Boat structure and coating apparatus

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a coating equipment, which solves the problem of the sticking point mark on the sheet after coating caused by the boat structure with sticking points for fixing the sheet in the related art. The boat structure comprises a plurality of boat pages, the plurality of boat pages are arranged at intervals along a first direction, and adjacent two boat pages are insulated from each other, wherein each boat page comprises a plurality of protrusions arranged at intervals along a second direction, adjacent protrusions have gaps therebetween, the gaps of the plurality of boat pages are arranged one by one in the first direction, each sheet can be inserted into the corresponding plurality of gaps, and the boat pages and the sheet are insulated. The boat structure and the coating equipment provided by the present disclosure can avoid the sticking point mark on the surface of the sheet during the coating process, and improve the coating uniformity.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and coating equipment. Background Technology

[0002] The production process of solar cells includes a plasma-enhanced chemical vapor deposition (PECVD) coating step. During coating, a silicon wafer is first inserted into the gaps between the blades of a boat structure and secured to the surface of the blades using locking points. Then, the boat structure carrying the silicon wafer is placed in a PECVD machine to coat the silicon wafer surface. However, during the coating process, it has been found that locking marks appear at the corresponding locking point locations on the silicon wafer, thus affecting the uniformity of the coating on the silicon wafer surface. Utility Model Content

[0003] In view of this, the present disclosure provides a boat structure and a coating equipment to solve the problem in the related art where the use of a boat structure with locking points to fix the sheet results in locking marks on the coated sheet.

[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to carry a sheet. The boat structure includes: a plurality of boat blades spaced apart along a first direction, with adjacent boat blades insulated from each other, and any two adjacent boat blades configured to have opposite polarities; wherein each boat blade includes a plurality of protrusions spaced apart along a second direction, with gaps between adjacent protrusions, the gaps between the plurality of boat blades being arranged one-to-one in the first direction, and each sheet being able to be inserted into the corresponding plurality of gaps, the boat blades being insulated from the sheet, and the first and second directions being perpendicular.

[0005] In some embodiments, the sheet is carried on a support assembly, and the multiple sheets carried are spaced apart along a second direction and extend along a first direction; wherein the support assembly is insulated from the boat blade, and each of the carried sheets can be inserted into a corresponding plurality of gaps without contact between the sheet and the boat blade.

[0006] In some embodiments, each boat leaf includes multiple sets of protrusions arranged at intervals along a second direction, each set of protrusions including multiple protrusions arranged at intervals, the protrusions of the multiple boat leaves are arranged in a one-to-one correspondence in the first direction, and the corresponding sets of protrusions correspond to a bearing component.

[0007] In some embodiments, the distance between adjacent protrusion groups is greater than or equal to the gap between adjacent protrusions in the protrusion group.

[0008] In some embodiments, the support assembly includes: two support plates spaced apart along a second direction, the support plates being configured as insulating elements; and a support rod connecting the two support plates, wherein one end of a sheet is connected to the support rod to support the sheet, the support rod being configured as an insulating element, and along the second direction, a boat leaf is provided with support grooves on both sides of the protrusion assembly, the support grooves being configured to engage with the support plates, and when the support plates are placed in the support grooves, there is a gap between the sheet supported by the support rod and the boat leaf.

[0009] In some embodiments, the distance between adjacent planks is between 10 mm and 12 mm along the first direction; and / or, the distance between adjacent protrusions is between 4 mm and 8 mm along the second direction; and / or, when the sheet is inserted into the gap between adjacent protrusions, the sheet is located at the center of symmetry of the two protrusions along the second direction.

[0010] In some embodiments, it further includes a first insulating connector, a first insulating connector insulating connection carrier assembly and a plurality of boats, or a first insulating connector insulating connection sheet and a plurality of boats.

[0011] In some embodiments, the device further includes an electrode assembly electrically connected to a plurality of scapes such that any two adjacent scapes have opposite polarities.

