A contamination resistant vacuum chamber viewing window

Abstract

The utility model relates to an anti-pollution vacuum cavity observation window belongs to vacuum cavity equipment technical field, the utility model discloses through setting the window part, extension protection structure, filter portion to form the special observation window structure that can directly dock vacuum cavity external surface in proper order, not only can be away from the part of reaction in vacuum cavity, still can pass through the isolation valve in extension protection structure and block the pollutant particle, avoid the electromagnetic field of reaction in vacuum cavity, reduce the opportunity of direct contact of the transparent plate of observation port and the pollution particle of reaction generation. In addition, the filter screen of filter portion can block pollution when the isolation valve closes the valve, further improve the blocking effect. The utility model provides three layers of insurance, makes the maintenance replacement period of observation window greatly increase, reduces the total maintenance time of equipment, consumable loss rate, effectively saves the manual and cost.

Description

Technical Field

[0001] This utility model relates to a pollution-resistant vacuum chamber observation window, belonging to the technical field of vacuum chamber equipment. Background Technology

[0002] In vacuum applications (such as semiconductor manufacturing, material coating, and vacuum drying equipment), observation windows are typically installed on the outside of the vacuum chamber. These are key components for ensuring normal equipment operation and process monitoring. Their core function is to allow operators to observe the state of materials, reaction processes, or the operation of equipment components in real time without disrupting the vacuum environment. For example, this includes monitoring the film formation effect on the substrate surface during coating and observing morphological changes of materials within the drying chamber. Therefore, the transparency and stability of the observation window directly affect the accuracy of process judgment and the operating efficiency of the equipment.

[0003] The current mainstream traditional observation window structure typically involves fixing the glass component of the window directly to the outer wall of the vacuum chamber. A rubber or metal sealing ring tightly seals the glass to the chamber wall, thus isolating the vacuum side from the external atmosphere and ensuring a stable vacuum level within the chamber. The transparent glass allows for real-time observation. This structure is widely used in various vacuum devices due to its simple design and low manufacturing cost.

[0004] As the equipment is used for longer periods, the shortcomings of traditional observation window structures become increasingly apparent, mainly in terms of contamination and maintenance costs. 1. Susceptible to contamination from internal reactions: Because the glass is directly attached to the outside of the vacuum chamber, its inner surface facing inward is completely exposed to the internal environment. When chemical reactions, plasma treatment, or material evaporation processes occur inside the chamber, dust, volatiles, and deposits generated by the reaction easily adhere to the inner surface of the glass, forming stains that are difficult to clean. This causes the glass's transparency to decrease rapidly, and in severe cases, it can even completely obstruct the view, making normal observation impossible.

[0005] 2. High frequency and high cost: Once the glass becomes contaminated, the machine must be shut down and the vacuum environment of the cavity must be broken before disassembly, cleaning, or replacement can be performed. This not only interrupts the production process and reduces equipment utilization, but also increases additional costs such as seal wear and labor maintenance. Especially in high-frequency process scenarios, the maintenance cycle of the observation window will be significantly shortened. Frequent disassembly and maintenance may also lead to a decline in the sealing performance of the seals, further increasing the risk of air leakage in the cavity and creating a vicious cycle of "contamination-maintenance-recontamination".

[0006] Therefore, it is necessary to find an observation window structure that can overcome the above problems. Utility Model Content

[0007] To address the above problems, this utility model provides a contamination-resistant vacuum chamber observation window, comprising: The window section is provided with an observation port, and a sealing flange is provided around the observation port; The filter section is installed on the outer surface of the vacuum chamber; The protective structure is extended to connect the window section and the filter section, and a protective channel is formed inside. An isolation valve is inserted into an extended protection structure and can control the opening and closing of the protection channel.

[0008] Furthermore, the extended protective structure is a cylindrical structure, allowing direct observation of the filter section and its interior from the outside through the observation port.

[0009] Furthermore, the observation port is covered with a transparent plate.

[0010] Furthermore, the observation port is sealed with a quartz glass plate.

[0011] Furthermore, the isolation valve is inserted in the middle of the extended protection structure, forming a barrier in the middle of the cylinder structure. The opening and closing of the isolation valve is controlled to control the opening and closing of the protection channel.

[0012] Furthermore, a rotary motor is provided on the top of the isolation valve.

[0013] Furthermore, the sealing flange is provided with multiple positioning holes, and the sealing flange is assembled into the positioning holes and connected to the observation port by fasteners, thereby encapsulating the outer periphery of the observation port.

[0014] Furthermore, a filter screen is provided at the center of the filtration section.

[0015] Furthermore, the filter screen is a metal filter screen.

