A device for preventing moisture from entering an ALD aluminum boat

Abstract

The utility model discloses a device for ALD aluminum boat moistureproof relates to moistureproof technical field, include: equipment box, the inboard of equipment box is provided with heat supply subassembly, telescopic uniform wind subassembly, telescopic uniform wind subassembly sets up in the outside of equipment box, and telescopic uniform wind subassembly includes the installation shell fixed on the outer surface of equipment box. In the utility model, the air pump sends hot air to the air bag tube bag through the connecting pipe, the area that the air bag tube bag is separated by the separation belt and is not communicated with the air supply hollow shell will be filled with air, and when full, it will cause the air bag tube bag to straighten, so as to push the air supply hollow shell outward, the airflow in the air bag tube bag and the air supply hollow shell communication area will enter the air supply hollow shell and blow hot airflow to the aluminum boat through the air outlet, and the air supply hollow shell moves to the aluminum boat periphery under the push of the air bag tube bag and wraps it, so as to provide uniform hot air for the aluminum boat surface and dry moistureproof, improve the overall moistureproof effect.

Description

Technical Field

[0001] This utility model relates to the field of moisture-proof technology, specifically to a device for moisture-proofing ALD aluminum boats. Background Technology

[0002] In semiconductor manufacturing and materials science, ALD is a technique used to deposit thin films on a substrate surface at a single-layer atomic thickness. For deposition and transport, "boats" or "aluminum boats" are commonly used in laboratories to place samples, substrates, or chemical precursors. These "aluminum boats" usually refer to small aluminum containers or carriers used to place samples. They are made of aluminum or aluminum alloys to withstand chemical and high-temperature processing environments. To improve production line yield, moisture-proof devices are needed to protect the aluminum boats from moisture.

[0003] A document with publication number CN220017955U discloses a device for preventing moisture in ALD aluminum boats. The device includes an aluminum boat positioned at the ALD unloading end. A main unit capable of periodically generating constant-temperature gas is located on one side of the open end of the aluminum boat. A data cable electrically connected to a PLC controller is attached to the side wall of the main unit. An air outlet pipe for transmitting the constant-temperature gas is also connected to the side wall of the main unit. An air outlet nozzle is located at the end of the air outlet pipe furthest from the main unit, with the air outlet direction facing the open end of the aluminum boat, and the spray area of ​​the air outlet nozzle is not less than the opening area of ​​the aluminum boat. This invention allows for quick assembly and disassembly to one side of the aluminum boat's open end, offering high flexibility and versatility. It enables automatic, periodic, constant-temperature (30°C) purging of the aluminum boat at the ALD unloading end, ensuring dryness inside the aluminum boat, preventing moisture absorption, solving the problem of blackening of solar cell EL (electrode ionization), and significantly improving the quality of the solar cells.

[0004] The aforementioned moisture-proof device uses a constant-temperature airflow to blow on the surface of an aluminum boat to keep it dry. However, the constant-temperature airflow is transmitted from one side of the aluminum boat to the other. During this transmission process, the temperature of the constant-temperature airflow will decrease when it reaches the side that is farther away, resulting in uneven heating of the aluminum boat surface. Some areas may be overheated, while other areas (such as the side that is farther away from the starting end of the constant-temperature airflow) remain damp, affecting the overall moisture-proof effect. Utility Model Content

[0005] The purpose of this invention is to provide a device for preventing moisture in ALD aluminum boats, which solves the problem that traditional ALD aluminum boat moisture-proof devices, where constant temperature airflow blows from one direction, cause uneven heating of the aluminum boat surface, some areas may overheat while other areas (such as the side farther from the starting end of the constant temperature airflow) remain damp, affecting the overall moisture-proof effect.

[0006] This utility model solves the above-mentioned technical problems through the following technical solution: a device for moisture protection of ALD aluminum boats, comprising: An equipment box, the inside of which is equipped with a heating component; A telescopic air distribution assembly is disposed on the outside of an equipment box. The telescopic air distribution assembly includes a mounting shell fixed to the outer surface of the equipment box, an air supply hollow shell slidingly disposed on the inner side of the mounting shell, an air outlet disposed on the inner side of the air supply hollow shell, and the telescopic air distribution assembly also includes a self-returning component disposed on the outside of the mounting shell and a push-out component disposed on the inner side of the air supply hollow shell.

[0007] Preferably, the ejector includes an airbag tube fixed to the inner side of the air supply hollow shell, a separator is fixed to the inner side of the airbag tube, a connecting pipe is fixed to one end of the airbag tube, and one end of the connecting pipe extends to the inner side of the equipment box.

