A filter auxiliary tool for wafer baking

Abstract

The application discloses a filter auxiliary tool for wafer drying, which comprises a reference positioning assembly, an adjusting guide assembly and a limiting fixing assembly, and the reference positioning assembly, the adjusting guide assembly and the limiting fixing assembly are installed on the top of a drying device; two groups of the reference positioning assembly are provided with containing areas for containing filters, the reference positioning assembly moves in the horizontal direction along the adjusting guide assembly to change the area of the containing area, and the limiting fixing assembly moves along the adjusting guide assembly to be locked and connected with the reference positioning assembly. Through the integration of the reference positioning, the adjusting guide and the limiting fixing functional components, the installation optimization of the filter from rough positioning to fine positioning and then to reliable locking is realized. The two groups of movable reference positioning assemblies constitute a containing area which can be flexibly adjusted, so that the tool can adapt to filters of different size specifications, the universality and compatibility are improved, and the replacement cost is reduced. Through limiting the filter or increasing the area of the containing area, the filter can be quickly and safely disassembled.

Description

Technical Field

[0001] This application belongs to the field of wafer drying technology, specifically relating to a filter auxiliary tooling for wafer drying. Background Technology

[0002] In the manufacturing process of semiconductor wafers and silicon wafers, the drying process after cleaning is crucial. Any tiny particulate contaminants or chemical aerosol residues can lead to device performance degradation and reduced yield. This process is typically accomplished using a wafer spin dryer, which removes surface liquids through centrifugal force during high-speed rotation. To maintain an ultra-high level of cleanliness inside the equipment, especially in the area directly above the wafer, chemical filters are usually installed at the top of the equipment to remove molecular-level contaminants such as acidic and alkaline gases and organic solvent vapors from the air.

[0003] However, the current method of installing filters on top of spin dryers has significant drawbacks. Currently, most methods use simple bolt fixation or a basic bracket structure, lacking a quick and precise positioning and locking mechanism. During installation, operators must repeatedly adjust the filter position to align with the bolt holes, a tedious and inefficient process. Since filters are consumables that are replaced periodically, this inconvenience is further amplified during frequent maintenance. More importantly, inaccurate positioning can lead to gaps between the filter and the mounting base, causing airflow short-circuiting, or uneven stress can damage the sealing material around the filter, resulting in leaks and contaminating the process environment.

[0004] Furthermore, existing structures typically offer very limited operating space and make it difficult to use tools when disassembling filters, further increasing the difficulty and time required for replacement. In high-end semiconductor manufacturing, equipment downtime directly impacts production capacity and costs. Therefore, it is necessary to improve the rapid and accurate positioning and reliable locking of filters to enhance filter disassembly and assembly efficiency, thereby improving equipment maintenance efficiency and ensuring process stability. Utility Model Content

[0005] This application provides a filter auxiliary tooling for wafer drying, which solves the problems of inconvenient disassembly and assembly and difficulty in accurate positioning of chemical filters when applied to the wafer drying process.

[0006] The technical solution adopted in this application is as follows: A filter auxiliary fixture for wafer drying includes a reference positioning component, an adjustment guide component, and a limiting and fixing component. The reference positioning component, the adjustment guide component, and the limiting and fixing component are all installed on the top of the drying equipment. Two sets of the reference positioning components are provided with receiving areas for accommodating the filter. The reference positioning components move horizontally along the adjustment guide component to change the area of ​​the receiving area. The limiting and fixing component moves along the adjustment guide component to lock into the reference positioning component.

[0007] Preferably, the reference positioning components are provided in two sets, each set of the reference positioning components includes an "L"-shaped reference positioning block, and the two sets of reference positioning components are arranged opposite to each other to form the receiving area.

[0008] Preferably, the inner side of the reference positioning block is a right-angled reference surface, the top of the reference positioning block is provided with a guide slope, and the side of the reference positioning block is provided with reference scale lines.

