Piezoelectric micropump and electronic device

Abstract

The utility model discloses a piezoelectricity micro -pump and electronic equipment, piezoelectricity micro -pump includes piezoelectric layer, reinforcing layer and jet layer, piezoelectric layer with reinforcing layer is stacked and forms vibration part, jet layer includes bottom wall and with bottom wall circumferential encircle and connect side wall, the top of jet layer has opening, the middle part of jet layer with vibration part is connected, so that jet layer with vibration part encloses the accommodation chamber at opening, and the side wall or bottom wall is seted up with jet flow port, and the accommodation chamber is communicated to outside through jet flow port. With this, the deformation of piezoelectric layer under the action of the alternating electric field has the high accuracy and repeatability, to be able to accurate control reinforcing layer's deformation degree, to be able to accurate adjustment the volumetric change of accommodation chamber, and then can fine control the fluid flow and flow rate of inhaled and jetted through jet flow port.

Description

Technical Field

[0001] This utility model relates to the field of piezoelectric pump technology, specifically, to a piezoelectric micropump and electronic equipment. Background Technology

[0002] A piezoelectric pump is a fluid device that utilizes the inverse piezoelectric effect of piezoelectric ceramics, using a piezoelectric oscillator as its actuator. Due to its advantages such as compact structure, high control precision, fast response speed, and long lifespan, it is widely used in fields such as biomedicine, heat dissipation and cooling, and portable testing equipment.

[0003] In existing piezoelectric pumps, the valve plate section mostly adopts cantilever beam or wheel type. However, the cantilever beam type has poor valve plate sealing performance, and the wheel type valve plate is prone to abnormalities such as twisting due to liquid impact during vibration. Both of these result in poor performance consistency of the piezoelectric pump. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for piezoelectric micropumps and electronic devices.

[0005] According to a first aspect of the present invention, a piezoelectric micropump is provided, comprising:

[0006] A piezoelectric layer and a reinforcing layer are stacked together to form a vibrating part;

[0007] The jet layer includes a bottom wall and a side wall circumferentially connected to the bottom wall. The top of the jet layer has an opening. The jet layer is connected to the middle of the vibrating part, such that the jet layer and the vibrating part form a receiving chamber at the opening. A jet port is provided on the side wall or the bottom wall, and the receiving chamber is connected to the outside through the jet port.

[0008] Optionally, the reinforcing layer is located between the piezoelectric layer and the jet layer, and a hollow portion is formed in the middle of the reinforcing layer, with the opening opposite to the hollow portion.

[0009] Optionally, the hollow portion is formed by grooving or thinning.

[0010] Optionally, the vibrating part includes a central deformation zone, an edge deformation zone, and a transition zone, wherein the transition zone is located between the central deformation zone and the edge deformation zone, and the sidewall is connected to the transition zone.

[0011] Optionally, the jet layer further includes a connecting wall, the side wall being connected between the bottom wall and the connecting wall, and the connecting wall being circumferentially sealed to the middle part of the vibrating part, such that the side wall, the bottom wall, the connecting wall and the vibrating part together form the receiving chamber.

[0012] Optionally, the jet layer is a polymer film layer.

[0013] Optionally, the piezoelectric layer is located between the reinforcing layer and the jet layer.

[0014] Optionally, the reinforcing layer is cut to form a body and at least one support arm, the reinforcing layer having at least one notch, and each support arm being located at a corresponding notch and bent and connected to the body.

[0015] Optionally, the reinforcing layer includes a plurality of support arms, which are uniformly connected to the body.

[0016] And / or, the support arm is perpendicularly connected to the body;

[0017] And / or, the piezoelectric layer is located on the side of the body away from the support arm.

[0018] Optionally, along the stacking direction of the vibrating part, the jet layer is positioned opposite the support arm.

[0019] Optionally, the reinforcing layer includes a body and an FPC circuit board disposed on the body. Along the stacking direction of the vibrating part, the FPC circuit board extends with a plurality of connection terminals. Some of the connection terminals are connected to the piezoelectric layer on one side, and other connection terminals are configured to form a connection with an external device on the other side.

[0020] Optionally, the reinforcing layer has a through groove extending along its thickness direction, the reinforcing layer forms a receiving portion inside the through groove, the reinforcing layer forms a fixing portion outside the through groove, the fixing portion is configured to connect with an external device, the piezoelectric layer is disposed in the receiving portion, and there is a gap between the edge of the piezoelectric layer and the through groove.

[0021] Optionally, the through slot includes a first main body and a first extension that are interconnected;

[0022] The first main body is arc-shaped, and the central angle of the first main body is greater than 180° and less than 360°;

[0023] The number of the first extension portions is two, one of which is connected to one end of the first main body portion and extends outward toward the outside of the first main body portion, and the other of which is connected to the other end of the first main body portion and extends outward toward the outside of the first main body portion.