[0012] In some embodiments, the plurality of boats includes a plurality of first boats and a plurality of second boats arranged alternately in a first direction, and the electrode assembly includes: a first conductive connection block conductively connected to the plurality of first boats; a first electrode electrically connected to the first conductive connection block; a second conductive connection block conductively connected to the plurality of second boats; and a second electrode electrically connected to the second conductive connection block, wherein the polarities of the first electrode and the second electrode are opposite.

[0013] Secondly, embodiments of this disclosure also provide a coating apparatus, comprising: a boat structure as described above, the boat structure being configured to carry a plurality of sheets; and a furnace body having a furnace cavity, the furnace cavity being configured to accommodate the boat structure carrying the sheets.

[0014] This disclosure provides a boat structure and coating equipment. By dividing the boat blades into multiple protrusions arranged at intervals, with gaps between the protrusions, the gaps between the boat blades correspond one-to-one in a first direction. A sheet can be inserted into the corresponding gap, with the sheet's extension direction perpendicular to the boat blade's extension direction, and the sheet is insulated from the boat blades. During the coating process, since adjacent boat blades are configured with opposite polarities, one of the corresponding protrusions in the two boat blades with opposite polarities acts as the positive electrode and the other as the negative electrode to ionize the gas between them into plasma. The plasma then dissipates to the coating surface of the adjacent sheet. Therefore, in this boat structure, the sheet does not act as any electrode in the plasma reaction; it is ionized only through two boat blades of different polarities (specifically, two protrusions of different polarities). The ionized plasma dissipates to the coating surface of the adjacent sheet, thereby reducing or even avoiding the occurrence of puncture marks and improving the uniformity of the coating on the sheet surface.

[0015] In addition, by setting multiple protrusions, each sheet can be inserted into the corresponding gap and insulated from the boat, and both sides of the sheet in the second direction can be coated as the surface to be coated. When the sheet is a single solar cell, double-sided coating can be achieved, and when the sheet is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, thus improving coating efficiency. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure.

[0018] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0019] Figure 3 for Figure 2 A magnified view of part A in the boat structure shown.

[0020] Figure 4 The diagram shown is a schematic diagram of a carrier component provided in an embodiment of this disclosure.

[0021] Figure 5 The image shown is a front view of a carrier component provided in an embodiment of this disclosure.

[0022] Figure 6 The image shown is a front view of a boat structure provided in an embodiment of this disclosure.

[0023] Figure 7 for Figure 6 A magnified view of part E in the boat structure shown.

[0024] Figure 8 The image shown is a top view of a boat structure provided in an embodiment of this disclosure.

[0025] Figure 9 for Figure 8 A magnified view of part F in the boat structure shown.

[0026] Figure label: 100. Coating equipment; 10. Boat structure; 1. Boat blade; 1b. Protrusion group; 1N. First boat blade; 1M. Second boat blade; 11. Protrusion; 111. Gap; 112. Support groove; 2. Bearing assembly; 21. Support plate; 22. Bearing rod; 221. Slot; 3. Electrode assembly; 31. First conductive connecting block; 32. Second conductive connecting block; 33. First electrode; 34. Second electrode; 20. Furnace body; 201. Furnace cavity; 202. Furnace opening; 30. Sheet; X. First direction; Y. Second direction; Z. Vertical direction. Detailed Implementation

[0027] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0028] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 3 for Figure 2 The image shows a magnified view of part A in the boat structure. Arrow X points to the first direction, arrow Y to the second direction, and arrow Z to the vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other.

[0029] This disclosure provides a boat structure, such as Figures 1 to 3 The boat structure 10 is used in the coating equipment 100. The boat structure 10 is configured to carry the sheet 30, and the coating equipment 100 is configured to process the sheet 30 in the boat structure 10.

[0030] It is understood that the coating equipment 100 can be a PECVD equipment, which includes a furnace body 20 having at least one furnace opening 202. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening 202, and a boat structure 10 carrying a sheet 30 can enter and exit the furnace cavity 201 from the furnace opening 202. In the furnace cavity 201, at least one surface of the sheet 30 carried in the boat structure 10 is coated with one or more layers of film. The specific structure of the coating equipment 100 will not be described in detail.

