A vibration isolation device and temperature compensation system

Abstract

The utility model relates to a kind of vibration isolation device and temperature compensation system, the vibration isolation device includes: support platform;Multiple first heat insulation parts;Multiple support parts, its number is equal to the number of multiple first heat insulation parts, multiple support parts are fixed to support platform upper surface, and first heat insulation part is clamped between corresponding support part bottom surface and support platform upper surface, the free end of each support part corresponds through the through part and extends into the inside of temperature interval box, multiple support parts are used to support laser tracker installation tooling;Multiple second heat insulation parts, it is annular, and the number is same with the number of multiple support parts, corresponding second heat insulation part is sleeved on corresponding support part, and the gap between corresponding support part and corresponding through part is sealed;Multiple active shock absorbers, it is fixed to the lower surface of support platform. The utility model effectively inhibits external vibration transmission to laser tracker installation tooling, reduces the vibration interference of temperature compensation process to laser tracker.

Description

Technical Field

[0001] This utility model relates to the field of laser tracker technology, specifically to a vibration isolation device and a temperature compensation system. Background Technology

[0002] As a portable, high-precision, high-speed absolute laser measurement system with powerful dynamic six degrees of freedom, the laser tracker integrates many advanced measurement functions and is widely used in various industrial fields such as aviation, aerospace, automotive, shipbuilding, manufacturing, and robotics.

[0003] Laser trackers are susceptible to changes in ambient temperature, leading to thermal deformation of the mechanical structure, laser wavelength drift, and electronic signal drift. Before leaving the factory, a temperature compensation system is installed to compensate for temperature variations in the laser tracker. In existing temperature compensation systems, the temperature chamber is placed on a fixed platform, and the laser tracker mounting fixture is fixed to the bottom plate of the temperature chamber. The laser tracker is then mounted on the mounting fixture. However, vibrations can affect the laser tracker, interfering with the stability of the temperature compensation, causing micro-deformation of the mechanical structure, disrupting the static assumptions of the compensation model, and resulting in decreased compensation accuracy. Therefore, how to suppress vibration during the temperature compensation process of the laser tracker is a key concern. Utility Model Content

[0004] To address the aforementioned technical problems, one of the objectives of this utility model is to provide a vibration isolation device that effectively suppresses external vibrations from being transmitted to the laser tracker mounting fixture, reduces vibration interference during the temperature compensation process of the laser tracker, and minimizes the coupling effect of vibration and temperature changes on the measurement, ensuring the accuracy of the compensation data and improving the temperature compensation accuracy and measurement stability of the laser tracker.

[0005] To solve the above-mentioned technical problems, the present invention proposes the following technical solution: This application relates to a vibration isolation device for a temperature compensation system of a laser tracker, the temperature compensation system including a temperature chamber, and the vibration isolation device comprising: Support platform; Multiple primary insulation sections; Multiple support parts, the number of which is equal to the number of multiple first heat insulation parts, are distributed and fixed to the upper surface of the support platform, and the first heat insulation parts are sandwiched between the bottom surface of the corresponding support part and the upper surface of the support platform. The free end of each support part passes through the through part opened on the bottom plate of the variable temperature chamber and extends into the interior of the variable temperature chamber. The multiple support parts are used to support the laser tracker installation fixture. Multiple second heat insulation parts, all of which are annular, and the number of them is the same as the number of multiple support parts. The corresponding second heat insulation parts are sleeved on the corresponding support parts and seal the gap between the corresponding support parts and the corresponding through parts. Multiple active shock absorbers are distributed and fixed to the lower surface of the support platform.

[0006] In some embodiments of this application, the first heat insulation part is a heat insulation cloth, and the vibration isolation device further includes a plurality of hoop rings corresponding to the plurality of heat insulation cloths. The corresponding hoop rings pass through the corresponding heat insulation cloths and are clamped on the corresponding support part, and the free end of the corresponding heat insulation cloths is connected to the inner sidewall of the corresponding through part.

[0007] In some embodiments of this application, the support portion includes: A support column, the top of which is used to support the installation fixture for the laser tracker; The connecting part is used to fix the support column to the upper surface of the support platform, and the second heat insulation part is sandwiched between the connecting part and the upper surface of the support platform.

[0008] In some embodiments of this application, the connecting part is a connecting plate, which is fixed to the bottom end of the support column and screwed to the upper surface of the support platform.

[0009] In some embodiments of this application, the second heat insulation part is a nylon gasket.

[0010] In some embodiments of this application, the support platform is a granite platform, and the support column is a granite column.

[0011] In some embodiments of this application, the number of multiple first heat insulation parts, multiple support parts, multiple second heat insulation parts, and multiple active shock absorbers are all four; The four support components form a square area; An active shock absorber and a support are arranged opposite each other on the upper and lower surfaces of the support platform.

