Vacuum furnace body for double-sided coating of wide-format products

Abstract

The embodiment of the utility model relates to a vacuum furnace body for wide version product double -sided coating, set up furnace body structure on the vacuum furnace body for wide version product double -sided coating, set up hole structure on furnace body structure, set up inboard target on furnace body structure, set up outboard target on furnace body structure, place wide version product in the inside of furnace body structure, when wide version product double -sided coating, inboard target and outboard target open simultaneously, and wide version product only needs revolution, has target base distance change very little, film layer uniformity is good, and the advantage that coating efficiency is high, and the furnace capacity is big, solved in the prior art, the target of coating cavity generally installs in the outside of furnace body, if wide version product is carried out double -sided coating, then clamp needs one side revolution and autorotation, but because product is wide, target base distance change is very big in autorotation process, leading to film layer uniformity difference is big, and the technical problem that coating efficiency is low, and the furnace capacity is few.

Description

Technical Field

[0001] The embodiments of this utility model relate to a furnace body, and more particularly to a vacuum furnace body for double-sided coating of wide-format products. Background Technology

[0002] In existing technologies, the target of the coating chamber is usually mounted on the outside of the furnace. If double-sided coating is to be performed on wide products, the fixture needs to rotate on one side and rotate on its own axis. However, due to the wideness of the products, the target-substrate distance changes greatly during the rotation, resulting in large differences in the uniformity of the film layer, low coating efficiency, and small furnace loading capacity. Utility Model Content

[0003] The purpose of this invention is to provide a vacuum furnace body for double-sided coating of wide-format products, in which targets are installed both inside and outside the furnace body. When wide-format products are coated on both sides, the inner and outer targets are opened simultaneously, and the wide-format products only need to revolve. The target-substrate distance changes very little, the film uniformity is good, the coating efficiency is high, and the furnace capacity is large.

[0004] To achieve the above objectives, the present invention provides a vacuum furnace body for double-sided coating of wide-format products, characterized in that it comprises: The furnace body structure is provided on the vacuum furnace body used for double-sided coating of wide-format products; A perforated structure is provided on the furnace body structure; Inner target, the inner target is provided on the furnace body structure; An outer target is provided on the furnace body structure; The wide-plate product is placed inside the furnace structure; the wide-plate product is between the inner target and the outer target. When the wide-plate product is coated on both sides, the inner target and the outer target are opened simultaneously, and the wide-plate product only needs to revolve.

[0005] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products according to this utility model, the furnace body structure includes: The furnace body is mounted on the vacuum furnace body used for double-sided coating of wide-format products; The upper cover is fixed above the furnace body; A base plate is fixedly connected to the bottom of the furnace body; The furnace door is movably connected to one side of the furnace body.

[0006] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products of this utility model, the perforated structure includes: External target mounting holes: Several external target mounting holes are provided on the upper cover; Inner target mounting holes: Several inner target mounting holes are made on the upper cover.

[0007] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products of this utility model, the inner target passes through the upper cover of the furnace body structure from top to bottom, and one end of the inner target is fixedly connected to the inner target mounting hole of the hole structure; the outer target passes through the upper cover of the furnace body structure from top to bottom, and one end of the outer target is fixedly connected to the outer target mounting hole of the hole structure.

[0008] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products of this utility model, the furnace door and the furnace body are movably connected by a number of door hinges.

[0009] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products of this utility model, an air extraction port is fixedly connected to the other side of the furnace body, and the air extraction port is in communication with the interior of the furnace body.

[0010] Furthermore, in the vacuum furnace body for double-sided coating of wide-format products of this utility model, a cooling water inlet is provided on the upper cover; and a cooling water outlet is provided on the upper cover.

[0011] Furthermore, in the vacuum furnace body of this utility model for double-sided coating of wide-format products, a pivot hole is opened at the center of the upper cover.

[0012] Compared with the prior art, the embodiment of this utility model adopts a furnace structure on a vacuum furnace body for double-sided coating of wide-format products; a perforated structure is provided on the furnace structure; an inner target is provided on the furnace structure; an outer target is provided on the furnace structure; and the wide-format product is placed inside the furnace structure. The wide-format product is positioned between the inner and outer targets. When the wide-format product is coated on both sides, the inner and outer targets are opened simultaneously, and the wide-format product only needs to rotate. This has the advantages of very small change in target-substrate distance, good film uniformity, high coating efficiency, and large furnace capacity. It solves the technical problem in the prior art that the targets of the coating cavity are generally mounted on the outside of the furnace body. If double-sided coating of wide-format products is to be performed, the fixture needs to rotate on one side, but because the product is wide, the target-substrate distance changes greatly during the rotation, resulting in large differences in film uniformity, low coating efficiency, and small furnace capacity. Attached Figure Description

