Dry pump suction inlet filter device

Abstract

The utility model relates to filter device technical field especially discloses a kind of dry pump air inlet filter devices, including filter air outlet pipe, when needing to detect filtered gas, upwardly push and pull operating plate, drive valve rod limit support along support sliding groove vertically upward sliding, until valve rod limit support lower end completely separates from the outside of stop ball valve valve rod, remove the rotation restriction to stop ball valve, rotate stop ball valve valve rod, filtered gas will enter sampling communication pipe along sampling through hole, flow out through stop ball valve outlet, the sealing connection of the sampling interface of detection equipment and stop ball valve outlet, ensure that there is no leakage at the junction, according to the detection requirement, collect appropriate gas sample, whole process does not need to disassemble flange or disconnect gas path, simplify detection operation process, shorten sampling time consumption, both avoid production interruption to guarantee the continuity and stability of industrial production, can also realize the rapid, efficient detection of filtered gas, and then improve sampling work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of filtration device technology, and in particular to a dry pump inlet filtration device. Background Technology

[0002] Dry pumps, as core equipment for gas transmission and vacuum acquisition in industrial production, are widely used in scenarios with stringent requirements for gas purity, such as semiconductor manufacturing, precision machining, and chemical reactions. To prevent dust, particulate matter, and other impurities from entering the dry pump and causing rotor wear, gas passage blockage, or a decrease in vacuum, a filter device is usually installed at the inlet of the dry pump to pre-treat the incoming air.

[0003] Existing dust filters primarily use a metal housing to provide structural support and containment space, ensuring overall sealing and pressure resistance. High-precision filter elements intercept dust particles of varying sizes. Connections to equipment such as vacuum pump inlet pipes are achieved through inlet and outlet flanges, ensuring unobstructed and sealed airflow.

[0004] However, in actual production, the purity test of filtered gas is a key link to ensure the stability of production process and product quality. It is necessary to sample and test the filtered gas regularly or as needed. When it is necessary to obtain a sample of filtered gas, it is often necessary to disassemble the outlet flange or disconnect the gas line. This operation method is not only cumbersome and time-consuming, but also causes gas line interruption, affecting the continuity of production. It cannot meet the needs of rapid, efficient and safe testing of filtered gas. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a dry pump inlet filtration device, which solves the technical problem that in actual production, the purity detection of filtered gas is a key link in ensuring the stability of production processes and product quality. It is necessary to sample and test the filtered gas regularly or as needed. When it is necessary to obtain a sample of the filtered gas, it is often necessary to disassemble the outlet flange or disconnect the gas line connection. This operation method is not only cumbersome and time-consuming, but also causes gas line interruption, affecting the continuity of production. It cannot meet the technical problem of meeting the needs for rapid, efficient and safe detection of filtered gas.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A dry pump inlet filtration device includes a filter outlet pipe. A sampling mechanism for gas detection is provided on the outside of the filter outlet pipe. The sampling mechanism includes a sampling through hole, a sampling connecting pipe, and a shut-off ball valve. The sampling through hole is located on the outside of the filter outlet pipe and communicates with the inside of the filter outlet pipe. One end of the sampling connecting pipe is located on the side of the filter outlet pipe corresponding to the sampling through hole. The shut-off ball valve is fixedly installed on the other end of the sampling connecting pipe. A valve stem limiting bracket for limiting the rotation of the shut-off ball valve stem is provided on the side of the filter outlet pipe corresponding to the shut-off ball valve.

[0007] Preferably, a connecting nut is fixedly installed on the side of the filter outlet pipe corresponding to the sampling through hole. A hollow locking screw is connected to the internal thread of the connecting nut. The hollow locking screw is fixedly installed at the end of the sampling connecting pipe. The hollow locking screw has a hollow structure, and its internal channel is connected to the internal channel of the sampling connecting pipe. This allows the gas in the filter outlet pipe to enter the sampling connecting pipe through the sampling through hole and the internal channel of the hollow locking screw. The connecting nut and the hollow locking screw are threadedly connected to fix the sampling connecting pipe and the filter outlet pipe. The hollow locking screw provides a flow channel for the gas, forming a complete sampling path with the sampling connecting pipe. The threaded connection is stable and reliable, and facilitates the disassembly and assembly of the sampling mechanism.