[0008] Preferably, the self-returning component includes two inclined hollow strips fixed to the outer surface of the equipment box and two connecting frames fixed to one side of the air supply hollow shell. Each of the two connecting frames has a vertical groove, and a gravity head slides on the inner side of each of the two vertical grooves. One end of each gravity head passes through the inner side of the two inclined hollow strips.

[0009] Preferably, the heating component includes an air pump fixed inside the equipment box, the air pump's outlet end is fixedly connected to a sealed shell, and one end of the connecting pipe is connected to the sealed shell.

[0010] Preferably, the heating assembly further includes heating wires disposed inside the equipment box and a filter screen fixed to one side of the equipment box.

[0011] Preferably, the top and bottom of the equipment box are fixed with screw-hole mounting strips.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: The air pump delivers hot air to the airbag tube bag through a connecting pipe. The area of ​​the airbag tube bag that is not connected to the air supply hollow shell, which is separated by the dividing strip, will be filled with air. When filled, the airbag tube bag will straighten, thus pushing the air supply hollow shell outward. The airflow entering the area of ​​the airbag tube bag that is connected to the air supply hollow shell will enter the air supply hollow shell and blow the hot airflow through the air outlet onto the aluminum boat. The air supply hollow shell is pushed by the airbag tube bag to move to the outside of the aluminum boat and wrap it around it, thereby providing uniform hot air to the surface of the aluminum boat for drying and moisture prevention, and improving the overall moisture prevention effect. Attached Figure Description

[0013] Figure 1 This is the front view of the present invention; Figure 2This is a schematic diagram showing the disassembled air supply hollow shell and mounting shell of this utility model; Figure 3 This is a cross-sectional view of the present invention.

[0014] The numbers in the diagram represent: 1. Equipment box; 2. Heating components; 21. Air pump; 22. Enclosed shell; 23. Heating wire; 24. Filter screen; 3. Telescopic air distribution component; 31. Mounting shell; 32. Hollow air supply shell; 33. Air outlet; 34. Airbag tube; 35. Separator; 36. Connecting pipe; 37. Inclined hollow strip; 38. Connecting frame; 39. Vertical groove; 310. Gravity head; 4. Screw hole mounting strip. Detailed Implementation

[0015] The above-mentioned and other technical features and advantages of this utility model will be described in more detail below with reference to the accompanying drawings.

[0016] This embodiment provides a technical solution: a device for moisture protection of ALD aluminum boats, such as... Figures 1-3 As shown, the device includes an equipment box 1, a heating component 2 disposed inside the equipment box 1, and a telescopic air distribution component 3 disposed outside the equipment box 1. The top and bottom of the equipment box 1 are fixed with screw hole mounting plates 4. The heating component 2 includes an air pump 21 fixed inside the equipment box 1, an electric heating wire 23 disposed inside the equipment box 1, and a filter screen 24 fixed on one side of the equipment box 1. The filter screen 24 filters dust and impurities in the air to prevent the air pump 21 from becoming clogged after long-term operation. The air outlet of the air pump 21 is fixedly connected to a closed shell 22. As is well known to those skilled in the art, the working principle and wiring method of the air pump 21 are common and are all conventional means or common knowledge, so they will not be described in detail here. Those skilled in the art can make any selections according to their needs or convenience.

[0017] The telescopic air distribution assembly 3 includes a mounting shell 31 fixed to the outer surface of the equipment box 1. An air supply hollow shell 32 slides on the inner side of the mounting shell 31. A groove can be opened on the inner surface of the mounting shell 31. A slider that slides in the groove is fixedly set on the outer surface of the air supply hollow shell 32 to limit the sliding path of the air supply hollow shell 32. An air outlet 33 is opened on all four sides of the inner surface of the air supply hollow shell 32. The telescopic air distribution assembly 3 also includes a self-returning component set on the outer side of the mounting shell 31 and a push-out component set on the inner side of the air supply hollow shell 32.

[0018] The ejector includes an airbag tube 34 fixed inside the air supply hollow shell 32. At least two airbag tubes 34 are provided, and in this embodiment, four airbag tubes 34 are provided. These four airbag tubes 34 are respectively provided at four corresponding positions inside the air supply hollow shell 32 to ensure that the airbag tubes 34 deliver air evenly into the air supply hollow shell 32. A dividing strip 35 is fixed inside the airbag tube 34, which divides the internal space of the airbag tube 34 into two areas of the same volume. One half of the area can send the air in the airbag tube 34 into the air supply hollow shell 32. A connecting pipe 36 is fixedly provided at one end of the airbag tube 34. One end of the connecting pipe 36 extends to the inside of the equipment box 1 and is connected to the closed shell 22.