[0031] Optionally, the sheet 30 can be a solar cell, also known as a silicon wafer. The solar cell has a surface to be coated on at least one side in the thickness direction. The sheet 30, carried in the boat structure 10, can be coated by the dissipated plasma in a PECVD equipment. The shape of the sheet 30 can be, for example, rectangular, square, or circular, and is not specifically limited.

[0032] It is understandable that each sheet 30 can be a single solar cell, with both sides of the single solar cell in the second direction Y serving as the coating surfaces to be coated, so as to perform double-sided coating on the single solar cell. Alternatively, each sheet 30 can be two solar cells stacked back to back in the second direction Y, with the opposing surfaces of the two solar cells serving as the coating surfaces to be coated, so as to perform single-sided coating on the two opposing solar cells simultaneously.

[0033] The boat structure 10 includes multiple boat blades 1, which are arranged at intervals along the first direction X. It can be understood that the boat blades 1 can be configured as planar plate-like structures extending along the planes containing the second direction Y and the vertical direction Z. The specific shape and size of the boat blades 1 can be adaptively adjusted according to the number of sheets 30 to be supported and the space they can occupy, without being specifically limited.

[0034] Alternatively, the boat leaf 1 can be made of a high-temperature resistant and conductive material, such as graphite.

[0035] Existing graphite boats often insert sheet 30 into the gap between adjacent boat blades 1 in the boat structure 10, and fix sheet 30 to the surface of boat blade 1 by locking points. At this time, sheet 30 is electrically connected to graphite boat. Since the locking points block the coated side of sheet 30, and sheet 30 acts as the positive (or negative) electrode of plasma reaction, while boat blade 1, which is spaced apart from and opposite to sheet 30, acts as the negative (or positive) electrode, most of the plasma and active groups bombard the surface of sheet 30 uniformly and vertically, causing locking point marks to easily appear on the part of sheet 30 blocked by the locking points.

[0036] To address the aforementioned problems, the boat structure 10 provided in this disclosure includes a plurality of boat blades 1 spaced apart along a first direction X. Each pair of adjacent boat blades 1 is insulated from each other, and any two adjacent boat blades 1 are configured to have opposite polarities. Each boat blade 1 includes a plurality of protrusions 11 spaced apart along a second direction Y. Adjacent protrusions 11 have gaps 111 between them. The gaps 111 of the plurality of boat blades 1 are arranged in a one-to-one correspondence in the first direction X. Each sheet 30 can be inserted into the corresponding plurality of gaps 111, and the boat blade 1 is insulated from the sheet 30. Since adjacent boat blades 1 have opposite polarities, there are gaps (different from the gaps 111 between adjacent protrusions 11) between adjacent boat blades 1, and no electrical connection is made, thereby ensuring that adjacent boat blades 1 are insulated from each other.

[0037] The boat structure disclosed herein divides the boat flaps 1 into a plurality of spaced protrusions 11, with gaps 111 between the protrusions 111. The gaps 111 of the plurality of boat flaps 1 correspond one-to-one in the first direction X. The sheet 30 can be inserted into the corresponding gap 111. At this time, the extension direction of the sheet 30 is perpendicular to the extension direction of the boat flaps 1, and the sheet 30 is insulated from the boat flaps 1. During the coating process, since two adjacent boat flaps 1 are configured to have opposite polarities, one of the two corresponding protrusions 11 of the two boat flaps 1 with opposite polarities acts as a positive electrode and the other as a negative electrode to ionize the gas between them into plasma. The plasma then diffuses to the surface of the adjacent sheet 30 to be coated. Therefore, in the boat structure 10 of this disclosure, the sheet 30 does not serve as any pole of the plasma reaction, but is ionized only through two boat blades 1 of different polarities (specifically two protrusions 11 of different polarities). The ionized plasma dissipates to the surface of the sheet 30 to be coated, thereby reducing or even avoiding the occurrence of puncture marks, and thus improving the uniformity of the coating on the surface of the sheet 30.

