Improved ald aluminum oxide wrap around improved aluminum boat device

Abstract

The utility model discloses an improve ALD aluminium oxide winding and plating improve aluminium boat device relates to solar cell manufacturing equipment technical field, include: aluminium boat frame. The utility model will two ends of two horizontal hollow strips, two vertical hollow strips upper end and two lower position limit strip both ends's positive rotation magnetic strip is from vertical negative pole positioning groove or horizontal negative pole positioning groove and is probed out, subsequently will two lower position limit strip along second connecting groove and slide, two vertical hollow strips along vertical groove direction and move, two horizontal hollow strips along first connecting groove and move, and vertical hollow strip drives corresponding upper position limit strip or mid -position limit strip and changes the interval before and after translation, and horizontal hollow strip drives corresponding upper position limit strip or mid -position limit strip and changes height vertical movement, until lower position limit strip, upper position limit strip and mid -position limit strip remove to the appropriate size, and positive rotation magnetic strip is transferred to corresponding vertical negative pole positioning groove or horizontal negative pole positioning groove and fixes its position, can make the device applicable to different size silicon wafer use, and greatly improve the applicability.

Description

Technical Field

[0001] This utility model relates to the field of solar cell manufacturing equipment technology, specifically to an improved aluminum boat device for ALD (Al2O3) aluminum oxide winding plating. Background Technology

[0002] Solar cells come in various types, including monocrystalline silicon solar cells, polycrystalline silicon solar cells, and thin-film solar cells. Among them, silicon wafers are the core semiconductor substrate of solar cells. The material types include monocrystalline silicon wafers and polycrystalline silicon wafers. As the carrier of the solar light absorption layer, the upper and lower surfaces need to undergo processes such as texturing, coating (anti-reflective coating Arc), and thin film deposition to improve efficiency. An aluminum boat is an aluminum alloy container or tray used for support, positioning, and heat conduction. It is often used in process scenarios that require vertical or positional placement. In silicon wafer manufacturing, aluminum boats are often used to provide stable mechanical support and maintain the positioning and alignment of silicon wafers. When the process involves coating, film deposition, or drying processes that require stable positioning and high temperature / cleanliness requirements, aluminum boats and their grooves / clamps are usually useful or necessary.

[0003] A document with publication number CN220468140U describes an improved ALD (Aluminum Dioxide) winding plating device for aluminum boats, comprising two side plates. One end of a side groove bar is connected to one of the side plates via a spring-loaded component. The side groove bar moves along its axial direction via the spring-loaded component, allowing it to switch between a first working condition and a second working condition. In the first working condition, the grooves on the upper groove bar, side groove bar, and lower groove bar are respectively and correspondingly arranged, and the side surface of the silicon wafer is flat. In the second working condition, the grooves on the side groove bar are translated relative to the grooves on the upper and lower groove bars, and the side surface of the silicon wafer is curved. This invention enables the silicon wafer to bend, resulting in a tighter fit between two silicon wafers in the same groove, ensuring winding thickness and area, and improving the yield rate.

[0004] The aluminum boat device disclosed above has very limited applicability because the positions and spacing of the upper slot bar, side slot bar, and lower slot bar are all fixed. Utility Model Content

[0005] The purpose of this invention is to provide an improved aluminum boat device for ALD (Al2O3) alumina winding plating, which solves the problem that traditional improved aluminum boat devices for ALD alumina winding plating have fixed positions and spacing of the upper groove bar, side groove bar and lower groove bar, so they can only be used for silicon wafers of a single size, resulting in very low applicability.

[0006] This utility model solves the above-mentioned technical problems through the following technical solution: This utility model provides an improved ALD (aluminum oxide) wrap-around plating device for aluminum boats, comprising: An aluminum boat frame includes a fixing plate, on both sides of which are fixed U-shaped frames. Connecting strips are fixed to the inner sides of both U-shaped frames. Vertical grooves are formed on both sides of the inner walls of both U-shaped frames. First connecting grooves are formed at the top of the inner walls of both U-shaped frames and at the top of the two connecting strips. Second connecting grooves are formed at the bottom of the inner walls of both U-shaped frames and at the bottom of the two connecting strips. Positioning holes are provided on the inner sides of the vertical grooves, the first connecting grooves, and the second connecting grooves. Vertical negative positioning grooves are provided at the top of both U-shaped frames and on one side of the two connecting strips. Horizontal negative positioning grooves are provided on one side of both U-shaped frames. A movable limiting component is disposed on the inner side of an aluminum boat frame. The movable limiting component includes two adjusting members, a support member disposed between the two adjusting members, and a limiting member for fixing the position of the adjusting members.

