A 12-inch wafer POLY furnace gas guide tube

Abstract

The utility model discloses a kind of 12 inch wafer POLY furnace air guide pipe.The air guide pipe is stainless steel material, and air guide pipe main part is constituted by air inlet pipe, gas pipe intercommunication block, air outlet pipe three parts, gas pipe intercommunication block is L-shaped, air inlet pipe and air outlet pipe are welded in gas pipe intercommunication block two ends;The air inlet pipe is inserted into the air guide pipe mounting hole of POLY furnace pipe bottom flange, and it extends from the side wall of flange, for connecting gas supply;Air outlet pipe is detachably connected with the vertical quartz air guide pipe in furnace;The inside of L-shaped gas pipe intercommunication block and the L-shaped surface of POLY furnace pipe bottom flange are pasted.The 12 inch POLY furnace air guide pipe of the utility model has the characteristics of simple structure and convenient to use, can realize the quick replacement of quartz air guide pipe in POLY furnace, can effectively prolong the PM cycle of 12 inch POLY furnace in actual production, reduce the replacement frequency of furnace pipe and related components, achieve the purpose of reducing cost and increasing efficiency.

Description

Technical Field

[0001] This utility model relates to a gas guide pipe for a 12-inch wafer POLY furnace, belonging to the field of polysilicon production technology. Background Technology

[0002] 12-inch wafer POLY (polysilicon deposition furnace) production lines often require PM (preventive maintenance) due to duct blockage. Duct blockage typically occurs with an increase in the number of furnaces in use, but other quartz components such as the inner and outer tubes and quartz boat can still be used. Existing quartz ducts are generally L-shaped. Due to the current installation method, it is difficult to disassemble and reassemble the duct when it is blocked, as the furnace chamber remains at a process temperature of 600°C without cooling. Therefore, the POLY furnace must be cooled before disassembling and replacing the duct. This leads to a risk of damage to the inner and outer tubes and quartz boat after cooling and then reheating, making continued use generally unacceptable. Consequently, these components are forced to be replaced along with the duct, shortening the overall PM cycle of the POLY furnace, increasing the cost of various quartz components and corresponding seals, and impacting the POLY process's capacity.

[0003] Based on the above practical needs, this utility model designs a 12-inch wafer POLY furnace gas pipe to allow for the replacement of quartz gas pipes without cooling, effectively solving the current production problems. Utility Model Content

[0004] The purpose of this invention is to provide a 12-inch wafer POLY furnace gas guide pipe, which enables rapid replacement of the quartz gas guide pipe inside the POLY furnace. In actual production, this can effectively extend the PM cycle of the 12-inch wafer POLY furnace, reduce the replacement frequency of furnace tubes and related components, and achieve the goal of cost reduction and efficiency improvement.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A 12-inch wafer POLY furnace gas duct is made of stainless steel. The main body of the gas duct consists of three parts: an inlet pipe, a gas pipe connecting block, and an outlet pipe. The gas pipe connecting block is L-shaped, and the inlet pipe and the outlet pipe are welded to both ends of the gas pipe connecting block. The inlet pipe is inserted into the gas guide pipe mounting hole of the bottom flange of the POLY furnace tube and extends from the side wall of the flange for connecting the gas supply source; the outlet pipe is detachably connected to the vertical quartz gas guide pipe inside the furnace; the inner side of the L-shaped gas pipe connecting block fits against the L-shaped surface of the bottom flange of the POLY furnace tube.

[0006] Furthermore, the airway connecting block is provided with an L-shaped airway inside, the two ends of which are connected to the inlet pipe and the outlet pipe. The L-shaped airway, the inlet pipe, and the outlet pipe are all hollow cylinders.

[0007] Furthermore, the air duct has a variable diameter structure, with the inner diameter of the inlet pipe being larger than that of the outlet pipe.

[0008] Furthermore, the L-shaped airway of the tracheal connecting block has a variable diameter structure, with the diameter of the middle part of the L-shaped airway being larger than the inner diameter of the inlet and outlet pipes connected at both ends of the L-shaped airway.