[0009] Preferably, the adjustment guide assembly includes a guide rail disposed outside the reference positioning block, and the outer wall of the reference positioning block is provided with a slider adapted to the guide rail. The reference positioning block moves along the guide rail via the slider to move closer to or further away from another reference positioning block.

[0010] Preferably, the adjustment guide assembly is provided in two sets corresponding to the reference positioning assembly, and the extension directions of the two guide rails are arranged perpendicular to each other.

[0011] Preferably, the limiting and fixing assembly includes an adjusting block and an adjusting bolt. The adjusting block moves in the same direction as the corresponding reference positioning block along the guide rail. Both the adjusting block and the reference positioning block are provided with threaded holes adapted to the adjusting bolt. The adjusting bolt passes through the adjusting block and is rotatably connected to the reference positioning block.

[0012] Preferably, the adjusting block includes a block body and a locking handle.

[0013] Preferably, the adjusting bolt is an internal hex bolt, and the limiting and fixing assembly is provided with an anti-loosening nut that cooperates with the adjusting bolt.

[0014] Preferably, the reference positioning component further includes a positioning sensor, which is disposed on the inner sidewall of the reference positioning block and detects the distance between the reference positioning block and the filter.

[0015] Due to the adoption of the above technical solution, the beneficial effects achieved by this application are as follows: This application solution optimizes filter installation from coarse positioning to fine positioning and reliable locking by integrating reference positioning, adjustment guidance, and limit fixing functional components. Two sets of movable reference positioning components form a flexibly adjustable accommodating area, allowing the tooling to adapt to filters of different sizes and specifications, greatly improving the equipment's versatility and compatibility, and reducing the cost of replacing tooling due to product model changes. Secondly, the adjustment guidance component provides a precise movement path for the reference positioning and limit fixing components, ensuring straightness and consistency of movement in the horizontal direction, avoiding the arbitrariness and uncertainty of manual adjustments, thus guaranteeing the positional accuracy of the filter during each installation and effectively preventing the risk of airflow leakage or seal damage due to installation deviations. Furthermore, the locking connection between the limit fixing component and the reference positioning component forms a stable and secure clamp, locking the filter's final position. The rigid connection of the two reference blocks offsets the impact of vibrations that may occur during equipment operation on filter positioning, ensuring long-term operational stability and reliability. Furthermore, the movement of the reference positioning component can limit the filter or increase the area of ​​the accommodating region during assembly or disassembly, providing space for the filter to move and enabling it to be quickly disassembled. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the auxiliary tooling in one embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the reference positioning block in one embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the adjusting pressure block in one embodiment of the present invention.

[0017] Explanation of reference numerals in the attached figures: 1-Reference positioning component, 11-Reference positioning block, 110-Right angle reference surface, 111-Guide inclined surface, 112-Reference scale line, 12-Slider, 13-Positioning sensor; 2-Adjusting guide assembly, 21-Guide rail, 22-Mounting base; 3-Limit fixing component, 31-Adjusting pressure block, 311-Pressure block body, 312-Locking handle, 32-Adjusting bolt. Detailed Implementation

[0018] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0019] Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below. It should be noted that, unless otherwise specified, the embodiments of this application and the features thereof can be combined with each other.

[0020] Furthermore, it should be understood in the description of this application that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0021] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0023] This application provides a filter auxiliary tooling for wafer drying, such as... Figures 1 to 3 As shown, it includes a reference positioning component 1, an adjustment guide component 2, and a limiting and fixing component 3. The reference positioning component 1, the adjustment guide component 2, and the limiting and fixing component 3 are all installed on the top of the drying equipment. The two sets of reference positioning components 1 are provided with a receiving area for accommodating the filter. The reference positioning component 1 moves horizontally along the adjustment guide component 2 to change the area of ​​the receiving area. The limiting and fixing component 3 moves along the adjustment guide component 2 to lock and connect with the reference positioning component 1.