[0038] In addition, by providing multiple protrusions 11, each sheet 30 can be inserted into the corresponding gap 111 and insulated from the leaf 1. Both sides of the sheet 30 in the second direction Y can be coated as the surface to be coated. When the sheet 30 is a single solar cell, double-sided coating can be achieved. When the sheet 30 is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, thus improving coating efficiency.

[0039] In some alternative embodiments, the boat structure 10 includes a first insulating connector that provides an insulating connection between the sheet 30 and the boat 1 when the sheet 30 is inserted into the corresponding plurality of gaps 111. For example, the first insulating connector may be disposed at the bottom of each gap 111 in the boat 1, specifically as an insulating tooth disposed at the bottom of the gap 111. The edge of the sheet 30 can be engaged with the insulating tooth so that the sheet 30 can be confined within the gap 111 and there is no contact between the sheet 30 and the boat 1. The sheet 30 is fixed without being obstructed from the surface to be coated.

[0040] In some alternative embodiments, multiple sheets 30 may be pre-loaded onto the support assembly 2, and then the support assembly 2 and the boat structure 10 may work together to insert the multiple sheets 30 into the gaps 111.

[0041] Figure 4 The diagram shown is a schematic diagram of a carrier component provided in an embodiment of this disclosure. Figure 5 The image shown is a front view of a carrier component provided in an embodiment of this disclosure.

[0042] like Figure 3 , Figure 4 and Figure 5 Sheets 30 are supported by a support assembly 2, and multiple supported sheets 30 are arranged at intervals along a second direction Y, while the sheets 30 extend along a first direction X. The support assembly 2 is insulated from the boat flaps 1, and each supported sheet 30 can be inserted into a corresponding plurality of gaps 111 without contact between the sheet 30 and the boat flaps 1. Through the insulated connection between the support assembly 2 and the multiple boat flaps 1, when the sheet 30 is inserted into the gap 111, it can be suspended within the gap 111 without contacting the protrusions 11 of the boat flaps 1, thus preventing the surface of the sheet 30 to be coated from being obstructed and avoiding jamming. Furthermore, by first supporting multiple sheets 30 onto the support assembly 2, and then through the insulated connection between the support assembly 2 and the multiple boat flaps 1, the multiple sheets 30 can be inserted into their respective gaps 111, improving the loading and unloading efficiency of the sheets 30.

[0043] It is understood that among the multiple sheets 30 arranged at intervals along the second direction Y carried by the carrier component 2, each sheet 30 can be a single solar cell. Whether each sheet 30 carried by the carrier component 2 is a single solar cell or two stacked solar cells can be adaptively adjusted according to actual needs and is not specifically limited. Through the insulating cooperation between the carrier component 2 and the multiple boats 1, each sheet 30 can be inserted into the gap 111, and the sheet 30 has no contact with the boats 1. Both sides of the sheet 30 in the second direction Y serve as the surface to be coated. When the sheet 30 is a single solar cell, double-sided coating can be achieved. When the sheet 30 is two stacked solar cells, single-sided coating of more solar cells can be achieved at one time, improving coating efficiency.

[0044] Specifically, the load-bearing component 2 includes two support plates 21 and a load-bearing rod 22. The two support plates 21 are spaced apart along the second direction Y. The load-bearing rod 22 connects the two support plates 21. One end of the sheet 30 is connected to the load-bearing rod 22 to support the sheet 30. The support plates 21 and the load-bearing rod 22 are insulating components.

[0045] The number of support rods 22 can be one or two, and they are disposed at the bottom of one end of the sheet 30 to support the sheet 30. Alternatively, there can be multiple support rods 22, which enclose a support space configured to support the sheet 30. For example, the support plate 21 can be a square plate structure, and four support rods 22 can be disposed at the four corners of the square plate. Multiple slots 221 are provided on the side of the support rod 22 facing the support space, and these slots 221 are spaced apart along the extension direction of the support rod 22 to engage the sheet 30, thus confining the sheet 30 within the support space.

