Anti-plate mounting structure and vacuum equipment

Abstract

The utility model discloses a kind of installation structure and vacuum equipment of anti-plate, belong to high-vacuum equipment technical field.The installation structure of anti-plate includes: anti-plate;Guiding structure, the anti-plate and the guiding structure abut;Track, the anti-plate and the track rolling connection;Connecting structure, the connecting structure includes clamping groove and connecting piece, the clamping groove is set on the anti-plate, and with the connecting piece cooperation, connect adjacent two the anti-plate.This installation structure of anti-plate can make multiple anti-plate connect as a whole by setting clamping groove and connecting piece, in equipment of longitudinal depth deeper, when anti-plate needs to be taken out and wash, only need to pull first anti-plate, multiple anti-plate can be pulled out.Installation time, also can be pushed into the inside of cavity by pushing outermost anti-plate first installed anti-plate, facilitate operator's installation and take out, reduce the dismounting time of operator, improve work efficiency.

Description

Technical Field

[0001] This utility model relates to an installation structure for an anti-stick plate and a vacuum device, belonging to the field of high vacuum equipment technology. Background Technology

[0002] A filter plate is a key component in vacuum coating equipment, primarily used to adsorb or block target particles or evaporated materials that fly off during the coating process, preventing these excess substances from contaminating the equipment cavity or non-target substrate areas. In traditional high-vacuum equipment, the filter plate is mainly fixed inside the vacuum equipment using threaded connections. This installation method is complex to install and remove in confined spaces, and subsequent cleaning of the filter plate is inconvenient.

[0003] Furthermore, to maximize the protective area of ​​the anti-fall plate against the inner wall of the chamber, the anti-fall plate is typically quite large, making it inconvenient to install and remove in narrow chamber spaces. This is especially true in high-vacuum equipment with a long depth (≥2m). When the chamber is large, operators can crawl inside to work and fix the plate as a whole using bolts and screws. However, when the chamber is small, installing the anti-fall plate requires removing some components to create sufficient space. Moreover, when the anti-fall plate needs to be removed for cleaning, those deeper inside the chamber are difficult to remove, increasing the time required for installation and making subsequent cleaning inconvenient. Utility Model Content

[0004] To address the aforementioned issues, this utility model provides an installation structure for an anti-fall plate and a vacuum device, effectively overcoming the problems of existing high vacuum devices having long cavity depths and small cavity spaces, which lead to difficulties in installing the anti-fall plate, increased installation time for workers, and inconvenience in removing and cleaning it.

[0005] Firstly, this utility model provides an installation structure for an anti-collision plate, including... Anti-fall plate; A guide structure, wherein the anti-collision plate abuts against the guide structure; The track, wherein the anti-fall plate is rotatably connected to the track; A connecting structure, comprising a slot and a connector, wherein the slot is disposed on the anti-fall plate and cooperates with the connector to connect two adjacent anti-fall plates.

[0006] In one embodiment of this utility model, a cavity is included, the track is connected to the cavity, and the guide structure is installed on the side of the cavity opposite to the track.

[0007] In one embodiment of this utility model, the track includes a roller and a rotating shaft. The roller is sleeved on the outer periphery of the rotating shaft and abuts against the anti-collision plate. The rotating shaft is connected to the cavity.

[0008] In one embodiment of this utility model, there are multiple rollers and rotating shafts arranged in a linear array, and a bearing is provided between the rollers and the rotating shafts.

[0009] In one embodiment of this utility model, the guide structure is a sheet metal structure and is bent into a groove structure with multiple folds, and the anti-collision plate is inserted into the groove of the guide structure.

[0010] In one embodiment of this utility model, a limiting structure is included, which is installed on both sides of the cavity and perpendicular to the guide structure.

[0011] In one embodiment of this utility model, the limiting structure includes a first limiting member and a second limiting member, and the first limiting member and the second limiting member abut against the anti-collision plate.

