Molecular pump filtering structure

Abstract

The utility model relates to the field of molecular pump filtering, disclose a kind of molecular pump filtering structure, including shell, the shell inside lower end is fixedly arranged with baffle, the baffle lower end is fixedly arranged with motor, the motor output side is fixedly arranged with air inlet fan, the motor output side is fixedly arranged with mounting plate above, the mounting plate upper end is fixedly arranged with mounting box, the mounting box inner end edge is fixedly arranged with four limit blocks, the mounting box inner end is close to the position of middle and is provided with multiple springs, multiple the spring upper end is fixedly arranged with brush plate, the shell inside upper end is fixedly arranged with dust screen, the shell inside upper end is fixedly arranged with secondary filter plate, the shell outside is close to the position of baffle above and is fixedly arranged with air outlet pipe.In the utility model, when motor starts, brush plate can continuously clean dust screen, so that dust screen can be cleaned without disassembling dust screen by staff, reduce downtime and maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of molecular pump filtration, and in particular to a molecular pump filtration structure. Background Technology

[0002] A molecular pump is a device that achieves extremely low pressure in a high vacuum system. It uses various mechanisms, including mechanical, thermal, and ionic methods, to expel or transfer gas molecules from the pump chamber to the outside, thereby reducing the internal gas pressure. However, the inlet chamber of a molecular pump is prone to drawing in dust, particles, and contaminants. Once inside the chamber, these contaminate controlled surfaces, affect film growth, contaminate samples, and reduce pump efficiency and lifespan. Therefore, a filtration structure is needed to trap particles and reduce wear and clogging risks on rotating parts, sealing surfaces, brushes, bearings, etc. A molecular pump filtration structure refers to a set of filter elements arranged in the inlet path of the molecular pump, used to trap and classify airborne particles and contaminants, preventing them from entering the vacuum chamber and the pump body.

[0003] The prior art (publication number: CN220354146U) discloses "an air intake filtration structure for a molecular pump, including a molecular pump housing, an upper mounting plate at the upper end of the housing, a filter assembly at the upper end of the mounting plate, a sealing ring between the filter assembly and the mounting plate, and an mounting component at the upper end of the filter assembly; the filter assembly includes a connecting pipe, a threaded groove on the inner side of the connecting pipe, a threaded ring threaded to the inner side of the threaded groove, and a filter element snapped into the inner side of the threaded ring. This invention provides air intake protection for the molecular pump through the filter assembly and protection of the mounting point through the sealing ring, achieving efficient protection for the molecular pump and reducing damage to the working molecular pump caused by impurities carried in the gas."

[0004] In the process of developing this application, the inventors discovered the following problems with the existing technology: the device requires manual removal of the filter element before cleaning, necessitating equipment shutdown and manual removal of the filter element for cleaning, causing system downtime and affecting production cycle and capacity. Furthermore, differences in cleaning intensity, cleanliness, and frequency among different operators lead to inconsistent cleaning results.

[0005] Therefore, those skilled in the art have provided a molecular pump filtration structure to solve the problems mentioned in the background art. Utility Model Content

[0006] The purpose of this invention is to address the shortcomings of existing technologies by proposing a molecular pump filtration structure. When the motor starts, the brush plate continuously cleans the dust screen, thus eliminating the need for staff to remove the dust screen for cleaning, reducing downtime and maintenance costs.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A molecular pump filtration structure includes a housing, a partition fixedly disposed on the lower end of the inner side of the housing, a motor fixedly disposed on the lower end of the partition, an air intake fan fixedly disposed on the outer side of the motor output end, a mounting plate fixedly disposed above the motor output end, a mounting box fixedly disposed on the upper end of the mounting plate, four limiting blocks fixedly disposed on the inner edge of the mounting box, and multiple springs disposed on the middle position of the inner end of the mounting box, with brush plates fixedly disposed on the upper ends of the multiple springs; A dustproof net is fixedly installed on the upper inner side of the outer shell, a secondary filter plate is fixedly installed on the upper inner side of the outer shell, a limit plate is fixedly installed inside the outer shell relative to the position of the secondary filter plate, and an air outlet pipe is fixedly installed on the outer side of the outer shell near the top of the partition.