[0024] According to a second aspect of the present invention, an electronic device is provided, comprising the piezoelectric micropump described in the first aspect.

[0025] One technical advantage of this utility model is:

[0026] This invention relates to a piezoelectric micropump that utilizes the piezoelectric effect of the piezoelectric layer for actuation. The deformation of the piezoelectric layer under an alternating electric field exhibits high precision and repeatability, allowing for accurate control of the reinforcing layer's deformation. This enables precise adjustment of the volume change within the receiving chamber, and consequently, fine control of the fluid flow rate and velocity drawn in and ejected through the jet nozzle. Furthermore, using the pressure difference between the inside and outside of the receiving chamber to drive fluid intake and ejection enhances the piezoelectric micropump's actuation performance while ensuring consistent performance.

[0027] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0028] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0029] Figure 1 A vibration diagram of a piezoelectric micropump provided in one embodiment of this utility model;

[0030] Figure 2 A vibration diagram of another piezoelectric micropump provided in one embodiment of the present invention;

[0031] Figure 3 A schematic diagram of a reinforcing layer provided in one embodiment of the present invention;

[0032] Figure 4 A partial schematic diagram of a piezoelectric micropump provided in one embodiment of the present invention;

[0033] Figure 5 A partial schematic diagram of another piezoelectric micropump provided in one embodiment of the present invention;

[0034] Figure 6 This is a partial schematic diagram of another piezoelectric micropump provided in one embodiment of the present invention.

[0035] The components are: 1. Piezoelectric layer; 2. Reinforcing layer; 21. Hollowed-out part; 22. Body; 23. Support arm; 24. Through groove part; 25. Receiving part; 26. Fixing part; 3. Jet layer; 31. Bottom wall; 32. Side wall; 33. Jet nozzle; 34. Connecting wall;

[0036] 200. External devices. Detailed Implementation

[0037] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0038] The embodiments of this application will now be described in detail, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0039] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0040] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0041] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0042] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0043] This application provides a piezoelectric micropump, which mainly consists of three parts: a piezoelectric layer 1, a reinforcing layer 2, and a jet layer 3. The piezoelectric layer 1 and the reinforcing layer 2 are stacked to form a vibrating part, i.e., a driving component. The jet layer 3 is connected to the middle part of the vibrating part and forms a receiving chamber, and the fluid is communicated to the outside through the jet port 33.

[0044] like Figure 1 and Figure 2 As shown, the piezoelectric micropump provided in this application includes:

[0045] A piezoelectric layer 1 and a reinforcing layer 2 are stacked together to form a vibrating part;

[0046] The jet layer 3 includes a bottom wall 31 and a side wall 32 circumferentially connected to the bottom wall 31. The top of the jet layer 3 has an opening. The jet layer 3 is connected to the middle of the vibrating part, such that the jet layer 3 and the vibrating part form a receiving chamber at the opening. A jet port 33 is provided on the side wall 32 or the bottom wall 31, and the receiving chamber is connected to the outside through the jet port 33.

[0047] like Figure 1 and Figure 2 As shown, lead zirconate titanate (PZT) piezoelectric ceramic material can be used to fabricate piezoelectric layer 1. Piezoelectric layer 1 is typically a thin sheet structure, including but not limited to rectangular and circular sheets. Its specific dimensions can be designed according to the flow requirements of the application scenario.

[0048] The reinforcing layer 2 can be made of stainless steel or silicon-based materials. The reinforcing layer 2 is a thin sheet structure adapted to the shape of the piezoelectric layer 1, including but not limited to rectangular and circular sheets. The thickness of the reinforcing layer 2 can be set to 0.5-2 times the thickness of the piezoelectric layer 1. The center of the reinforcing layer 2 can have a connection area that connects to the jet layer 3. This connection area can be formed into specific shapes such as circles or squares through microfabrication processes such as photolithography and etching to achieve precise docking with the jet layer 3.

[0049] Alternatively, a connection region connecting to the jet layer 3 can be formed in the middle of the piezoelectric layer 1. The connection region can be formed into specific shapes such as circles and squares through micro-machining processes such as photolithography and etching, so as to achieve precise docking with the jet layer 3.

[0050] On the one hand, the reinforcing layer 2 can enhance the deformation of the piezoelectric layer 1 to a certain extent, so as to adjust the volume of the accommodating chamber; on the other hand, the reinforcing layer 2 can also enhance the structural stability of the piezoelectric layer 1, so that its deformation characteristics remain basically unchanged after the piezoelectric layer 1 has been working for a long time. This makes the volume change of the accommodating chamber highly stable, thereby ensuring the stable output of fluid flow at the jet port 33.