[0046] Optionally, the size and shape of the bearing space enclosed by the multiple bearing rods 22 can be adaptively adjusted according to the shape and size of the sheet 30 being supported, without being specifically limited. Similarly, the shape and size of the support plate 21, as well as the number of bearing rods 22 and their arrangement on the support plate 21, can also be adaptively adjusted according to the shape and size of the sheet 30 being supported, without being specifically limited.

[0047] Understandably, when multiple sheets 30 are snapped into the slots 221 of the support rods 22, a sheet 30 can be snapped into each slot 221 at intervals of one or more, to adjust the spacing of the supported sheets 30 in the second direction Y. The spacing of the sheets 30 supported by the support assembly 2 in the second direction Y needs to be adaptively adjusted according to the width of the protrusions 11 on the boat 1 in the second direction Y and the gaps 111 provided between adjacent protrusions 11, so that when the support assembly 2 is insulated from the multiple boats 1, the multiple supported sheets 30 can be inserted into each gap 111 one by one, and the multiple support rods 22 can be accommodated in the gaps between adjacent boats 1, so as to avoid interference between the sheets 30, the protrusions 11 and the support rods 22.

[0048] It should be emphasized that the length of the bearing component 2 in the second direction Y, the number of slots 221 on the bearing rod 22, the spacing, etc. can be adaptively adjusted according to the number and spacing of the sheet 30 to be supported, and no specific limitation is made.

[0049] Optionally, when the carrier assembly 2 is insulated from the multiple leaf blades 1, the carrier assembly 2 itself can be configured as an insulating element that is insulated from the multiple leaf blades 1. For example, the support plate 21 can be configured as an insulating element, and the carrier rod 22 can be configured as an insulating element. Alternatively, the contact points between the carrier assembly 2 and the multiple leaf blades 1 can be insulated by setting a first insulating connector. The specific configuration can be adapted according to actual needs and is not specifically limited.

[0050] Figure 6 The image shown is a front view of a boat structure provided in an embodiment of this disclosure. Figure 7 for Figure 6 A magnified view of part E in the boat structure shown. Figure 8 The image shown is a top view of a boat structure provided in an embodiment of this disclosure. Figure 9 for Figure 8 A magnified view of part F in the boat structure shown.

[0051] like Figure 2 and Figure 3 The supporting components 2 that cooperate with the boat structure 10 can be set in multiple groups. The multiple protrusions 11 set on the multiple boat sheets 1 can be divided into multiple regions, and each region corresponds to a supporting component 2. This can make full use of the limited space of the boat structure 10 to arrange more sheets 30, which is beneficial to improving the coating efficiency.

[0052] Specifically, such as Figure 2 , Figure 3 , Figures 6 to 9Each boat sheet 1 includes multiple sets of protrusions 1b spaced apart along the second direction Y. Each set of protrusions 1b includes multiple protrusions 11 spaced apart. The protrusions 1b of the multiple boat sheets 1 are arranged one-to-one in the first direction X, and the corresponding sets of protrusions 1b correspond to a support component 2. When the boat structure 10 is placed in the furnace cavity 201 for processing, the extension direction of the furnace cavity 201 is parallel to the second direction Y. The multiple boat sheets 1 in the boat structure 10 are spaced apart along the width direction of the furnace cavity 201, and the multiple sheets 30 of the support component 2 are spaced apart along the extension direction of the furnace cavity 201 (i.e., the length direction of the furnace cavity 201).

[0053] Optionally, the boat structure 10 may also include a second insulating connector. The second insulating connector may be configured as an insulating carrier plate or an insulating connecting rod connecting multiple boat blades. The multiple boat blades 1 may be arranged at equal intervals along the first direction X or at non-equal intervals. However, it must at least ensure that when the sheet 30 is inserted into the gap 111, the interval between adjacent boat blades 1 is sufficient to allow the bearing rod 22 of the bearing assembly 2 to enter from top to bottom and be accommodated in the interval position. No specific limitation is made.

