Vacuum chamber isolation door valve

Abstract

The utility model relates to the technical field of vacuum equipment, concretely relates to a vacuum cavity isolation door valve, design the cover plate for cutting off two adjacent vacuum cavities in the vacuum equipment to act as the gate of cutting off two adjacent vacuum cavities. Multiple fixed mounting pieces and multiple connecting arms are arranged staggeredly to jointly constitute connecting components. The connecting components have sufficient strength, can ensure stability when connecting the cover plate and driving, are not easily damaged, and prolong the service life of the whole set of equipment. A connecting seat is further arranged at the connecting position of the connecting arm and the cover plate to increase the connecting contact surface of the connecting arm and the cover plate, ensure that the connecting position is not easily loosened and damaged, improve stability, and prolong the service life of the whole set of equipment. The movable driving cylinder cooperates with the conical swing arm and the fixed bearing to drive the rotating rod to rotate, so that the driving cylinder can adaptively adjust the output direction of the output shaft. The installation flexibility of the driving mechanism is improved, and the adaptability is further improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment technology, and in particular to a vacuum cavity isolation valve. Background Technology

[0002] In vacuum equipment, an isolation mechanism is typically required between two adjacent vacuum chambers to separate them into two independent chambers, thereby enabling different vacuum levels within each adjacent chamber. This isolation mechanism usually uses mechanical devices (such as gates or diaphragms) to block gas flow and maintain the vacuum level of a specific chamber. This is commonly found in photovoltaic equipment, semiconductor manufacturing, and scientific research experiments. In some vacuum equipment used for continuous photovoltaic production, the opening and closing frequency of such valves is extremely high. However, in existing technologies, the entire vacuum gate assembly is relatively large and heavy, and the frequent opening and closing easily leads to mechanical wear and tear on the structure. The connection between the rotating parts and the gate, as the main load-bearing component, is particularly vulnerable to damage, thus affecting the lifespan of the entire equipment. Furthermore, the space constraints of photovoltaic production vacuum equipment limit the structural design of the isolation valve and its drive components. Therefore, designing an isolation valve that meets vacuum leakage rate requirements and ensures robust key components within a limited space is a significant challenge. Utility Model Content

[0003] In view of this, the purpose of this utility model is to propose a vacuum cavity isolation valve to solve the technical problems of easy mechanical wear and poor mechanical wear durability of the existing vacuum cavity isolation valve.

[0004] To achieve the above objectives, this utility model provides a vacuum chamber isolation valve, including a cover plate for separating two adjacent vacuum chambers in a vacuum device, and the isolation valve further includes: A rotating rod is rotatably connected to a vacuum device. Multiple connecting arms are also fixedly connected to the rotating rod. The multiple connecting arms are equidistantly distributed, and the other end of each connecting arm is fixedly connected to the rear end face of a cover plate.

[0005] A drive cylinder is movably connected to a fixed base, which is fixedly connected to a vacuum device. A conical rocker arm is rotatably connected to the output shaft of the drive cylinder, and the conical rocker arm is fixedly connected to a rotating rod.

[0006] Furthermore, the rotating rod is provided with multiple fixed mounting parts, which are equidistantly distributed and used to rotatably connect the rotating rod to the vacuum equipment.

[0007] Furthermore, the number of connecting arms is one less than the number of fixed mounting parts, and a connecting arm is provided at the midpoint between every two adjacent fixed mounting parts.

[0008] Furthermore, the rotating rod passes through and is rotatably connected to the fixed mounting component, which is fixedly connected to the vacuum equipment.

[0009] Furthermore, a connecting seat is provided at the connection between the connecting arm and the cover plate. The connecting seat consists of a square plate and a bracket. The connecting arm is connected to the bracket by bolts, and the cover plate is fixedly connected to the square plate to increase the connection contact surface.

[0010] Furthermore, the tapered swing arm is fixedly connected to the rotating rod via a fixed bearing, and the fixed bearing is also fixedly connected to the vacuum equipment. Furthermore, a rotating mounting bracket is provided on the fixed base, and the rear end of the drive cylinder is connected to the rotating mounting bracket for driving the cylinder to rotate to adjust the output direction of the output shaft.

[0011] Furthermore, the rotating mounting bracket includes a rotating support, a rotating mounting seat, and a rotating shaft. The driving cylinder is fixedly connected to the rotating mounting seat, the rotating mounting seat is rotatably connected to the rotating support via the rotating shaft, and the rotating support is fixedly connected to the fixed seat.

[0012] Furthermore, a rubber sealing ring is provided on the front end face of the cover plate along the edge of the cover plate.

