Chemical liquid circulation pipeline structure

Abstract

The utility model provides a kind of liquid medicine circulation pipeline structure, it is related to wafer manufacturing technical field, comprising: multiple circulation pipelines, each circulation pipeline is layered arrangement in the normal direction of plane enclosed by itself, the circulation pipeline between adjacent level is staggered arrangement;Liquid inlet point and liquid outlet point of each circulation pipeline are along the diagonal line distribution of circulation pipeline.It is beneficial to be that circulation pipeline is layered arrangement in the normal direction of plane enclosed by circulation pipeline and staggered arrangement between level, can significantly compress the layout space inside single piece cleaning equipment;At the same time, by staggered arrangement, the liquid inlet and liquid outlet of pipeline are distributed in loop diagonal position, effectively stabilize the flow and pressure fluctuation at each connection node.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a pharmaceutical solution circulation pipeline structure. Background Technology

[0002] In single-wafer cleaning equipment, multiple chemical solutions are required to clean the wafers. A single cleaning unit may use more than a dozen different solutions, each requiring a separate pipeline for supply, resulting in a large number of pipelines. To ensure stable flow rates and cleanliness of each solution at the outlet, the pipeline structure needs to be designed in a "U" shape to create a circulating flow. If there are many solutions, the circulating pipeline must be arranged in layers. Given the existing pipeline layout and connector volume, the inlet and outlet ports can only be randomly arranged within the limited equipment space. This method results in varying distances between the inlet and outlet ports from each series connection point on the circulating pipeline. Since pipeline pressure and flow are related to distance, the flow rate and pressure at each connection point in the circulating pipeline differ, leading to variations in the cleaning nozzle capacity at each connection point. Utility Model Content

[0003] To address the problems existing in the prior art, this utility model provides a drug circulation pipeline structure, comprising:

[0004] Multiple circulation pipes are arranged in layers along the normal direction of the plane enclosed by the circulation pipes, with the circulation pipes in adjacent layers staggered.

[0005] The inlet and outlet points of each circulation pipeline are distributed along the diagonal of the circulation pipeline.

[0006] Preferably, the circulation pipeline is a rectangular pipeline.

[0007] Preferably, the circulation pipelines of adjacent layers are staggered in a first direction by a staggered distance of 60mm, and the first direction is perpendicular to the normal direction of the plane enclosed by the circulation pipelines.

[0008] Preferably, the circulation pipelines of adjacent levels are staggered in the second direction by a stagger distance of 60mm, and the second direction is perpendicular to both the normal direction and the first direction.

[0009] Preferably, the distance between adjacent circulation pipes in the normal direction of the plane enclosed by the circulation pipes is 50 mm.

[0010] Preferably, each of the circulation pipelines is provided with multiple series contacts, and each series contact is equipped with a cleaning nozzle.

[0011] Preferably, for each of the circulation pipes, the projection positions of the two circulation pipes adjacent to it above and below are the same in the normal direction.

[0012] Preferably, a T-connector is installed at the series connection point, and the cleaning nozzle is installed on the T-connector.

[0013] The above technical solution has the following advantages or beneficial effects:

[0014] 1. The circulation pipeline is arranged in layers along the normal direction of the plane enclosed by the circulation pipeline, and the layers are staggered, which can significantly reduce the space for the circulation pipeline inside the single-piece cleaning equipment.

[0015] 2. The staggered arrangement of the circulation pipeline allows the inlet and outlet points of the circulation pipeline to be set at opposite corners of the U-shaped pipeline, making the pressure and flow rate changes at each connection point of the circulation pipeline more stable. Attached Figure Description

[0016] Figure 1 A top view of a drug circulation pipeline structure in a preferred embodiment of this utility model;

[0017] Figure 2 An isometric view of a drug circulation pipeline structure in a preferred embodiment of this utility model;

[0018] Figure 3 A side view of a drug circulation pipeline structure in a preferred embodiment of this utility model;

[0019] Figure 4 for Figure 2 An enlarged view of the upper part;

[0020] Figure 5 for Figure 2 An enlarged diagram of the lower half. Detailed Implementation

[0021] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. The present invention is not limited to this embodiment; other embodiments that conform to the spirit of the present invention may also fall within its scope.

[0022] In a preferred embodiment of this utility model, based on the above-mentioned problems existing in the prior art, a drug circulation pipeline structure is provided, such as... Figure 1-5 As shown, it includes:

[0023] Multiple circulation pipes 1 are arranged in layers along the normal direction of the plane they enclose, with the circulation pipes 1 in adjacent layers staggered.

[0024] The inlet point 2 and outlet point 3 of each circulation pipeline are distributed along the diagonal of the circulation pipeline.

[0025] Preferably, each circulation pipe 1 is provided with multiple series contacts, and each series contact is equipped with a cleaning nozzle.

[0026] Specifically, such as Figure 1-5 As shown, this embodiment includes three circulation pipes 1, each with the same structure. They are arranged in layers along the normal direction of the plane enclosed by the circulation pipes (corresponding to the Z-axis direction in the figure). The circulation pipes of adjacent layers are staggered. This arrangement only requires a small increase in space (approximately the length of a T-joint) in the X and Y axis directions (the X and Y axes in the figure correspond to the length and width directions of the circulation pipes, and the plane formed by the X and Y axes is the plane enclosed by the circulation pipes) compared to the original direct stacking method. However, it can significantly reduce the arrangement space of the circulation pipes inside the single-piece cleaning device in the Z-axis direction (the more pipes, the more obvious the effect).