[0024] This application solution optimizes filter installation from coarse positioning to fine positioning and reliable locking by integrating reference positioning, adjustment guidance, and limit fixing functional components. Two sets of movable reference positioning components 1 form a flexibly adjustable accommodating area, allowing the tooling to adapt to filters of different sizes and specifications, greatly improving the equipment's versatility and compatibility, and reducing the cost of replacing tooling due to product model changes. Secondly, the adjustment guidance component 2 provides a precise movement path for the reference positioning component 1 and the limit fixing component 3, ensuring straightness and consistency of movement in the horizontal direction, avoiding the arbitrariness and uncertainty of manual adjustments, thus guaranteeing the positional accuracy of the filter each time it is installed, effectively preventing the risk of airflow leakage or seal damage due to installation deviations. Furthermore, the locking connection between the limit fixing component 3 and the reference positioning component 1 forms a stable and secure clamp, locking the filter's final position. The rigid connection of the two reference blocks offsets the impact of vibrations that may occur during equipment operation on filter positioning, ensuring long-term operational stability and reliability. Furthermore, the movement of the reference positioning component 1 can limit the filter or increase the area of ​​the accommodating region during assembly or disassembly, providing space for the filter to move and enabling it to be quickly disassembled.

[0025] In one embodiment, the reference positioning component 1 is provided in two sets, each set of reference positioning components 1 including an "L"-shaped reference positioning block 11, and the two sets of reference positioning components 1 are arranged opposite to each other to form an accommodating area.

[0026] Two sets of L-shaped reference positioning blocks 11, arranged opposite each other, form two mutually perpendicular reference planes. These planes simultaneously provide reference positioning for two adjacent sides of the filter, ensuring the filter is placed within a preset rectangular coordinate area, achieving rapid and accurate two-dimensional positioning. The opposite arrangement of the two sets allows the receiving area to constrain the filter from two directions, forming a stable enclosure structure that effectively prevents excessive movement of the filter in the horizontal plane and significant displacement of its placement. Compared to single-point or single-side positioning, this design greatly improves the rigidity and reliability of the positioning, laying a solid foundation for subsequent clamping and locking steps and avoiding final positioning errors caused by unstable references.

[0027] Furthermore, the inner side of the reference positioning block 11 is a right-angled reference surface 110, the top of the reference positioning block 11 is provided with a guide slope 111, and the side of the reference positioning block 11 is provided with a reference scale line 112.

[0028] By setting a right-angled reference surface 110, surface contact with the filter sidewall is ensured. Compared to point or line contact, this provides more uniform support and more accurate positioning reference, reducing the risk of damage to the filter housing due to localized stress concentration. The top guide ramp 111 forms an inlet structure. When the operator places the filter, even with slight height deviations or inaccurate positioning, the filter edge will first contact the guide ramp 111 and automatically slide into the receiving area under gravity, reducing installation difficulty. The reference scale lines allow the operator to pre-adjust the reference positioning block 11 to approximately the correct position according to the filter's standard dimensions, reducing the time required for subsequent fine-tuning, improving overall work efficiency, and facilitating standardized management and traceability of operation records.

[0029] It should be further explained that the present application also has other implementation methods. For example, before installing the filter, a reference positioning block 11 can be moved outward to expand the accommodating area. The filter can be hoisted and placed along the guide slope 111 of the unmoved reference positioning block 11. Then, the moved reference positioning block 11 can be moved back to clamp and limit its position.

[0030] In one embodiment, the adjustment guide assembly 2 includes a guide rail 21 disposed outside the reference positioning block 11, and a slider 12 adapted to the guide rail 21 is provided on the outer wall of the reference positioning block 11. The reference positioning block 11 moves along the guide rail 21 by the slider 12 to approach or move away from another reference positioning block 11.

[0031] The movement of the reference positioning block 11 is achieved through the cooperation of the guide rail 21 and the slider 12, providing high-precision, low-friction, and stable linear motion guidance. This ensures that the reference positioning block 11 slides smoothly along the predetermined trajectory during adjustment, avoiding jamming or offset. This guarantees the accuracy of the geometric center of the receiving area formed by the two, which is beneficial for ensuring the docking position of the filter with the air inlet at the top of the equipment. The fit between the slider 12 and the guide rail 21 is extremely small, effectively eliminating any backlash or positional drift that may occur during locking, thus maintaining positioning accuracy over a long period. This movement method also facilitates later maintenance and replacement; if the guide rail 21 or the slider 12 shows significant wear, they can be replaced individually, reducing maintenance costs.

