A single crystal furnace exhaust system and single crystal furnace
Patent Information
- Application Number
- CN202522041596.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-22
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2035-09-22
AI Technical Summary
之后对排气管进行清理时，由于氧化物富集大量的热量，在突然接触空气后会剧烈燃烧，并存在发生闪爆的风险，造成工人灼伤
本实用新型单晶炉排气系统在排气竖管上设置第一通气孔，在排气竖管上设置第二通气孔，除氧装置分别与第一通气孔和第二通气孔连通，通过第一通气孔和第二通气孔向排气竖管和排气横管内通入气体，将排气管内壁附着的氧化物吹拂，使氧化物脱落，促使氧化物随抽空气流排出排气管外，减少排气管内富集的氧化物，降低排气管闪爆的风险，提高生产安全性，同时改善车间环境，还降低单晶炉的清理难度和工作量。
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Figure CN224858484U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of exhaust in single crystal furnaces, and particularly to an exhaust system for single crystal furnaces and a single crystal furnace. Background Technology
[0002] Single-crystal ingots are widely used in the photovoltaic and semiconductor industries, and the single-crystal furnace is the main equipment for producing them. During the operation of the single-crystal furnace, molten silicon and a high-purity quartz crucible continuously react to produce a large amount of silicon oxide, which is extracted from the furnace through the exhaust system. After the single-crystal furnace production cycle is completed, the exhaust system is used to evacuate the furnace. The exhaust system is usually located at the bottom of the furnace and includes an exhaust pipe and a vacuum pump. The vacuum pump evacuates the furnace through the exhaust pipe. During this process, oxides accumulate in the exhaust pipe. When the exhaust pipe is subsequently cleaned, the oxides, due to their high heat content, can burn violently upon sudden contact with air, posing a risk of flash explosion and burns to workers.
[0003] To address this issue, workers take protective measures before opening the exhaust pipe cover to allow the oxide polymer to burn slowly, but this doesn't effectively solve the problem. This is because, although the oxide polymer cools upon contact with air, its internal temperature remains high. During the process of workers cleaning, stirring, and breaking up the oxide polymer, violent combustion still occurs, posing a risk of burns. Furthermore, flash explosions of the exhaust pipe frequently occur during single-crystal furnace production, causing burns to workers. Simultaneously, the dispersed dust disrupts normal production operations in the workshop. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a single crystal furnace exhaust system that reduces oxide content and improves production safety.
[0005] The technical problem to be solved by this utility model is to provide a single crystal furnace including the single crystal furnace exhaust system.
[0006] To solve the above-mentioned technical problems, this utility model provides a single crystal furnace exhaust system, which is set at the bottom of the single crystal furnace and includes an exhaust pipe, an oxygen removal device and a vacuum pumping device. The exhaust pipe includes an exhaust vertical pipe and an exhaust horizontal pipe, and the exhaust vertical pipe and the vacuum pumping device are respectively connected to the exhaust horizontal pipe. The outer wall of the exhaust vertical pipe is provided with a first vent hole communicating with the exhaust vertical pipe, and the outer wall of the exhaust horizontal pipe is provided with a second vent hole communicating with the exhaust horizontal pipe. The deoxygenation device is connected to the first vent and the second vent to introduce gas into the exhaust vertical pipe and the exhaust horizontal pipe.
[0007] As an improvement to the above solution, the exhaust vertical pipe includes a first pipe section and a second pipe section, the first pipe section being connected to the single crystal furnace, and the second pipe section being connected to the exhaust horizontal pipe; The first vent is located on the outer wall of the second pipe section, and the first vent is arranged along the circumference of the second pipe section.
[0008] As an improvement to the above solution, an overflow pipe is provided on the outer wall of the first pipe section.
[0009] As an improvement to the above solution, a third vent is provided at the connection between the first pipe section and the overflow pipe, and the axis of the third vent passes through the second pipe section.
[0010] As an improvement to the above solution, the diameter of the first vent hole is 10-30mm; The diameter of the second vent is 10-30 mm; The diameter of the third vent is 10-30 mm.
[0011] As an improvement to the above solution, the first pipe section is curved, and the second pipe section is straight.
[0012] As an improvement to the above solution, the outer wall of the exhaust horizontal pipe is provided with several sets of second vent holes arranged along the axial direction of the exhaust horizontal pipe.
[0013] As an improvement to the above scheme, the second vents in two adjacent groups are staggered.
[0014] As an improvement to the above solution, exhaust pipe caps for sealing the ports are provided at both ends of the exhaust horizontal pipe.
[0015] As an improvement to the above solution, the deoxygenation device includes a deoxygenation source, a gas pipe, and a solenoid valve. The deoxygenation source is connected to a first vent and a second vent through the gas pipe. The solenoid valve is located on the gas pipe.