[0051] like Figure 1 As shown, the jet layer 3 includes a bottom wall 31 and side walls 32 that are circumferentially connected to the bottom wall 31, and its overall structure is cup-shaped or cylindrical. The top of the jet layer 3 has an opening, for example, the top wall of the jet layer 3 can be completely removed to form an opening, or a portion of the top wall of the jet layer 3 can be hollowed out to form an opening.

[0052] The opening size matches the connection area of ​​the reinforcing layer 2 or the piezoelectric layer 1 to achieve a sealed connection between the jet layer 3 and the vibrating part. A jet port 33 can be formed on the sidewall 32 or bottom wall 31 of the jet layer 3. The shape of the jet port 33 includes, but is not limited to, circular, square, and slit shapes, to allow fluid to communicate with the outside.

[0053] In one embodiment, the connection area between the jet layer 3 and the vibrating part can be, for example... Figure 1 The end of the middle sidewall 32 is coated with an adhesive, such as epoxy resin or UV-curable adhesive, to achieve a firm connection between the jet layer 3 and the vibrating part and to form a reliable chamber.

[0054] Therefore, the piezoelectric micropump of this application can be driven by the piezoelectric effect of the piezoelectric layer 1. The deformation of the piezoelectric layer 1 under the action of an alternating electric field has high precision and repeatability, which can precisely control the degree of deformation of the reinforcing layer 2, thereby accurately adjusting the volume change of the receiving chamber, and further enabling fine control of the flow rate and velocity of the fluid drawn in and ejected through the jet port 33. Moreover, using the pressure difference between the inside and outside of the receiving chamber to drive the fluid intake and ejection can enhance the driving performance of the piezoelectric micropump while helping to ensure its performance consistency.

[0055] Specifically, under the influence of an external alternating electric field, the piezoelectric layer 1 can undergo periodic expansion and contraction deformation based on the piezoelectric effect. When the direction of the electric field is the same as the polarization direction of the piezoelectric layer 1, the piezoelectric layer 1 elongates; when the direction of the electric field is opposite to the polarization direction of the piezoelectric layer 1, the piezoelectric layer 1 shortens. The deformation of the piezoelectric layer 1 is transmitted to the jet layer 3 through the reinforcing layer 2, causing the volume of the accommodating chamber to change periodically.

[0056] like Figure 1 and Figure 2 As shown, when the piezoelectric layer 1 elongates, the reinforcing layer 2 deforms downwards (indicated by the dotted line in the diagram), causing the volume of the receiving chamber formed by the jet layer 3 and the reinforcing layer 2 to decrease, increasing the pressure inside the chamber, and the fluid is ejected at high speed through the jet port 33. When the piezoelectric layer 1 shortens, the reinforcing layer 2 deforms upwards, causing the volume of the receiving chamber to increase, decreasing the pressure inside the chamber, and the fluid is drawn into the receiving chamber through the jet port 33. By continuously applying an alternating electric field, the piezoelectric micropump can achieve continuous fluid intake and ejection, and complete fluid transport.

[0057] In one embodiment, the jet layer 3 can be designed with multiple jet ports 33, each of which can be independently connected to an external fluid source, thereby enabling the intake and mixing of multiple fluid streams. For example, when the piezoelectric micropump has two jet ports 33, one jet port 33 is connected to reagent A and the other jet port 33 is connected to reagent B. By controlling the driving signal of the piezoelectric layer 1, reagent A and reagent B can be mixed in different proportions and then sprayed.

[0058] In one embodiment, the jet port 33 can be directly connected to an external fluid pipe to allow for the introduction or discharge of fluid. This connection method is simple in structure, easy to implement, and suitable for scenarios where fluid purity requirements are not high and complex fluid control is not necessary.

[0059] In one embodiment, the jet port 33 can be connected to an external fluid source via microchannels on the microfluidic chip. The microchannels on the microfluidic chip can be precisely manufactured using microfabrication processes such as photolithography and etching to enable precise control and distribution of fluids.

[0060] Optionally, the jet layer 3 is located on the side of the reinforcing layer 2 away from the piezoelectric layer 1, and the jet layer 3 is connected to the middle of the reinforcing layer 2 to form a receiving chamber.

[0061] like Figure 1 and Figure 2 As shown, reliable sealing methods such as adhesive sealing or welding sealing can be used to connect the middle of the jet layer 3 and the reinforcing layer 2 to effectively prevent fluid leakage. Adhesive sealing, through the selection of a suitable adhesive and precise pressure, heating, or ultraviolet light curing processes, ensures the sealing performance of the bonded area. Welding sealing utilizes advanced processes such as laser welding or resistance welding to achieve a high-quality sealing connection between the metal jet layer 3 and the reinforcing layer 2. This reliable sealing structure ensures stable operation of the piezoelectric micropump in various working environments, avoiding performance degradation and equipment damage caused by fluid leakage.