[0032] Preferably, the guide component 2 is provided in two sets corresponding to the reference positioning component 1, and the extension directions of the two guide rails 21 are set perpendicular to each other.

[0033] By setting the extension directions of the two sets of guide rails 21 to be perpendicular to each other, independent and precise control over the size of the accommodating area is achieved in two independent orthogonal directions. This allows the fixture to flexibly adapt to both the length and width dimensions of the rectangular filter, making it highly versatile. Operators can adjust the two sets of reference positioning blocks 11 separately without interference, making the positioning process clearer and more orderly. The two mutually perpendicular guide rails 21 allow one reference positioning block 11 to move along the x-direction and the other along the y-direction. This allows for flexible adjustment of which reference positioning block 11 to move as needed, and avoids the need for excessively long or numerous guide rails 21.

[0034] Understandable, Figure 2 The diagram shows the structure of one of the reference positioning blocks 11. The slider on the other reference positioning block that cooperates with it is set on another side perpendicular to the scheme shown in the diagram, so as to realize the movement of the two reference positioning blocks in different directions.

[0035] In one embodiment, the limiting and fixing component 3 includes an adjusting block 31 and an adjusting bolt 32. The adjusting block 31 moves along the guide rail 21 in the same direction as the corresponding reference positioning block 11. Both the adjusting block 31 and the reference positioning block 11 are provided with threaded holes that are adapted to the adjusting bolt 32. The adjusting bolt 32 passes through the adjusting block 31 and is rotatably connected to the reference positioning block 11.

[0036] The locking mechanism is formed by the combination of adjusting block 31 and adjusting bolt 32, realizing the separate operation process of positioning and locking in this scheme. The adjusting block 31 and the reference positioning block 11 move along the same guide rail 21, ensuring that it always maintains the correct relative position relationship with the reference positioning block 11, and also facilitating the simplification of component setup. When the adjusting bolt 32 is rotated, the axial tension it generates forces the adjusting block 31 and the reference positioning block 11 to move closer together and lock tightly. This action not only fixes the two together, but also allows the adjusting block 31 to apply a certain pressure to the reference positioning block 11, making it more accurately press against the filter shell, thereby limiting the filter. The two sets of reference positioning blocks 11 cooperate diagonally to limit the filter within the receiving area.

[0037] In one embodiment, the adjusting block 31 includes a block body 311 and a locking handle 312.

[0038] The pressure block body 311 can slide along the guide rail 21. After sliding into place and locking the adjustment pressure block 31 with the reference positioning block 11, the adjustment pressure block 31 is limited to the current position by tightening the locking handle 312, so as to firmly fix the adjustment pressure block 31 on the guide rail 21. This effectively avoids displacement of the reference positioning block 11 and the adjustment pressure block 31 due to accidental contact before final fixation, ensuring stable positioning of the filter.

[0039] Furthermore, the side wall of the adjusting block 31 that abuts against the reference positioning block 11 is provided with a rubber gasket (not shown in the figure).

[0040] A rubber gasket is provided on the side wall where the adjusting block 31 abuts against the reference positioning block 11. The high coefficient of friction of the rubber material increases the static friction of the contact surface, providing stronger anti-slip and anti-loosening capabilities under the same bolt preload, thus enhancing the reliability of the locking. Secondly, as a soft material, the rubber gasket can compensate for any minor unevenness that may exist on the contact surface between the adjusting block 31 and the reference positioning block 11, ensuring a uniform distribution of the clamping force and avoiding localized stress concentration that could lead to component deformation or damage. It also helps absorb and attenuate high-frequency micro-vibrations transmitted during equipment operation, protecting the tooling itself and preventing loosening of the connection due to vibration.

