Boat structure and coating apparatus

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a coating equipment, which solves the problem of point printing of a sheet clamped in the boat structure in the related art. The boat structure comprises a plurality of boat pages arranged at intervals along a first direction, and adjacent two boat pages are insulated from each other. The plurality of boat pages are arranged at intervals along the first direction to form a plurality of groups of boat pages, and each group of boat pages corresponds to a group of sheets. In the corresponding group of boat pages and the group of sheets, each boat page comprises a plurality of protrusions arranged at intervals along a second direction, and adjacent two protrusions have a gap therebetween. The gaps of the plurality of boat pages are arranged one by one in the first direction, each sheet can be inserted into the corresponding plurality of gaps, and the boat pages and the sheets are insulated. The boat structure and the coating equipment provided by the present disclosure can avoid point printing on the surface of the sheet in the coating process, and improve the uniformity of coating.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and coating equipment. Background Technology

[0002] In the production process of solar cells, a typical step is to coat the surface of silicon wafers. Plasma-enhanced chemical vapor deposition (PECVD) equipment is widely used as a process for coating silicon wafer surfaces. During coating, the silicon wafer is first inserted into the gaps between the blades of a boat structure and fixed to the surface of the blades using locking points. Then, the boat structure carrying the silicon wafer is placed inside the PECVD equipment to coat the silicon wafer surface. However, during the coating process, it has been found that locking marks appear at the corresponding locking point locations on the silicon wafer, affecting the uniformity of the coating on the silicon wafer surface. Utility Model Content

[0003] In view of this, the present disclosure provides a boat structure and a coating equipment to solve the problem of stuck marks appearing on sheets that are stuck in the boat structure after coating in the related art.

[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to support a sheet extending along a first direction. Multiple sheets are spaced apart along a second direction to form a sheet group. The first and second directions are perpendicular. The boat structure includes: multiple boat blades spaced apart along the first direction, with adjacent boat blades insulated from each other. Any two adjacent boat blades are configured to have opposite polarities. The multiple boat blades are spaced apart along the first direction to form multiple boat blade groups, each boat blade group corresponding to a sheet group. In the corresponding boat blade group and sheet group, each boat blade includes multiple protrusions spaced apart along the second direction, with gaps between adjacent protrusions. The gaps between the multiple boat blades are correspondingly arranged one-to-one in the first direction. Each sheet can be inserted into the corresponding multiple gaps, and the boat blades are insulated from the sheet.

[0005] In some embodiments, multiple sheets of each sheet group are carried on a carrier assembly configured to be insulated from the corresponding boat sheet group, and the sheets in the carried sheet group can be inserted into the corresponding multiple gaps without contact between the sheets and the boat sheet.

[0006] In some embodiments, the distance between adjacent boat-shaped groups is greater than or equal to the distance between two adjacent protrusions in the boat-shaped group.

[0007] In some embodiments, along the first direction, the distance between adjacent planks is between 10 mm and 12 mm; and / or, along the second direction, the distance between adjacent protrusions in each plank group is between 4 mm and 8 mm; and / or, when the sheet is inserted into the gap between adjacent protrusions, along the second direction, the sheet is located at the center of symmetry of the two protrusions.

[0008] In some embodiments, it further includes a first insulating connector, a first insulating connector insulating connection carrier assembly and a plurality of boats, or a first insulating connector insulating connection sheet and a plurality of boats.

[0009] In some embodiments, each boat sheet group includes: a first boat sheet subgroup, including a plurality of first boat sheets and a first conductive connector arranged at intervals along a first direction, the first conductive connector being conductively connected to the plurality of first boat sheets; a second boat sheet subgroup, including a plurality of second boat sheets and a second conductive connector arranged at intervals along the first direction, the second conductive connector being conductively connected to the plurality of second boat sheets, the plurality of first boat sheets and the plurality of second boat sheets being alternately arranged in the first direction, and the protrusions of the alternately arranged first boat sheets and the protrusions of the second boat sheets corresponding one-to-one in the first direction, the first conductive connector being insulated from the second boat sheets, and the second conductive connector being insulated from the first boat sheets.