[0016] As an improvement to the above solution, the vacuuming device includes a connecting pipe and a vacuuming mechanism, wherein the vacuuming mechanism is connected to the exhaust horizontal pipe through the connecting pipe. The gas is an inert gas; The pressure of the gas is 2-5 kgf / cm3.
[0017] Accordingly, this utility model also provides a single crystal furnace, characterized in that it includes a chassis and the above-mentioned single crystal furnace exhaust system, wherein the chassis is provided with an air passage hole, one end of the exhaust vertical pipe is connected to the air passage hole, and the other end is connected to the exhaust horizontal pipe.
[0018] The following are the beneficial effects of implementing this utility model: This utility model's single crystal furnace exhaust system has a first vent hole and a second vent hole on the exhaust vertical pipe. The deoxygenation device is connected to the first and second vent holes respectively. Gas is introduced into the exhaust vertical pipe and the exhaust horizontal pipe through the first and second vent holes to blow away the oxides adhering to the inner wall of the exhaust pipe, causing the oxides to fall off and be discharged out of the exhaust pipe with the airflow. This reduces the oxides accumulated in the exhaust pipe, lowers the risk of flash explosion in the exhaust pipe, improves production safety, improves the workshop environment, and reduces the difficulty and workload of cleaning the single crystal furnace. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the exhaust system of the single crystal furnace of this utility model; Figure 2 yes Figure 1 Schematic diagram of the connection structure between the second pipe section, the exhaust horizontal pipe and the connecting pipe; Figure 3 yes Figure 1 Schematic diagram of the connection structure between the first pipe section and the overflow pipe. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the following will describe this utility model in further detail with reference to the accompanying drawings. It is hereby declared that the terms "up," "down," "left," "right," "front," "back," "inner," and "outer," etc., appearing or about to appear in this document, are based solely on the accompanying drawings and are not intended to specifically limit this utility model.
[0021] See Figure 1-3 This utility model discloses a single crystal furnace exhaust system, which is set at the bottom of the single crystal furnace and includes an exhaust pipe, an oxygen removal device and a vacuum device. The exhaust pipe includes an exhaust vertical pipe 1 and an exhaust horizontal pipe 2, and the exhaust vertical pipe 1 and the vacuum device are respectively connected to the exhaust horizontal pipe 2.
[0022] The outer wall of the exhaust vertical pipe 1 is provided with a first vent hole 13 communicating with the exhaust vertical pipe 1, and the outer wall of the exhaust horizontal pipe 2 is provided with a second vent hole 21 communicating with the exhaust horizontal pipe 2.
[0023] The deoxygenation device is connected to the first vent 13 and the second vent 21 respectively to introduce gas into the exhaust vertical pipe 1 and the exhaust horizontal pipe 2.
[0024] This utility model's single crystal furnace exhaust system has a first vent hole and a second vent hole on the exhaust vertical pipe. The deoxygenation device is connected to the first and second vent holes respectively. Gas is introduced into the exhaust vertical pipe and the exhaust horizontal pipe through the first and second vent holes to blow away the oxides adhering to the inner wall of the exhaust pipe, causing the oxides to fall off and be discharged out of the exhaust pipe with the airflow. This reduces the oxides accumulated in the exhaust pipe, lowers the risk of flash explosion in the exhaust pipe, improves production safety, improves the workshop environment, and reduces the difficulty and workload of cleaning the single crystal furnace.
[0025] Specifically, such as Figure 1-3 As shown, the exhaust vertical pipe 1 includes a first pipe section 11 and a second pipe section 12. The first pipe section 11 is connected to the single crystal furnace, and the second pipe section 12 is connected to the exhaust horizontal pipe 2. The first vent hole 13 is provided on the outer side wall of the second pipe section 12, and the first vent hole 13 is arranged along the circumference of the second pipe section 12.
[0026] The gas inside the single crystal furnace flows sequentially through the first pipe section, the second pipe section, and the exhaust horizontal pipe. Oxides are mainly concentrated in the second pipe section and the exhaust horizontal pipe. Through-holes are located on the second pipe section and the exhaust horizontal pipe, allowing gas to be introduced into them. This blows away the oxides adhering to the inner walls of the pipes, causing them to detach and be discharged out of the exhaust pipe with the airflow. This reduces the amount of oxides concentrated in the exhaust pipe, lowers the risk of flash explosion, improves production safety, improves the workshop environment, and reduces the difficulty and workload of cleaning the single crystal furnace. The first vent is located circumferentially along the second pipe section, ensuring uniform gas distribution within the second pipe section and effective oxide removal.