[0009] Furthermore, the inlet pipe and outlet pipe are inserted into both ends of the L-shaped air passage of the air pipe connecting block and connected by welding. In this case, the vertical quartz air guide tube is inserted into the outer periphery of the outlet pipe and abuts against the end face of the air pipe connecting block on the outer periphery of the outlet pipe.

[0010] The advantages of this utility model are: The gas guide pipe of this 12-inch wafer POLY furnace has the characteristics of simple structure and convenient use. It can realize the rapid replacement of quartz gas guide pipe in POLY furnace, meet the requirement of replacing quartz gas guide pipe without cooling the furnace chamber, effectively extend the PM cycle of 12-inch POLY furnace, reduce the replacement frequency of furnace tube and related components, and achieve the purpose of cost reduction and efficiency improvement. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of a gas guide tube according to the present invention.

[0012] Figure 2 This is a cross-sectional schematic diagram of an air guide tube according to the present invention.

[0013] Figure 3 This is a schematic diagram of the structure of a gas tube connecting block in a gas duct according to the present invention.

[0014] Figure 4 This is a schematic diagram showing the installation position of the gas guide pipe of this utility model inside the POLY furnace.

[0015] Figure label: 1. Inlet pipe; 11. Inlet pipe duct; 2. Pipe connector; 21. L-shaped pipe duct connector; 3. Outlet pipe; 31. Outlet pipe duct; 4. Quartz gas guide pipe; 5. POLY furnace tube; 6. Flange. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but this does not imply any limitation on the scope of protection of the present invention.

[0017] like Figures 1 to 4As shown, the 12-inch wafer POLY furnace gas duct proposed in this utility model is made of stainless steel. The main body of the gas duct consists of three parts: an inlet pipe 1, a gas pipe connecting block 2, and an outlet pipe 3. These three parts are welded together as a whole. The gas duct has an L-shaped layout, and its overall shape is determined by the gas pipe connecting block 2, which is suitable for the application scenario. In the application scenario, the inlet pipe 1 is inserted into the gas duct mounting hole of the flange 6 at the bottom of the POLY furnace tube 5 and extends from the side wall of the flange 6 to connect to the gas supply source; the outlet pipe 3 is detachably connected to the vertical quartz gas duct 4 inside the furnace; the inner side of the L-shaped gas pipe connecting block 2 fits against the L-shaped surface of the bottom flange of the POLY furnace tube.

[0018] In a gas duct of this utility model, the gas duct connecting block 2 has an L-shaped air passage 21 inside. The two ends of the L-shaped air passage 21 are respectively connected to the air passage 11 of the inlet pipe 1 and the air passage 31 of the outlet pipe 3. The L-shaped air passage 21, along with the inlet pipe 1 and the outlet pipe 3, is designed as a hollow cylinder. The gas duct as a whole has a variable diameter structure, wherein the inner diameter of the inlet pipe 1 is larger than the inner diameter of the outlet pipe 3. The L-shaped air passage 21 of the gas duct connecting block 2 has a variable diameter structure, with the diameter of the middle portion of the L-shaped air passage 21 being larger than the diameter of the air passages of the inlet pipe 1 and the outlet pipe 3 connected at both ends of the L-shaped air passage. As a connection method, the inlet pipe 1 and the outlet pipe 3 can be inserted into the two ends of the L-shaped air passage of the gas duct connecting block and assembled by welding.

[0019] The present invention utilizes a venting tube in which the L-shaped portion of the original L-shaped quartz venting tube is removed and replaced with a vertical quartz venting tube 4. This venting tube replaces the L-shaped portion of the original L-shaped quartz venting tube, and the vertical quartz venting tube 4 is detachably installed on the outlet pipe 3 of the present invention's venting tube. As for the installation method between the vertical quartz venting tube 4 and the present invention's venting tube, it can be designed such that the inner diameter of the vertical quartz venting tube 4 is slightly larger than the outer diameter of the outlet pipe 3, and the outer diameter of the quartz venting tube 4 is approximately equal to the outer diameter of the air pipe connecting block 2. Therefore, the quartz venting tube 4 can be inserted into the outlet pipe 3, simultaneously abutting against the end face of the air pipe connecting block 2 located on the outer periphery of the outlet pipe 3.