[0012] In one embodiment of this utility model, the anti-fall plate is a sheet metal structure with folded edges on all four sides, the slot is a through hole provided on the folded edge of the anti-fall plate, and the connector is a bolt that passes through the slot on two adjacent anti-fall plates.

[0013] In one embodiment of this utility model, at least one set of tracks is provided below each of the anti-fall plates.

[0014] Secondly, this utility model also provides a vacuum device, including the aforementioned mounting structure for an anti-stick plate.

[0015] This utility model has the following beneficial effects: The installation structure and vacuum equipment for the anti-collision plate provided by this utility model have the following advantages: 1. The installation structure of this anti-fall plate, through the setting of slots and connectors, allows multiple anti-fall plates to be connected as a whole. In equipment with deep interiors, when the anti-fall plate needs to be removed for cleaning, simply pull the first anti-fall plate to pull out multiple anti-fall plates. During installation, the first anti-fall plate can also be pushed into the inner side of the cavity by pushing the outermost anti-fall plate, which facilitates installation and removal by operators, reduces the disassembly and assembly time of operators, and improves work efficiency.

[0016] 2. The installation structure of the anti-collision plate is also equipped with rollers and a guide structure. The guide structure can guide and limit the movement of the anti-collision plate. The rollers are set at the bottom of the anti-collision plate, which facilitates the removal and pushing of the anti-collision plate. Compared with the traditional screw fixing method, it avoids the problem of fasteners being exposed in the film material, which is convenient for cleaning. At the same time, it reduces the loosening of parts caused by thread stripping, including reducing the problem of contamination and blockage of screw holes during the production process. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the installation of the anti-fall plate provided by this utility model.

[0018] Figure 2 for Figure 1 A magnified view of a portion of point A in the middle.

[0019] Figure 3 for Figure 1 A magnified view of a section at point B.

[0020] Figure 4 This is a cross-sectional view of the anti-collision plate installation structure provided by this utility model.

[0021] Figure 5 for Figure 4 A magnified view of a section at point C.

[0022] Figure 6 for Figure 4 A magnified view of a section at point D.

[0023] In the diagram: 1. Anti-collision plate; 2. Guide structure; 3. Track; 31. Roller; 32. Rotating shaft; 4. Connecting structure; 41. Slot; 42. Connecting piece; 5. Limiting structure; 51. First limiting piece; 52. Second limiting piece; 6. Cavity. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0027] like Figures 1 to 6 As shown, this utility model provides an installation structure for a protective plate. The installation structure includes a cavity 6, a protective plate 1, a guide structure 2, a track 3, a connecting structure 4, and a limiting structure 5. The track 3 is installed on the cavity 6, and the protective plate 1 is slidably connected to the track 3. The protective plate 1 can be pushed into the cavity 6 of a high-vacuum device via the track 3. A guide structure 2 is provided on the side opposite to the track 3. The guide structure 2 is installed on the cavity 6 and can abut against the protective plate 1, providing guidance for the movement of the protective plate 1. Multiple protective plates 1 are provided, fixedly connected to each other by the connecting structure 4, facilitating the pushing in and pulling out of the protective plates 1. Limiting structures 5 are installed at both ends of the cavity 6 to fix the installed protective plates 1 and prevent them from moving during use.

[0028] In some embodiments, the track 3 includes a roller 31 and a rotating shaft 32. The roller 31 is sleeved on the rotating shaft 32, and the two are rotatably connected by bearings. The rotating shaft 32 is mounted on the cavity 6. There are multiple rollers 31 and rotating shafts 32, which are arranged in a linear array along the moving direction of the anti-collision plate 1. Anti-collision plates 1 are provided on the three sides of the cavity 6 other than the bottom. At least one set of tracks 3 is provided below each anti-collision plate 1. Two sets of tracks 3 are symmetrically arranged below the anti-collision plate 1 at the top of the cavity 6 to facilitate the pushing of the anti-collision plate 1 into the cavity 6.