[0041] Furthermore, in one embodiment of this application, the adjusting guide assembly 2 further includes a mounting base 22 disposed at the bottom of the guide rail 21, and is fixed to the top of the device by the mounting base 22. The specific fixing method can be achieved by using existing technology, such as fixing the mounting base 22 by fastening. The mounting base 22 has a pre-reserved installation position for the guide rail 21. The installation method between the guide rail 21 and the bottom mounting base 22 can be selected by snap-fit ​​welding or snap-fit ​​connection by fasteners. The mounting base 22 increases the contact area between the guide rail 21 and the top of the device, making it easier to position and install the guide rail 21 on the top of the device.

[0042] Figure 3 The length of the middle guide rail 21 is for illustrative purposes only; its actual length should be set according to actual needs.

[0043] Preferably, the adjusting bolt 32 is an internal hex bolt, and the limiting and fixing component 3 is provided with an anti-loosening nut that cooperates with the adjusting bolt 32.

[0044] Using internal hex bolts and anti-loosening nuts, sufficient preload is applied to ensure locking strength, resist the influence of vibration on the threaded pair during long-term operation of the equipment, and prevent the adjusting bolt 32 from rotating or loosening spontaneously, thereby ensuring the long-term stability and reliability of the locking force of the limit fixing component 3.

[0045] In one embodiment, the reference positioning component 1 further includes a positioning sensor 13, which is disposed on the inner sidewall of the reference positioning block 11 and detects the distance between the reference positioning block 11 and the filter.

[0046] The positioning sensor 13 monitors the actual distance between the reference positioning block 11 and the filter sidewall in real time and feeds the data back to the operator or host computer system. The operator can make fine adjustments based on the precise numerical display, eliminating human judgment errors. Simultaneously, it can record the precise position data for each installation, facilitating quality traceability and predictive maintenance. It should be noted that the positioning sensor 13 needs to be connected to a controller. This technology is already maturely applied in existing technology, allowing for the pre-setting of a distance threshold between the reference positioning block 11 and the filter, and alerting the user when the threshold is reached. Furthermore, this application allows for electronic control of the movement of the reference positioning block 11, setting the movement direction and stroke to ensure it moves along a predetermined path, improving tooling accuracy.

[0047] The wafers are cleaned before drying, and their surfaces are in an ultra-clean state. If particulate contaminants accumulate during the drying process, they will directly cause short circuits or open circuits, rendering the chip unusable. Traditional filter installation methods (such as manually lifting the vias) are prone to generating metal or dust particles due to friction and collision, and are difficult to clean thoroughly due to the limited operating space. Large rectangular filters are heavy and pose a risk of slipping when installed on top, which could not only injure personnel but also damage the expensive process chambers and transport mechanisms below.

[0048] Meanwhile, wafer drying (especially IPA vapor drying) requires extremely high sealing. Even minor leaks can lead to the waste of expensive process gases (such as high-purity nitrogen and IPA vapor), and can also disrupt the uniformity of the airflow and temperature fields within the cavity, resulting in uneven drying, water stains, and even the introduction of moisture and contaminants from the outside air.

[0049] In addition, filters need to be replaced regularly to maintain performance. Replacing them in the high-risk, confined space at the top of the equipment is traditionally time-consuming, labor-intensive, and carries high safety risks, potentially leading to excessive downtime and impacting production capacity.

[0050] This application's solution uses a receiving area formed by two sets of L-shaped reference positioning blocks and a guide ramp to guide the filter smoothly into the predetermined position, greatly reducing particulate matter generated by repeated adjustments and collisions. The adjustment guide assembly ensures smooth and straight movement, avoiding damage to the internal precision filter element or sealing material caused by forceful knocking or prying, thus preventing the filter itself from becoming a source of pollution.

[0051] By adjusting the guiding components (such as using the guide rail in the above scheme), the parallelism and coaxiality between the filter and the mounting flange on the top of the equipment are ensured, so that the sealing ring around the filter can be evenly compressed to form a complete and reliable sealing ring, fundamentally eliminating leakage channels caused by installation tilt or misalignment.