[0062] Optionally, the reinforcing layer 2 is located between the piezoelectric layer 1 and the jet layer 3, and a hollow portion 21 is provided in the middle of the reinforcing layer 2, with the opening being opposite to the hollow portion 21.

[0063] like Figure 6 As shown, during the operation of the piezoelectric micropump, the reinforcing layer 2 will bear the stress generated by the deformation of the piezoelectric layer 1. After opening the hollow part 21 in the middle of the reinforcing layer 2, the stress originally concentrated in the middle of the reinforcing layer 2 can be dispersed to the material around the hollow part 21, reducing the degree of local stress concentration.

[0064] Furthermore, by creating a hollow portion 21 in the middle of the reinforcing layer 2, the material obstruction in the middle section can be reduced, allowing the deformation of the piezoelectric layer 1 to be transmitted more directly and rapidly through the reinforcing layer 2 to the jet layer 3. Due to the presence of the hollow portion 21, the reinforcing layer 2 can generate a larger amount of deformation when driven by the deformation of the piezoelectric layer 1. This also increases the range of volume change of the accommodating chamber enclosed by the jet layer 3 and the reinforcing layer 2, thereby increasing the flow rate of fluid drawn in and ejected under the action of pressure difference.

[0065] Optionally, the hollow portion 21 is formed by slotting or thinning.

[0066] Specifically, when the hollow portion 21 is formed by grooving, the presence of grooves or through slots can change the mechanical structure of the reinforcing layer 2. When the piezoelectric layer 1 is excited by an electric field and deforms, the grooved area can reduce the local stiffness of the reinforcing layer 2, allowing the reinforcing layer 2 to respond more quickly to the deformation of the piezoelectric layer 1 and rapidly transmit the deformation to the jet layer 3, thereby improving the overall driving response speed of the piezoelectric micropump.

[0067] Furthermore, the slotted openings 21 also create specific stress relief channels within the reinforcing layer 2. When the deformation of the piezoelectric layer 1 is transmitted to the reinforcing layer 2, the stress is distributed and transmitted along the edge of the slot. This regular stress distribution allows the deformation to be transmitted to the jet layer 3 more concentratedly and effectively, which helps to increase the gas delivery flow rate.

[0068] If the hollow part 21 is formed by thinning, the material in the thinned area is reduced, the mass is reduced, and the inertia is also reduced. Driven by the deformation of the piezoelectric layer 1, the thinned reinforcing layer 2 can also deform more easily, reducing the deformation lag caused by inertia. This allows the piezoelectric micropump to realize the change in the volume of the accommodating chamber more quickly, thereby improving the dynamic response capability of fluid delivery.

[0069] Furthermore, the thinned hollow portion 21 reduces the material thickness of the reinforcing layer 2 and also reduces the damping during deformation transmission. The thinner reinforcing layer 2 reduces the resistance to deformation of the piezoelectric layer 1, allowing deformation to be transmitted more smoothly to the jet layer 3, reducing energy loss during transmission, improving the energy conversion efficiency of piezoelectric drive, and thus enhancing the driving performance of the piezoelectric micropump.

[0070] Optionally, the vibrating part includes a central deformation zone, an edge deformation zone, and a transition zone, wherein the transition zone is located between the central deformation zone and the edge deformation zone, and the sidewall 32 is connected to the transition zone.

[0071] like Figure 1 and Figure 2As shown, the central deformation zone, as the core driving area of ​​the vibrating part, can generate concentrated and large deformations under the action of an electric field. This concentrated deformation can directly act on the containing chamber and efficiently change the chamber volume, thereby achieving effective driving of the fluid.

[0072] The deformation of the edge deformation zone can supplement and adjust the deformation generated in the central deformation zone, making the deformation of the entire vibrating part more uniform and stable. Under high-frequency driving conditions, the auxiliary effect of the edge deformation zone can reduce energy loss caused by uneven deformation and improve the stability of piezoelectric drive.

[0073] The transition zone, located between the central deformation zone and the edge deformation zone, is the transition area between contraction and relaxation on the vibrating part, acting as a bridge to smoothly transmit deformation. It avoids abrupt changes in deformation between the central and edge deformation zones, allowing deformation to gradually transition from the center to the edge. This smooth deformation transmission reduces stress concentration during deformation, lowers the risk of damage to the vibrating part due to stress concentration, and improves the efficiency of deformation transmission.

[0074] like Figure 1 and Figure 2 As shown, connecting the sidewall 32 to the transition zone allows the enclosed receiving chamber to correspond to the central deformation zone, thereby increasing the gas delivery flow rate. Furthermore, the transition zone, acting as a bridge connecting the central and edge deformation zones, forms a stable structural frame when connected to the sidewall 32. Under external impact or vibration, this structural frame can better withstand and disperse external forces, reducing the risk of damage to the vibrating parts.

