Transport structure for tgv glass substrates, anode box and horizontal plating line

Abstract

The utility model relates to electroplating technical field discloses a kind of conveying structure, anode box and horizontal electroplating line for TGV glass substrate, conveying structure for TGV glass substrate includes: multiple lower wheel piece rotation connection lower support;With the lower wheel piece of same lower support, it is located in same straight line along TGV glass substrate conveying direction, and it is located in same height;Multiple upper wheel piece rotation connection upper support;With the upper wheel piece of same upper support, it is located in same straight line along TGV glass substrate conveying direction, and it is located in same height;Upper wheel piece and lower wheel piece one-to-one correspondence;And be set on same vertical plane;Upper wheel piece and lower wheel piece hold TGV glass substrate, when upper wheel piece and lower wheel piece rotate, TGV glass substrate is conveyed.The application is held by the regular arrangement of upper wheel piece and lower wheel piece located in same straight line TGV glass substrate, reduces contact point, reduces vibration, runs smoothly, prevents TGV glass substrate breakage damage.

Description

Technical Field

[0001] This utility model relates to the field of electroplating technology, specifically to a conveying structure, an anode box, and a horizontal electroplating line for TGV glass substrates. Background Technology

[0002] Existing printed circuit boards (PCBs) typically require electroplating in an electroplating bath. Patent CN119465358A discloses a novel titanium basket cover device for improving the appearance of concave and rough horizontal electroplating lines, uniform copper thickness, and plate jamming, used for electroplating printed circuit boards. Figure 9 As shown, a novel titanium basket cover plate device for improving the concave, rough, copper thickness uniformity, and jamming of horizontal electroplating lines includes: a titanium basket cover plate body 22, the upper surface of which is provided with six sets of roller slots 23, the six sets of roller slots 23 are staggered, and rollers are provided in the roller slots 23 to facilitate the transport of the printed circuit board to be electroplated.

[0003] TGV glass substrates are chip packaging substrates that use glass as the base material and form vertical electrical interconnects through glass via (TGV) technology. They are used to carry bare chip dies and provide high-density integration, offering significant advantages in fields such as 5G, AI, and high-performance computing. During the fabrication of TGV glass substrates, a seed layer needs to be deposited within the vias and filled with electroplated copper to ensure conductivity. Due to the small thickness and brittleness of TGV glass substrates, if the aforementioned titanium basket cover body 22 and rollers are used to transport them, the rollers will make staggered contact with the TGV glass substrate, resulting in complex stress on the substrate. This makes it easy for even slight vibrations to cause the TGV glass substrate to crack and break. Utility Model Content

[0004] In view of this, the present invention provides a conveying structure for TGV glass substrates to solve the problem that when using the existing titanium basket cover plate body and multiple sets of staggered rollers to convey TGV glass substrates, the rollers make staggered contact with the TGV glass substrate, which makes the stress on the TGV glass substrate complex and easily causes slight vibrations, leading to the breakage and damage of the TGV glass substrate.

[0005] In a first aspect, this utility model provides a transport structure for TGV glass substrates, comprising: Multiple lower supports arranged at intervals; Multiple spaced lower rollers are rotatably connected to the upper part of the lower bracket; all lower rollers on the same lower bracket are located in the same straight line along the conveying direction of the TGV glass substrate and at the same height. Multiple upper supports arranged at intervals; Multiple spaced upper rollers are rotatably connected to the lower part of the upper support. All upper rollers on the same upper support are aligned along the conveying direction of the TGV glass substrate and at the same height. The number of upper and lower rollers is the same, and they are arranged in a one-to-one correspondence. The corresponding upper and lower rollers are arranged on the same vertical plane. The upper and lower rollers are adapted to clamp the TGV glass substrate and convey it as they rotate. Beneficial effects: This application adopts the above technical solution, which uses regularly arranged upper and lower rollers aligned along a straight line to clamp and convey the TGV glass substrate. This significantly reduces contact points, reduces minor vibrations, maintains the balance of the TGV glass substrate, ensures smoother operation, prevents breakage of the TGV glass substrate, reduces the breakage rate, and improves the overall efficiency of electroplating the TGV glass substrate. Furthermore, the installation of the conveying structure for the TGV glass substrate is easy and precise to control.

[0006] Optionally, multiple spaced lower supports are arranged in a direction parallel to the conveying direction of the TGV glass substrate; multiple spaced upper supports are arranged in a direction parallel to the conveying direction of the TGV glass substrate, the number of lower supports and upper supports are the same, and they are arranged in a one-to-one correspondence; the one-to-one correspondence of lower supports and upper supports is arranged on the same vertical plane.

