Non-woven cloth replacing device for air inlet of MAU unit
Patent Information
- Application Number
- CN202521856360.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-29
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2035-08-29
AI Technical Summary
[0004]手动固定式无纺布滤网结构存在以下问题:1.更换效率低:需停机操作,人工拆卸/安装步骤繁琐,影响连续生产,因为固定式结构依赖人工干预,缺乏自动化设计;2.维护成本高:手动无纺布更换时间较长,因为MAU进风口高度过高,人工更换需登高作业;3.安全风险高:需登高作业,半导体制造行业的工业MAU进风口高度通常高达4m
[0010] The advantages of this utility model are: reasonable structural design, no need for personnel to work at the same height compared with the prior art, simplifies the replacement of non-woven fabric, does not block the air inlet of MAU, does not require additional personnel to replace the pre-filter, can effectively deal with the situation where the depth of the MAU room is insufficient, can effectively shorten the length of MAU, save the space of the machine room, and is suitable for fresh air systems in high cleanliness requirements such as cleanrooms, electronic manufacturing, biopharmaceuticals, and food processing, which can improve filtration maintenance efficiency and reduce operating costs.
Smart Images

Figure CN224860641U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a non-woven fabric replacement device for the air inlet of an MAU unit, belonging to the field of air purification technology. Background Technology
[0002] In the existing technology, the air inlet filter of MAU unit mostly adopts a manually fixed non-woven fabric filter structure or an automatically fixed non-woven fabric filter structure.
[0003] The core components of a manually fixed nonwoven filter typically include: a metal or plastic frame fixed to the MAU inlet; single or multiple layers of nonwoven filter media, secured within the frame by slots or bolts; and a sealing strip to prevent airflow bypass. The workflow is as follows: air passes through the nonwoven filter media to intercept particulate matter. Once the filter media becomes contaminated, the machine must be stopped, the frame disassembled, the old filter media removed, and the new filter media manually replaced. This process takes approximately 30 minutes to 1 hour.
[0004] The manual fixed non-woven fabric filter structure has the following problems: 1. Low replacement efficiency: It requires machine shutdown and the manual disassembly / installation steps are cumbersome, affecting continuous production, because the fixed structure relies on manual intervention and lacks automated design; 2. High maintenance cost: The manual non-woven fabric replacement time is long, because the MAU air inlet is too high, and manual replacement requires climbing to work; 3. High safety risk: It requires climbing to work, and the air inlet height of industrial MAUs in the semiconductor manufacturing industry is usually as high as 4m.
[0005] The core components of the automatic fixed nonwoven filter screen structure include: a winding filter media structure that automatically winds up and unwinds the filter media via upper and lower rollers, supporting segmented replacement; a floor-standing automated drive device that drives the roller rotation with a motor, enabling replacement without stopping the machine; a cutting device with built-in blades to cut the old filter media during replacement, ensuring operational continuity; and a sealing structure consisting of a spring clamping device to prevent airflow leakage and ensure filtration efficiency.
[0006] The automatic fixed nonwoven filter structure has the following problems: personnel cannot replace the MAU primary filter through the MAU inlet. It is necessary to add a separate functional section for personnel to enter and exit. Because the automatic fixed nonwoven filter structure blocks the MAU inlet, the nonwoven fabric needs to be cut and reinstalled by climbing up, which makes installation inconvenient due to frequent climbing. Utility Model Content
[0007] This utility model proposes a non-woven fabric replacement device for the air inlet of an MAU unit, which aims to overcome the above-mentioned shortcomings of the existing technology, eliminating the need for working at height or adding additional functional sections for personnel operation.
[0008] The technical solution of this utility model is a non-woven fabric replacement device for the air inlet of an MAU unit. Its structure includes a non-woven fabric installation fence, a non-woven fabric installation roller shutter, a winding mechanism, and a drive motor. The non-woven fabric installation fence covers the lower half of the air inlet of the MAU unit. The winding mechanism and the drive motor are installed on the wall at the top of the air inlet of the MAU unit via a mounting bracket. The drive motor drives the winding mechanism to rotate. The non-woven fabric installation roller shutter is installed on the winding mechanism. The width of the non-woven fabric installation roller shutter matches the width of the air inlet of the MAU unit. The surfaces of the non-woven fabric installation fence and the non-woven fabric installation roller shutter facing the air inlet direction are covered with non-woven fabric. When installing the nonwoven fabric, the drive motor first lowers the end of the nonwoven fabric installation roller shutter to the ground via a winding mechanism. The nonwoven fabric is then installed on the roller shutter surface at the middle height of the MAU unit's air inlet. Next, the drive motor drives the winding mechanism again to raise the end of the nonwoven fabric installation roller shutter to the middle height of the MAU unit's air inlet, covering the upper half of the MAU unit's air inlet. Finally, nonwoven fabric is installed on the nonwoven fabric installation barrier to cover the lower half of the MAU unit's air inlet. This process allows for nonwoven fabric replacement without requiring personnel to climb, all from the ground. When the pre-filter needs replacement, the drive motor drives the winding mechanism to raise the end of the nonwoven fabric installation roller shutter to its highest point, and the nonwoven fabric installation barrier is removed, allowing personnel to enter the MAU unit's air inlet to replace the pre-filter. Compared to existing technologies, this effectively shortens the MAU length and saves space in the machine room.
[0009] Preferably, the device also includes two fixing slots and fixing slot covers. The two fixing slots are respectively located at 1 / 2 the height of the MAU unit's air inlet and at the bottom, along the width direction of the MAU unit's air inlet. The upper and lower ends of the non-woven fabric installation fence are detachably installed in the two fixing slots and are each fixed by a fixing slot cover. The fixing slot cover is installed to the fixing slot by screws and nuts. When it is necessary to disassemble the non-woven fabric installation fence, the screws and nuts are removed with a screwdriver, and the fixing slot cover is removed to remove the non-woven fabric installation fence. This achieves simple installation and removal of the non-woven fabric installation fence.