[0052] The limiting and fixing components (such as the self-locking structure of the adjusting bolt and adjusting pressure block mentioned above) provide a continuous, uniform, and repeatable clamping force. This rigid connection can effectively resist vibration and thermal expansion and contraction during equipment operation, ensuring that the sealing performance does not degrade during long-term, continuous drying process cycles, thus guaranteeing the stability and repeatability of the process.

[0053] The movable reference positioning block and receiving area design allow operators to pre-align the filter roughly on the ground or a safe platform, and then easily achieve precise positioning using the guide mechanism. The quick-locking function of the limit fixing components replaces the tedious operation of tightening bolts one by one, shortening replacement time.

[0054] The tooling is adaptable to filters of different sizes and specifications, reducing the cost and time required to modify equipment or customize new tooling due to product model changes. Standardized operating procedures make changeover times predictable, allowing the production department to accurately schedule maintenance windows and optimize production plans.

[0055] This application's tooling breaks down the high-risk operation of installing heavy objects at heights into a series of controllable, low-risk standardized steps: placement, guiding, positioning, and locking. The filter is always securely restrained within its containment area until it is safely fixed to the equipment, greatly reducing the risk of it slipping and falling.

[0056] The technical solutions protected in this application are not limited to the above embodiments. It should be noted that any combination of the technical solutions of any embodiment with one or more other embodiments is within the scope of protection of this application. Although this application has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of this application are within the scope of protection claimed in this application.

Claims

1. A filter auxiliary tooling for wafer drying, characterized in that, The device includes a reference positioning component, an adjustment guide component, and a limiting and fixing component, all of which are installed on the top of the drying equipment. The two sets of reference positioning components are provided with receiving areas for accommodating the filter. The reference positioning components move horizontally along the adjustment guide component to change the area of ​​the receiving area, and the limiting and fixing components move along the adjustment guide component to lock and connect with the reference positioning components.

2. The filter auxiliary tooling according to claim 1, characterized in that, The reference positioning component is provided in two sets, and each set of the reference positioning component includes an "L"-shaped reference positioning block. The two sets of reference positioning components are arranged opposite to each other to form the receiving area.

3. The filter auxiliary tooling according to claim 2, characterized in that, The inner side of the reference positioning block is a right-angled reference surface, the top of the reference positioning block is provided with a guide slope, and the side of the reference positioning block is provided with reference scale lines.

4. The filter auxiliary tooling according to claim 2, characterized in that, The adjustment guide assembly includes a guide rail disposed outside the reference positioning block, and the outer wall of the reference positioning block is provided with a slider adapted to the guide rail. The reference positioning block moves along the guide rail via the slider to move closer to or further away from another reference positioning block.

5. The filter auxiliary tooling according to claim 4, characterized in that, The adjustment guide component is provided in two sets corresponding to the reference positioning component, and the extension directions of the two guide rails are set perpendicular to each other.

6. The filter auxiliary tooling according to claim 5, characterized in that, The limiting and fixing assembly includes an adjusting block and an adjusting bolt. The adjusting block moves in the same direction as the corresponding reference positioning block along the guide rail. Both the adjusting block and the reference positioning block are provided with threaded holes that are adapted to the adjusting bolt. The adjusting bolt passes through the adjusting block and is rotatably connected to the reference positioning block.

7. The filter auxiliary tooling according to claim 6, characterized in that, The adjusting block includes a block body and a locking handle.

8. The filter auxiliary tooling according to claim 6, characterized in that, The side wall where the adjusting pressure block abuts against the reference positioning block is provided with a rubber gasket.

9. The filter auxiliary tooling according to claim 6, characterized in that, The adjusting bolt is an internal hex bolt, and the limiting and fixing assembly is provided with an anti-loosening nut that cooperates with the adjusting bolt.

10. The filter auxiliary tooling according to claim 2, characterized in that, The reference positioning component further includes a positioning sensor, which is disposed on the inner sidewall of the reference positioning block and detects the distance between the reference positioning block and the filter.

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