[0013] The beneficial effects of this utility model are as follows: 1. Multiple fixed mounting parts and multiple connecting arms are provided, and the two are arranged alternately to form a connecting component. This ensures that these connecting components have sufficient strength, guaranteeing stability when connecting the cover plate and transmitting power, and are not easily damaged, thus extending the service life of the entire equipment.

[0014] 2. A connecting seat is also provided at the connection between the connecting arm and the cover plate to increase the contact surface between the connecting arm and the cover plate, ensuring that the connection is not easily loosened or damaged, improving stability and extending the life of the entire equipment.

[0015] 3. A movable drive cylinder, in conjunction with a conical rocker arm and a fixed bearing, drives the rotating rod to rotate, allowing the drive cylinder to adaptively adjust the output direction of the output shaft. This improves the installation flexibility of the drive mechanism, thereby enhancing its adaptability. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1This is a schematic diagram of the overall structure and principle of the device of this utility model.

[0018] Figure 2 This is a schematic diagram of the connection structure between the rotating rod and the cover plate in the device of this utility model.

[0019] Figure 3 This is a schematic diagram of the front of the cover plate in the device of this utility model.

[0020] Figure 4 This is a schematic diagram of the structure of the fixed base and rotating mounting bracket in the device of this utility model.

[0021] Figure 5 This is a schematic diagram of the rotating mounting frame of the device of this utility model.

[0022] The diagram is marked as follows: 101. Drive cylinder; 102. Fixed seat; 103. Conical swing arm; 104. Rotating rod; 105. Connecting arm; 106. Connecting seat; 107. Cover plate; 108. Fixed bearing; 109. Fixed mounting part; 110. Rubber sealing ring; 111. Rotating bracket; 112. Rotating mounting seat; 113. Rotating shaft. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0024] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] The first aspect of this utility model is as follows: Figure 1 , Figure 2 and Figure 3As shown, due to the very high opening and closing frequency of the vacuum chamber isolation valve, and the large size and weight of the entire vacuum gate assembly, mechanical wear of the structure is easily caused. In particular, the connection between the rotating part and the gate, as the main load-bearing component, is especially prone to damage, thus affecting the lifespan of the entire equipment. Therefore, this invention designs a cover plate 107 to separate two adjacent vacuum chambers in a vacuum device, serving as a gate to isolate the two adjacent vacuum chambers.

[0026] The cover plate 107 is connected to the rotating rod 104, which is rotatably connected to the vacuum equipment. Multiple connecting arms 105 are also fixedly connected to the rotating rod 104. The multiple connecting arms 105 are equidistantly distributed, and the other end of the connecting arm 105 is fixedly connected to the rear end face of the cover plate 107.

[0027] Preferably, a connecting seat 106 is provided at the connection between the connecting arm 105 and the cover plate 107. The connecting seat 106 is composed of a square plate and a bracket. The connecting arm 105 is connected to the bracket by bolts, and the cover plate 107 is fixedly connected to the square plate to increase the connection contact surface.

[0028] The rotating rod 104 is provided with multiple fixed mounting parts 109, which are equidistantly distributed and used to rotatably connect the rotating rod 104 to the vacuum equipment. The rotating rod 104 passes through and is rotatably connected to the fixed mounting parts 109, which are then fixedly connected to the vacuum equipment. The number of connecting arms 105 is one less than the number of fixed mounting parts 109, and a connecting arm 105 is provided at the midpoint between every two adjacent fixed mounting parts 109.

[0029] Multiple fixed mounting parts 109 and multiple connecting arms 105 are arranged in an alternating manner to form a connecting component. This ensures that the connecting component has sufficient strength to guarantee stability and prevent damage when connecting the cover plate 107 and transmitting power. A connecting seat 106 is also provided at the connection between the connecting arm 105 and the cover plate 107, increasing the contact surface between the connecting arm 105 and the cover plate 107, ensuring that the connection is not prone to loosening or damage, improving stability, and extending the life of the entire equipment.

[0030] The first aspect of this utility model is as follows: Figure 1 , Figure 4 and Figure 5 As shown, due to space constraints in photovoltaic production vacuum equipment, the structural design of the isolation valve and drive components is limited. To improve adaptability, this embodiment designs a drive cylinder 101 capable of moving within a certain range as a power source.

[0031] Specifically, the drive cylinder 101 is movably connected to the fixed base 102, which is fixedly connected to the vacuum equipment. A conical rocker arm 103 is rotatably connected to the output shaft of the drive cylinder 101, and the conical rocker arm 103 is fixedly connected to the rotating rod 104. A rotating mounting bracket is provided on the fixed base 102, and the rear end of the drive cylinder 101 is connected to the rotating mounting bracket for driving the cylinder 101 to rotate and adjust the output direction of the output shaft.