[0075] Optionally, a through groove is provided in the middle of the reinforcing layer 2, and the deformation directions of the piezoelectric layers 1 inside and outside the through groove are opposite.

[0076] like Figure 6 As shown, the through-slot in the middle of the reinforcing layer 2 can change the mechanical structure of the reinforcing layer 2. When the piezoelectric layer 1 is excited by an electric field and deforms, the through-slot region can reduce the local stiffness of the reinforcing layer 2, so that the reinforcing layer 2 can respond more quickly to the deformation of the piezoelectric layer 1 and quickly transfer the deformation to the jet layer 3, thereby improving the overall driving response speed of the piezoelectric micropump.

[0077] The through-slot is typically located in the transition region between contraction and expansion on the vibrating part. The design of the through-slot allows the vibrating part to extend and contract more freely on both sides of the through-slot, reducing the constraint of the reinforcing layer 2 on the deformation of the piezoelectric layer 1. The deformation directions of the vibrating part inside and outside the through-slot are opposite, that is, when one side of the vibrating part extends outward, the other side contracts inward. The two work together to make the deformation of the entire vibrating part more uniform and stable.

[0078] Optionally, the size of the jet layer 3 is not larger than the size of the through groove.

[0079] Specifically, the sidewall 32 of the jet layer 3 can be set to fit against the inner wall of the through groove, or the sidewall 32 of the jet layer 3 can be set to have a certain gap with the inner wall of the through groove. Both can make the jet layer 3 located in the through groove, so that the enclosed receiving chamber corresponds to the central deformation zone, thereby improving the gas delivery flow rate.

[0080] Optionally, the sidewall 32 fits into the inner wall of the through groove, which can increase the volume of the enclosed cavity and facilitate the assembly of the jet layer 3, thus helping to reduce the assembly difficulty of the piezoelectric micropump.

[0081] Optionally, the jet outlet 33 is located on the bottom wall 31;

[0082] And / or, the jet layer 3 has a plurality of the jet ports 33, at least some of the jet ports 33 being located on the bottom wall 31.

[0083] like Figure 1 and Figure 2 As shown, the jet port 33 is located on the bottom wall 31 so that the pressure difference between the inside and outside of the cavity and gravity can be used to drive the fluid movement, thereby enhancing the driving performance of the piezoelectric micropump.

[0084] In one embodiment, if the jet layer 3 is designed with multiple jet ports 33, at least some of the jet ports 33 can be located on the bottom wall 31. The pressure difference between the inside and outside of the cavity and gravity can be used to drive the fluid movement, thereby enhancing the driving performance of the piezoelectric micropump.

[0085] The system includes multiple jet nozzles 33 connected to different fluid sources. When fluids from different sources enter the receiving chamber through their respective jet nozzles 33, turbulence and shear forces are generated within the chamber due to differences in flow velocity, direction, and physical properties. By rationally designing the size, angle, and position of the corresponding jet nozzles 33, the flow velocity and flow rate ratio of different fluids can be precisely controlled.

[0086] Furthermore, the mechanical effects of turbulence and shear force can promote rapid collisions and diffusion between fluid molecules, achieving rapid and uniform mixing of the fluid. Compared with traditional mixing methods, the piezoelectric micropump of this application does not require an additional stirring device, and can complete the mixing process solely based on the dynamic characteristics of the fluid itself, thereby shortening the mixing time and improving the mixing efficiency.

[0087] Optionally, the jet layer 3 further includes a connecting wall 34, the side wall 32 is connected between the bottom wall 31 and the connecting wall 34, and the connecting wall 34 is circumferentially sealed to the middle part of the vibrating part, so that the side wall 32, the bottom wall 31, the connecting wall 34 and the vibrating part together form the receiving chamber.

[0088] like Figure 2 As shown, the connecting wall 34, which is the area where the jet layer 3 connects to the vibrating part, can adjust the connection strength between the jet layer 3 and the vibrating part by controlling its width. The side wall 32, the bottom wall 31, and the connecting wall 34 together form a concave structure with an opening, and the concave area correspondingly forms a receiving chamber.

[0089] In one embodiment, the jet layer 3 and the vibrating part can be configured to have the same size along the thickness direction of the piezoelectric micropump, that is, the edge of the connecting wall 34 of the jet layer 3 is flush with the edge of the vibrating part. This facilitates the molding of the piezoelectric micropump and can also form a larger accommodating chamber, which helps to enhance the driving performance of the piezoelectric micropump.

[0090] Optionally, the jet layer 3 is a polymer film layer.

[0091] Specifically, polymer materials typically possess a certain degree of flexibility and elasticity, allowing the jet layer 3 formed from polymer materials to undergo moderate deformation when subjected to fluid impact. This deformation can act as a buffer and regulator, absorbing some of the fluid's impact energy, reducing jet rebound and splashing, thereby improving jet stability.

