A clamping structure for a rotary cathode

Abstract

The utility model belongs to the field of rotary cathode, specifically speaking is a kind of for the clamping structure of rotary cathode, including rotary cathode, external box, water inlet joint, the end of rotary cathode is provided with external box, and the frame body of external box is fixedly connected with water inlet joint, and water inlet joint is inserted with hose, and the end of hose is provided with clamp piece, and the side of clamp piece is clamped with blocking frame, and the frame body of clamp piece is fixedly connected with anti-bending spring pipe no.

Description

Technical Field

[0001] This utility model relates to the field of rotating cathodes, specifically a snap-fit ​​structure for rotating cathodes. Background Technology

[0002] The magnetron rotating cathode is a core component of magnetron sputtering technology. The rotating target tube design significantly improves thin film deposition efficiency and target utilization. The magnetron rotating cathode consists of a cylindrical target, an internal magnetic rod, and a cooling system. The target tube rotates at a constant speed under the drive of a motor, and the magnetic rod is fixed inside to generate a closed magnetic field.

[0003] When connecting the hose to the water inlet connector of the external box of the rotating cathode magnet, a plug-in connection is used, followed by clamping for fixation. However, due to limited space at the connection point between the hose and the water inlet connector, the connection may sometimes bend, requiring manual adjustment of the hose. Furthermore, during the installation of other components, collisions can sometimes affect the hose, necessitating readjustment after installation to prevent bending. Therefore, a clamping structure for the rotating cathode is proposed to address these issues. Utility Model Content

[0004] To overcome the shortcomings of the existing technology, this utility model proposes a snap-fit ​​structure for a rotating cathode.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a snap-fit ​​structure for a rotating cathode, including a rotating cathode, an external box, and a water inlet connector. The external box is provided at the end of the rotating cathode. The frame of the external box is fixedly connected to the water inlet connector. A flexible hose is inserted into the water inlet connector. A clamp is sleeved at the end of the flexible hose. A blocking frame is snapped to the side of the clamp. An anti-bending spring tube one is fixedly connected to the frame of the clamp. An anti-bending spring tube two is snapped to the end of the anti-bending spring tube one.

[0006] Preferably, the clamp includes: a connecting plate, a fitting groove, and a locking hole. The frame of the clamp is fixedly connected to one end of the connecting plate, and the other end of the connecting plate is fixedly connected to the end of the anti-bending spring tube. The fitting groove is provided on the side of the frame of the clamp, and the locking hole is provided on the inner wall of the fitting groove. The fitting groove is used to insert a blocking frame.

[0007] Preferably, the anti-bending spring tube includes: a first fixing ring and a second fixing ring, one end of the anti-bending spring tube is fixedly connected to the end of the first fixing ring, and the other end of the anti-bending spring tube is fixedly connected to the end of the second fixing ring.

[0008] Preferably, the second anti-bending spring tube includes: a third fixing ring and a closing ring frame. One end of the second anti-bending spring tube is fixedly connected to the end of the third fixing ring, and the other end of the second anti-bending spring tube is fixedly connected to the frame of the closing ring frame.

[0009] Preferably, the closing ring frame includes: a screw connection frame and a base plate. The frame of the closing ring frame is fixedly connected to the frame of the base plate. The frame of the base plate is fixedly connected to the end of the second anti-bending spring tube. The frame of the base plate is fixedly connected to the end of the screw connection frame.

[0010] Preferably, the blocking frame includes: a notch and an elastic clip; the notch is provided on the side of the blocking frame body, and the elastic clip is provided on the blocking frame body.

[0011] Preferably, the elastic clip further includes a spring and a bullet head, with the inner wall of the elastic clip fixedly connected to one end of the spring and the other end of the spring fixedly connected to the end of the bullet head.

[0012] The advantages of this utility model are:

[0013] 1. This utility model, through the setting of the notch groove, enables the blocking frame to quickly insert when it enters the fitting groove. The bullet head will be stuck in the card hole, positioning the blocking frame. In this way, when the bolt on the other side of the clamp is tightened, the end of the blocking frame will abut against the outer wall of the outer box. Thus, during the tightening of the clamp bolt, the blocking frame can provide a fulcrum, allowing the clamp to bind and secure the hose.