[0032] The rotating mounting bracket includes a rotating support 111, a rotating mounting seat 112, and a rotating shaft 113. The drive cylinder 101 is fixedly connected to the rotating mounting seat 112. The rotating mounting seat 112 is rotatably connected to the rotating support 111 via the rotating shaft 113. The rotating support 111 is fixedly connected to the fixed seat 102.

[0033] The movable drive cylinder 101, in conjunction with the conical swing arm 103 and the fixed bearing 108, drives the rotating rod 104 to rotate, allowing the drive cylinder 101 to adaptively adjust the output direction of the output shaft. This improves the installation flexibility of the drive mechanism, thereby enhancing its adaptability.

[0034] Preferably, a rubber sealing ring 110 is provided on the front end face of the cover plate 107 along the edge of the cover plate 107.

[0035] In summary, this utility model provides multiple fixed mounting parts 109 and multiple connecting arms 105, which are staggered to form a connecting component. This ensures sufficient strength for these connecting components, guaranteeing stability and preventing damage during connection and transmission of the cover plate 107, thus extending the lifespan of the entire equipment. A connecting seat 106 is also provided at the connection point between the connecting arm 105 and the cover plate 107, increasing the contact surface and preventing loosening or damage at the connection, thereby improving stability and extending the lifespan of the entire equipment. A movable drive cylinder 101, in conjunction with a conical swing arm 103 and a fixed bearing 108, drives the rotating rod 104 to rotate, allowing the drive cylinder 101 to adaptively adjust the output direction of the output shaft. This improves the installation flexibility of the drive mechanism, thereby enhancing its adaptability.

[0036] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention includes the claims being limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0037] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum chamber isolation valve, comprising a cover plate (107) for separating two adjacent vacuum chambers in a vacuum device, characterized in that, The isolation valve also includes: A rotating rod (104) is rotatably connected to a vacuum device. Multiple connecting arms (105) are also fixedly connected to the rotating rod (104), with the connecting arms (105) evenly distributed. The other end of each connecting arm (105) is fixedly connected to the rear end face of a cover plate (107). A drive cylinder (101) is movably connected to a fixed base (102), which is fixedly connected to a vacuum device. A conical swing arm (103) is rotatably connected to the output shaft of the drive cylinder (101), and the conical swing arm (103) is fixedly connected to a rotating rod (104).

2. The vacuum chamber isolation valve according to claim 1, characterized in that, The rotating rod (104) is provided with a plurality of fixed mounting parts (109), which are equidistantly distributed and used to rotatably connect the rotating rod (104) to the vacuum equipment.

3. A vacuum chamber isolation valve according to claim 2, characterized in that, The number of connecting arms (105) is one less than the number of fixed mounting parts (109), and a connecting arm (105) is provided at the middle position of every two adjacent fixed mounting parts (109).

4. A vacuum chamber isolation valve according to claim 2, characterized in that, The rotating rod (104) passes through and is rotatably connected to the fixed mounting (109), which is fixedly connected to the vacuum equipment.

5. A vacuum chamber isolation valve according to claim 1 or 3, characterized in that, A connecting seat (106) is also provided at the connection between the connecting arm (105) and the cover plate (107). The connecting seat (106) consists of a square plate and a bracket. The connecting arm (105) is connected to the bracket by bolts, and the cover plate (107) is fixedly connected to the square plate to increase the connection contact surface.

6. A vacuum chamber isolation valve according to claim 1, characterized in that, The conical swing arm (103) is fixedly connected to the rotating rod (104) via a fixed bearing (108), and the fixed bearing (108) is also fixedly connected to the vacuum equipment.

7. A vacuum chamber isolation valve according to claim 1, characterized in that, A rotating mounting bracket is provided on the fixed base (102), and the rear end of the drive cylinder (101) is connected to the rotating mounting bracket to drive the cylinder (101) to rotate to adjust the output direction of the output shaft.

8. A vacuum chamber isolation valve according to claim 7, characterized in that, The rotating mounting bracket includes a rotating bracket (111), a rotating mounting seat (112), and a rotating shaft (113). The driving cylinder (101) is fixedly connected to the rotating mounting seat (112). The rotating mounting seat (112) is rotatably connected to the rotating bracket (111) via the rotating shaft (113). The rotating bracket (111) is fixedly connected to the fixed seat (102).

9. A vacuum chamber isolation valve according to claim 1, characterized in that, A rubber sealing ring (110) is provided on the front end face of the cover plate (107) along the edge of the cover plate (107).

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