[0008] Preferably, a sealing gasket is fitted on the outside of the hollow locking screw to fill the gap at the connection between the sampling connecting tube and the connecting nut, preventing gas from leaking from the periphery of the sampling through hole, ensuring the purity of the sampled gas, and improving the overall sealing performance.

[0009] Preferably, the filter outlet pipe has a bracket sliding groove on its exterior. The upper end of the valve stem limiting bracket is slidably connected to the inside of the bracket sliding groove. The filter outlet pipe has an operation guide hole on the side corresponding to the bracket sliding groove. A lifting operation plate is slidably connected inside the operation guide hole. The end of the lifting operation plate is fixedly installed on the end of the valve stem limiting bracket. The lower end of the valve stem limiting bracket is engaged with the valve stem of the shut-off ball valve, restricting its rotation. The bracket sliding groove provides a sliding path for the valve stem limiting bracket. The lifting operation plate drives the valve stem limiting bracket to move. The operation guide hole guides the sliding of the lifting operation plate, preventing accidental opening of the shut-off ball valve due to equipment vibration or accidental contact by personnel, thus improving operational safety. The lifting operation plate design makes the movement of the valve stem limiting bracket more convenient and the operation efficiency higher.

[0010] Preferably, the valve stem limiting bracket has limiting springs on both sides to restrict its position. Both sides of the valve stem limiting bracket have elastic deformation grooves. One end of the limiting spring is fixedly connected inside the elastic deformation groove, and the other end extends outward. The limiting spring abuts against the inner wall of the filter outlet pipe through its own elasticity. The elastic deformation groove provides compression deformation space for the limiting spring, achieving dual positioning of the valve stem limiting bracket. After resetting, the fixing is more secure. Pressing the limiting spring releases the limiting position, making operation simple and requiring no additional tools.

[0011] Compared with the prior art, the present invention has the following beneficial effects: When the dry pump is working, the gas is filtered by the filter body and then enters the dry pump inlet through the filter outlet pipe. When it is necessary to test the filtered gas, press the limiting springs on both sides of the valve stem limiting bracket with your fingers to compress the elastic ends of the limiting springs and fully embed them into the elastic deformation groove. Keep pressing and push the lifting operation plate upward smoothly to drive the valve stem limiting bracket to slide vertically upward along the bracket sliding groove until the lower end of the valve stem limiting bracket is completely separated from the outside of the shut-off ball valve stem, completely releasing the rotation restriction on the shut-off ball valve. Rotate the shut-off ball valve stem, and the filtered gas will enter the sampling connecting pipe through the sampling through hole and flow out stably through the shut-off ball valve outlet. Seal the connection between the sampling interface of the testing equipment and the shut-off ball valve outlet. It can be connected through a hose to ensure that there is no leakage at the connection. Collect an appropriate amount of gas sample according to the testing requirements. The entire process requires no disassembly of the flange or disconnection of the gas line, simplifying the testing operation process and shortening the sampling time. This avoids production interruptions to ensure the continuity and stability of industrial production, while also enabling rapid and efficient testing of filtered gas, thereby improving sampling efficiency. Attached Figure Description

[0012] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This utility model Figure 1 Exploded view of the middle stop ball valve; Figure 3 This utility model Figure 2 A bottom view of the air outlet pipe of the middle filter; Figure 4 This utility model Figure 3 Structural diagram of a stop ball valve; Figure 5 This utility model Figure 1Enlarged structural diagram at point A in the middle.