[0029] In some embodiments, the protective plate 1 is a sheet metal structure with folded edges on all four sides. The connecting structure 4 includes a slot 41 and a connector 42. The slot 41 is disposed on the folded edge of the protective plate 1, and the connector 42 passes through the slot 41 to fix two adjacent protective plates 1 together, facilitating the pushing or pulling of multiple protective plates 1 into or out of the cavity 6. Especially in cavities with a greater depth (≥2m), a connecting structure must be provided between two adjacent protective plates 1 so that when the protective plates 1 are pulled out for cleaning, the protective plates 1 deep inside the cavity 6 can also be pulled out for cleaning.

[0030] Optionally, in some embodiments, the slot 41 is a through hole, having multiple slots, one end of which is a large hole and the other end is a small hole, symmetrically arranged on the folded edge of the anti-collision plate 1. The connector 42 is a bolt, which passes through the slot 41 to fix two adjacent anti-collision plates 1 together, and connects multiple anti-collision plates 1 into a whole, which facilitates the installation and disassembly by operators, reduces disassembly and assembly time, and facilitates the subsequent installation and cleaning of the anti-collision plates. At the same time, the connecting structure 4 is set on the folded edge of the anti-collision plate 1, which can prevent the connecting structure 4 from being exposed in the film material, making it easier to clean and reducing the contamination of the holes and connectors during the production process, thus preventing blockage.

[0031] Optionally, in some embodiments, the slot 41 is a through hole and is provided on one side of the edge of the anti-collision plate 1, and the connector 42 is an elastic protrusion and is provided on the other side of the edge opposite to the slot 41, so that two adjacent anti-collision plates 1 can be connected by fastening.

[0032] In some embodiments, the guide structure 2 is a groove structure with multiple folded edges, which is fixedly installed on one side of the cavity 6. The side of the anti-collision plate 1 away from the track 3 abuts against the guide structure 2 and is inserted into the groove of the guide structure 2, so that it can only be pushed into the cavity 6 along the direction of the track 3, providing guidance and limiting for the movement of the anti-collision plate 1.

[0033] In some embodiments, the limiting structure 5 is installed on both sides of the cavity 6 and perpendicular to the guide structure 2. The limiting structure 5 includes a first limiting member 51 and a second limiting member 52, which are symmetrically installed on both sides of the cavity 6 and perpendicular to the guide structure 2. When the anti-collision plate 1 is placed into the cavity 6, the first limiting member 51 and the second limiting member 52 are installed on both sides of the cavity 6 to limit the movement direction of the anti-collision plate 1 and prevent it from moving during use.

[0034] Furthermore, this utility model also provides a vacuum device including the aforementioned anti-fouling plate mounting structure. The vacuum device includes a cavity 6 and an anti-fouling plate 1. The anti-fouling plate 1 is mounted within the cavity 6 via the aforementioned mounting structure, serving to adsorb or block target material particles or evaporating materials that are dispersed during the coating process, preventing these excess substances from contaminating the device or non-target substrate areas. Moreover, the anti-fouling plate 1 can be easily pushed in or removed via this mounting structure, facilitating subsequent cleaning.

[0035] The working principle of the anti-fall plate installation structure provided by this utility model is as follows: A track 3 is installed on one side of the cavity 6, and a guide structure 2 is installed on the side opposite to the track 3. Multiple anti-fall plates 1 are connected as a whole through the cooperation of the slot 41 and the connecting piece 42. Under the restriction of the guide structure 2, the anti-fall plate 1 moves along the track 3 into the cavity 6. Then, the first limiting piece 51 and the second limiting piece 52 are installed on both sides of the cavity 6 to limit the movement direction of the anti-fall plate 1. When it is necessary to clean the anti-fall plate 1, it is only necessary to remove the limiting piece on one side to pull out the anti-fall plate 1. Since multiple anti-fall plates 1 are connected as a whole through the cooperation of the slot 41 and the connecting piece 42, when the first anti-fall plate 1 is pulled, multiple anti-fall plates 1 inside the cavity 6 can be pulled out together for cleaning. In a limited space, all anti-fall plates 1 can be taken out and pushed in without disassembling other parts, reducing the disassembly and assembly time of the operator, improving work efficiency, and making it easy to remove the anti-fall plates 1 for cleaning later.