[0010] In some embodiments, the first boat leaf assembly further includes: a plurality of first boat feet, respectively connected to the bottom of the plurality of first boat leaves, and a first conductive connector connected to the plurality of first boat feet; the second boat leaf assembly further includes: a plurality of second boat feet, respectively connected to the bottom of the plurality of second boat leaves, and a second conductive connector connected to the plurality of second boat feet; wherein, when the plurality of first boat leaves and the plurality of second boat leaves are arranged alternately, along the second direction, the first boat feet and the second boat feet are respectively disposed at the bottom of both sides of the boat leaves.

[0011] In some embodiments, the device further includes: a carrier plate extending along a first direction, the carrier plate being configured to carry multiple sets of boat blades, a first conductive connector and a second conductive connector being in contact with the carrier plate, and the carrier plate being configured as an insulating element.

[0012] In some embodiments, the device further includes: a first electrode group electrically connected to a first conductive connector; and a second electrode group electrically connected to a second conductive connector, wherein the polarities of the first electrode group and the second electrode group are opposite.

[0013] Secondly, embodiments of this disclosure also provide a coating apparatus, comprising: a boat structure as described above, the boat structure being configured to carry a plurality of sheets; and a furnace body having a furnace cavity, the furnace cavity being configured to accommodate the boat structure carrying the sheets.

[0014] This disclosure provides a boat structure and coating equipment. In each corresponding boat sheet group and sheet group, the boat sheets are divided into multiple protrusions arranged at intervals, with gaps between the protrusions. The gaps between the boat sheets correspond one-to-one in a first direction, allowing the sheet to be inserted into the corresponding gap. At this time, the extension direction of the sheet is perpendicular to the extension direction of the boat sheet, and the sheet is insulated from the boat sheet. During the coating process, since adjacent boat sheets are configured with opposite polarities, one of the corresponding protrusions of the two boat sheets with opposite polarities acts as the positive electrode and the other as the negative electrode to ionize the gas between them into plasma. The plasma then dissipates to the coating surface of the adjacent sheet. Therefore, in the boat structure of this disclosure, the sheet does not act as any electrode in the plasma reaction; it is ionized only through two boat sheets of different polarities (specifically, two protrusions of different polarities). The ionized plasma dissipates to the coating surface of the adjacent sheet, thereby reducing or even avoiding the occurrence of puncture marks and improving the uniformity of the coating on the sheet surface.

[0015] In addition, by setting multiple protrusions, each sheet can be inserted into the corresponding gap and insulated from the boat, and both sides of the sheet in the second direction can be coated as the surface to be coated. When the sheet is a single solar cell, double-sided coating can be achieved, and when the sheet is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, thus improving coating efficiency. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure.

[0018] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0019] Figure 3 for Figure 2 A magnified view of part A in the boat structure shown.

[0020] Figure 4 The diagram shown is a schematic diagram of a carrier component provided in an embodiment of this disclosure.

[0021] Figure 5 The image shown is a front view of a carrier component provided in an embodiment of this disclosure.

[0022] Figure 6 The image shown is a front view of the boat structure and load-bearing components provided in an embodiment of this disclosure.

[0023] Figure 7 The image shown is a front view of a boat structure provided in an embodiment of this disclosure.

[0024] Figure 8 The image shown is a left view of the boat structure and the supporting components provided in an embodiment of this disclosure.

[0025] Figure 9 The diagram shown is a schematic diagram of the first boat leaf group in a boat structure provided in an embodiment of this disclosure.

[0026] Figure 10 The diagram shown is a schematic diagram of the second boat leaf group in a boat structure provided in an embodiment of this disclosure.

[0027] Figure 11 The diagram shown is a schematic diagram of the carrier plate in a boat structure provided in an embodiment of this disclosure.

[0028] Figure 12 The image shown is a top view of the boat structure and load-bearing components provided in an embodiment of this disclosure.

[0029] Figure 13 for Figure 12 A magnified view of part B in the boat structure shown.

[0030] Figure 14 for Figure 13 A magnified view of part C in the boat structure shown.