[0012] In some embodiments of this application, the variable temperature chamber also has multiple support feet, the bottom surface of which is flush with the bottom surface of the active shock absorber.

[0013] Compared with the prior art, the vibration isolation device provided in this application has the following advantages and beneficial effects: (1) The support part used to support the installation fixture of the laser tracker does not contact the temperature chamber, so the vibration of the temperature chamber cannot be transmitted to the vibration isolation device and will not affect the measurement and temperature compensation of the laser tracker. Furthermore, an active shock absorber is installed at the bottom to support the support platform and prevent external vibrations from being transmitted to the support platform, effectively suppressing the impact of external vibrations on the measurement and temperature compensation of the laser tracker. (2) By arranging the first heat insulation part, the heat or cold energy in the variable temperature chamber is prevented from flowing out, ensuring the temperature inside the variable temperature chamber is stable. Furthermore, by setting the second heat insulation part, the heat or cold energy in the variable temperature chamber is reduced from being transferred to the support platform and the active shock absorber, thus affecting the performance of the active shock absorber.

[0014] Some embodiments of this application also relate to a temperature compensation system for performing temperature compensation on a laser tracker, the temperature compensation system comprising: A variable temperature chamber is used to provide a variable temperature space for the laser tracker, and multiple through-sections are opened on the bottom plate of the variable temperature chamber. A laser tracker installation fixture, located inside the variable temperature chamber, is used to install the laser tracker; Vibration isolation device, comprising: Support platform; Multiple primary insulation sections; Multiple support parts, the number of which is equal to the number of multiple first heat insulation parts, are distributed and fixed to the upper surface of the support platform, and the first heat insulation parts are sandwiched between the bottom surface of the corresponding support part and the upper surface of the support platform. The free end of each support part passes through the corresponding through part and extends into the interior of the variable temperature chamber. The multiple support parts are used to support the laser tracker installation fixture. Multiple second heat insulation parts, all of which are annular, and the number of them is the same as the number of multiple support parts. The corresponding second heat insulation parts are sleeved on the corresponding support parts and seal the gap between the corresponding support parts and the corresponding through parts. Multiple active shock absorbers are distributed and fixed to the lower surface of the support platform.

[0015] Other features and advantages of this utility model will become clearer after reading the detailed embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments of this utility model or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a structural diagram of the vibration isolation device and laser tracker installation fixture proposed in this utility model assembled into the variable temperature chamber at the first angle. Figure 2 This is a structural diagram of the variable temperature chamber used in the vibration isolation device proposed in this utility model. Figure 3 for Figure 1 Top view in the image; Figure 4 For along Figure 3 A cross-sectional view along the AA direction; Figure 5 This is a structural diagram of the vibration isolation device and laser tracker installation fixture proposed in this utility model assembled into the temperature-controlled chamber at a second angle. Figure 6 This is a structural diagram of the vibration isolation device proposed in this utility model; Figure label: 100. Vibration isolation device; 110. Support platform; 120. Support section; 121. Support column; 122. Connector; 130. First heat insulation section; 140. Second heat insulation section; 150. Active shock absorber; 200. Variable temperature chamber enclosure; 210. Base plate; 211. Through section; 220. Circumferential side plate; 230. Supporting legs; 300. Laser tracker installation fixture. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0019] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this utility model. In the description of this utility model, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0021] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0022] To prevent vibration from affecting the temperature compensation of the laser tracker, a vibration isolation device is installed in the temperature chamber housing used for temperature compensation of the laser tracker. This effectively suppresses the impact of vibration on the temperature compensation of the laser tracker, thereby improving the accuracy of temperature compensation and measurement of the laser tracker.

[0023] See Figures 1 to 6 The structure of the vibration isolation device 100 is described in conjunction with the variable temperature chamber 200.

[0024] The variable temperature chamber 200 is a chamber that provides a variable temperature space for the laser tracker (not shown). In order to achieve variable temperature compensation for the laser tracker, the laser tracker is placed inside the variable temperature chamber 200, and the variable temperature compensation system is used to achieve variable temperature compensation for the laser tracker.

[0025] The laser tracker is placed inside the variable temperature chamber 200. The variable temperature compensation system for the laser tracker is existing technology and is not the focus of this application. This application focuses on how to suppress the transmission of vibration to the laser tracker located in the variable temperature chamber 200, so as to avoid the vibration affecting the variable temperature compensation of the laser tracker.

[0026] In some embodiments of this application, see Figure 1 The variable temperature chamber 200 has a top cover (not shown), circumferential side plates 220 and a bottom plate 210. The laser tracker mounting fixture 300 is arranged inside the variable temperature chamber 200 using a vibration isolation device 100, and the laser tracker is mounted on the laser tracker mounting fixture 300.

[0027] In some embodiments of this application, the base plate 210 has a plurality of through portions 211, see [reference]. Figure 2The multiple through portions 211 are four through holes, which enclose a square area.