[0092] Furthermore, polymer materials possess low inertia, enabling them to respond rapidly to changes in external signals. In systems requiring dynamic jet control, the polymer film can quickly adjust the jet's on / off state and flow rate according to electrical signal commands, achieving high-precision real-time control. This rapid response characteristic allows piezoelectric micropumps to better adapt to complex and changing working environments.

[0093] Furthermore, the polymer film possesses a highly uniform surface structure and chemical properties. During jetting, this uniformity ensures a stable and consistent flow state of the fluid on the film surface. Compared to traditional non-uniform surface materials, the polymer film reduces turbulence and irregular fluctuations during fluid flow, enabling the jet to be ejected in a more stable and controllable manner.

[0094] Optionally, such as Figure 4 As shown, the piezoelectric layer 1 is located between the reinforcing layer 2 and the jet layer 3. The piezoelectric layer 1, reinforcing layer 2, and jet layer 3 can each have a circular cross-sectional structure.

[0095] Optionally, the reinforcing layer 2 is cut to form a body 22 and at least one support arm 23. The reinforcing layer 2 has at least one notch, and each support arm 23 is located at a corresponding notch and is bent and connected to the body 22.

[0096] like Figure 3As shown, a certain width of the reinforcing layer 2 can be cut inward along its outer periphery to separate the reinforcing layer 2 into the main body 22 and at least one support arm 23, each support arm 23 being cantilevered to the main body 22. The support arm 23 can be bent, and its other end can be used to form a convenient and reliable connection with the component to be installed.

[0097] The bending design of the support arm 23 allows for flexible connection with other components according to actual needs. The support arm 23 can be equipped with different connection holes or structures, facilitating its fixation with other components via bolts, welding, or other methods. This connection flexibility enables the reinforcing layer 2 to adapt to different installation environments and connection requirements, and also improves the overall functional adaptability of the piezoelectric micropump.

[0098] like Figure 4 As shown, a piezoelectric layer 1 can be provided, for example, attached below the main body 22, so as to reduce the binding force of the reinforcing layer 2 on the piezoelectric layer 1 below by reducing the contact area. This helps to reduce the resistance when the piezoelectric layer 1 and the reinforcing layer 2 are deformed, thereby reducing the energy consumption of the piezoelectric micropump and extending its service life.

[0099] Furthermore, the support arm 23 and the main body 22 are connected by a bending connection, forming a structural unit with a specific geometric shape. This geometry provides better stability and resistance to deformation under stress. Compared with traditional straight connection methods, the bending connection increases the rigidity of the structure, making the reinforcing layer 2 less prone to bending or torsional deformation under external forces.

[0100] During the stress process, the material around the notch of the main body 22 will deform to a certain extent. This deformation can absorb some energy, relieve the impact of stress on the reinforcing layer 2, and help extend the service life of the reinforcing layer 2.

[0101] Optionally, the reinforcing layer 2 includes a plurality of support arms 23, which are uniformly connected to the body 22.

[0102] And / or, the support arm 23 is perpendicularly connected to the body 22;

[0103] And / or, the piezoelectric layer 1 is located on the side of the body 22 away from the support arm 23.

[0104] like Figure 3 As shown, three, four or even more support arms 23 can be cut out and multiple support arms 23 can be evenly connected to the body 22. This layout allows the reinforcing layer 2 to evenly distribute the load to each support arm 23 when it is subjected to external force.

[0105] The evenly distributed support arms 23 can also provide structural support for the connection between the main body 22 and the external device 200 from multiple directions, forming a three-dimensional support system. This multi-directional support can enhance the ability of the reinforcing layer 2 to resist deformation. Whether subjected to lateral force, longitudinal force or torsional force, the structure can maintain stability through the synergistic effect of the support arms 23, and can also ensure the connection strength of the piezoelectric micropump.

[0106] like Figure 4 As shown, the support arm 23 can be vertically connected to the body 22, that is, bent at 90° to form a vertical connection structure, which facilitates a convenient and reliable connection between the support arm 23 and the external device 200 above.

[0107] like Figure 4 As shown, the piezoelectric layer 1 can be disposed on the side of the body 22 away from the support arm 23, that is, the piezoelectric layer 1 is located below the body 22. At this time, the deformation of the vibrating part can cause a change in the volume of the receiving chamber, thereby controlling the flow rate and velocity of the fluid drawn in and ejected through the jet port, while reducing energy consumption.

[0108] Furthermore, this configuration can also reduce the mechanical interference to the piezoelectric layer 1 when the support arm 23 deforms under stress, enabling the piezoelectric layer 1 to work in a more stable environment, thereby improving the accuracy and reliability of its output signal.

