An airbag pressure-acceleration integrated micro-sensor packaging structure

Abstract

The utility model relates to micro sensor technical field, and disclose an air bag pressure - acceleration integral type micro sensor packaging structure, this structure includes packaging shell, packaging cover, sensor mounting mechanism and auxiliary mechanism, and the bottom of packaging shell is equipped with installation base and connects mounting seat, and is separated into pressure detection chamber and acceleration detection chamber through 0.1 millimeter monocrystalline silicon silicon partition in the inside, in sensor mounting mechanism, pressure sensor is fixed in left chamber through mounting seat, and sensitive diaphragm faces up, and cooperates with the pressure of packaging cover guide hole and captures pressure, and two groups of acceleration sensor are fixed in right chamber through low elasticity modulus silica gel pad, and buffer vibration interference, realize integrated detection, and auxiliary mechanism contains side louvre and dust screen, can radiate dustproof, guarantee sensor stable operation, and the packaging structure size is 4mm * 4mm * 1.2mm, saves 50% space and 30% power consumption, can solve the problem of seat thickness limited, and the air bag of separate sensor is puffy, is applicable to the field such as automobile safety, consumer electronics.

Description

Technical Field

[0001] This utility model relates to the field of micro-sensor technology, specifically to an integrated micro-sensor packaging structure for airbag pressure-acceleration. Background Technology

[0002] In fields such as automotive safety and consumer electronics, the demand for accurate monitoring of equipment collision conditions is becoming increasingly urgent, requiring the simultaneous acquisition of pressure and acceleration data to achieve multi-dimensional safety assessments. Traditional solutions often use separate packages for pressure and acceleration sensors, resulting in large size and low integration, making them difficult to adapt to the installation requirements of miniaturized devices.

[0003] Based on the above, the applicant believes the following deficiencies exist: The existing device does not integrate pressure and acceleration detection, requiring the separate installation of two independent sensors. This necessitates planning installation locations and designing fixing structures for each sensor, increasing assembly time and labor costs, and occupying more space. The combined volume of the two independent sensors makes it difficult to adapt to scenarios with tight installation space requirements, such as airbags. Utility Model Content

[0004] The purpose of this invention is to provide an integrated micro-sensor packaging structure for airbag pressure-acceleration to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an integrated micro-sensor packaging structure for airbag pressure-acceleration, including a packaging shell, a packaging cover on the top of the packaging shell, a sensor mounting mechanism on the surface of the packaging shell and the packaging cover, and an auxiliary mechanism on the surface of the packaging shell; The sensor mounting mechanism includes a sensor mounting base, which is installed inside the bottom left side of the encapsulation housing. A pressure sensor is mounted inside the sensor mounting base, and a pressure sensor protective housing is mounted outside the pressure sensor. Insertion sockets are fixedly connected to the centers of the front and rear ends inside the encapsulation housing, with silicon spacers inserted into the inner ends of the insertion sockets. Silicone pads are installed on the right sides of the front and rear ends inside the encapsulation housing, with accelerometers installed inside the silicone pads. A pressure guiding hole is provided on the top of the encapsulation cover. The pressure sensor is fixed to the pressure detection chamber via the sensor mounting base, with the top sensitive diaphragm exposed upwards, aligning with the pressure guiding hole of the encapsulation cover. It can quickly capture airbag pressure; two sets of accelerometers are fixed to the acceleration detection chamber by silicone pads, which can accurately sense acceleration changes. The combination of the two achieves integrated detection of pressure and acceleration, eliminating the need to install two separate sensors. The socket inside the package fixes a 0.1 mm thick monocrystalline silicon separator, which can strictly separate the pressure detection chamber and the acceleration detection chamber to avoid environmental interference between the two chambers. At the same time, the low elastic modulus silicone pad can buffer the influence of external vibration on the accelerometer, further improving the accuracy of the detection data. The sensor mounting mechanism achieves integrated and accurate detection, ensuring detection independence and accuracy.