[0031] Figure label: 100. Coating equipment; 10. Boat structure; 1. Boat blade; 1a. Boat blade assembly; 11a. First boat blade sub-assembly; 11b. Second boat blade sub-assembly; 1N. First boat blade; 1M. Second boat blade; 11. Protrusion; 111. Gap; 12. First boat foot; 13. First conductive connector; 14. Second boat foot; 15. Second conductive connector; 2. Bearing assembly; 21. Support plate; 22. Bearing rod; 221. Slot; 3. Carrier plate; 31. First carrier plate; 311. First support bar; 32. Second carrier plate; 321. Second support bar; 33. Connecting plate; 4. Electrode assembly; 41. First electrode group; 42. Second electrode group; 20. Furnace body; 201. Furnace cavity; 202. Furnace opening; 30. Sheet; 30a. Sheet group; X. First direction; Y. Second direction; Z. Vertical direction. Detailed Implementation

[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0033] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 3 for Figure 2 A magnified view of part A in the boat structure shown. Figure 4 The diagram shown is a schematic diagram of a carrier component provided in an embodiment of this disclosure. Figure 5 The image shown is a front view of a carrier component provided in an embodiment of this disclosure. Figure 6 The image shown is a front view of the boat structure and load-bearing components provided in an embodiment of this disclosure. Figure 7 The image shown is a front view of a boat structure provided in an embodiment of this disclosure. Figure 8 The image shown is a left view of the boat structure and supporting components provided in an embodiment of this disclosure. Arrow X points to a first direction, arrow Y points to a second direction, and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other.

[0034] This disclosure provides a boat structure, such as Figures 1 to 8 The boat structure 10 is used in the coating equipment 100. The boat structure 10 is configured to carry the sheet 30, and the coating equipment 100 is configured to process the sheet 30 in the boat structure 10.

[0035] It is understood that the coating equipment 100 can be a PECVD equipment, which includes a furnace body 20 having at least one furnace opening 202. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening 202, and a boat structure 10 carrying a sheet 30 can enter and exit the furnace cavity 201 from the furnace opening 202. In the furnace cavity 201, at least one surface of the sheet 30 carried in the boat structure 10 is coated with one or more layers of film. The specific structure of the coating equipment 100 will not be described in detail.

[0036] Optionally, the sheet 30 can be a solar cell, also known as a silicon wafer. The solar cell has a surface to be coated on at least one side in the thickness direction. The sheet 30, carried in the boat structure 10, can be coated by the dissipated plasma in a PECVD equipment. The shape of the sheet 30 can be, for example, rectangular, square, or circular, and is not specifically limited.

[0037] It is understandable that each sheet 30 can be a single solar cell, with both sides of the single solar cell in the second direction Y serving as the coating surfaces to be coated, so as to perform double-sided coating on the single solar cell. Alternatively, each sheet 30 can be two solar cells stacked back to back in the second direction Y, with the opposing surfaces of the two solar cells serving as the coating surfaces to be coated, so as to perform single-sided coating on the two opposing solar cells simultaneously.

[0038] like Figure 3 and Figure 7 The boat structure 10 includes multiple boat blades 1, which are arranged at intervals along the first direction X. It can be understood that the boat blades 1 can be configured as planar plate-like structures extending along the planes containing the second direction Y and the vertical direction Z. The specific shape and size of the boat blades 1 can be adaptively adjusted according to the number of sheets 30 to be supported and the space they can occupy, without being specifically limited.

[0039] Alternatively, the boat leaf 1 can be made of a high-temperature resistant and conductive material, such as graphite.

[0040] Existing graphite boats often insert sheet 30 into the gap between adjacent boat blades 1 in the boat structure 10, and fix sheet 30 to the surface of boat blade 1 by locking points. At this time, sheet 30 is electrically connected to graphite boat. Since the locking points block the coated side of sheet 30, and sheet 30 acts as the positive (or negative) electrode of plasma reaction, while boat blade 1, which is spaced apart from and opposite to sheet 30, acts as the negative (or positive) electrode, most of the plasma and active groups bombard the surface of sheet 30 uniformly and vertically, causing locking point marks to easily appear on the part of sheet 30 blocked by the locking points.