[0014] Legend: 1. Filter outlet pipe; 2. Sampling through hole; 3. Sampling connecting pipe; 4. Stop ball valve; 5. Valve stem limit bracket; 6. Connecting nut; 7. Hollow locking screw; 8. Sealing washer; 9. Bracket sliding groove; 10. Operation guide hole; 11. Lifting operation plate; 12. Limiting spring; 13. Elastic deformation groove. Detailed Implementation

[0015] This application provides a dry pump inlet filtration device, which effectively solves the technical problem that in actual production, the purity detection of filtered gas is a key link to ensure the stability of the production process and the quality of products. It is necessary to sample and test the filtered gas regularly or as needed. When it is necessary to obtain a sample of filtered gas, it is often necessary to disassemble the outlet flange or disconnect the gas line connection. This operation method is not only cumbersome and time-consuming, but also causes gas line interruption, affecting the continuity of production. It cannot meet the technical problem of meeting the needs for rapid, efficient and safe detection of filtered gas.

[0016] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the technical solution in this application effectively solves the problem that in actual production, the purity detection of filtered gas is a key link in ensuring the stability of the production process and the quality of the product. It requires periodic or on-demand sampling and testing of the filtered gas. However, obtaining a sample often necessitates disassembling the outlet flange or disconnecting the gas line. This method is not only cumbersome and time-consuming but also disrupts production continuity due to gas line interruptions, failing to meet the technical requirements for rapid, efficient, and safe testing of filtered gas. The overall approach is as follows: To address the problems existing in the prior art, this utility model provides a dry pump inlet filtration device, including a filter outlet pipe 1. A sampling mechanism for gas detection is provided on the outside of the filter outlet pipe 1. The sampling mechanism includes a sampling through hole 2, a sampling connecting pipe 3, and a shut-off ball valve 4. The sampling through hole 2 is opened on the outside of the filter outlet pipe 1 and communicates with the inside of the filter outlet pipe 1. One end of the sampling connecting pipe 3 is set on the side of the filter outlet pipe 1 corresponding to the sampling through hole 2. The shut-off ball valve 4 is fixedly installed on the other end of the sampling connecting pipe 3.

[0017] The sampling through hole 2 provides a channel for gas sampling, allowing the gas in the filter outlet pipe 1 to be discharged. The sampling connecting pipe 3 transports the gas sample, and the shut-off ball valve 4 controls the opening and closing of the sampling channel, realizing directional sampling of the filtered gas. The shut-off ball valve 4 can be opened and closed quickly to avoid continuous gas leakage during sampling, thereby making the sampling process controllable.

[0018] A connecting nut 6 is fixedly installed on the side of the filter outlet pipe 1 corresponding to the sampling through hole 2. A hollow locking screw 7 is threaded inside the connecting nut 6. The hollow locking screw 7 is fixedly installed at the end of the sampling connecting pipe 3. The hollow locking screw 7 has a hollow structure, and the internal channel of the hollow locking screw 7 is connected to the internal channel of the sampling connecting pipe 3. This allows the gas in the filter outlet pipe 1 to enter the sampling connecting pipe 3 through the sampling through hole 2 and the internal channel of the hollow locking screw 7.

[0019] The connecting nut 6 is threadedly connected to the hollow locking screw 7 to fix the sampling connecting pipe 3 and the filter outlet pipe 1. The hollow locking screw 7 provides a flow channel for the gas and forms a complete sampling path with the sampling connecting pipe 3. The threaded connection is stable and reliable and facilitates the disassembly and assembly of the sampling mechanism.

[0020] A sealing washer 8 is fitted on the outside of the hollow locking screw 7 to fill the gap at the connection between the sampling connecting pipe 3 and the connecting nut 6, prevent gas from leaking from the area around the sampling through hole 2, ensure the purity of the sampled gas, and improve the overall sealing performance.