[0054] Optionally, each of the corresponding protrusion groups 1b in the second direction Y can correspond to only one load-bearing component 2. When the load-bearing component 2 is engaged with the boat structure 10, multiple load-bearing components 2 are arranged at intervals along the first direction X. Alternatively, each corresponding protrusion group 1b can be further divided into multiple sub-protrusion groups arranged along the second direction Y. Each sub-protrusion group corresponds to one load-bearing component 2. When the load-bearing component 2 is engaged with the boat structure 10, multiple load-bearing components 2 are arranged in multiple rows and columns along the first direction X and the second direction Y.

[0055] Optionally, along the second direction Y, the distance between adjacent protrusion groups 1b is greater than or equal to the gap 111 between adjacent protrusions 11 in the protrusion group 1b, which facilitates the position identification of each protrusion group 1b and the alignment of multiple protrusion groups 1b corresponding to the first direction X with the bearing component 2, thereby facilitating the automatic control of the bearing component 2 to cooperate or disoperate with multiple corresponding protrusion groups 1b.

[0056] Optionally, along the second direction Y, the boat leaf 1 is provided with support grooves 112 on both sides of the protrusion group 1b. The support grooves 112 are configured to engage the bearing assembly 2, specifically to engage the support plate 21. When the support plate 21 is placed in the support groove 112, there is a gap between the sheet 30 supported by the bearing rod 22 and the boat leaf 1 (different from the gap 111 between adjacent protrusions 11) to ensure that the sheet 30 can be stably suspended in the corresponding gap 111 and insulated from the boat leaf 1.

[0057] like Figure 3 , Figure 7 , Figure 8 and Figure 9 Along the second direction Y, the distance between adjacent protrusions 11 is between 4mm and 8mm. For example, multiple protrusions 11 are arranged at equal intervals along the second direction Y, and the gap 111 between adjacent protrusions 11 has a first distance L1. The first distance L1 can be 4mm, 6mm, or 8mm, and can be adaptively adjusted according to the thickness of the sheet 30 being accommodated, without being specifically limited.

[0058] Optionally, when the sheet 30 is inserted into the gap 111 between adjacent protrusions 11, the sheet 30 is located at the center of symmetry of the two protrusions 11 along the second direction Y.

[0059] Optionally, the height of the protrusion 11 in the vertical direction Z can be adaptively adjusted according to the length, width, etc. of the sheet 30, so that the sheet 30 can be completely inserted into the gap 111, without specific limitation.

[0060] Optionally, along the first direction X, the distance between adjacent boat flaps 1 is between 10mm and 12mm. For example, multiple boat flaps 1 are arranged at equal intervals along the first direction X, and the distance between each pair of adjacent boat flaps 1 is a second distance L2. The second distance L2 can be 10mm, 11mm, or 12mm, and can be adaptively adjusted according to actual needs without being specifically limited.

[0061] In some alternative embodiments, such as Figure 3 , Figure 7 , Figure 8 and Figure 9 The boat structure 10 also includes an electrode assembly 3, which is electrically connected to a plurality of boat leaves 1 so that any two adjacent boat leaves 1 have opposite polarities.

[0062] Optionally, the plurality of boats 1 include a plurality of first boats 1N and a plurality of second boats 1M arranged alternately in a first direction X. The electrode assembly 3 includes a first conductive connection block 31, a first electrode 33, a second conductive connection block 32, and a second electrode 34. The first conductive connection block 31 is electrically connected to the plurality of first boats 1N. The first electrode 33 is electrically connected to the first conductive connection block 31. The second conductive connection block 32 is electrically connected to the plurality of second boats 1M. The second electrode 34 is electrically connected to the second conductive connection block 32. The polarities of the first electrode 33 and the second electrode 34 are opposite.

