes a base, a lower heat-conducting mesh is embedded at the bottom of the base, and a side heat-conducting mesh is embedded on the side of the base. The shaped positioning ring is fixedly set on the top of the base. The AMOLED evaporation source crucible consists of an inner liner and a shell. By setting a coil with both ends connected as a loop inside the shell, the heating medium can circulate in the coil, thereby uniformly heating the shell. The annular positioning ring of the inner liner is engaged with the annular positioning groove of the shell. The lower heat-conducting mesh embedded at the bottom of the base and the side heat-conducting mesh embedded on the side are made of asbestos mesh material, which has good thermal conductivity and can evenly conduct the heat transferred by the shell to the interior of the base, thereby making the material in the crucible evenly heated, effectively improving the working efficiency and product quality of the AMOLED evaporation source.

[0005] Preferably, the outer shell, the base, and the annular positioning ring are all made of ceramic, and the outer shell and the base are both pot-shaped, with the crucible made of ceramic.

[0006] Preferably, both the lower heat-conducting mesh and the side heat-conducting mesh are made of asbestos mesh, which serves as a heat-conducting metal layer, utilizing the high thermal conductivity of the metal to disperse heat.

[0007] Preferably, the surface of the annular positioning ring is fixedly provided with two symmetrically arranged upper positioning blocks, and the annular positioning groove is provided with two symmetrically arranged upper positioning grooves. The two upper positioning blocks are respectively engaged with the two upper positioning grooves to position the inner liner and improve the stability of the inner liner.

[0008] Preferably, the outer ring at the bottom of the base is fixed with four evenly distributed lower positioning blocks, and the outer ring at the bottom of the inner wall of the outer shell is provided with four evenly distributed lower positioning grooves. The four lower positioning blocks are respectively engaged with the four lower positioning grooves to position the inner liner and improve the stability of the inner liner.

[0009] Preferably, each of the two upper positioning blocks has a lifting groove on its opposite side to facilitate the removal of the inner liner.

[0010] Preferably, the outer side of the lower heat-conducting mesh is provided with four evenly distributed grooves, and the four grooves are respectively set to correspond to the four lower positioning blocks. The lower heat-conducting mesh has pre-set grooves to leave space for the lower positioning blocks.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: by setting a coil with both ends connected as a loop inside the outer shell, the heating medium can circulate in the coil, thereby uniformly heating the shell; the annular positioning ring of the inner liner is engaged with the annular positioning groove of the shell; the lower heat-conducting mesh embedded at the bottom of the base and the side heat-conducting mesh embedded on the side are made of asbestos mesh material, which has good thermal conductivity and can evenly conduct the heat transferred by the shell to the interior of the base, thereby making the material in the crucible evenly heated, effectively improving the working efficiency and product quality of the AMOLED evaporation source. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model;

[0013] Figure 2 This is a schematic diagram of the structure of the inner liner of this utility model;

[0014] Figure 3 This is a schematic diagram of the structure of the casing of this utility model;

[0015] Figure 4 This is a partial view of the casing of this utility model;

[0016] Figure 5 This is a top view of the casing of this utility model;

[0017] Figure 6This is a development view of the substrate and the side heat-conducting mesh of this utility model;

[0018] Figure 7 This is a development diagram of the substrate and the lower heat-conducting mesh of this utility model.

[0019] In the diagram: 1. Inner liner; 2. Outer shell; 3. Outer shell; 4. Annular positioning groove; 5. Upper positioning groove; 6. Coil; 7. Lower positioning groove; 8. Inner shell; 9. Annular positioning ring; 10. Upper positioning block; 11. Lower positioning block; 12. Lifting groove; 13. Base; 14. Side heat conduction mesh; 15. Lower heat conduction mesh; 16. Groove. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0021] Please see Figure 1-7 This utility model provides an AMOLED evaporation source crucible with uniform temperature enhancement, including a shell 2 and an inner liner 1 placed inside the shell 2. The shell 2 includes an outer shell 3, and a coil 6 with both ends connected in a loop is provided inside the outer shell 3. An annular positioning groove 4 is opened on the outer ring of the top of the outer shell 3. The inner liner 1 includes an inner shell 8, and an integral annular positioning ring 9 is fixedly connected to the top of the inner shell 8. The annular positioning ring 9 is engaged with the annular positioning groove 4. The inner shell 8 includes a base 13, a lower heat-conducting mesh 15 is embedded at the bottom of the base 13, a side heat-conducting mesh 14 is embedded on the side of the base 13, and the annular positioning ring 9 is fixedly set on the top of the base 13. The outer shell 3, the base 13 and the annular positioning ring 9 are all made of ceramic. The outer shell 3 and the base 13 are both pot-shaped. The lower heat-conducting mesh 15 and the side heat-conducting mesh 14 are both made of asbestos mesh.

[0022] A coil 6 with its two ends connected as a loop is installed inside the casing 2, which forces the gas to generate convection circulation during the heating process, reducing the temperature gradient. A side heat-conducting mesh 14 and a lower heat-conducting mesh 15 are installed on the surface of the inner liner 1, thereby achieving a uniform increase in the temperature of the AMOLED evaporation source crucible.