[0007] Preferably, the two adjusting members are respectively disposed on the inner side of the two U-shaped frames, and the adjusting members include two horizontal hollow strips that slide between the two vertical slots and two vertical hollow strips that slide between the two first connecting slots.

[0008] Preferably, elastic balls are provided at both ends of the two horizontal hollow strips and at both ends of the two vertical hollow strips, and the elastic balls are engaged in the corresponding positioning holes.

[0009] Preferably, the support member includes two upper limiting strips, two lower limiting strips, and two middle limiting strips. Both ends of the two upper limiting strips and both ends of the two middle limiting strips are fixed with through shafts, which pass through the inner side of the overlapping space of the horizontal hollow strips and the vertical hollow strips.

[0010] Preferably, one side of one of the transverse hollow strips has two hollow shells that slide together. The inner sides of the two hollow shells are each connected by a connecting rod. One end of each connecting rod extends to the outer side of the two hollow shells and is fixedly connected to the through shaft at one end of each of the two center limiting strips. The inner sides of the two hollow shells are each fixed with a spring.

[0011] Preferably, the limiting member includes a positive rotating magnetic strip, and one end of the positive rotating magnetic strip is fixed with a stop strip.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: The positive rotating magnetic strips at both ends of the two horizontal hollow strips, the upper ends of the two vertical hollow strips, and both ends of the two lower limiting strips are pulled out from the vertical negative positioning groove or the horizontal negative positioning groove. Then, the two lower limiting strips are slid along the second connecting groove in sequence, the two vertical hollow strips are moved along the vertical groove, and the two horizontal hollow strips are moved along the first connecting groove. The vertical hollow strips drive the corresponding upper limiting strips or middle limiting strips to move horizontally to change the front and rear distance, and the horizontal hollow strips drive the corresponding upper limiting strips or middle limiting strips to move vertically to change the height, until the lower limiting strips, upper limiting strips, and middle limiting strips are moved to the appropriate size. Then, the positive rotating magnetic strips are rotated to the corresponding vertical negative positioning grooves or horizontal negative positioning grooves and fixed in their positions. This device can be used for silicon wafers of different sizes, greatly improving its applicability. Attached Figure Description

[0013] Figure 1 This is the front view of the present invention; Figure 2 This is a cross-sectional view of the present invention; Figure 3 for Figure 2 Enlarged schematic diagram of part A in the middle.

[0014] Figure 4 for Figure 2 Enlarged schematic diagram of section B.

[0015] The numbers in the image represent: 1. Aluminum boat frame; 11. Fixing plate; 12. U-shaped frame; 13. Connecting strip; 14. Vertical groove; 15. First connecting groove; 16. Second connecting groove; 17. Positioning hole; 18. Vertical negative pole positioning groove; 19. Horizontal negative pole positioning groove; 2. Movable limiting component; 21. Horizontal hollow strip; 22. Vertical hollow strip; 23. Elastic ball; 24. Upper limiting strip; 25. Lower limiting strip; 26. Middle limiting strip; 27. Through shaft; 28. Hollow shell; 29. ​​Connecting rod; 210. Spring; 211. Positive pole rotating magnetic strip; 212. Abutment strip. Detailed Implementation

[0016] The above-mentioned and other technical features and advantages of this utility model will be described in more detail below with reference to the accompanying drawings.

[0017] This embodiment provides a technical solution: an apparatus for improving ALD (aluminum oxide) wrap-around plating and aluminum boats, such as... Figures 1-4As shown, the device includes an aluminum boat frame 1 and a movable limiting assembly 2. The aluminum boat frame 1 includes a fixing plate 11, with U-shaped frames 12 fixed to both sides of the fixing plate 11. Connecting strips 13 are fixed to the inner sides of both U-shaped frames 12. Vertical grooves 14 are formed on both sides of the inner walls of both U-shaped frames 12, and are positioned above the connecting strips 13. First connecting grooves 15 are formed at the top of the inner walls of both U-shaped frames 12 and at the top of both connecting strips 13. Second connecting grooves 16 are formed at the bottom of the inner walls of both U-shaped frames 12 and at the bottom of both connecting strips 13. The vertical grooves 14, first connecting grooves 15, and... The inner side of the second connecting groove 16 is provided with a row of equidistant positioning holes 17. The top of the two U-shaped frames 12 and one side of the two connecting strips 13 are provided with vertical negative positioning grooves 18. One side of the two U-shaped frames 12 is provided with horizontal negative positioning grooves 19. The positions of the vertical negative positioning grooves 18 and the horizontal negative positioning grooves 19 correspond to the positions of the positioning holes 17 and are equal in number. Scale lines are set on the positions of the vertical negative positioning grooves 18 and the horizontal negative positioning grooves 19 on the U-shaped frames 12. The accuracy of the adjustment spacing of the support can be determined according to the dimensions marked on the scale lines.