[0041] To address the aforementioned problems, the boat structure 10 provided in this disclosure includes a plurality of boat blades 1 spaced apart along a first direction X. Adjacent boat blades 1 are insulated from each other, and any two adjacent boat blades 1 are configured to have opposite polarities. Sheets 30 extend along the first direction X, and a plurality of sheets 30 are spaced apart along a second direction Y to form a sheet group 30a. A plurality of boat blades 1 are spaced apart along the first direction X to form multiple groups of boat blade groups 1a, each boat blade group 1a corresponding to a sheet group 30a. In the corresponding boat blade group 1a and sheet group 30a, each boat blade 1 includes a plurality of protrusions 11 spaced apart along the second direction Y. Adjacent protrusions 11 have gaps 111 between them. The gaps 111 of the plurality of boat blades 1 are arranged one-to-one in the first direction X, and each sheet 30 can be inserted into the corresponding plurality of gaps 111. The boat blades 1 are insulated from the sheets 30. Since the two adjacent leaf blades 1 have opposite polarities, there is a gap between the two adjacent leaf blades 1 and no electrical connection is made, thus ensuring that the two adjacent leaf blades 1 are insulated from each other.

[0042] The boat structure disclosed herein, in each corresponding boat blade group 1a and sheet group 30a, divides the boat blade 1 into a plurality of spaced protrusions 11, with gaps 111 between the plurality of protrusions 111. The gaps 111 of the plurality of boat blades 1 correspond one-to-one in the first direction X. The sheet 30 can be inserted into the corresponding gap 111. At this time, the extension direction of the sheet 30 is perpendicular to the extension direction of the boat blade 1, and the sheet 30 is insulated from the boat blade 1. During the coating process, since two adjacent boat blades 1 are configured to have opposite polarities, one of the two corresponding protrusions 11 of the two boat blades with opposite polarities acts as a positive electrode and the other as a negative electrode to ionize the gas between them into plasma. The plasma dissipates to the surface of the adjacent sheet 30 to be coated. Therefore, in the boat structure 10 of this disclosure, the sheet 30 does not serve as any pole of the plasma reaction, but is ionized only through two boat blades 1 of different polarities (specifically two protrusions 11 of different polarities). The ionized plasma dissipates to the surface of the sheet 30 to be coated, thereby reducing or even avoiding the occurrence of puncture marks, and thus improving the uniformity of the coating on the surface of the sheet 30.

[0043] In addition, by providing multiple protrusions 11, each sheet 30 can be inserted into the corresponding gap 111 and insulated from the leaf 1. Both sides of the sheet 30 in the second direction Y can be coated as the surface to be coated. When the sheet 30 is a single solar cell, double-sided coating can be achieved. When the sheet 30 is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, thus improving coating efficiency.

[0044] In some alternative embodiments, the boat structure 10 includes a first insulating connector that provides an insulating connection between the sheet 30 and the boat 1 when the sheet 30 is inserted into the corresponding plurality of gaps 111. For example, the first insulating connector may be disposed at the bottom of each gap 111 in the boat 1, specifically as an insulating tooth disposed at the bottom of the gap 111. The edge of the sheet 30 can be engaged with the insulating tooth so that the sheet 30 can be confined within the gap 111 and there is no contact between the sheet 30 and the boat 1. The sheet 30 is fixed without being obstructed from the surface to be coated.

[0045] In other alternative embodiments, such as Figures 3 to 6 Multiple sheets 30 in each sheet group 30a can be pre-supported by the support component 2, and then the multiple sheets 30 in the sheet group 30a can be inserted into the gaps 111 in the corresponding boat sheet group 1a through the cooperation of the support component 2 and the boat structure 10.

[0046] Specifically, multiple sheets 30 in each sheet group 30a are supported by a support component 2, and the supported sheets 30 are arranged at intervals along the second direction Y, while the sheets 30 extend along the first direction X. The support component 2 is configured to be insulated from the corresponding leaf group 1a, allowing the sheets 30 in the supported sheet group 30a to be inserted into the corresponding gaps 111 without contact between the sheets 30 and the leaf 1. Through the insulated connection between the support component 2 and the multiple leaf 1s, the sheets 30, after being inserted into the gaps 111, can be suspended within the gaps 111 without contacting the protrusions 11 of the leaf 1, thus preventing the surface of the sheets 30 to be coated from being obstructed and avoiding jamming. In addition, by first carrying multiple sheets 30 in sheet group 30a onto the support component 2, and then through the insulated cooperation between the support component 2 and the corresponding leaf group 1a, multiple sheets 30 can be inserted into the corresponding multiple gaps 111 respectively, thereby improving the loading and unloading efficiency of the sheets 30.