[0028] See 3 to Figure 6 The vibration isolation device 100 includes a support platform 110, multiple support parts 120, multiple first heat insulation parts 130, multiple second heat insulation parts 140, and multiple active dampers 150.

[0029] In some embodiments of this application, the number of multiple support portions 120, multiple first heat insulation portions 130 and multiple second heat insulation portions 140 is the same and corresponds one-to-one, and may also be the same as the number of active shock absorbers 150.

[0030] See Figures 3 to 6 The number of multiple support parts 120, multiple first heat insulation parts 130, multiple second heat insulation parts 140 and multiple active shock absorbers 150 are four each, or the number of multiple support parts 120, multiple first heat insulation parts 130 and multiple second heat insulation parts 140 are four each, and the number of active shock absorbers 150 can be less than four or more than four.

[0031] The support platform 110 serves as the main support for the entire vibration isolation device 100 and also acts as a counterweight, ensuring that the vibration isolation device 100 does not shake when the laser tracker moves on the laser tracker mounting fixture.

[0032] In some embodiments of this application, the support platform 110 is a granite platform. Granite has a dense structure, high compressive strength, low water absorption, high surface hardness, good chemical stability, strong durability, and poor fire resistance.

[0033] See Figure 3 and Figure 6 Four support parts 120 form a square and are fixed to the upper surface of the support platform 110, with their free ends extending into the variable temperature chamber 200 through the corresponding through-parts 211 (see...). Figure 4 and Figure 5 ), and the free ends of the four support parts 120 support the laser tracker installation fixture 300.

[0034] There is a gap between the outer peripheral sidewall of the support part 120 and the through hole, that is, the support part 120 and the base plate 210 do not contact each other. In this way, the vibration of the variable temperature chamber 200 will not be transmitted to the support part 120, thus preventing the vibration of the variable temperature chamber 200 from affecting the laser tracker.

[0035] In some embodiments of this application, see Figure 4 and Figure 5The support part 120 includes a support column 121 and a connector 122. The support column 121 is fixed to the connector 122, and the connector 122 is fixed to the support platform 110. In this way, the support column 121 is fixed to the support platform 110.

[0036] See Figure 4 The support column 121 is a cylinder, and the connector 122 is a connecting plate. The connecting plate is fixed to the bottom end of the support column 121 by screws, and the area of ​​the connecting plate is larger than the surface area of ​​the bottom end of the support column 121. Therefore, the part of the screw that passes through the connector 122 and extends beyond the bottom end of the support column 121 is fixed to the support platform 110.

[0037] In some embodiments of this application, the support column 121 is a granite column. Granite has a dense structure, high compressive strength, low water absorption, high surface hardness, good chemical stability, strong durability, and poor fire resistance.

[0038] To ensure the temperature inside the variable temperature chamber 200 and prevent heat or cold from escaping through the gaps described above, please refer to... Figure 4 The first heat insulation part 130 is correspondingly sleeved on the support column 121 and is used to seal the gap as described above.

[0039] The first heat insulation part 130 can be made of various types of materials. In some embodiments of this application, the first heat insulation part 130 can be made of heat insulation cloth, which is clamped to the support column 121 by a hoop (not shown), and the free end is connected (e.g., by sealant) to the inner wall of the corresponding through part 211.

[0040] The heat insulation cloth can prevent heat or cold from flowing out of the variable temperature chamber 200, and also prevent the vibration of the variable temperature chamber 200 from affecting the laser tracker.

[0041] In some embodiments of this application, the second heat insulation portion 140 is sandwiched between the bottom surface of the support portion 120 and the upper surface of the support platform 110, see [reference]. Figure 4 The second heat insulation part 140 is sandwiched between the other surface of the connecting plate that does not contact the bottom end of the support column 121 and the upper surface of the support platform 110, further preventing the cold or heat in the variable temperature chamber 200 from flowing out to the support platform 110.

[0042] The second heat insulation part 140 can be made of various heat insulation materials. In this application, the second heat insulation part 140 can be made of nylon gasket, which can effectively insulate heat.

[0043] Active vibration damper 150 is installed on the lower surface of support platform 110 to prevent external ground vibration from being transmitted to vibration isolation device 100 and laser tracker mounting fixture 300, thus avoiding the influence of external ground equipment (e.g., compressor in refrigerant circulation loop used to change the temperature inside variable temperature chamber 200) on the laser tracker.

[0044] In some embodiments of this application, see Figure 5 and Figure 6 An active damper 150 is positioned opposite a support 120 on the upper and lower surfaces of the support platform 110. Thus, the second heat insulation part 140 is provided to effectively reduce the transfer of heat or cold from the variable temperature chamber 200 to the support platform 110 and the active damper 150, thereby reducing the impact on the performance of the active damper 150.