[0036] In summary, the installation structure of this anti-fall plate has the following advantages: 1. The mounting structure of this anti-fall plate, through the setting of the slot 41 and the connector 42, allows multiple anti-fall plates 1 to be connected into a whole. In equipment with a deep interior, when the anti-fall plate 1 needs to be removed for cleaning, only the first anti-fall plate needs to be pulled out to pull out multiple anti-fall plates. During installation, the first anti-fall plate can also be pushed into the inner side of the cavity by pushing the outermost anti-fall plate, which facilitates the installation and removal by the operator, reduces the operator's disassembly and assembly time, and improves work efficiency.

[0037] 2. The mounting structure of the anti-collision plate is also equipped with rollers 31 and guide structure 2. The guide structure 2 can provide guidance and limit the movement direction of the anti-collision plate 1. By setting rollers 31 at the bottom of the anti-collision plate 1, it is easy to remove and push the anti-collision plate 1 in. Compared with the traditional screw fixing method, it avoids the problem of fasteners being exposed in the film material, which is easy to clean. At the same time, it reduces the loosening of parts caused by thread stripping, including reducing the problem of contamination and blockage of screw holes during the production process.

[0038] This document uses specific embodiments to illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An installation structure for a protective plate, characterized in that, include Anti-fall plate (1); The guide structure (2) is in contact with the anti-collision plate (1); The track (3) is connected to the anti-collision plate (1) in a rolling manner; The connection structure (4) includes a slot (41) and a connector (42). The slot (41) is disposed on the anti-collision plate (1) and cooperates with the connector (42) to connect two adjacent anti-collision plates (1).

2. The installation structure of the anti-collision plate according to claim 1, characterized in that, Includes a cavity (6), the track (3) is connected to the cavity (6), and the guide structure (2) is installed on the side of the cavity (6) away from the track (3).

3. The installation structure of the anti-collision plate according to claim 2, characterized in that, The track (3) includes a roller (31) and a rotating shaft (32). The roller (31) is sleeved on the outer periphery of the rotating shaft (32). The roller (31) abuts against the anti-collision plate (1). The rotating shaft (32) is connected to the cavity (6).

4. The installation structure of the anti-collision plate according to claim 3, characterized in that, There are multiple rollers (31) and the rotating shaft (32), which are arranged in a linear array, and a bearing is provided between the rollers (31) and the rotating shaft (32).

5. The installation structure of the anti-collision plate according to claim 1, characterized in that, The guide structure (2) is a sheet metal structure and is bent into a groove structure with multiple folds. The anti-stick plate (1) is inserted into the groove of the guide structure (2).

6. The installation structure of the anti-collision plate according to claim 2, characterized in that, It includes a limiting structure (5), which is installed on both sides of the cavity (6) and is perpendicular to the guide structure (2).

7. The installation structure of the anti-collision plate according to claim 6, characterized in that, The limiting structure (5) includes a first limiting member (51) and a second limiting member (52), which abut against the anti-collision plate (1).

8. The installation structure of the anti-collision plate according to claim 1, characterized in that, The anti-collision plate (1) is a sheet metal structure with folded edges on all four sides. The slot (41) is a through hole and is set on the folded edge of the anti-collision plate (1). The connector (42) is a bolt that passes through the slot (41) on two adjacent anti-collision plates (1).

9. The installation structure of the anti-collision plate according to claim 1, characterized in that, At least one set of the tracks (3) is provided below each of the aforementioned anti-fall plates (1).

10. A vacuum device, characterized in that, The mounting structure of the anti-collision plate as described in any one of claims 1-9.

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