[0047] It is understood that among the multiple sheets 30 arranged at intervals along the second direction Y carried by the carrier component 2, each sheet 30 can be a single solar cell. Whether each sheet 30 carried by the carrier component 2 is a single solar cell or two stacked solar cells can be adaptively adjusted according to actual needs and is not specifically limited. Through the insulating cooperation between the carrier component 2 and the multiple boats 1, each sheet 30 can be inserted into the gap 111, and the sheet 30 has no contact with the boats 1. Both sides of the sheet 30 in the second direction Y serve as the surface to be coated. When the sheet 30 is a single solar cell, double-sided coating can be achieved. When the sheet 30 is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, improving coating efficiency.

[0048] More specifically, the load-bearing assembly 2 includes two support plates 21 and a load-bearing rod 22. The two support plates 21 are spaced apart along the second direction Y. The load-bearing rod 22 connects the two support plates 21. One end of the sheet 30 is connected to the load-bearing rod 22 to support the sheet 30. The support plates 21 and the load-bearing rod 22 are insulating components.

[0049] The number of support rods 22 can be one or two, and they are disposed at the bottom of one end of the sheet 30 to support the sheet 30. Alternatively, there can be multiple support rods 22, which enclose a support space configured to support the sheet 30. For example, the support plate 21 can be a square plate structure, and four support rods 22 can be disposed at the four corners of the square plate. Multiple slots 221 are provided on the side of the support rod 22 facing the support space, and these slots 221 are spaced apart along the extension direction of the support rod 22 to engage the sheet 30, thus confining the sheet 30 within the support space.

[0050] Optionally, the size and shape of the bearing space enclosed by the multiple bearing rods 22 can be adaptively adjusted according to the shape and size of the sheet 30 being supported, without being specifically limited. Similarly, the shape and size of the support plate 21, as well as the number of bearing rods 22 and their arrangement on the support plate 21, can also be adaptively adjusted according to the shape and size of the sheet 30 being supported, without being specifically limited.

[0051] Understandably, when multiple sheets 30 are snapped into the slots 221 of the support rods 22, a sheet 30 can be snapped into each slot 221 at intervals of one or more, to adjust the spacing of the supported sheets 30 in the second direction Y. The spacing of the multiple sheets 30 in the sheet group 30a supported by the support assembly 2 in the second direction Y needs to be adaptively adjusted according to the width of the protrusions 11 on the leaf 1 in the second direction Y and the gaps 111 provided between adjacent protrusions 11, so that when the support assembly 2 is insulated from the multiple leaf 1s of the leaf group 1a, the multiple sheets 30 can be inserted into the gaps 111 one by one, and the multiple support rods 22 can be accommodated in the gaps between adjacent leaf 1s to avoid interference between the sheets 30, the protrusions 11 and the support rods 22.

[0052] It should be emphasized that the length of the bearing component 2 in the second direction Y, the number of slots 221 on the bearing rod 22, the spacing, etc. can be adaptively adjusted according to the number and spacing of the sheet 30 to be supported, and no specific limitation is made.

[0053] Optionally, when the carrier component 2 is insulated from the leaf assembly 1a, the carrier component 2 itself can be configured as an insulating element that is insulated from the multiple leaf blades 1 of the leaf assembly 1a. For example, the support plate 21 can be configured as an insulating element, and the carrier rod 22 can be configured as an insulating element. Alternatively, the contact positions between the carrier component 2 and the multiple leaf blades 1 can be separated by providing a first insulating connector. The specific configuration can be adapted according to actual needs and is not specifically limited.

[0054] In some alternative embodiments, such as Figure 3 , Figures 6 to 8 Along the first direction X, the distance between adjacent boat leaf groups 1a is greater than or equal to the gap 111 between adjacent protrusions 11 in the boat leaf 1, which facilitates the position identification of each boat leaf group 1a and the alignment of the boat leaf group 1a with the support component 2, thereby facilitating the automatic control of the cooperation or discooperation between the support component 2 and each boat leaf group 1a.