[0014] 2. This utility model features a wide opening and a narrow closing of the constricting ring frame, resembling a trumpet shape. This allows the fixing ring two to be quickly inserted into the inner wall at the opening of the constricting ring frame. Then, by rotating the constricting ring frame, the screw frame will rotate on the inner wall of the anti-bending spring tube one. Because the screw frame is inclined, as the constricting ring frame moves, the screw frame can fit tightly against the inner wall of the anti-bending spring tube one. Since the anti-bending spring tube one and the anti-bending spring tube two are elastic, they have self-resetting properties after being folded by external force, which can drive the hose of the protected part to reset synchronously, avoiding the hose from being folded and squeezed. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a partial structural schematic diagram of the present invention;

[0018] Figure 3 This is a schematic diagram of the blocking frame structure of this utility model;

[0019] Figure 4 This is a structural schematic diagram of the anti-bending spring tube and the clamp component of this utility model;

[0020] Figure 5 This is a schematic diagram of the anti-bending spring tube of this utility model.

[0021] In the picture:

[0022] 1. Rotating cathode; 2. External box; 3. Water inlet connector; 5. Hose; 6. Clamp; 61. Connecting plate; 62. Fitting groove; 621. Locking hole; 7. Anti-bending spring tube one; 71. Fixing ring one; 72. Fixing ring two; 8. Anti-bending spring tube two; 81. Fixing ring three; 82. Closing ring frame; 821. Threaded frame; 822. Base plate; 9. Blocking frame; 91. Cut groove; 92. Elastic clamp; 921. Spring; 922. Bullet head. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0024] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0025] This application discloses a snap-fit ​​structure for a rotating cathode, including a rotating cathode 1, an external housing 2, and a water inlet connector 3. The external housing 2 is provided at the end of the rotating cathode 1. The water inlet connector 3 is fixedly connected to the frame of the external housing 2. A flexible hose 5 is inserted into the water inlet connector 3. A clamp 6 is sleeved at the end of the flexible hose 5. A blocking frame 9 is snapped onto the side of the clamp 6. An anti-bending spring tube 1 7 is fixedly connected to the frame of the clamp 6. An anti-bending spring tube 2 8 is snapped onto the end of the anti-bending spring tube 1 7.

[0026] The clamp component 6 includes: a connecting plate 61, a fitting groove 62, and a locking hole 621. The frame of the clamp component 6 is fixedly connected to one end of the connecting plate 61, and the other end of the connecting plate 61 is fixedly connected to the end of the anti-bending spring tube 7. The fitting groove 62 is opened on the side of the frame of the clamp component 6, and the locking hole 621 is opened on the inner wall of the fitting groove 62. The fitting groove 62 is used to insert the blocking frame 9.

[0027] The anti-bending spring tube 7 includes: a first fixing ring 71 and a second fixing ring 72. One end of the anti-bending spring tube 7 is fixedly connected to the end of the first fixing ring 71, and the other end of the anti-bending spring tube 7 is fixedly connected to the end of the second fixing ring 72.

[0028] The second anti-bending spring tube 8 includes: a third fixing ring 81 and a closing ring frame 82. One end of the second anti-bending spring tube 8 is fixedly connected to the end of the third fixing ring 81, and the other end of the second anti-bending spring tube 8 is fixedly connected to the frame of the closing ring frame 82.

[0029] The closing ring frame 82 includes: a screw frame 821 and a base plate 822. The frame of the closing ring frame 82 is fixedly connected to the frame of the base plate 822. The frame of the base plate 822 is fixedly connected to the end of the anti-bending spring tube 8. The frame of the base plate 822 is fixedly connected to the end of the screw frame 821.

[0030] The blocking frame 9 includes: a notch 91 and an elastic clip 92. The notch 91 is opened on the side of the frame of the blocking frame 9, and the elastic clip 92 is provided on the frame of the blocking frame 9.

[0031] The elastic clip 92 further includes a spring 921 and a bullet head 922. The inner wall of the elastic clip 92 is fixedly connected to one end of the spring 921, and the other end of the spring 921 is fixedly connected to the end of the bullet head 922.