[0010] The advantages of this utility model are: reasonable structural design, no need for personnel to work at the same height compared with the prior art, simplifies the replacement of non-woven fabric, does not block the air inlet of MAU, does not require additional personnel to replace the pre-filter, can effectively deal with the situation where the depth of the MAU room is insufficient, can effectively shorten the length of MAU, save the space of the machine room, and is suitable for fresh air systems in high cleanliness requirements such as cleanrooms, electronic manufacturing, biopharmaceuticals, and food processing, which can improve filtration maintenance efficiency and reduce operating costs. Attached Figure Description
[0011] Figure 1 This is a schematic diagram of the structure of the nonwoven fabric replacement device at the air inlet of the MAU unit of this utility model.
[0012] Figure 2 yes Figure 1 Side view.
[0013] In the diagram, 1 is the air inlet of the MAU unit, 2 is the mounting slot, 3 is the non-woven fabric mounting fence, 4 is the mounting slot cover, 5 is the non-woven fabric mounting roller shutter, 6 is the winding mechanism, 7 is the drive motor, 8 is the mounting bracket, and 9 is the wall. Detailed Implementation
[0014] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.
[0015] like Figure 1 , 2 As shown, a nonwoven fabric replacement device for the air inlet of an MAU unit includes a fixing groove 2, a nonwoven fabric mounting fence 3, a fixing groove cover 4, a nonwoven fabric mounting roller shutter 5, a winding mechanism 6, and a drive motor 7. There are two fixing grooves 2, respectively located at 1 / 2 the height and the bottom of the air inlet 1 of the MAU unit along its width direction. The upper and lower ends of the nonwoven fabric mounting fence 3 are detachably installed in the two fixing grooves 2 and are respectively fixed by a fixing groove cover 4. The fixing groove cover 4 is... The MAU unit air inlet 1 is installed between the two fixed slots 2 by screws and nuts and fixing groove 2. The non-woven fabric mounting fence 3 covers the MAU unit air inlet 1 between the two fixing grooves 2. The wall 9 at the top of the MAU unit air inlet 1 is equipped with a winding mechanism 6 and a drive motor 7 by mounting bracket 8. The drive motor 7 drives the winding mechanism 6 to rotate. The non-woven fabric mounting roller shutter 5 is installed on the winding mechanism 6. The width of the non-woven fabric mounting roller shutter 5 matches the width of the MAU unit air inlet 1. The surfaces of the non-woven fabric mounting fence 3 and the non-woven fabric mounting roller shutter 5 facing the air inlet direction are covered with non-woven fabric.
[0016] When installing the nonwoven fabric, the drive motor 7 first drives the winding mechanism 6 to lower the end of the nonwoven fabric installation roller shutter 5 to the ground. The nonwoven fabric is then installed on the surface of the roller shutter 5 up to the height of the middle fixing groove 2. Next, the drive motor 7 drives the winding mechanism 6 to raise the end of the nonwoven fabric installation roller shutter 5 to the height of the middle fixing groove 2. The nonwoven fabric on the roller shutter 5 covers the upper half of the MAU unit's air inlet 1. Finally, nonwoven fabric is installed on the nonwoven fabric installation fence 3 to cover the lower half of the MAU unit's air inlet 1. This process allows for nonwoven fabric replacement to be completed on the ground without requiring personnel to climb.
[0017] When it is necessary to disassemble the non-woven fabric installation fence 3, simply remove the screws and nuts with a screwdriver, remove the fixing groove cover plate 4, and the non-woven fabric installation fence 3 can be removed. This achieves simple assembly and disassembly of the non-woven fabric installation fence 3.
[0018] When the pre-filter needs to be replaced, the drive motor 7 drives the winding mechanism 6 to raise the end of the non-woven fabric mounting shutter 5 to its highest position, and the non-woven fabric mounting fence 3 is removed, allowing personnel to enter the MAU unit's air inlet 1 to replace the pre-filter. Compared with existing technologies, this effectively shortens the MAU length and saves space in the machine room.
[0019] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.
[0020] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.
Claims
1. A nonwoven fabric replacement device for the air inlet of an MAU unit, characterized in that, The system includes a non-woven fabric installation fence (3), a non-woven fabric installation roller shutter (5), a winding mechanism (6), and a drive motor (7). The non-woven fabric installation fence (3) covers the lower half of the air inlet (1) of the MAU unit. The winding mechanism (6) and the drive motor (7) are installed on the wall (9) at the top of the air inlet (1) of the MAU unit via a mounting bracket (8). The drive motor (7) drives the winding mechanism (6) to rotate. The non-woven fabric installation roller shutter (5) is installed on the winding mechanism (6). The width of the non-woven fabric installation roller shutter (5) matches the width of the air inlet (1) of the MAU unit. The surfaces of the non-woven fabric installation fence (3) and the non-woven fabric installation roller shutter (5) facing the air inlet direction are covered with non-woven fabric.
2. The nonwoven fabric replacement device for the air inlet of an MAU unit as described in claim 1, characterized in that, It also includes two fixing slots (2) and fixing slot cover plates (4). The two fixing slots (2) are respectively set at 1 / 2 height and bottom of the MAU unit air inlet (1) along the width direction of the MAU unit air inlet (1). The upper and lower ends of the non-woven fabric installation fence (3) are respectively detachably installed in the two fixing slots (2) and fixed by a fixing slot cover plate (4). The fixing slot cover plate (4) is installed with the fixing slot (2) by screws and nuts.