[0023] Two symmetrically arranged upper positioning blocks 10 are fixedly installed on the surface of the annular positioning ring 9. Two symmetrically arranged upper positioning grooves 5 are opened in the annular positioning groove 4. The two upper positioning blocks 10 are respectively engaged with the two upper positioning grooves 5. A lifting groove 12 is opened on the opposite side of the two upper positioning blocks 10. The inner liner 1 is positioned, and the inner liner 1 is lifted by inserting a tool into the two lifting grooves 12.

[0024] Four evenly distributed lower positioning blocks 11 are fixedly arranged on the outer ring at the bottom of the base 13. Four evenly distributed lower positioning grooves 7 are opened on the outer ring at the bottom of the inner wall of the outer shell 3. The four lower positioning blocks 11 are respectively engaged with the four lower positioning grooves 7. Four evenly distributed grooves 16 are opened on the outer side of the lower heat conduction mesh 15. The four grooves 16 are respectively set to correspond to the four lower positioning blocks 11; the inner liner 1 is positioned.

[0025] In this embodiment, the AMOLED evaporation source crucible consists of an inner liner 1 and a shell 2. A coil 6 with its two ends connected in a loop is installed inside the shell 2, forcing the gas to circulate during heating, reducing the temperature gradient. A side heat-conducting mesh 14 and a lower heat-conducting mesh 15 are installed on the surface of the inner liner 1 to uniformly raise the temperature of the AMOLED evaporation source crucible. The outer shell 3, the base 13, and the annular positioning ring 9 are made of ceramic material, possessing excellent high-temperature resistance and heat insulation properties, reducing heat loss and further ensuring heating stability. The upper positioning block 10 on the annular positioning ring 9 engages with the upper positioning groove 5 in the annular positioning groove 4, and the lower positioning block 11 at the bottom of the base 13 cooperates with the lower positioning groove 7 at the bottom of the inner wall of the outer shell 3. This dual positioning structure effectively prevents the inner liner 1 from being misaligned with the shell. To prevent displacement or shaking within the inner liner 1, ensuring the stability and uniformity of heat transfer during heating, the lifting groove 12 on the opposite side of the upper positioning block 10 allows operators to easily remove the inner liner 1 from the outer shell 2 using tools. This facilitates the addition and replacement of materials and the cleaning and maintenance of the inner liner 1, improving the ease of operation of the equipment. The groove 16 on the outer side of the lower heat-conducting mesh 15 corresponds to the lower positioning block 11, avoiding interference from the lower positioning block 11 on the structure of the lower heat-conducting mesh 15 while ensuring that the lower heat-conducting mesh 15 can completely cover the bottom of the substrate 13, fully utilizing its heat conduction function and making the heat distribution at the bottom of the substrate 13 more uniform. This allows materials in different positions within the crucible to obtain a consistent heating effect, helping to improve the uniformity of film thickness and product consistency during the vapor deposition process.

[0026] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An AMOLED evaporation source crucible with uniform temperature enhancement, comprising a shell (2) and an inner liner (1) placed inside the shell (2), characterized in that: The outer shell (2) includes an outer shell (3), and the inner shell (3) is provided with a coil (6) with both ends connected to form a loop. The outer ring of the top of the outer shell (3) is provided with an annular positioning groove (4). The inner shell (1) includes an inner shell (8), and the top of the inner shell (8) is fixedly connected with an integral annular positioning ring (9). The annular positioning ring (9) is engaged with the annular positioning groove (4). The inner shell (8) includes a base (13), and the bottom of the base (13) is embedded with a lower heat-conducting mesh (15). The side of the base (13) is embedded with a side heat-conducting mesh (14). The annular positioning ring (9) is fixedly set on the top of the base (13).

2. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 1, characterized in that: The outer shell (3), the base (13) and the annular positioning ring (9) are all made of ceramic, and the outer shell (3) and the base (13) are both pot-shaped.

3. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 1, characterized in that: Both the lower heat-conducting mesh (15) and the side heat-conducting mesh (14) are made of asbestos mesh.

4. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 1, characterized in that: Two symmetrically arranged upper positioning blocks (10) are fixedly arranged on the surface of the annular positioning ring (9), and two symmetrically arranged upper positioning grooves (5) are opened in the annular positioning groove (4). The two upper positioning blocks (10) are respectively engaged and connected with the two upper positioning grooves (5).

5. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 1, characterized in that: The outer ring at the bottom of the base (13) is fixed with four evenly distributed lower positioning blocks (11), and the outer ring at the bottom of the inner wall of the outer shell (3) is provided with four evenly distributed lower positioning grooves (7), and the four lower positioning blocks (11) are respectively engaged with the four lower positioning grooves (7).

6. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 4, characterized in that: Each of the two upper positioning blocks (10) has a lifting groove (12) on one side facing away from each other.

7. The AMOLED evaporation source crucible with uniform temperature enhancement according to claim 5, characterized in that: The outer side of the lower heat-conducting mesh (15) is provided with four evenly distributed grooves (16), and the four grooves (16) are respectively arranged corresponding to the four lower positioning blocks (11).

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