[0020] In practical applications, the operation process of the 12-inch wafer POLY furnace gas pipe of this invention is as follows: Combination Figure 4As shown, the gas guide pipe of this invention is placed at the gas guide pipe mounting hole of the flange 6 at the bottom of the POLY furnace tube 5. The gas inlet pipe 1 of the gas guide pipe is inserted into the gas guide pipe mounting hole of the flange 6. The inner side of the L-shaped gas pipe connecting block 2 fits perfectly with the L-shaped surface of the flange 6. Overall, the gas inlet pipe 1 of the gas guide pipe extends to the outer side wall of the flange 6 and connects with the special gas stainless steel corrugated pipe threaded joint. In this way, the gas guide pipe of this invention is fixed to the bottom of the POLY furnace tube and cannot be easily disassembled. When the POLY furnace is working, the process special gas passes through the gas inlet pipe 1, gas pipe connecting block 2, and gas outlet pipe 3 of the 12-inch wafer POLY furnace gas guide pipe of this invention and enters the vertical quartz gas guide pipe 4, and then reaches the furnace chamber to react.

[0021] When the quartz gas duct becomes blocked during the processing of the POLY furnace, the automatic door of the POLY furnace can be opened to directly pull out the vertical quartz gas duct from the gas outlet pipe 3 and quickly install a new quartz gas duct. Practice has proven that when the POLY furnace does not cool down, under the premise of taking protective measures, the gas duct of this utility model can be used to quickly replace the blocked vertical quartz gas duct, extending the service life of quartz components such as the inner and outer tubes of the POLY furnace and the quartz boat. It can effectively extend the PM cycle of the 12-inch POLY furnace, reduce the replacement frequency of furnace tubes and related components, and achieve the goal of reducing costs and increasing efficiency while shortening downtime and improving the actual production capacity of the POLY process.

Claims

1. A gas duct for a 12-inch wafer POLY furnace, characterized in that, The air duct is made of stainless steel. The main body of the air duct consists of three parts: an air inlet pipe, an air duct connector block, and an air outlet pipe. The air duct connector block is L-shaped, and the air inlet pipe and the air outlet pipe are welded to both ends of the air duct connector block. The inlet pipe is inserted into the gas guide pipe mounting hole of the bottom flange of the POLY furnace tube and extends from the side wall of the flange for connecting the gas supply source; the outlet pipe is detachably connected to the vertical quartz gas guide pipe inside the furnace; the inner side of the L-shaped gas pipe connecting block fits against the L-shaped surface of the bottom flange of the POLY furnace tube.

2. The 12-inch wafer POLY furnace gas duct according to claim 1, characterized in that, The airway connecting block has an L-shaped airway inside, with the two ends of the L-shaped airway connecting the inlet pipe and the outlet pipe. The L-shaped airway, the inlet pipe, and the outlet pipe are all hollow cylinders.

3. The 12-inch wafer POLY furnace gas duct according to claim 1, characterized in that, The air duct has a variable diameter structure, with the inner diameter of the inlet pipe being larger than that of the outlet pipe.

4. The 12-inch wafer POLY furnace gas duct according to claim 3, characterized in that, The L-shaped airway of the tracheal connector block has a variable diameter structure, with the diameter of the middle part of the L-shaped airway being larger than the inner diameter of the inlet and outlet pipes connected at both ends of the L-shaped airway.

5. The 12-inch wafer POLY furnace gas duct according to claim 4, characterized in that, The air inlet pipe and air outlet pipe are inserted into both ends of the L-shaped air passage of the air pipe connecting block and connected by welding.

6. The 12-inch wafer POLY furnace gas duct according to claim 5, characterized in that, The vertical quartz air guide tube is inserted into the outer periphery of the air outlet tube and abuts against the end face of the air tube connecting block on the outer periphery of the air outlet tube.

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