[0019] The self-returning component includes two inclined hollow strips 37 fixed to the outer surface of the equipment box 1 and two connecting brackets 38 fixed to one side of the air supply hollow shell 32. The two inclined hollow strips 37 are respectively located on the front and back of the equipment box 1, and the two connecting brackets 38 are respectively located between the two inclined hollow strips 37 and the outer wall of the equipment box 1. Each of the two connecting brackets 38 has a vertical groove 39, and a gravity head 310 slides on the inner side of each of the two vertical grooves 39. One end of each gravity head 310 passes through the inner side of the two inclined hollow strips 37.

[0020] In use: When moisture protection is required for the aluminum boat, the air pump 21 will start and draw outside air into the equipment box 1. Dust in the air will be filtered through the filter screen 24 and heated in the space area of ​​the heating wire 23 in the equipment box 1. The heated air will then pass through the closed shell 22 and enter several connecting pipes 36 connected to the closed shell 22. The airflow will be sent to the airbag tube bag 34 through the connecting pipes 36. The area of ​​the airbag tube bag 34 that is not connected to the air supply hollow shell 32, separated by the dividing strip 35, will be filled with air. When it is full, the airbag tube bag 34 will straighten, thereby pushing the air supply hollow shell 32 outward. The airflow entering the area connected to the airbag tube 34 and the air supply hollow shell 32 will enter the air supply hollow shell 32 and blow the hot airflow towards the aluminum boat through the air outlet 33. When the air supply hollow shell 32 is pushed to the side away from the equipment box 1, it will drive the gravity head 310 to move together through the connecting frame 38. At the same time, the gravity head 310 will slide obliquely upward in the inclined hollow strip 37 (at this time, the gravity head 310 will slide upward in the vertical groove 39). The air supply hollow shell 32 will move to the outside of the aluminum boat under the push of the airbag tube 34 and wrap it, thereby providing the aluminum boat with uniform hot air for sufficient and uniform moisture protection.

[0021] When the hot airflow is stopped, the air pump 21 is turned off and no longer supplies airflow to the airbag tube 34, so there is no thrust on the air supply hollow shell 32. At this time, the gravity head 310 will slide down along the inclined hollow strip 37, thereby driving the connecting frame 38 and the air supply hollow shell 32 to slide, and slide the air supply hollow shell 32 into the mounting shell 31 to hide it again, exposing the wrapped aluminum boat, without affecting the processing and production of the aluminum boat.

[0022] The above description is merely a preferred embodiment of the present utility model and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present utility model, all of which will fall within the protection scope of the present utility model.

Claims

1. A device for moisture protection of ALD aluminum boats, characterized in that, include: Equipment box (1), the inner side of which is provided with heating components (2); Telescopic air distribution assembly (3) is disposed on the outside of the equipment box (1). The telescopic air distribution assembly (3) includes a mounting shell (31) fixed to the outer surface of the equipment box (1). An air supply hollow shell (32) slides on the inner side of the mounting shell (31). An air outlet (33) is disposed on the inner side of the air supply hollow shell (32). The telescopic air distribution assembly (3) also includes a self-returning component disposed on the outside of the mounting shell (31) and a push-out component disposed on the inner side of the air supply hollow shell (32).

2. The device for moisture protection of ALD aluminum boats as described in claim 1, characterized in that, The ejector includes an airbag tube (34) fixed inside the air supply hollow shell (32), a separator (35) is fixed inside the airbag tube (34), and a connecting pipe (36) is fixed at one end of the airbag tube (34), with one end of the connecting pipe (36) extending to the inside of the equipment box (1).

3. The device for moisture protection of ALD aluminum boats as described in claim 2, characterized in that, The self-returning component includes two inclined hollow strips (37) fixed to the outer surface of the equipment box (1) and two connecting frames (38) fixed to one side of the air supply hollow shell (32). Each of the two connecting frames (38) has a vertical groove (39). Gravity heads (310) slide on the inner side of each of the two vertical grooves (39). One end of each gravity head (310) passes through the inner side of the two inclined hollow strips (37).

4. The device for moisture protection of ALD aluminum boats as described in claim 2, characterized in that, The heating component (2) includes an air pump (21) fixed inside the equipment box (1). The air outlet of the air pump (21) is fixedly connected to a closed shell (22). One end of the connecting pipe (36) is connected to the closed shell (22).

5. The device for moisture protection of ALD aluminum boats as described in claim 4, characterized in that, The heating component (2) also includes an electric heating wire (23) disposed inside the equipment box (1) and a filter screen (24) fixed to one side of the equipment box (1).

6. The device for moisture protection of ALD aluminum boats as described in claim 1, characterized in that, The top and bottom of the equipment box (1) are both fixed with screw hole mounting strips (4).

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