[0027] In some embodiments, the first pipe section 11 is curved, and the second pipe section 12 is straight. Gas flowing out of the single crystal furnace first flows through the curved first pipe section and then into the straight second pipe section. Oxides are guided into the second pipe section by the curved first pipe section, and oxides are less likely to accumulate in the first pipe section.
[0028] In some embodiments, such as Figure 1 , 3 As shown, the outer wall of the first pipe section 11 is provided with an overflow pipe 3. The overflow pipe prevents high-temperature residue from directly entering the vacuum pumping device, which could damage the device and shorten its service life. The overflow pipe has an overflow cap at its end, which can be opened for cleaning.
[0029] In some embodiments, such as Figure 3As shown, a third vent is provided at the connection between the first pipe section and the overflow pipe, and the axis of the third vent passes through the second pipe section. Since oxides tend to adhere more easily to the relatively flat latter half of the first pipe section and the second pipe section, the third vent allows gas to directly blow into the first and second pipe sections, increasing the blowing force of the gas on the oxides and resulting in a better cleaning effect.
[0030] In some embodiments, the diameter of the first vent is 10-30 mm; the diameter of the second vent is 10-30 mm; and the diameter of the third vent is 10-30 mm. If the diameter of the vent is less than 10 mm, the air pressure is insufficient, making it difficult to remove the oxides; if the diameter of the vent is greater than 30 mm, the air pressure is too high, causing the exhaust pipe to vibrate easily, affecting the connection structure and shortening the service life of the exhaust pipe.
[0031] In some embodiments, the diameter of the first vent is 15-25 mm; the diameter of the second vent is 15-25 mm; and the diameter of the third vent is 15-25 mm.
[0032] In some embodiments, the diameter of the first vent is 18-22 mm; the diameter of the second vent is 18-22 mm; and the diameter of the third vent is 18-22 mm.
[0033] In some embodiments, such as Figure 1-2 As shown, the outer wall of the exhaust horizontal pipe 2 is provided with several sets of second vent holes 21 arranged along the axial direction of the exhaust horizontal pipe 2. Each set of second vent holes is arranged at intervals along the axial direction of the exhaust horizontal pipe. The multiple sets of second vent holes work together to evenly inject gas into the exhaust horizontal pipe, ensuring that every corner of the exhaust horizontal pipe is affected by the gas, effectively blowing away the oxides attached to the inner wall of the exhaust pipe and causing the oxides to fall off.
[0034] In some embodiments, the two adjacent sets of the second vent holes 21 are staggered, so that every corner inside the exhaust pipe can be affected by the gas, effectively blowing away the oxides attached to the inner wall of the exhaust pipe and causing the oxides to fall off.
[0035] In some embodiments, such as Figure 1-2 As shown, each end of the exhaust horizontal pipe 2 is provided with an exhaust pipe cap 22 for sealing the port. The exhaust pipe caps ensure that the exhaust horizontal pipe remains sealed and also facilitate cleaning of the exhaust horizontal pipe.
[0036] In some embodiments, the gas is an inert gas to prevent it from reacting with the substances inside the tube.
[0037] In some embodiments, the inert gas is nitrogen, but not limited thereto.
[0038] In some embodiments, the pressure of the gas is 2-5 kgf / cm³. If the gas pressure is less than 2 kgf / cm³, it cannot agitate the oxides or cause them to fall off; if the gas pressure is greater than 5 kgf / cm³, it may blow the oxides or the like towards the furnace platform.
[0039] In some embodiments, the pressure of the gas is 2-4 kgf / cm³. In some embodiments, the pressure of the gas is 2-3 kgf / cm³. In some embodiments, the pressure of the gas is 2.5 kgf / cm³.
[0040] Furthermore, the deoxygenation device includes a deoxygenation source (not shown in the figure), a gas pipe (not shown in the figure), and a solenoid valve (not shown in the figure). The deoxygenation source is connected to the first vent 13 and the second vent 21 via the gas pipe; the solenoid valve is located on the gas pipe. The deoxygenation source is used to supply gas, and the solenoid valve is used to control the gas flow. When it is necessary to introduce gas into the exhaust pipe to purge oxides, the solenoid valve is opened. Otherwise, the solenoid valve is closed. The inert gas can be supplied and discharged in a pulse manner under the action of the solenoid valve.
[0041] Furthermore, such as Figure 1-2 As shown, the vacuuming device includes a connecting pipe 4 and a vacuuming mechanism, which is connected to the exhaust horizontal pipe 2 via the connecting pipe 4. The vacuuming mechanism includes a vacuum pump and a filter. The vacuum pump evacuates the exhaust pipe and the furnace through the connecting pipe, and the filter is installed on the connecting pipe to filter the extracted gas, effectively protecting the vacuum pump and extending its service life.