[0045] In some embodiments of this application, see Figure 2 The variable temperature chamber 200 also has multiple support legs 230, see [link / reference] Figure 4 The bottom surface of the support foot 230 is flush with the bottom surface of the active shock absorber 150, so that when the support foot 230 is supported on a bearing plane, the active shock absorber 150 is also stably supported on the bearing plane.

[0046] In some embodiments of this application, a temperature compensation system is also involved, which is used to compensate for the temperature of a laser tracker. The temperature compensation system includes a temperature chamber 200, a laser tracker mounting fixture 300, and a vibration isolation device 100 as described above.

[0047] The vibration isolation device 100 involved in this application can significantly reduce the impact of external vibration on the laser tracker, avoid optical path deviation or signal distortion of the laser tracker, and improve its measurement stability and repeatability. Meanwhile, the vibration isolation device 100 can isolate external vibration interference, enabling the temperature compensation system to more accurately correct errors for temperature changes, avoid the coupling effect of vibration and thermal deformation, ensure more reliable compensation effect, and thus expand the application scenarios of laser trackers with temperature compensation function (especially suitable for complex environments such as high-precision manufacturing, semiconductor testing or field measurement), which can extend the service life of equipment and improve data consistency.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A vibration isolation device for a temperature compensation system of a laser tracker, the temperature compensation system comprising a temperature chamber, characterized in that, The vibration isolation device includes: Support platform; Multiple primary insulation sections; Multiple support parts, the number of which is equal to the number of multiple first heat insulation parts, are distributed and fixed to the upper surface of the support platform, and the first heat insulation parts are sandwiched between the bottom surface of the corresponding support part and the upper surface of the support platform. The free end of each support part passes through the through part opened on the bottom plate of the variable temperature chamber and extends into the interior of the variable temperature chamber. The multiple support parts are used to support the laser tracker installation fixture. Multiple second heat insulation parts, all of which are annular, and the number of them is the same as the number of multiple support parts. The corresponding second heat insulation parts are sleeved on the corresponding support parts and seal the gap between the corresponding support parts and the corresponding through parts. Multiple active shock absorbers are distributed and fixed to the lower surface of the support platform.

2. The vibration isolation device according to claim 1, characterized in that, The first heat insulation part is heat insulation cloth, and the vibration isolation device also includes multiple hoop rings corresponding to multiple heat insulation cloths. The corresponding hoop rings pass through the corresponding heat insulation cloths and are clamped on the corresponding support parts, and the free end of the corresponding heat insulation cloth is connected to the inner side wall of the corresponding through part.

3. The vibration isolation device according to claim 1, characterized in that, The support portion includes: A support column, the top of which is used to support the installation fixture for the laser tracker; The connecting part is used to fix the support column to the upper surface of the support platform, and the second heat insulation part is sandwiched between the connecting part and the upper surface of the support platform.

4. The vibration isolation device according to claim 3, characterized in that, The connecting part is a connecting plate, which is fixed to the bottom end of the support column and screwed to the upper surface of the support platform.

5. The vibration isolation device according to claim 1 or 3, characterized in that, The second heat insulation part is a nylon gasket.

6. The vibration isolation device according to claim 3, characterized in that, The support platform is a granite platform, and the support columns are granite columns.

7. The vibration isolation device according to claim 1, characterized in that, The number of multiple first heat insulation parts, multiple support parts, multiple second heat insulation parts, and multiple active shock absorbers are all four; The four support components form a square area; An active shock absorber and a support are arranged opposite each other on the upper and lower surfaces of the support platform.

8. The vibration isolation device according to claim 1, characterized in that, The variable temperature chamber also has multiple support legs, the bottom surface of which is flush with the bottom surface of the active shock absorber.

9. A temperature compensation system for a laser tracker, characterized in that, The temperature compensation system includes: A variable temperature chamber is used to provide a variable temperature space for the laser tracker, and multiple through-sections are opened on the bottom plate of the variable temperature chamber. A laser tracker installation fixture, located inside the variable temperature chamber, is used to install the laser tracker; Vibration isolation device, comprising: Support platform; Multiple primary insulation sections; Multiple support parts, the number of which is equal to the number of multiple first heat insulation parts, are distributed and fixed to the upper surface of the support platform, and the first heat insulation parts are sandwiched between the bottom surface of the corresponding support part and the upper surface of the support platform. The free end of each support part passes through the corresponding through part and extends into the interior of the variable temperature chamber. The multiple support parts are used to support the laser tracker installation fixture. Multiple second heat insulation parts, all of which are annular, and the number of them is the same as the number of multiple support parts. The corresponding second heat insulation parts are sleeved on the corresponding support parts and seal the gap between the corresponding support parts and the corresponding through parts. Multiple active shock absorbers are distributed and fixed to the lower surface of the support platform.

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