[0016] The beneficial effects of this utility model are: This invention features a unique observation window structure formed by sequentially connecting a window section, an extended protective structure, and a filter section. This structure allows direct contact with the outer surface of a vacuum chamber. It not only keeps the observation window away from the reaction area within the vacuum chamber but also blocks contaminant particles through an isolation valve in the extended protective structure. This avoids the electromagnetic field generated by the reaction within the vacuum chamber, reducing the chance of direct contact between the transparent plate of the observation port and contaminant particles generated during the reaction. Furthermore, the inner wall of the protective channel absorbs some contaminant particles, causing their energy to decay due to refraction. In addition, the filter screen in the filter section blocks contamination when the isolation valve is closed, further enhancing the blocking effect. This invention provides three layers of protection, significantly increasing the maintenance and replacement cycle of the observation window, reducing overall equipment maintenance time and consumable consumption, and effectively saving labor and costs. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of the overall structure in one embodiment of the present invention; Figure 2 This is a cross-sectional view of the overall structure in one embodiment of the present invention; In the diagram: 1. Window section; 2. Filter section; 3. Extended protective structure; 4. Isolation valve; 5. Observation port; 6. Sealing flange; 7. Filter screen. Detailed Implementation

[0018] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0019] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] This invention provides a contamination-resistant vacuum chamber observation window, comprising a window portion, an extended protective structure, and a filter portion connected in sequence.

[0022] exist Figure 2 In the example, the window is a component located away from the vacuum chamber, with an observation port at its center. To enhance the sealing of the window, a sealing flange is provided around the observation port for precise installation and positioning.

[0023] In some embodiments, the observation port is covered with a transparent plate for observing the reaction within the vacuum chamber through the transparent plate. Figures 1-2 In the example, the transparent plate is a quartz glass plate.

[0024] In some implementations, the filter is mounted on the outer surface of the vacuum chamber, which is equivalent to a component that directly connects to the vacuum chamber. A chamber-side flange can also be provided on its outer periphery to seal it.

[0025] exist Figure 2 In the example, a filter screen is provided at the center of the filtration section, which can filter most pollutant particles and provides a certain degree of pollution barrier effect without opening the isolation valve. Preferably, a metal filter screen is used.

[0026] In some embodiments, the extended protective structure connects the window portion and the filter portion and forms a protective channel inside; Figures 1-2 In the example, the extended protective structure is a cylindrical structure. From the outside, the filter section and its interior can be directly observed through the observation port via the extended protective structure, which also forms a viewing channel. By moving the observation window structure away from the cavity to avoid the electromagnetic field of the reaction inside the vacuum cavity, the quartz glass is made to have less direct contact with the pollutant particles generated by the reaction. Furthermore, the inner channel wall absorbs some of the pollutant particles, and the particle refraction causes their energy to decay.

[0027] exist Figures 1-2 In the example, the isolation valve is inserted into the extended protection structure and can control the opening and closing of the protection channel. Further, the isolation valve is inserted in the middle of the extended protection structure, forming a barrier in the middle of the cylinder structure, and the opening and closing of the protection channel is controlled by controlling the opening and closing of the isolation valve.

[0028] Furthermore, a rotary motor is installed on top of the isolation valve, and the rotation angle and number of steps of the rotary motor are controlled by a central control computer PLC. When the controller sends a pulse, it rotates by a fixed angle. The degree of closure of the isolation valve inside the vacuum chamber observation window is controlled by the rotation angle of the rotary motor.

[0029] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the claims.

Claims

1. A contamination-resistant observation window for a vacuum cavity, characterized in that, include: The window section is provided with an observation port, and a sealing flange is provided around the observation port; The filter section is installed on the outer surface of the vacuum chamber; The protective structure is extended to connect the window section and the filter section, and a protective channel is formed inside. An isolation valve is inserted into an extended protection structure and can control the opening and closing of the protection channel.

2. The vacuum cavity observation window according to claim 1, characterized in that, The extended protective structure is a cylindrical structure, allowing direct observation of the filter section and its interior from the outside through the observation port.

3. The vacuum cavity observation window according to claim 2, characterized in that, The observation port is covered with a transparent plate.

4. The vacuum cavity observation window according to claim 3, characterized in that, The observation port is covered with a quartz glass plate.

5. The vacuum cavity observation window according to claim 3, characterized in that, The isolation valve is inserted in the middle of the extended protection structure, forming a barrier in the middle of the cylinder structure. The opening and closing of the isolation valve is controlled to control the opening and closing of the protection channel.

6. The vacuum cavity observation window according to claim 5, characterized in that, A rotary motor is installed on the top of the isolation valve.

7. The vacuum cavity observation window according to claim 1, characterized in that, The sealing flange is provided with multiple positioning holes. The sealing flange is assembled into the positioning holes and connected to the observation port by fasteners, and then sealed to the outer periphery of the observation port.

8. The vacuum cavity observation window according to claim 1, characterized in that, A filter screen is provided at the center of the filtration section.

9. The vacuum cavity observation window according to claim 8, characterized in that, The filter screen is a metal filter screen.

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