[0042] Accordingly, see Figure 1-3 This utility model also discloses a single crystal furnace, including a chassis 5 and the aforementioned single crystal furnace exhaust system. The chassis 5 is provided with an air passage 51. One end of the exhaust vertical pipe 1 is connected to the air passage 51, and the other end is connected to the exhaust horizontal pipe 2. The specific structure of the single crystal furnace exhaust system is as described above and will not be repeated here.
[0043] During the later stages of the single crystal furnace's operating cycle, heating will cease. However, the vacuum system will evacuate the furnace platform after the heater is shut down, promoting furnace cooling and protecting the single crystal rods. The deoxygenation device of this invention introduces inert gas directly into the exhaust pipe 60 minutes after the single crystal furnace stops heating. As the gas temperature from the main furnace chamber gradually decreases, oxides adhering to the exhaust pipe wall will detach and accumulate in the horizontal exhaust pipe with the exhaust gas flow. These accumulated oxides remain in a flammable state and will continue to burn even after a 10-hour furnace shutdown and extensive contact with air. This invention can also introduce nitrogen gas in a pulsed manner through the vent 60 minutes after the single crystal furnace stops heating, intermittently blowing away the oxides. This causes the oxides in the exhaust pipe to detach and enter the filter of the vacuum system with the gas, thus removing the oxides.
[0044] In summary, this utility model provides a single crystal furnace exhaust system and a single crystal furnace, which reduces oxide content and improves production safety.
[0045] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.
Claims
1. A single crystal furnace exhaust system, disposed at the bottom of the single crystal furnace, characterized in that, It includes an exhaust pipe, a deoxygenation device, and a vacuuming device. The exhaust pipe includes an exhaust vertical pipe and an exhaust horizontal pipe, and the exhaust vertical pipe and the vacuuming device are respectively connected to the exhaust horizontal pipe. The outer wall of the exhaust vertical pipe is provided with a first vent hole communicating with the exhaust vertical pipe, and the outer wall of the exhaust horizontal pipe is provided with a second vent hole communicating with the exhaust horizontal pipe. The deoxygenation device is connected to the first vent and the second vent to introduce gas into the exhaust vertical pipe and the exhaust horizontal pipe.
2. The single crystal furnace exhaust system as described in claim 1, characterized in that, The exhaust vertical pipe includes a first pipe section and a second pipe section, the first pipe section being connected to the single crystal furnace, and the second pipe section being connected to the exhaust horizontal pipe; The first vent is located on the outer wall of the second pipe section, and the first vent is arranged along the circumference of the second pipe section.
3. The single crystal furnace exhaust system as described in claim 2, characterized in that, An overflow pipe is provided on the outer wall of the first pipe section.
4. The single crystal furnace exhaust system as described in claim 3, characterized in that, A third vent is provided at the connection between the first pipe section and the overflow pipe, and the axis of the third vent passes through the second pipe section.
5. The single crystal furnace exhaust system as described in claim 4, characterized in that, The diameter of the first vent is 10-30 mm; The diameter of the second vent is 10-30 mm; The diameter of the third vent is 10-30 mm.
6. The single crystal furnace exhaust system as described in claim 2, characterized in that, The first pipe section is curved, and the second pipe section is straight.
7. The single crystal furnace exhaust system as described in claim 1, characterized in that, The outer wall of the exhaust horizontal pipe is provided with several sets of second vent holes arranged along the axial direction of the exhaust horizontal pipe.
8. The single crystal furnace exhaust system as described in claim 7, characterized in that, The second vent holes in two adjacent groups are staggered.
9. The single crystal furnace exhaust system as described in claim 1, characterized in that, The exhaust pipe is provided with exhaust pipe caps at both ends for sealing the ports.
10. The single crystal furnace exhaust system as described in claim 1, characterized in that, The deoxygenation device includes a deoxygenation source, a duct, and a solenoid valve. The deoxygenation source is connected to a first vent and a second vent via the duct. The solenoid valve is located on the duct.
11. The single crystal furnace exhaust system as described in claim 1, characterized in that, The vacuuming device includes a connecting pipe and a vacuuming mechanism, wherein the vacuuming mechanism is connected to the exhaust horizontal pipe through the connecting pipe. The gas is an inert gas; The pressure of the gas is 2-5 kgf / cm3.
12. A single crystal furnace, characterized in that, The system includes a chassis and a single crystal furnace exhaust system as described in any one of claims 1-11, wherein the chassis is provided with an air passage hole, one end of the exhaust vertical pipe is connected to the air passage hole, and the other end is connected to the exhaust horizontal pipe.