[0007] Optionally, the two ends of the lower bracket are respectively placed on the two side frames of the lower frame; multiple upper jet branch pipes are fixed at intervals on the upper frame, and the upper jet branch pipes are arranged in a direction perpendicular to the conveying direction of the TGV glass substrate; a first support structure is provided on the upper bracket at the position between the two upper wheel pieces; the position of the first support structure corresponds to the position of the upper jet branch pipes; the upper jet branch pipes pass through the first support structure of the upper bracket to support the upper bracket; the first support structure is a first groove and / or a first through hole with an opening facing downwards. Beneficial effects: By adopting the above technical solution, the upper and lower brackets are more stably fixed.

[0008] Optionally, multiple lower jet branch pipes are fixed at intervals on the lower frame, and the lower jet branch pipes are arranged in a direction perpendicular to the conveying direction of the TGV glass substrate; a second support structure is provided on the lower bracket between two lower wheel pieces; the position of the second support structure corresponds to the position of the lower jet branch pipes; the lower jet branch pipes pass through the second support structure; the second support structure is a second through hole and / or a second groove with an upward opening. Beneficial effect: By adopting the above technical solution, the lower bracket is more stably fixed.

[0009] Optionally, both the upper and lower supports are plate components; a first bolt passes through the lower wheel and the lower support, and a first nut is screwed onto the protruding end of the first bolt to connect the lower wheel and the lower support; a second bolt passes through the upper wheel and the upper support, and a second nut is screwed onto the protruding end of the second bolt to connect the upper wheel and the upper support. Beneficial effects: This application adopts the above technical solution, which reliably installs and limits the upper and lower wheel.

[0010] Optionally, a first weight-reducing groove is provided in the portion of the upper bracket located between the two upper wheel pieces where no first support structure is provided, and a second weight-reducing groove is provided in the portion of the lower bracket located between the two lower wheel pieces where no second support structure is provided. Beneficial effect: This application adopts the above technical solution to reduce the weight of the upper and lower brackets.

[0011] Optionally, the thickness of the TGV glass substrate ranges from 0.3 mm to 2.0 mm.

[0012] Secondly, this utility model also provides an anode box, including: the aforementioned conveying structure for TGV glass substrates.

[0013] Optionally, it also includes: Upper frame; The upper anode box is disposed within the upper frame; The lower frame is fixedly installed and is located below the upper frame; The lower anode box is disposed within the lower frame; the conveying structure for the TGV glass substrate is disposed between the upper frame and the lower frame.

[0014] Thirdly, this utility model also provides a horizontal electroplating line, including: the aforementioned anode box. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a transport structure for TGV glass substrates provided in an embodiment of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of a transport structure for TGV glass substrates provided in an embodiment of the present invention. Figure 2 ; Figure 3This is a schematic diagram of a transport structure for TGV glass substrates provided in an embodiment of the present invention. Figure 3 ; Figure 4 This is a schematic diagram of a transport structure for TGV glass substrates provided in an embodiment of the present invention. Figure 4 ; Figure 5 This is a schematic diagram of the three-dimensional structure of the single-row upper support connecting to the upper wheel plate provided in the embodiment of this utility model. Figure 1 ; Figure 6 This is a schematic diagram of the three-dimensional structure of the single-row upper support connecting to the upper wheel plate provided in the embodiment of this utility model. Figure 2 ; Figure 7 This is a three-dimensional structural diagram of the connection between the single-row lower support and the lower wheel plate provided in the embodiment of this utility model. Figure 1 ; Figure 8 This is a three-dimensional structural diagram of the connection between the single-row lower support and the lower wheel plate provided in the embodiment of this utility model. Figure 2 ; Figure 9 This is a schematic diagram of a novel titanium basket cover plate device for improving the concave and roughness of horizontal electroplating lines, the uniformity of copper thickness, and the clamping of plates in the prior art.

[0017] Explanation of reference numerals in the attached figures: 1. Lower bracket; 2. Lower wheel; 3. TGV glass substrate; 4. Upper bracket; 5. Upper wheel; 6. Lower frame; 7. Upper frame; 8. Upper jet branch pipe; 9. First groove; 10. First through hole; 11. Lower jet branch pipe; 12. Second through hole; 13. Second groove; 14. First bolt; 15. First nut; 16. Second bolt; 17. Second nut; 18. First weight reduction groove; 19. Second weight reduction groove; 20. Upper anode box; 21. Lower anode box; 22. Titanium basket cover plate body; 23. Roller groove. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] like Figures 1 to 8One specific embodiment of the conveying structure for TGV glass substrates shown includes: multiple lower supports 1 arranged at intervals, multiple lower wheel pieces 2 arranged at intervals, multiple upper supports 4 arranged at intervals, and multiple upper wheel pieces 5 arranged at intervals.