[0006] Preferably, the accelerometer and silicone pad are provided in two sets, and the silicon separator is made of monocrystalline silicon material with a thickness of 0.1 mm.

[0007] Preferably, the silicone pad is made of a low elastic modulus material, and the accelerometer is attached to the inner sidewall of the encapsulation housing via the silicone pad.

[0008] Preferably, the auxiliary mechanism includes side heat dissipation holes, which are located at the center of the left and right sides of the encapsulation shell. Dustproof meshes are installed at the center of the left and right sides of the encapsulation shell, and mounting pins are installed at the four corners of the dustproof meshes. The dustproof meshes are installed at the center of the left and right sides of the encapsulation shell using these mounting pins. The side heat dissipation holes at the center of the left and right sides of the encapsulation shell can quickly dissipate the heat generated by the internal sensors during operation, preventing performance degradation of the pressure and acceleration sensors due to high temperatures, ensuring stable operation of the sensors at suitable temperatures. The dustproof meshes fixed at the side heat dissipation holes by the mounting pins can prevent external dust from entering the encapsulation shell without affecting heat dissipation, preventing dust from adhering to the sensor surface and affecting detection accuracy, reducing sensor malfunctions caused by dust contamination, and lowering maintenance frequency and costs. The auxiliary mechanism achieves efficient heat dissipation, stable sensor operation, dust protection, and reduced maintenance costs.

[0009] Preferably, a mounting base is fixedly connected to the bottom of the encapsulation shell, and connecting mounting seats are fixedly connected to the four corners of the mounting base.

[0010] Preferably, the pressure sensor has its top sensitive diaphragm facing upwards and exposed inside the cavity, the inside of the encapsulation shell has a pressure detection chamber on the left side and an acceleration detection chamber on the right side.

[0011] Compared with the prior art, this utility model provides an integrated micro-sensor packaging structure for airbag pressure-acceleration, which has the following advantages: 1. This integrated airbag pressure-acceleration micro-sensor packaging structure features a sensor mounting mechanism. The pressure sensor is fixed to the pressure detection chamber via a sensor mounting base, with the top sensitive diaphragm exposed upwards. Combined with the pressure guide holes in the packaging cover, it can quickly capture airbag pressure. Two sets of acceleration sensors are fixed to the acceleration detection chamber via silicone pads, enabling precise sensing of acceleration changes. The combination of these two sensors achieves integrated pressure and acceleration detection, eliminating the need for separate installation of two independent sensors. A 0.1 mm thick monocrystalline silicon separator is fixed within the packaging shell via a connector, strictly separating the pressure detection chamber from the acceleration detection chamber and preventing environmental interference between the two chambers. Simultaneously, the low-elasticity silicone pad buffers the impact of external vibrations on the acceleration sensors, further improving the accuracy of the detection data. The integrated sensor mounting mechanism achieves precise detection, ensuring detection independence and accuracy. The integrated packaging of the two sensors effectively solves the problem of limited seat thickness and the issue of localized airbag bulging caused by stacking separate sensors.

[0012] 2. This integrated pressure-accelerometer microsensor packaging structure is equipped with an auxiliary mechanism. The side heat dissipation holes on the left and right sides of the packaging shell can quickly dissipate the heat generated by the internal sensor during operation, avoiding performance degradation of the pressure and acceleration sensors due to high temperature environments, and ensuring stable operation of the sensor at a suitable temperature. The dustproof mesh fixed at the side heat dissipation holes by mounting bolts can prevent external dust from entering the packaging shell without affecting heat dissipation, preventing dust from adhering to the sensor surface and affecting detection accuracy, reducing sensor failures caused by dust contamination, and lowering maintenance frequency and costs. The auxiliary mechanism achieves efficient heat dissipation, stable sensor operation, dust protection, and reduced maintenance costs. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the auxiliary structure of this utility model; Figure 3 This is a schematic diagram of the internal structure of this utility model; Figure 4 This is a schematic diagram of the sensor mounting mechanism of this utility model.