[0055] Optionally, the multiple boats 1 in each boat group 1a can be arranged at equal intervals or at non-equal intervals along the second direction Y, but at least it must be ensured that when the sheet 30 is inserted into the gap 111, the interval between adjacent boats 1 is sufficient to allow the support rod 22 of the support assembly 2 to enter from top to bottom and be accommodated in the interval position, without specific limitation.

[0056] Figure 9 The diagram shown is a schematic diagram of the first boat leaf group in a boat structure provided in an embodiment of this disclosure. Figure 10 The diagram shown is a schematic diagram of the second boat leaf group in a boat structure provided in an embodiment of this disclosure. Figure 11 The diagram shown is a schematic diagram of the carrier plate in a boat structure provided in an embodiment of this disclosure. Figure 12 The image shown is a top view of the boat structure and load-bearing components provided in an embodiment of this disclosure. Figure 13 for Figure 12 A magnified view of part B in the boat structure shown. Figure 14 for Figure 13 A magnified view of part C in the boat structure shown.

[0057] In some embodiments, such as Figure 3 , Figure 9 , Figure 10 and Figure 14 Each leaf group 1a includes a first leaf subgroup 11a and a second leaf group 11b. The first leaf group 11a includes a plurality of first leaf 1Ns arranged at intervals along a first direction X and a first conductive connector 13. The first conductive connector 13 is conductively connected to the plurality of first leaf 1Ns. The second leaf group 11b includes a plurality of second leaf 1Ms arranged at intervals along a first direction X and a second conductive connector 15. The second conductive connector 15 is conductively connected to the plurality of second leaf 1Ms. The plurality of first leaf 1Ns and the plurality of second leaf 1Ms are arranged alternately in the first direction X, and the protrusions 11 of the alternately arranged first leaf 1Ns and the protrusions 11 of the second leaf 1Ms correspond one-to-one in the first direction X. The first conductive connector 13 is insulated from the second leaf 1Ms, and the second conductive connector 15 is insulated from the first leaf 1Ns. By pre-fabricating multiple first boat sheets 1N and first conductive connectors 13 electrically connecting the multiple first boat sheets 1N to form a first boat sheet sub-group 11a, and by pre-fabricating multiple second boat sheets 1M and second conductive connectors 15 electrically connecting the multiple second boat sheets 1M to form a second boat sheet sub-group 11b, the first boat sheet sub-group 11a and the second boat sheet sub-group 11b are then combined, such that the first boat sheets 1N and the second boat sheets 1M are alternately arranged along the first direction X, and the first conductive connectors 13 are insulated from the second boat sheets 1M, and the second conductive connectors 15 are insulated from the first boat sheets 1N. This improves the assembly efficiency of the boat sheet sub-group 1a, facilitates the control of the spacing between adjacent boat sheets 1, and improves the alignment accuracy of the corresponding gaps 111 among the multiple boat sheets 1.

[0058] In some alternative embodiments, such as Figure 3 , Figure 7 , Figure 9 and Figure 11 The boat structure 10 also includes a carrier plate 3, which extends along a first direction X. The carrier plate 3 is configured to support multiple sets of boat blades 1a and is configured as an insulating element.

[0059] Specifically, the first boat leaf assembly 11a further includes multiple first boat feet 12, which are respectively connected to the bottom of multiple first boat leaves 1N. A first conductive connector 13 is connected to the multiple first boat feet 12. The second boat leaf assembly 11b further includes multiple second boat feet 14, which are respectively connected to the bottom of multiple second boat leaves 1M. A second conductive connector 15 is connected to the multiple second boat feet 14. When the multiple first boat leaves 1N and multiple second boat leaves 1M are arranged alternately, along the second direction Y, the first boat feet 12 and the second boat feet 14 are respectively located at the bottom of both sides of the boat leaf 1. The boat feet provide support for the boat leaf 1, allowing it to be stably placed on the carrier plate 3.

[0060] More specifically, the carrier plate 3 includes a first carrier plate 31 and a second carrier plate 32 spaced apart along the second direction Y. Both the first carrier plate 31 and the second carrier plate 32 are configured as insulating elements. The first carrier plate 31 and the second carrier plate 32 extend along the first direction X and are connected by a connecting plate 33. When the boat assembly 1a is placed on the carrier plate 3, the first boat foot 12 is placed on the first carrier plate 31 and the second boat foot 14 is placed on the second carrier plate 32 to support the first boat assembly 11a and the second boat assembly 11b, respectively.