[0020] like Figure 1 and Figure 2 As shown, multiple spaced lower wheel pieces 2 are rotatably connected to the upper part of the lower support 1; all the lower wheel pieces 2 on the same lower support 1 are located in the same straight line along the conveying direction of the TGV glass substrate 3 and at the same height. Figure 2 The arrows indicate the conveying direction of the TGV glass substrate 3. Both the lower support 1 and the upper support 4 can be in two rows. Multiple spaced upper wheel plates 5 are rotatably connected to the lower part of the upper support 4; all upper wheel plates 5 on the same upper support 4 are located on the same straight line along the conveying direction of the TGV glass substrate 3 and at the same height; the number of upper wheel plates 5 and lower wheel plates 2 is the same, which can be eight each, and they are arranged in a one-to-one correspondence; the one-to-one corresponding upper wheel plates 5 and lower wheel plates 2 are arranged on the same vertical plane; the upper wheel plates 5 and lower wheel plates 2 are adapted to clamp the TGV glass substrate 3, and convey the TGV glass substrate 3 when the upper wheel plates 5 and lower wheel plates 2 rotate.

[0021] Specifically, such as Figure 1 and Figure 2 As shown, multiple spaced lower supports 1 are arranged in a direction parallel to the conveying direction of the TGV glass substrate 3; multiple spaced upper supports 4 are arranged in a direction parallel to the conveying direction of the TGV glass substrate 3. The number of lower supports 1 and upper supports 4 are the same, and they are arranged in a one-to-one correspondence. The one-to-one correspondence of lower supports 1 and upper supports 4 is arranged on the same vertical plane.

[0022] Specifically, such as Figure 3 and Figure 4 As shown, the two ends of the lower support 1 are respectively placed on the two side edges of the lower frame 6; the lower frame 6 can be a cuboid with openings at the top and bottom. Multiple upper jet branch pipes 8 are fixed at intervals on the upper frame 7; the upper frame 7 can also be a cuboid with openings at the top and bottom. The upper jet branch pipes 8 are arranged perpendicular to the conveying direction of the TGV glass substrate 3; a first support structure is provided on the upper support 4 at the position between the two upper wheel plates 5; the position of the first support structure corresponds to the position of the upper jet branch pipes 8; the upper jet branch pipes 8 pass through the first support structure of the upper support 4 to support the upper support 4. Figure 5 and Figure 6 As shown, the first support structure is a first groove 9 with an opening facing downwards and / or a first through hole 10.

[0023] Specifically, such as Figure 3As shown, multiple lower jet branch pipes 11 are fixed at intervals on the lower frame 6, and the lower jet branch pipes 11 are arranged in a direction perpendicular to the conveying direction of the TGV glass substrate 3; a second support structure is provided on the lower bracket 1 at the position between the two lower wheel pieces 2; the position of the second support structure corresponds to the position of the lower jet branch pipes 11. The lower jet branch pipes 11 pass through the second support structure. Figure 7 and Figure 8 As shown, the second support structure is a second through hole 12 and / or an upward-opening second groove 13.

[0024] Specifically, such as Figures 5 to 8 As shown, both the upper bracket 4 and the lower bracket 1 are plate parts; the lower wheel 2 and the lower bracket 1 are connected by a first bolt 14, and a first nut 15 is screwed onto the protruding end of the first bolt 14; the upper wheel 5 and the upper bracket 4 are connected by a second bolt 16, and a second nut 17 is screwed onto the protruding end of the second bolt 16.

[0025] Furthermore, such as Figures 5 to 8 As shown, the portion of the upper bracket 4 located between the two upper wheel pieces 5 without a first support structure has a first weight-reducing groove 18, and the portion of the lower bracket 1 located between the two lower wheel pieces 2 without a second support structure has a second weight-reducing groove 19. The first support structure and the first weight-reducing groove 18 can be staggered, and the second support structure and the second weight-reducing groove 19 can be staggered.

[0026] refer to Figure 3 and Figure 4 As shown, this application also proposes an anode box, including: the aforementioned transport structure for TGV glass substrates.

[0027] The anode box described in this application further includes: an upper frame 7, an upper anode box 20, a lower frame 6, and a lower anode box 21. The upper anode box 20 is disposed within the upper frame 7. The lower frame 6 is fixedly disposed and located below the upper frame 7. The lower anode box 21 is disposed within the lower frame 6; the conveying structure for the TGV glass substrate is disposed between the upper frame 7 and the lower frame 6.