[0013] Figure 1 This is a perspective view of the present utility model; Figure 2 This is the top view and front view of this utility model; Figure 3 This is a schematic diagram of the coating process for the wide-format product of this utility model; Figure 4 This is the front view of the present invention. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of this utility model clearer, the various embodiments of this utility model will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the various embodiments of this utility model to facilitate a better understanding of this application. However, the technical solutions claimed in the claims of this application can be implemented even without these technical details and with various variations and modifications based on the following embodiments.

[0015] The embodiments of this utility model relate to a vacuum furnace body for double-sided coating of wide-format products, such as... Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, it includes: In this embodiment, a furnace structure 11 is provided on the vacuum furnace body for double-sided coating of wide-format products 9. The furnace structure 11 provides a closed environment for double-sided coating of wide-format products 9, protecting internal components from external interference.

[0016] A perforated structure 12 is provided on the furnace body structure 11. The perforated structure 12 is used to install the inner target 7 and the outer target 8.

[0017] An inner target 7 is installed on the furnace structure 11. The inner target 7 provides the coating material for the inner surface of the wide-format product 9. During magnetron sputtering, the inner target material is bombarded by high-energy particles, and target atoms or molecules are sputtered out and deposited on the inner surface of the wide-format product 9, forming a uniform film layer, thereby giving the inner surface of the product specific properties. The inner target 7 and the outer target 8 work together to enable simultaneous coating on both sides of the wide-format product 9, improving production efficiency and ensuring the quality of the double-sided coating.

[0018] An outer target 8 is set on the furnace body structure 11. The outer target 8 is used to coat the outer surface of the wide-plate product 9. The particles released by the outer target during the sputtering process are deposited on the outer surface of the product to form the required film layer, thereby improving the performance and appearance of the outer surface of the wide-plate product 9.

[0019] A wide plate product 9 is placed inside the furnace structure 11. The wide plate product 9 is between the inner target 7 and the outer target 8. When the wide plate product 9 is coated on both sides, the inner target 7 and the outer target 8 are opened at the same time. The wide plate product 9 only needs to revolve. The wide plate product 9 is a product that needs to be coated. It is coated on both sides in the vacuum furnace used for double-sided coating of the wide plate product, and a film layer is formed on its surface.

[0020] In this embodiment, an inner target 7 is provided on the furnace structure 11; an outer target 8 is provided on the furnace structure 11; a wide product 9 is placed inside the furnace structure 11; the wide product 9 is between the inner target 7 and the outer target 8. When the wide product 9 is coated on both sides, the inner target 7 and the outer target 8 are opened simultaneously, and the wide product 9 only needs to revolve. It has the advantages of very small change in target-substrate distance, good film uniformity, high coating efficiency, and large furnace capacity. It solves the technical problem in the prior art that the target of the coating cavity is generally installed on the outside of the furnace body. If the wide product is to be coated on both sides, the fixture needs to revolve and rotate on one side. However, because the product is wide, the target-substrate distance changes greatly during the rotation, resulting in large differences in film uniformity, low coating efficiency, and small furnace capacity.

[0021] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, the furnace body structure 11 includes: A furnace body 3 is installed on a vacuum furnace body 3 used for double-sided coating of wide-format products. The furnace body 3 provides a closed environment for double-sided coating of wide-format products 9, protecting internal components from external interference.

[0022] A top cover 13 is fixed above the furnace body 3. The top cover 13, the furnace body 3, and the bottom plate 10 together form a completely enclosed space to prevent outside air from entering the furnace, ensuring that the required vacuum degree is maintained during the coating process and guaranteeing the quality of the coating. The top cover 13 also provides a mounting position for the top components. Moreover, during the operation of the vacuum furnace, a negative pressure is formed inside the furnace, and the top cover 13 withstands a certain amount of external atmospheric pressure.

[0023] A base plate 10 is fixedly connected to the bottom of the furnace body 3. The base plate 10 is the bottom support structure of the furnace body 3, which bears the weight of the entire furnace body 3 and the wide plate product 9 placed inside it. The base plate 10 provides an installation base for some bottom components inside the furnace body.

[0024] Furnace door 1 is movably connected to one side of furnace body 3. Furnace door 1 is the passage for the wide product 9 to enter and exit. Before the coating operation, furnace door 1 is opened and the wide product 9 is placed in the designated position inside the furnace. After the coating is completed, furnace door 1 is opened again and the product is taken out. When furnace door 1 is closed, it forms a sealed space with furnace body 3 to maintain a vacuum environment inside the furnace.