[0018] The movable limiting component 2 is disposed on the inner side of the aluminum boat frame 1. The movable limiting component 2 includes two adjusting components, a support component disposed between the two adjusting components, and a limiting component for fixing the position of the adjusting components. The two adjusting components are respectively disposed on the inner side of the two U-shaped frames 12. The adjusting components include two horizontal hollow strips 21 that slide between the two vertical grooves 14 and two vertical hollow strips 22 that slide between the two first connecting grooves 15. There are four overlapping points between the two horizontal hollow strips 21 and the two vertical hollow strips 22. Both ends of the two horizontal hollow strips 21 and both ends of the two vertical hollow strips 22 are provided with elastic balls 23 whose size is adapted to the positioning holes 17. The elastic balls 23 are locked in the corresponding positioning holes 17.

[0019] The support includes two upper limiting strips 24, two lower limiting strips 25, and two middle limiting strips 26. Each of the middle limiting strips 26, upper limiting strips 24, and lower limiting strips 25 has a slot for positioning the silicon wafer. The slots on the upper limiting strips 24 and lower limiting strips 25 are vertically aligned. The two ends of the two lower limiting strips 25 slide within the two second connecting grooves 16, and the portions of the two lower limiting strips 25 that slide within the second connecting grooves 16 are provided with elastically variable hemispheres similar to elastic balls 23, which are engaged in the second connecting grooves 16. In the positioning hole 17 of 6, the two ends of the two upper limiting strips 24 and the two ends of the two middle limiting strips 26 are all fixed with through shafts 27. The two upper limiting strips 24 and the two middle limiting strips 26 are arranged in parallel to each other and are all parallel to the fixing plate 11. When parallel, the through shafts 27 at both ends are respectively inserted into the overlapping space of the corresponding horizontal hollow strips 21 and vertical hollow strips 22. The through shafts 27 at both ends of the two middle limiting strips 26 are slightly longer to facilitate their straight movement in the overlapping space of the horizontal hollow strips 21 and vertical hollow strips 22.

[0020] Two hollow shells 28 slide on one side of one of the transverse hollow bars 21. Connecting rods 29 slide on the inner side of each hollow shell 28. One end of each connecting rod 29 extends to the outer side of the two hollow shells 28 and is fixedly connected to the through shafts 27 at one end of each of the two center limiting bars 26. Springs 210 are fixed on the inner side of each hollow shell 28. When the springs 210 are at their original length, the slots on the center limiting bar 26, the upper limiting bar 24, and the lower limiting bar 25 are interleaved.

[0021] The limiting components include a positive pole rotating magnetic strip 211, one end of which is fixed with a stop strip 212. Limiting components are provided at both ends of the two horizontal hollow strips 21, the upper ends of the two vertical hollow strips 22, and both ends of the two lower limiting strips 25.

[0022] In use: First, pull the middle limiting strip 26 towards the direction where the hollow shell 28 is not set. When the middle limiting strip 26 is pulled, it will squeeze the spring 210 through the connecting rod 29 until the middle limiting strip 26 can no longer be pulled. At this time, the slots on the upper limiting strip 24, the middle limiting strip 26 and the lower limiting strip 25 will overlap one by one. Insert the dual silicon wafers from top to bottom between the upper limiting strip 24, the middle limiting strip 26 and the lower limiting strip 25. Release the middle limiting strip 26. Under the pull of the spring 210, the middle limiting strip 26 can move horizontally. When moving horizontally, the slots on the middle limiting strip 26 will tightly abut the dual silicon wafers located in the same slot, so that the dual silicon wafers are close together without gaps.