[0008] Furthermore, the intake fan is rotatably positioned in the middle of the inner side of the housing, and the secondary filter plate is positioned below the intake fan.

[0009] Furthermore, the mounting plate is rotatably positioned on the upper inner side of the housing, and the brush plate contacts the lower part of the dustproof net.

[0010] Furthermore, the brush plate is arranged around the outer ends of the four limiting plates, and the secondary filter plate is arranged outside the output end of the motor.

[0011] Furthermore, the air outlet pipe is located below the air intake fan, and mounting blocks are provided on both sides of the dustproof net.

[0012] Furthermore, mounting grooves are provided on both sides of the upper end of the outer casing.

[0013] This utility model has the following beneficial effects: 1. This utility model proposes a molecular pump filtration structure in which air undergoes preliminary filtration through a dust filter before entering the housing. This removes large particles and obvious pollutants, reducing the dust load entering the cavity and thus lowering the risk of contamination to sensitive components. The brush plate continuously cleans the dust filter during motor startup, eliminating the need for manual removal and replacement, thereby reducing downtime and maintenance costs. The cleaned dust is further isolated by a secondary filter plate, further reducing the probability of dust entering the housing and improving purification efficiency. A spring beneath the brush plate continuously pushes the bristles in contact with the dust filter, preventing dust accumulation and maintaining a long-term, stable cleaning effect. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall left axonometric projection of this utility model; Figure 2This is a right-side isometric view of the entire utility model; Figure 3 This is a schematic cross-sectional view of the present invention; Figure 4 This is a top-view axonometric schematic diagram of the outer shell, secondary filter plate, and limiting plate of this utility model; Figure 5 This is an isometric schematic diagram of the motor, secondary filter plate, mounting plate, and dustproof net of this utility model; Figure 6 This is an isometric view of the motor, intake fan, and secondary filter plate of this utility model. Figure 7 This is an isometric view of the motor, mounting plate, mounting box, and brush plate of this utility model; Figure 8 This is an isometric view of the motor, mounting plate, mounting box, and limiting block of this utility model.

[0015] Legend: 1. Outer shell; 2. Partition plate; 3. Motor; 4. Intake fan; 5. Secondary filter plate; 6. Mounting plate; 7. Mounting box; 8. Spring; 9. Brush plate; 10. Dustproof net; 11. Air outlet pipe; 12. Limiting plate; 13. Limiting block. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Reference Figures 1-8 One embodiment provided by this utility model: A molecular pump filtration structure includes a housing 1, a partition 2 fixedly disposed on the lower inner side of the housing 1, a motor 3 fixedly disposed on the lower end of the partition 2, an intake fan 4 fixedly disposed on the outer side of the output end of the motor 3, a mounting plate 6 fixedly disposed above the output end of the motor 3, a mounting box 7 fixedly disposed on the upper end of the mounting plate 6, four limiting blocks 13 fixedly disposed on the inner edge of the mounting box 7, multiple springs 8 disposed on the middle position of the inner end of the mounting box 7, a brush plate 9 fixedly disposed on the upper end of the multiple springs 8, a dustproof net 10 fixedly disposed on the upper inner side of the housing 1, a secondary filter plate 5 fixedly disposed on the upper inner side of the housing 1, and the housing 1... A limiting plate 12 is fixedly installed inside the secondary filter plate 5. An air outlet pipe 11 is fixedly installed on the outer side of the outer shell 1 near the upper part of the partition plate 2. The air intake fan 4 is rotatably installed in the middle of the inner side of the outer shell 1. The secondary filter plate 5 is installed below the air intake fan 4. The mounting plate 6 is rotatably installed on the upper part of the inner side of the outer shell 1. The brush plate 9 is in contact with the lower part of the dustproof net 10. The brush plate 9 is arranged around the outer ends of the four limiting plates 12. The secondary filter plate 5 is located outside the output end of the motor 3. The air outlet pipe 11 is located below the air intake fan 4. Mounting blocks are provided on both sides of the dustproof net 10. Mounting grooves are opened on both sides of the upper end of the outer shell 1.