[0025] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, the hole structure 12 includes: Several outer target mounting holes 4 are made on the upper cover 13, and the several outer target mounting holes 4 are used to connect the outer target 8.

[0026] Several inner target mounting holes 5 are made on the upper cover 13, and the several inner target mounting holes 5 are used to install the inner target 7.

[0027] To achieve the above-mentioned technical effects, such as Figure 1 As shown, the inner target 7 passes through the upper cover 13 of the furnace body structure 11 from top to bottom, and one end of the inner target 7 is fixedly connected to the inner target mounting hole 5 of the hole structure 12; the outer target 8 passes through the upper cover 13 of the furnace body structure 11 from top to bottom, and one end of the outer target 8 is fixedly connected to the outer target mounting hole 4 of the hole structure 12.

[0028] To achieve the above-mentioned technical effects, such as Figure 1 , Figure 2 and Figure 4 As shown, the furnace door 1 and the furnace body 3 are movably connected by several door hinges 2. The several door hinges 2 are used to connect the furnace door 1 and the furnace body 3, so that the furnace door 1 can rotate around the axis of the several door hinges 2, thereby opening and closing the furnace door 1.

[0029] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, an air extraction port 6 is fixedly connected to the other side of the furnace body 3. The air extraction port 6 is connected to the inside of the furnace body 3. Before coating, the air extraction port 6 is connected to a vacuum pump to extract the air inside the furnace, creating a vacuum environment for the double-sided coating of the wide plate product 9 and ensuring the quality of the coating.

[0030] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, a cooling water inlet 14 is provided on the upper cover 13; a cooling water outlet 15 is provided on the upper cover 13. The cooling water inlet 14 is used to connect to the source equipment that provides low-temperature cooling water, and the cooling water outlet 15 is used to connect to pipes or other equipment.

[0031] To achieve the above-mentioned technical effects, such as Figure 1 and Figure 2 As shown, a pivot hole 16 is provided at the center of the upper cover 13. The pivot hole 16 is used to install the pivot and bearing.

[0032] Those skilled in the art will understand that the above embodiments are specific examples of implementing the present invention, and in practical applications, various changes can be made to them in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A vacuum furnace body for double-sided coating of wide-format products, characterized in that, include: The furnace body structure is provided on the vacuum furnace body used for double-sided coating of wide-format products; A perforated structure is provided on the furnace body structure; Inner target, the inner target is provided on the furnace body structure; An outer target is provided on the furnace body structure; The wide-plate product is placed inside the furnace structure; the wide-plate product is between the inner target and the outer target. When the wide-plate product is coated on both sides, the inner target and the outer target are opened simultaneously, and the wide-plate product only needs to revolve.

2. The vacuum furnace body for double-sided coating of wide-format products according to claim 1, characterized in that, The furnace body structure includes: The furnace body is mounted on the vacuum furnace body used for double-sided coating of wide-format products; The upper cover is fixed above the furnace body; A base plate is fixedly connected to the bottom of the furnace body; The furnace door is movably connected to one side of the furnace body.

3. The vacuum furnace body for double-sided coating of wide-format products according to claim 1, characterized in that, The hole structure includes: External target mounting holes: Several external target mounting holes are provided on the upper cover; Inner target mounting holes: Several inner target mounting holes are made on the upper cover.

4. The vacuum furnace body for double-sided coating of wide-format products according to claim 1, characterized in that, The inner target passes through the upper cover of the furnace body structure from top to bottom, and one end of the inner target is fixedly connected to the inner target mounting hole of the hole structure; the outer target passes through the upper cover of the furnace body structure from top to bottom, and one end of the outer target is fixedly connected to the outer target mounting hole of the hole structure.

5. The vacuum furnace body for double-sided coating of wide-format products according to claim 2, characterized in that, The furnace door is movably connected to the furnace body via several door hinges.

6. The vacuum furnace body for double-sided coating of wide-format products according to claim 2, characterized in that, An air extraction port is fixedly connected to the other side of the furnace body, and the air extraction port is connected to the interior of the furnace body.

7. The vacuum furnace body for double-sided coating of wide-format products according to claim 2, characterized in that, A cooling water inlet is provided on the upper cover; a cooling water outlet is provided on the upper cover.

8. The vacuum furnace body for double-sided coating of wide-format products according to claim 2, characterized in that, A pivot hole is made at the center of the upper cover.

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