[0061] Optionally, a first support bar 311 is provided on the first carrier plate 31, and a second support bar 321 is provided on the second carrier plate 32. Both the first support bar 311 and the second support bar 321 are set as insulating parts. When the boat assembly 1a is placed on the carrier plate 3, the first support bar 311 does not interfere with the first boat foot 12, and the first support bar 311 is configured to support the second boat 1M; the second support bar 321 does not interfere with the second boat foot 14, and the second support bar 321 is configured to support the first boat 1N. This solves the problem that the boat 1 is easy to shake due to the boat foot being set on one side in the boat sub-assembly, and improves the stability of the placed boat assembly 1a.

[0062] Optionally, along the vertical direction Z, the first conductive connector 13 is disposed on the side of the first boat foot 12 away from the first boat leaf 1N, and the second conductive connector 15 is disposed on the side of the second boat foot 14 away from the second boat leaf 1M. When the boat leaf assembly 1a is placed on the carrier plate 3, the first conductive connector 13 contacts the first carrier plate 31, and the second conductive connector 15 contacts the second carrier plate 32, so that the first conductive connector 13 and the second conductive connector 15 can act as support members to support the boat leaf assembly 1a, thereby improving the support stability.

[0063] It is understandable that the first conductive connector 13 and the second conductive connector 15 can be configured as elongated planar plate structures extending along the first direction X, in order to increase the contact area with the carrier plate 3 and further enhance the support stability of the boat assembly 1a.

[0064] Optionally, the plurality of first boats 1N, the plurality of first boat feet 12, and the first conductive connector 13 in the first boat leaf group 11a can be made of the same conductive material, such as graphite, and the plurality of second boats 1M, the plurality of second boat feet 14, and the second conductive connector 15 in the second boat leaf group 11b can be made of the same conductive material, such as graphite. The plurality of first boats 1N, the plurality of first boat feet 12, and the first conductive connector 13 in the first boat leaf group 11a can be fabricated into an integral structure, and the plurality of second boats 1M, the plurality of second boat feet 14, and the second conductive connector 15 in the second boat leaf group 11b can be fabricated into an integral structure.

[0065] In some alternative embodiments, the boat structure 10 further includes an electrode assembly 4, which is electrically connected to a plurality of boat leaves 1 such that any two adjacent boat leaves 1 have opposite polarities. Specifically, the electrode assembly 4 includes a first electrode group 41 and a second electrode group 42. The first electrode group 41 is electrically connected to a first conductive connector 13, and the second electrode group 42 is electrically connected to a second conductive connector 15. The polarities of the first electrode group 41 and the second electrode group 42 are opposite.

[0066] Optionally, along the first direction X, the first electrode group 41 and the second electrode group 42 are respectively disposed on both sides of the carrier plate 3, and the first electrode group 41 and the second electrode group 42 are used to be electrically connected to an external power source.

[0067] like Figures 12 to 14 Along the second direction Y, the distance between adjacent protrusions 11 in each leaf 1 is between 4mm and 8mm. For example, multiple protrusions 11 are arranged at equal intervals along the second direction Y, and the gap 111 between adjacent protrusions 11 has a first distance L1, which can be 4mm, 6mm, or 8mm, and can be adaptively adjusted according to the thickness of the sheet 30 being accommodated, without being specifically limited.

[0068] Optionally, when the sheet 30 is inserted into the gap 111 between adjacent protrusions 11, the sheet 30 is located at the center of symmetry of the two protrusions 11 along the second direction Y.

[0069] Optionally, the height of the protrusion 11 in the vertical direction Z can be adaptively adjusted according to the length, width, etc. of the sheet 30, so that the sheet 30 can be completely inserted into the gap 111, without specific limitation.

[0070] Optionally, along the first direction X, the distance between adjacent boat flaps 1 is between 10mm and 12mm. For example, multiple boat flaps 1 are arranged at equal intervals along the first direction X, and the distance between each pair of adjacent boat flaps 1 is a second distance L2. The second distance L2 can be 10mm, 11mm, or 12mm, and can be adaptively adjusted according to actual needs without being specifically limited.