[0028] This application also proposes a horizontal electroplating line, comprising: the aforementioned anode box.

[0029] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by this application.

Claims

1. A conveying structure for TGV glass substrates, characterized in that, include: Multiple spaced-apart lower supports (1); Multiple spaced lower wheel pieces (2) are rotatably connected to the upper part of the lower bracket (1); all the lower wheel pieces (2) on the same lower bracket (1) are located in the same straight line along the conveying direction of the TGV glass substrate (3) and at the same height; Multiple spaced upper supports (4); Multiple spaced upper wheel plates (5) are rotatably connected to the lower part of the upper bracket (4); all upper wheel plates (5) on the same upper bracket (4) are located on the same straight line along the conveying direction of the TGV glass substrate (3) and at the same height; the number of upper wheel plates (5) and lower wheel plates (2) are the same and they are arranged in a one-to-one correspondence; the one-to-one corresponding upper wheel plates (5) and lower wheel plates (2) are arranged on the same vertical plane; the upper wheel plates (5) and lower wheel plates (2) are adapted to clamp the TGV glass substrate (3) and convey the TGV glass substrate (3) when the upper wheel plates (5) and lower wheel plates (2) rotate.

2. The conveying structure for TGV glass substrates according to claim 1, characterized in that, Multiple spaced lower supports (1) are arranged in a direction parallel to the conveying direction of the TGV glass substrate (3); multiple spaced upper supports (4) are arranged in a direction parallel to the conveying direction of the TGV glass substrate (3), the number of lower supports (1) and upper supports (4) are the same, and they are arranged in a one-to-one correspondence; the one-to-one correspondence of the lower supports (1) and upper supports (4) is arranged on the same vertical plane.

3. The conveying structure for TGV glass substrates according to claim 2, characterized in that, The two ends of the lower bracket (1) are respectively placed on the two side frames of the lower frame (6); multiple upper jet branch pipes (8) are fixed at intervals on the upper frame (7), and the upper jet branch pipes (8) are arranged in a direction perpendicular to the conveying direction of the TGV glass substrate (3); a first support structure is provided on the upper bracket (4) at the part between the two upper wheel pieces (5); the position of the first support structure corresponds to the position of the upper jet branch pipes (8); the upper jet branch pipes (8) pass through the first support structure of the upper bracket (4) to support the upper bracket (4); the first support structure is a first groove (9) with an opening facing downward and / or a first through hole (10).

4. The conveying structure for TGV glass substrates according to claim 3, characterized in that, Multiple lower jet branch pipes (11) are fixed at intervals on the lower frame (6). The lower jet branch pipes (11) are arranged in a direction perpendicular to the conveying direction of the TGV glass substrate (3). A second support structure is provided on the lower bracket (1) at the position between the two lower wheel pieces (2). The position of the second support structure corresponds to the position of the lower jet branch pipes (11). The lower jet branch pipes (11) pass through the second support structure. The second support structure is a second through hole (12) and / or a second groove (13) with an upward opening.

5. The conveying structure for TGV glass substrates according to claim 4, characterized in that, The upper bracket (4) and the lower bracket (1) are both plate parts; the lower wheel piece (2) and the lower bracket (1) are connected by a first bolt (14) through the first bolt (14) and a first nut (15) screwed on the protruding end of the first bolt (14); the upper wheel piece (5) and the upper bracket (4) are connected by a second bolt (16) through the second bolt (16) and a second nut (17) screwed on the protruding end of the second bolt (16).

6. The conveying structure for TGV glass substrates according to claim 5, characterized in that, The upper bracket (4) is provided with a first weight reduction groove (18) in the part between the two upper wheel pieces (5) where no first support structure is provided, and the lower bracket (1) is provided with a second weight reduction groove (19) in the part between the two lower wheel pieces (2) where no second support structure is provided.

7. The transport structure for TGV glass substrates according to any one of claims 1-6, characterized in that, The thickness of the TGV glass substrate (3) ranges from 0.3 mm to 2.0 mm.

8. An anode box, characterized in that, include: The transport structure for TGV glass substrates according to any one of claims 1-7.

9. The anode box according to claim 8, characterized in that, Also includes: Upper frame (7); The upper anode box (20) is disposed within the upper frame (7); The lower frame (6) is fixedly set, and the lower frame (6) is located below the upper frame (7); The lower anode box (21) is disposed within the lower frame (6); the conveying structure for the TGV glass substrate is disposed between the upper frame (7) and the lower frame (6).

10. A horizontal electroplating line, characterized in that, include: The anode box as described in claim 8 or 9.

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