[0021] A valve stem limiting bracket 5 is provided on the side of the filter outlet pipe 1 corresponding to the shut-off ball valve 4 to restrict the rotation of the valve stem. The lower end of the valve stem limiting bracket 5 is snapped onto the outside of the valve stem. A bracket sliding groove 9 is opened on the outside of the filter outlet pipe 1. The upper end of the valve stem limiting bracket 5 is slidably connected to the inside of the bracket sliding groove 9. An operation guide hole 10 is opened on the side of the filter outlet pipe 1 corresponding to the bracket sliding groove 9. A lifting operation plate 11 is slidably connected inside the operation guide hole 10. The end of the lifting operation plate 11 is fixedly installed on the end of the valve stem limiting bracket 5. The lower end of the valve stem limiting bracket 5 is snapped onto the valve stem of the shut-off ball valve 4 to restrict its rotation. The bracket sliding groove 9 provides a sliding path for the valve stem limiting bracket 5. The lifting operation plate 11 drives the valve stem limiting bracket 5 to move. The operation guide hole 10 guides the sliding of the lifting operation plate 11 to avoid the shut-off ball valve 4 from being accidentally opened due to equipment vibration or personnel touch, thereby improving operational safety. The design of the lifting operation plate 11 makes the movement of the valve stem limiting bracket 5 more convenient and the operation efficiency higher.

[0022] Both sides of the valve stem limiting bracket 5 are provided with limiting springs 12 for limiting the position of the valve stem limiting bracket 5. Both sides of the valve stem limiting bracket 5 are provided with elastic deformation grooves 13. One end of the limiting spring 12 is fixedly connected to the inside of the elastic deformation groove 13, and the other end extends outward. The limiting spring 12 abuts against the inner wall of the filter outlet pipe 1 through its own elasticity. The elastic deformation groove 13 provides compression deformation space for the limiting spring 12, realizing the dual positioning of the valve stem limiting bracket 5. After resetting, the fixation is more secure. Pressing the limiting spring 12 can release the limiting. The operation is simple and does not require additional tools.

[0023] Example 1 When the dry pump is working, the gas is filtered by the filter body and enters the dry pump inlet through the filter outlet pipe 1. When it is necessary to test the filtered gas, press the limiting springs 12 on both sides of the valve stem limiting bracket 5 with your fingers to compress the elastic ends of the limiting springs 12 and fully embed them into the elastic deformation grooves 13. Keep pressing and push the lifting operation plate 11 upward smoothly to drive the valve stem limiting bracket 5 to slide vertically upward along the bracket sliding groove 9 until the lower end of the valve stem limiting bracket 5 is completely separated from the valve stem of the shut-off ball valve 4, completely releasing the rotation restriction on the shut-off ball valve 4. Rotate the valve stem of the shut-off ball valve 4. At this time, the filtered gas will enter the sampling connecting pipe 3 through the sampling through hole 2 and flow out stably through the outlet of the shut-off ball valve 4. Seal the sampling interface of the testing equipment with the outlet of the shut-off ball valve 4. It can be connected through a hose to ensure that there is no leakage at the connection. Collect an appropriate amount of gas sample according to the testing requirements. After the test is completed, rotate the valve stem in the opposite direction to close the shut-off ball valve 4, and then push the lifting operation plate 11 down to reset the valve stem limit bracket 5. The valve stem limit bracket 5 is stuck on the outside of the valve stem, and the limit spring 12 is reset under its own elasticity. The outward extension end is tightly abutted against the inner wall of the filter outlet pipe 1, forming a double limit, which effectively prevents the valve from being opened accidentally due to equipment vibration or personnel accidental contact. The entire process requires no disassembly of the flange or disconnection of the gas line, simplifying the testing operation process and shortening the sampling time. This avoids production interruptions to ensure the continuity and stability of industrial production, while also enabling rapid and efficient testing of filtered gas, thereby improving sampling efficiency.