[0071] This disclosure also provides a coating apparatus, such as Figure 1 and Figure 2 The coating equipment 100 includes a boat structure 10 and a furnace body 20. The boat structure 10 is configured to carry a plurality of sheets 30, and the furnace body 20 has a furnace cavity 201 configured to accommodate the boat structure 10 carrying the sheets 30.

[0072] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0073] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0074] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0075] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0076] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0077] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0078] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support a sheet extending along a first direction, and multiple sheets spaced apart along a second direction to form a sheet group, wherein the first direction and the second direction are perpendicular, the boat structure includes: Multiple boat sheets are arranged at intervals along the first direction, with adjacent boat sheets being insulated from each other. Any two adjacent boat sheets are configured to have opposite polarities. The multiple boat sheets are arranged at intervals along the first direction to form multiple groups of boat sheets, and each group of boat sheets corresponds to one group of sheets. In the corresponding boat sheet group and sheet group, each boat sheet includes a plurality of protrusions spaced apart along the second direction, with gaps between adjacent protrusions. The gaps of the plurality of boat sheets are arranged one-to-one in the first direction. Each sheet can be inserted into the corresponding plurality of gaps. The boat sheet and the sheet are insulated from each other.

2. The boat structure according to claim 1, characterized in that, Each sheet group has a plurality of sheets carried on a support assembly configured to be insulated from the corresponding boat sheet group. The sheets in the carried sheet group can be inserted into the corresponding plurality of gaps without contact between the sheets and the boat sheet.

3. The boat structure according to claim 2, characterized in that, The distance between adjacent plank groups is greater than or equal to the distance between two adjacent protrusions in the plank group.

4. The boat structure according to claim 1, characterized in that, Along the first direction, the distance between adjacent planks is between 10mm and 12mm; and / or, Along the second direction, the distance between adjacent protrusions in each of the said leaf groups is between 4 mm and 8 mm; and / or, When the sheet is inserted into the gap between the adjacent protrusions, the sheet is located at the center of symmetry of the two protrusions along the second direction.

5. The boat structure according to claim 2, characterized in that, It also includes a first insulating connector that insulatingly connects the load-bearing assembly and the plurality of the planks, or the first insulating connector that insulatingly connects the sheet and the plurality of the planks.

6. The boat structure according to any one of claims 1-5, characterized in that, Each of the aforementioned boat-shaped groups includes: The first boat sheet subgroup includes a plurality of first boat sheets and a first conductive connector arranged at intervals along the first direction, wherein the first conductive connector is conductively connected to the plurality of first boat sheets; The second boat leaf assembly includes a plurality of second boat leaves and a second conductive connector arranged at intervals along the first direction. The second conductive connectors are conductively connected to the plurality of second boat leaves. The plurality of first boat leaves and the plurality of second boat leaves are arranged alternately in the first direction, and the protrusions of the alternately arranged first boat leaves and the protrusions of the second boat leaves correspond one-to-one in the first direction. The first conductive connectors are insulated from the second boat leaves, and the second conductive connectors are insulated from the first boat leaves.

7. The boat structure according to claim 6, characterized in that, The first boat page group also includes: Multiple first boat feet are respectively connected to the bottom of multiple first boat blades, and the first conductive connector is connected to the multiple first boat feet; The second boat leaf subgroup also includes: Multiple second boat feet are respectively connected to the bottom of multiple second boat blades, and the second conductive connector is connected to the multiple second boat feet; In the case where multiple first boat flaps and multiple second boat flaps are arranged alternately, along the second direction, the first boat feet and the second boat feet are respectively disposed at the bottom of both sides of the boat flaps.

8. The boat structure according to claim 7, characterized in that, Also includes: A carrier plate extends along the first direction and is configured to carry multiple sets of the boat blades. The first conductive connector and the second conductive connector are in contact with the carrier plate, and the carrier plate is configured as an insulating element.

9. The boat structure according to claim 6, characterized in that, Also includes: The first electrode group is electrically connected to the first conductive connector; The second electrode group is electrically connected to the second conductive connector, and the polarities of the first electrode group and the second electrode group are opposite.

10. A coating apparatus, characterized in that, include: The boat structure according to any one of claims 1-9, wherein the boat structure is configured to carry a plurality of sheets; A furnace body having a furnace cavity configured to accommodate the boat structure that carries the sheet.

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