[0109] Optionally, along the stacking direction of the vibrating part, the jet layer 3 and the support arm 23 are positioned opposite each other.

[0110] like Figure 3 and Figure 4 As shown, along the stacking direction of the vibrating part, that is, the thickness direction of the piezoelectric micropump, the edge of the piezoelectric layer 1 can be flush with the edge of the body 22, and the edge of the jet layer 3 can be flush with the edge of the piezoelectric layer 1. That is, both the piezoelectric layer 1 and the jet layer 3 are irregular cross-sectional structures adapted to the body 22. Alternatively, the edge of the piezoelectric layer 1 can be flush with the edge of the support arm 23, and the edge of the jet layer 3 can be flush with the edge of the piezoelectric layer 1. That is, the piezoelectric layer 1 and the jet layer 3 can be circular or rectangular cross-sectional structures opposite to the position of the support arm 23.

[0111] Optionally, the reinforcing layer 2 includes a body and an FPC circuit board disposed on the body. Along the stacking direction of the vibrating part, the FPC circuit board extends with a plurality of connection ends. Some of the connection ends are connected to the piezoelectric layer 1 on one side, and other connection ends are configured to form a connection with an external device 200 on the other side.

[0112] Specifically, an FPC circuit board can be directly attached to the main body. Connecting ends extend from the top and bottom sides of the FPC circuit board. The connecting ends on the bottom side of the FPC circuit board are connected to the piezoelectric layer 1 by means of welding, bonding, etc., and the connecting ends on the top side of the FPC circuit board are connected to the external device 200 by means of welding, bonding, etc., so that the piezoelectric micropump can be suspended and connected to the fixing plate of the external device 200.

[0113] Optionally, the reinforcing layer 2 has a through-slot 24 extending along its thickness direction. The reinforcing layer 2 forms a receiving portion 25 inside the through-slot 24 and a fixing portion 26 outside the through-slot 24. The fixing portion 26 is configured to connect with an external device 200. The piezoelectric layer 1 is disposed in the receiving portion 25, and a gap exists between the edge of the piezoelectric layer 1 and the through-slot 24. This allows the reinforcing layer 2 to be easily fixed to an external structure while also providing specific mounting space for the piezoelectric layer 1.

[0114] like Figure 6 As shown, the piezoelectric layer 1 is bonded to the reinforcing layer 2 and disposed within the receiving portion 25, with a gap between the edge of the piezoelectric layer 1 and the through-slot portion 24. This arrangement allows the through-slot portion 24 to provide space for the deformation of the piezoelectric layer 1 during vibration, reducing internal stress caused by restricted deformation. This helps improve the vibration effect of the piezoelectric layer 1 driving the receiving portion 25, thereby enhancing the driving capability of the vibrating part. Furthermore, the gap between the piezoelectric layer 1 and the through-slot portion 24 ensures that the vibration of the piezoelectric layer 1 is not interfered with by the fixing portion 26.

[0115] Therefore, in the vibration section provided in this application embodiment, by setting a through-slot structure in the reinforcing layer 2, the vibration degree of freedom of the piezoelectric layer 1 and the accommodating part 25 is greatly released, stress restraint and energy loss are reduced, thereby obtaining a greater driving force and flow rate under the same voltage. Therefore, when achieving the same vibration effect (driving force), the required driving voltage is lower; the purpose of increasing amplitude, reducing power consumption and improving driving efficiency is achieved, and the reliability of the piezoelectric micropump with this vibration section is also improved.

[0116] Optionally, the through groove 24 is arc-shaped, and the central angle of the through groove 24 is greater than 180° and less than 360°.

[0117] Optionally, the through slot 24 includes a first main body and a first extension that are interconnected;

[0118] The first main body is arc-shaped, and the central angle of the first main body is greater than 180° and less than 360°;

[0119] The number of the first extension portions is two, one of which is connected to one end of the first main body portion and extends outward toward the outside of the first main body portion, and the other of which is connected to the other end of the first main body portion and extends outward toward the outside of the first main body portion.

[0120] like Figure 5 and Figure 6 As shown, the through-slot 24 can include a first main body and two first extensions connected to each other. The first main body provides the main stress relief area, which can more effectively release the stress generated when the piezoelectric layer 1 vibrates, making the deformation of the vibrating part more uniform and improving the overall performance of the piezoelectric micropump.

[0121] The two first extensions form a cantilever structure, which enables a more uniform stress distribution at the connection point between the fixing part 26 and the receiving part 25 of the reinforcing layer 2, optimizing stress distribution and significantly reducing the risk of fatigue fracture. When the vibrating part undergoes high-frequency reciprocating bending, stress will concentrate in the area of ​​greatest deformation (i.e., the end of the through groove). The cantilever beam design transfers the stress concentration point from a small area and disperses it to a larger area (i.e., the root of the entire cantilever beam); this greatly improves the mechanical reliability and service life of the vibrating part.