[0024] Example 2 When the sampling mechanism needs to be replaced or repaired, simply loosen the threaded connection between the hollow locking screw 7 and the connecting nut 6, and directly remove the sampling connecting tube 3 to carry out operations such as replacement of parts and cleaning and maintenance. There is no need to disassemble the filter body or the dry pump inlet pipe. When the operator installs the sampling mechanism, first put the sealing washer 8 on the outside of the hollow locking screw 7, then align the hollow locking screw 7 with the threaded hole of the connecting nut 6, and rotate the sampling connecting tube 3 clockwise to slowly engage the hollow locking screw 7 and the connecting nut 6. Continue to rotate until the sealing washer 8 and the end face of the connecting nut 6 are in close contact. At this time, the sealing washer 8 deforms under the squeezing action of the sampling connecting tube 3 and the connecting nut 6, filling the gap at the connection between the two and forming a reliable sealing surface, effectively preventing gas from leaking from the threaded connection between the connecting nut 6 and the hollow locking screw 7. The sampling mechanism is detachable and easy to install through the threaded connection between the hollow locking screw 7 and the connecting nut 6. The structure is simple and easy to operate, which greatly reduces the difficulty of replacing and repairing the sampling mechanism and shortens the maintenance time. During the installation process, the compression sealing design of the sealing gasket 8 can effectively prevent gas from leaking from the connection gap, which not only ensures the purity of the sampled gas, but also improves the gas path sealing of the entire filtration device and reduces gas waste.

[0025] Finally, it should be noted that the above embodiments are merely examples for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A dry pump inlet filter device, comprising a filter outlet pipe (1), characterized in that, The filter outlet pipe (1) is provided with a sampling mechanism for gas detection. The sampling mechanism includes a sampling through hole (2), a sampling connecting pipe (3), and a shut-off ball valve (4). The sampling through hole (2) is opened on the outside of the filter outlet pipe (1) and is connected to the inside of the filter outlet pipe (1). One end of the sampling connecting pipe (3) is set on the side of the filter outlet pipe (1) corresponding to the sampling through hole (2). The shut-off ball valve (4) is fixedly installed on the other end of the sampling connecting pipe (3). Among them, the filter outlet pipe (1) is provided with a valve stem limiting bracket (5) on the side corresponding to the shut-off ball valve (4) to limit the rotation of the valve stem of the shut-off ball valve (4).

2. The dry pump inlet filter device as described in claim 1, characterized in that, A connecting nut (6) is fixedly installed on one side of the filter outlet pipe (1) corresponding to the sampling through hole (2). A hollow locking screw (7) is connected to the internal thread of the connecting nut (6). The hollow locking screw (7) is fixedly installed at the end of the sampling connecting pipe (3).

3. The dry pump inlet filter device as described in claim 2, characterized in that, The hollow locking screw (7) has a hollow structure, and the internal channel of the hollow locking screw (7) is connected to the internal channel of the sampling connecting pipe (3) so that the gas in the filter outlet pipe (1) enters the sampling connecting pipe (3) through the sampling through hole (2) and the internal channel of the hollow locking screw (7).

4. The dry pump inlet filter device as described in claim 2, characterized in that, The hollow locking screw (7) is fitted with a sealing gasket (8).

5. The dry pump inlet filter device as described in claim 1, characterized in that, The filter outlet pipe (1) has a bracket sliding groove (9) on its outside, and the upper end of the valve stem limiting bracket (5) is slidably connected to the inside of the bracket sliding groove (9).

6. The dry pump inlet filter device as described in claim 1, characterized in that, The filter outlet pipe (1) has an operation guide hole (10) on one side corresponding to the bracket sliding groove (9). The operation guide hole (10) is slidably connected to the inside of the operation guide hole (10). The end of the lifting operation plate (11) is fixedly installed at the end of the valve stem limiting bracket (5).

7. The dry pump inlet filter device as described in claim 1, characterized in that, Both sides of the valve stem limiting bracket (5) are provided with limiting springs (12) for limiting the position of the valve stem limiting bracket (5).

8. The dry pump inlet filter device as described in claim 1, characterized in that, Both sides of the valve stem limiting bracket (5) are provided with elastic deformation grooves (13). One end of the limiting spring (12) is fixedly connected to the inside of the elastic deformation groove (13), and the other end extends outward.

Images