[0063] It is understood that the first electrode 33 and the second electrode 34 are used for electrical connection with an external power source. The connection method between the first conductive connecting block 31, the second conductive connecting block 32 and the first leaf 1N and the second leaf 1M can be adaptively adjusted according to actual needs, without specific limitations.

[0064] This disclosure also provides a coating apparatus, such as Figure 1 and Figure 2 The coating equipment 100 includes a boat structure 10 and a furnace body 20. The boat structure 10 is configured to carry a plurality of sheets 30, and the furnace body 20 has a furnace cavity 201 configured to accommodate the boat structure 10 carrying the sheets 30.

[0065] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0066] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0067] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0068] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0069] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0070] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0071] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support the sheet, the boat structure includes: Multiple planks are arranged at intervals along a first direction, with adjacent planks insulated from each other, and any two adjacent planks are configured to have opposite polarities; Each of the boat sheets includes a plurality of protrusions spaced apart along a second direction, with gaps between adjacent protrusions. The gaps between the plurality of boat sheets are arranged in a one-to-one correspondence in the first direction. Each sheet can be inserted into the corresponding plurality of gaps, and the boat sheets are insulated from the sheets. The first direction and the second direction are perpendicular.

2. The boat structure according to claim 1, characterized in that, The sheet is supported on a support assembly, and the plurality of supported sheets are arranged at intervals along the second direction, the sheets extending along the first direction; The supporting component is insulated from the boat sheet, and each of the supported sheets can be inserted into the corresponding plurality of gaps without contact between the sheet and the boat sheet.

3. The boat structure according to claim 2, characterized in that, Each of the boat pages includes multiple sets of protrusions arranged at intervals along the second direction, each set of protrusions includes multiple protrusions arranged at intervals, the sets of protrusions of the multiple boat pages are arranged in a one-to-one correspondence in the first direction, and the corresponding sets of protrusions correspond to one of the bearing components.

4. The boat structure according to claim 3, characterized in that, The distance between adjacent protrusion groups is greater than or equal to the gap between adjacent protrusions in the protrusion group.

5. The boat structure according to claim 3, characterized in that, The carrier component includes: Two support plates are spaced apart along the second direction, and the support plates are configured as insulating components. A support rod connects the two support plates, wherein one end of the sheet is connected to the support rod to support the sheet, and the support rod is configured as an insulating element; Along the second direction, the boat leaf is provided with support grooves on both sides of the protrusion group. The support grooves are configured to engage with the support plate. When the support plate is placed in the support groove, there is a gap between the sheet supported by the support rod and the boat leaf.

6. The boat structure according to any one of claims 1-5, characterized in that, Along the first direction, the distance between adjacent planks is between 10mm and 12mm; and / or, Along the second direction, the distance between adjacent protrusions is between 4mm and 8mm; and / or, When the sheet is inserted into the gap between the adjacent protrusions, the sheet is located at the center of symmetry of the two protrusions along the second direction.

7. The boat structure according to any one of claims 2-5, characterized in that, It also includes a first insulating connector that insulatingly connects the load-bearing assembly and the plurality of the planks, or the first insulating connector that insulatingly connects the sheet and the plurality of the planks.

8. The boat structure according to any one of claims 1-5, characterized in that, Also includes: An electrode assembly is electrically connected to a plurality of the said paddles such that any two adjacent said paddles have opposite polarities.

9. The boat structure according to claim 8, characterized in that, The plurality of said scaphoids include a plurality of first scaphoids and a plurality of second scaphoids alternately arranged in the first direction, and the electrode assembly includes: A first conductive connection block, conductively connecting multiple first boat pages; The first electrode is electrically connected to the first conductive connection block; The second conductive connection block is conductively connected to multiple second boat blades; The second electrode is electrically connected to the second conductive connection block, and the polarities of the first electrode and the second electrode are opposite.

10. A coating apparatus, characterized in that, include: The boat structure according to any one of claims 1-9, wherein the boat structure is configured to carry a plurality of sheets; A furnace body having a furnace cavity configured to accommodate the boat structure that carries the sheet.

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