[0122] In one embodiment, the first extension is arc-shaped and the two first extensions are curved toward each other. In this way, the arc-shaped first extension further eliminates sharp corners, allowing stress to be gradually released along a smooth curve, thereby further improving the reliability of the reinforcing layer 2 and the vibration effect of the piezoelectric layer 1, and helping to enhance the driving capability of the piezoelectric micropump.

[0123] like Figure 4 As shown, a through slot 24 can also be provided on the main body 22. The through slot 24 is located in the jet layer 3 to release the vibration degree of freedom of the piezoelectric layer 1 and the accommodating part 25, reduce stress restraint and energy loss, thereby obtaining a greater driving force and flow rate under the same voltage. Therefore, when the same vibration effect (driving force) is achieved, the required driving voltage is lower. This achieves the purpose of increasing amplitude, reducing power consumption and improving driving efficiency, and also improves the reliability of the piezoelectric micropump with this vibration part.

[0124] The through groove 24 can be a regular arc shape or the aforementioned irregular shape, which will not be described in detail here.

[0125] This application also provides an electronic device including the aforementioned piezoelectric micropump, which possesses all the technical effects of the piezoelectric micropump.

[0126] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A piezoelectric micropump, characterized in that, include: A piezoelectric layer and a reinforcing layer are stacked together to form a vibrating part; The jet layer includes a bottom wall and a side wall circumferentially connected to the bottom wall. The top of the jet layer has an opening. The jet layer is connected to the middle of the vibrating part, such that the jet layer and the vibrating part form a receiving chamber at the opening. A jet port is provided on the side wall or the bottom wall, and the receiving chamber is connected to the outside through the jet port.

2. The piezoelectric micropump according to claim 1, characterized in that, The reinforcing layer is located between the piezoelectric layer and the jet layer, and a hollow portion is provided in the middle of the reinforcing layer, with the opening being opposite to the hollow portion.

3. The piezoelectric micropump according to claim 2, characterized in that, The hollowed-out portion is formed by grooving or thinning.

4. The piezoelectric micropump according to claim 1, characterized in that, The vibrating part includes a central deformation zone, an edge deformation zone, and a transition zone. The transition zone is located between the central deformation zone and the edge deformation zone, and the sidewall is connected to the transition zone.

5. The piezoelectric micropump according to claim 1, characterized in that, The jet layer further includes a connecting wall, the side wall being connected between the bottom wall and the connecting wall, and the connecting wall being circumferentially sealed to the middle part of the vibrating part, such that the side wall, the bottom wall, the connecting wall and the vibrating part together form the receiving chamber.

6. The piezoelectric micropump according to claim 1, characterized in that, The jet layer is a polymer film layer.

7. The piezoelectric micropump according to claim 1, characterized in that, The piezoelectric layer is located between the reinforcing layer and the jet layer.

8. The piezoelectric micropump according to claim 7, characterized in that, The reinforcing layer is cut to form a body and at least one support arm. The reinforcing layer has at least one notch, and each support arm is located at a corresponding notch and is bent and connected to the body.

9. The piezoelectric micropump according to claim 8, characterized in that, The reinforcing layer includes a plurality of support arms, which are uniformly connected to the body. And / or, the support arm is perpendicularly connected to the body; And / or, the piezoelectric layer is located on the side of the body away from the support arm.

10. The piezoelectric micropump according to claim 8, characterized in that, Along the stacking direction of the vibrating part, the jet layer is positioned opposite the support arm.

11. The piezoelectric micropump according to claim 7, characterized in that, The reinforcing layer includes a body and an FPC circuit board disposed on the body. Along the stacking direction of the vibrating part, the FPC circuit board extends with a plurality of connection terminals. Some of the connection terminals are connected to the piezoelectric layer on one side, and other connection terminals are configured to form a connection with an external device on the other side.

12. The piezoelectric micropump according to claim 1, characterized in that, The reinforcing layer has a through groove extending along its thickness direction. The reinforcing layer forms a receiving portion inside the through groove and a fixing portion outside the through groove. The fixing portion is configured to connect with an external device. The piezoelectric layer is disposed in the receiving portion, and there is a gap between the edge of the piezoelectric layer and the through groove.

13. The piezoelectric micropump according to claim 12, characterized in that, The through-slot includes a first main body and a first extension that are connected to each other; The first main body is arc-shaped, and the central angle of the first main body is greater than 180° and less than 360°; The number of the first extension portions is two, one of which is connected to one end of the first main body portion and extends outward toward the outside of the first main body portion, and the other of which is connected to the other end of the first main body portion and extends outward toward the outside of the first main body portion.

14. An electronic device, characterized in that, Includes the piezoelectric micropump as described in any one of claims 1 to 13.

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