[0032] Working principle: Before inserting the hose 5 into the water inlet connector 3, the anti-bending spring tube 2 8 needs to be fitted onto the hose 5, and then the clamp 6 is fitted onto the hose 5. Then, the hose 5 is inserted into the water inlet connector 3, and the notch 91 is pressed against the fitting groove 62. Because of the notch 91, the blocking bracket 9 has a quick insertion effect when it enters the fitting groove 62. After the blocking bracket 9 is inserted into the fitting groove 62, the bullet head 922 will align with the locking hole 621, allowing... The bullet head 922 is driven by the spring 921, and the bullet head 922 will be locked in the locking hole 621, positioning the blocking bracket 9. In this way, when the bolt on the other side of the clamp 6 is tightened, the end of the blocking bracket 9 will abut against the outer wall of the outer box 2. Thus, during the tightening of the clamp 6 bolt, the blocking bracket 9 can provide a fulcrum, allowing the clamp 6 to bind and secure the hose 5. Then, the closing ring bracket 82 is pushed toward the position of the fixing ring 72. Because the opening of the closing ring bracket 82 is wide, the closing... The constricted opening of the constriction ring 82 is narrow and flared, allowing the fixing ring 72 to be quickly inserted into the inner wall. Rotating the constriction ring 82 causes the threaded bracket 821 to rotate within the anti-bend spring tube 7. Because the threaded bracket 821 is angled, its movement ensures it fits snugly against the inner wall of the anti-bend spring tube 7. The protruding stripes on the outer side of the threaded bracket 821 engage with the anti-bend spring tube 7 as the constriction ring 82 rotates, thus extending the anti-bend spring tube 7 and the second anti-bend spring tube 8 into a single unit. This extends the protective hose 5. Further extension can be achieved by adding another anti-bend spring tube 8, allowing for flexible adjustments based on the installation environment. The elasticity of the anti-bend spring tubes 7 and 8 allows for self-resetting after being folded by external force, enabling the hose 5 in the protected area to return to its original position, preventing folding and compression of the hose 5.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A snap-fit ​​structure for a rotating cathode, comprising a rotating cathode (1), an external housing (2), and a water inlet connector (3), wherein the rotating cathode (1) is provided with an external housing (2) at its end, and the frame of the external housing (2) is fixedly connected to the water inlet connector (3), characterized in that: The water inlet connector (3) is connected to a hose (5), and the end of the hose (5) is fitted with a clamp (6). The side of the clamp (6) is fitted with a blocking frame (9). The frame of the clamp (6) is fixedly connected to an anti-bending spring tube one (7), and the end of the anti-bending spring tube one (7) is fitted with an anti-bending spring tube two (8).

2. The snap-fit ​​structure for a rotating cathode according to claim 1, characterized in that: The clamp (6) includes: a connecting plate (61), a fitting groove (62), and a locking hole (621). The frame of the clamp (6) is fixedly connected to one end of the connecting plate (61), and the other end of the connecting plate (61) is fixedly connected to the end of the anti-bending spring tube (7). The fitting groove (62) is opened on the side of the frame of the clamp (6), and the locking hole (621) is opened on the inner wall of the fitting groove (62). The fitting groove (62) is used to insert the blocking frame (9).

3. The snap-fit ​​structure for a rotating cathode according to claim 2, characterized in that: The anti-bending spring tube (7) includes: a fixing ring (71) and a fixing ring (72). One end of the anti-bending spring tube (7) is fixedly connected to the end of the fixing ring (71), and the other end of the anti-bending spring tube (7) is fixedly connected to the end of the fixing ring (72).

4. The snap-fit ​​structure for a rotating cathode according to claim 1, characterized in that: The second anti-bending spring tube (8) includes: a third fixing ring (81) and a closing ring frame (82). One end of the second anti-bending spring tube (8) is fixedly connected to the end of the third fixing ring (81), and the other end of the second anti-bending spring tube (8) is fixedly connected to the frame of the closing ring frame (82).

5. A snap-fit ​​structure for a rotating cathode according to claim 4, characterized in that: The closing ring frame (82) includes: a screw frame (821) and a base plate (822). The frame of the closing ring frame (82) is fixedly connected to the frame of the base plate (822). The frame of the base plate (822) is fixedly connected to the end of the anti-bending spring tube (8). The frame of the base plate (822) is fixedly connected to the end of the screw frame (821).

6. The snap-fit ​​structure for a rotating cathode according to claim 1, characterized in that: The blocking frame (9) includes: a notch (91) and an elastic clip (92). The notch (91) is opened on the side of the frame of the blocking frame (9), and the elastic clip (92) is provided on the frame of the blocking frame (9).

7. A snap-fit ​​structure for a rotating cathode according to claim 6, characterized in that: The elastic clip (92) further includes: a spring (921) and a bullet head (922). The inner wall of the elastic clip (92) is fixedly connected to one end of the spring (921), and the other end of the spring (921) is fixedly connected to the end of the bullet head (922).

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