[0018] Specifically, after starting motor 3, intake fan 4 starts to rotate, driving air into the interior of housing 1. The air entering the interior is first filtered by dust filter 10. Since there is a brush plate 9 above the output end of motor 3, the brush plate 9 can continuously clean the dust screen 10. The cleaned dust is isolated again by the secondary filter plate 5 to prevent dust from entering the interior of the outer casing 1. The spring 8 below the brush plate 9 pushes the bristles to continuously contact the dust screen 10, thereby preventing dust from accumulating on the dust screen 10. The limit block 13 can ensure that the brush plate 9 can only move up and down during the cleaning process to prevent deviation and ensure the normal use of the brush plate 9. The mounting blocks on both sides of the dustproof net 10 are fixed in the mounting groove with bolts. The dustproof net 10 can be removed by unscrewing the bolts. The mounting box 7 and the mounting plate 6 are also connected by bolts. After removing the dustproof net 10, the mounting box 7 can be removed by unscrewing the connecting bolts, which makes it convenient to replace the brush plate 9. The secondary filter plate 5 is fixed to the outer shell 1 from the side with bolts. It can be quickly removed by unscrewing the bolts to replace the secondary filter plate 5. It should be noted that the edge of the dustproof net 10 is a frame, and the internal mesh diameter is the same as that of the brush plate 9, ensuring that the entire mesh of the dustproof net 10 can be cleaned during cleaning; at the same time, the secondary filter plate 5 is made of electrostatic electret meltblown filter material, which can efficiently capture the fine dust particles cleaned by the brush plate.

[0019] Working principle: After the motor 3 is started, the intake fan 4 begins to rotate, drawing air into the housing 1. The air entering the housing is first filtered by the dust filter 10. Since there is a brush plate 9 above the output end of the motor 3, the brush plate 9 continuously cleans the dust filter 10. The cleaned dust is then separated again by the secondary filter plate 5 to prevent dust from entering the housing 1. The spring 8 below the brush plate 9 pushes the bristles to continuously contact the dust filter 10, thereby preventing dust from accumulating on the dust filter 10.

[0020] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A molecular pump filtration structure, comprising a housing (1), characterized in that: A partition (2) is fixedly installed on the lower part of the inner side of the outer shell (1). A motor (3) is fixedly installed on the lower part of the partition (2). An air intake fan (4) is fixedly installed on the outer side of the output end of the motor (3). A mounting plate (6) is fixedly installed above the output end of the motor (3). A mounting box (7) is fixedly installed on the upper part of the mounting plate (6). Four limiting blocks (13) are fixedly installed at the inner edge of the mounting box (7). Multiple springs (8) are installed in the middle of the inner end of the mounting box (7). A brush plate (9) is fixedly installed on the upper part of the multiple springs (8). A dustproof net (10) is fixedly installed on the upper inner side of the outer shell (1). A secondary filter plate (5) is fixedly installed on the upper inner side of the outer shell (1). A limiting plate (12) is fixedly installed inside the outer shell (1) relative to the secondary filter plate (5). An air outlet pipe (11) is fixedly installed on the outer side of the outer shell (1) near the top of the partition (2).

2. The molecular pump filtration structure according to claim 1, characterized in that: The intake fan (4) is rotatably positioned in the middle of the inner side of the outer casing (1), and the secondary filter plate (5) is positioned below the intake fan (4).

3. The molecular pump filtration structure according to claim 1, characterized in that: The mounting plate (6) is rotatably mounted on the upper side of the inner side of the outer casing (1), and the brush plate (9) is in contact with the lower part of the dustproof net (10).

4. The molecular pump filtration structure according to claim 1, characterized in that: The brush plate (9) is arranged around the four limiting plates (12) at the outer ends, and the secondary filter plate (5) is arranged outside the output end of the motor (3).

5. The molecular pump filtration structure according to claim 1, characterized in that: The air outlet pipe (11) is located below the air intake fan (4), and mounting blocks are provided on both sides of the dustproof net (10).

6. The molecular pump filtration structure according to claim 1, characterized in that: The outer shell (1) has mounting grooves on both sides of its upper end.

Images