[0027] Furthermore, the staggered arrangement of the circulation pipeline 1 allows the inlet point 2 and outlet point 3 of the circulation pipeline to be set at opposite corners of the circulation pipeline, eliminating the need for randomly arranged inlet and outlet points as in existing technologies. Once the positions of the inlet and outlet points are fixed, the distance between each connection point and the inlet and outlet points is also relatively fixed, making the pressure and flow rate changes at each connection point of the circulation pipeline more stable. This reduces the difference in the capacity of the cleaning nozzles at each connection point, improves the cleaning effect, and the orientation of the cleaning nozzles can be adjusted according to needs. The number of cleaning nozzles can also be increased according to actual requirements.

[0028] In a preferred embodiment of this utility model, such as Figure 1-5 As shown, circulation pipe 1 is a rectangular pipe.

[0029] In a preferred embodiment of the present invention, the circulation pipes 1 of adjacent levels are staggered in a first direction, with a staggered distance of 60mm, and the first direction is perpendicular to the normal direction of the plane enclosed by the circulation pipes.

[0030] In a preferred embodiment of the present invention, the circulation pipes 1 of adjacent levels are staggered in the second direction by a staggered distance of 60mm. The second direction is perpendicular to both the normal direction of the plane enclosed by the circulation pipes and the first direction.

[0031] The spacing between the circulation pipelines of adjacent levels in the normal direction is 50 mm.

[0032] Specifically, the first direction and the second direction correspond to the X and Y axes in the diagram, respectively.

[0033] In a preferred embodiment of the present utility model, a three-way pipe 11 is installed at the series connection point, and the cleaning spray head is mounted on the three-way pipe 11.

[0034] Specifically, in this embodiment, three-way pipes 11 are installed at the liquid inlet point 2, the liquid outlet point 3, and the series connection points on the middle ends of the pipelines. The length of the pipe heads of the three-way pipes 11 is generally less than 60mm in the X and Y axis directions, and the thickness in the Z axis direction is less than 100mm. Therefore, the staggered distance between adjacent circulation pipelines 1 in the first direction (X axis) and the second direction (Y axis) is 60mm, and the separation distance in the normal direction (Z axis) of the plane enclosed by the circulation pipelines is 50mm. This allows the three-way pipes 11 arranged at the same positions of adjacent circulation pipelines (such as the liquid inlet point 2, the liquid outlet point 3, and the middle end of the pipelines) to be staggered to save space. Meanwhile, the spacing between two spaced adjacent circulation pipelines (for example, the first layer and the third layer) is 100mm, which can easily allow the three-way pipes 11 to pass through, facilitating the individual disassembly and removal of the circulation pipeline 1 of a certain layer.

[0035] In a preferred embodiment of the present utility model, for each circulation pipeline 1, the projection positions of the two circulation pipelines 1 adjacent to it up and down in the normal direction of the plane enclosed by the circulation pipelines are the same.

[0036] Specifically, in this embodiment, the circulation pipelines 1 adopt rectangular pipelines, and the projection positions of two spaced adjacent circulation pipelines 1 (for example, the first layer and the third layer, the second layer and the fourth layer) in the normal direction of the plane enclosed by the circulation pipelines are the same. Whether there are only 3 layers of circulation pipelines or 10 or 20 layers, the space they occupy on the XY plane is the same, and there is no need to adopt a "loop" shape as in the prior art, which would increase the occupied space on the XY plane.

[0037] The above are only preferred embodiments of the present utility model, and are not intended to limit the implementation manners and protection scope of the present utility model. For those skilled in the art, it should be appreciated that all solutions obtained by equivalent substitutions and obvious variations made using the content of this specification and the accompanying drawings shall be included in the protection scope of the present utility model.

Claims

1. A pharmaceutical liquid circulation pipeline structure, characterized in that, include: Multiple circulation pipes are arranged in layers along the normal direction of the plane they enclose, with the circulation pipes in adjacent layers staggered. The inlet and outlet points of each circulation pipeline are distributed along the diagonal of the circulation pipeline.

2. The drug circulation pipeline structure according to claim 1, characterized in that, The circulation pipeline is a rectangular pipeline.

3. The drug circulation pipeline structure according to claim 1, characterized in that, The circulation pipelines of adjacent levels are staggered in a first direction by a distance of 60mm, and the first direction and the normal direction are perpendicular to each other.

4. The drug circulation pipeline structure according to claim 3, characterized in that, The circulation pipelines of adjacent levels are staggered in a second direction by a distance of 60mm, and the second direction is perpendicular to both the normal direction and the first direction.

5. The drug circulation pipeline structure according to claim 1, characterized in that, The spacing between the circulation pipelines of adjacent levels in the normal direction is 50 mm.

6. The drug circulation pipeline structure according to claim 1, characterized in that, Each of the aforementioned circulation pipelines is provided with multiple series connections, and each series connection is equipped with a cleaning nozzle.

7. The drug circulation pipeline structure according to claim 1, characterized in that, For each of the circulation pipes, the projection positions of the two circulation pipes above and below it are the same in the normal direction.

8. The drug circulation pipeline structure according to claim 6, characterized in that, A T-connector is installed at the series connection point, and the cleaning nozzle is mounted on the T-connector.

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