[0023] For silicon wafers of different sizes, the device can be adjusted to a suitable operating range. First, the positive rotating magnetic strip 211 in the limiting members at both ends of the two horizontal hollow strips 21, the upper ends of the two vertical hollow strips 22, and the two lower limiting strips 25 can be pulled out from the corresponding locked vertical negative positioning groove 18 or horizontal negative positioning groove 19. When the positive rotating magnetic strip 211 is pulled out, it deflects. When it deflects, it passes through one end of the abutment strip 212 and the horizontal hollow strips 21, vertical hollow strips 22, and lower limiting strips 25. The abutting of the sidewalls of the position limiting strip 25 restricts the rotation angle of the positive rotating magnetic strip 211. Subsequently, the two lower position limiting strips 25 can be slid along the extension direction of the second connecting groove 16, the two vertical hollow strips 22 can be moved along the direction of the vertical groove 14, and the two horizontal hollow strips 21 can be moved along the direction of the first connecting groove 15. After moving to the appropriate position, the position is fixed by the limiting member. When the two lower position limiting strips 25, the two vertical hollow strips 22, and the two horizontal hollow strips 21 move, they will respectively bring The positive rotating magnetic strip 211 and the elastic ball 23 connected to it move. When the elastic ball 23 moves, it will get into the positioning holes 17 at different positions. The pause formed by the elastic ball 23 getting into the positioning holes 17 helps the positive rotating magnetic strip 211 and the horizontal negative positioning groove 19 or vertical negative positioning groove 18 at different positions to align. When the vertical hollow strip 22 slides, it will drive the upper limiting strip 24 or the middle limiting strip 26 corresponding to the through shaft 27 to move horizontally and change the spacing in the front and back directions. When the horizontal hollow strip 21 slides, it will drive the upper limiting strip 24 or the middle limiting strip 26 corresponding to the through shaft 27 to move vertically and change its height until the lower limiting strip 25, the two vertical hollow strips 22 and the two horizontal hollow strips 21 drive the upper limiting strip 24 and the middle limiting strip 26 to a suitable size. Then, the positive rotating magnetic strip 211 is rotated to the corresponding vertical negative positioning groove 18 or the horizontal negative positioning groove 19 to fix its position. This allows the device to be used with silicon wafers of different sizes.

[0024] The above description is merely a preferred embodiment of the present utility model and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present utility model, all of which will fall within the protection scope of the present utility model.

Claims

1. A device for improving ALD (alumina winding plating) aluminum boat, characterized in that, include: An aluminum boat frame (1) includes a fixing plate (11). Two U-shaped frames (12) are fixed to both sides of the fixing plate (11). Connecting strips (13) are fixed to the inner sides of both U-shaped frames (12). Vertical grooves (14) are provided on both sides of the inner walls of both U-shaped frames (12). First connecting grooves (15) are provided at the top of the inner walls of both U-shaped frames (12) and at the top of both connecting strips (13). The bottom of the inner wall of the frame (12) and the bottom of the two connecting strips (13) are provided with second connecting grooves (16). The inner sides of the vertical groove (14), the first connecting groove (15) and the second connecting groove (16) are provided with positioning holes (17). The top of the two square frames (12) and one side of the two connecting strips (13) are provided with vertical negative pole positioning grooves (18). The one side of the two square frames (12) is provided with horizontal negative pole positioning grooves (19). The movable limiting component (2) is disposed on the inner side of the aluminum boat frame (1). The movable limiting component (2) includes two adjusting members, a support member disposed between the two adjusting members, and a limiting member for fixing the position of the adjusting members.

2. The apparatus for improving ALD alumina winding plating and improving aluminum boat as described in claim 1, characterized in that, The two adjusting components are respectively disposed on the inner side of the two U-shaped frames (12). The adjusting components include two horizontal hollow strips (21) that slide between the two vertical grooves (14) and two vertical hollow strips (22) that slide between the two first connecting grooves (15).

3. The apparatus for improving ALD alumina winding plating and improving aluminum boat as described in claim 2, characterized in that, Both ends of the two horizontal hollow strips (21) and both ends of the two vertical hollow strips (22) are provided with elastic balls (23), and the elastic balls (23) are locked in the corresponding positioning holes (17).

4. The apparatus for improving ALD alumina winding plating and improving aluminum boat as described in claim 3, characterized in that, The support includes two upper limiting strips (24), two lower limiting strips (25) and two middle limiting strips (26). The two ends of the lower limiting strips (25) slide inside the two second connecting grooves (16). The two ends of the two upper limiting strips (24) and the two ends of the two middle limiting strips (26) are fixed with through shafts (27). The through shafts (27) pass through the overlapping space of the horizontal hollow strip (21) and the vertical hollow strip (22).

5. The apparatus for improving ALD alumina winding plating and improving aluminum boat as described in claim 4, characterized in that, Two hollow shells (28) slide on one side of one of the transverse hollow strips (21). A connecting rod (29) slides on the inner side of each of the two hollow shells (28). One end of each connecting rod (29) extends to the outer side of the two hollow shells (28) and is fixedly connected to the through shaft (27) at one end of each of the two center limiting strips (26). A spring (210) is fixed on the inner side of each of the two hollow shells (28).

6. The apparatus for improving ALD alumina winding plating and improving aluminum boat as described in claim 1, characterized in that, The limiting component includes a positive pole rotating magnetic strip (211), and a stop strip (212) is fixed to one end of the positive pole rotating magnetic strip (211).

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