[0014] In the diagram: 1. Encapsulation housing; 11. Pressure detection chamber; 12. Acceleration detection chamber; 2. Mounting base; 3. Connecting mounting base; 4. Encapsulation cover; 5. Sensor mounting mechanism; 51. Sensor mounting base; 52. Pressure sensor; 53. Pressure sensor protective housing; 54. Connector; 55. Silicone separator; 56. Silicone pad; 57. Acceleration sensor; 58. Pressure guide hole; 6. Auxiliary mechanism; 61. Side heat dissipation hole; 62. Dustproof mesh; 63. Mounting bolt. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0017] This utility model provides the following technical solution: Example 1 Please see Figure 1-4 An integrated micro-sensor packaging structure for airbag pressure-acceleration includes a packaging shell 1, a packaging cover 4 on the top of the packaging shell 1, a sensor mounting mechanism 5 on the surface of the packaging shell 1 and the packaging cover 4, and an auxiliary mechanism 6 on the surface of the packaging shell 1. The sensor mounting mechanism 5 includes a sensor mounting base 51, which is installed inside the bottom left side of the encapsulation housing 1. A pressure sensor 52 is mounted inside the sensor mounting base 51, and a pressure sensor protective housing 53 is mounted outside the pressure sensor 52. A connector 54 is fixedly connected to the center of both the front and rear ends inside the encapsulation housing 1. A silicon separator 55 is inserted into the inner end of the connector 54. Silicone pads 56 are installed on the right side of both the front and rear ends inside the encapsulation housing 1, and an acceleration sensor 57 is installed inside the silicone pad 56. A pressure guiding hole 58 is provided on the top of the encapsulation cover 4. The pressure sensor 52 is fixed to the pressure detection chamber 11 via the sensor mounting base 51, with its sensitive diaphragm facing upwards and exposed. Combined with the pressure guiding hole 58 of the encapsulation cover 4, it can quickly capture the airbag pressure. Two sets of acceleration sensors 57 are fixed to the acceleration detection chamber 12 via the silicone pads 56, enabling accurate detection of acceleration changes. The combination of these sensors achieves integrated pressure and acceleration detection, eliminating the need for separate installation of two independent sensors. The connector 54 inside the encapsulation housing 1 is fixed at 0.1 mm. A millimeter-thick monocrystalline silicon separator 55 can strictly separate the pressure detection chamber 11 and the acceleration detection chamber 12, avoiding environmental interference between the two chambers. At the same time, the low elastic modulus silicone pad 56 can buffer the influence of external vibration on the acceleration sensor 57, further improving the accuracy of the detection data. The sensor mounting mechanism 5 enables integrated and precise detection, ensuring the independence and accuracy of the detection. The pressure sensor 52 and the acceleration sensor 57 use MPX5700 and ADXL345 respectively. Two sets of accelerometer 57 and silicone pad 56 are provided, and the silicon separator 55 is made of monocrystalline silicon with a thickness of 0.1 mm. The silicone pad 56 is made of a low elastic modulus material, and the accelerometer 57 is attached to the inner sidewall of the encapsulation housing 1 through the silicone pad 56.

[0018] Example 2 Please see Figure 1-4Furthermore, based on Embodiment 1, the auxiliary mechanism 6 further includes side heat dissipation holes 61, which are opened at the center of the left and right sides of the encapsulation shell 1. Dustproof nets 62 are provided at the center of the left and right sides of the encapsulation shell 1, and mounting bolts 63 are installed at the four corners of the surface of the dustproof nets 62. The dustproof nets 62 are installed at the center of the left and right sides of the encapsulation shell 1 through the mounting bolts 63. The side heat dissipation holes 61 at the center of the left and right sides of the encapsulation shell 1 can quickly dissipate the heat generated by the internal sensor during operation, avoid the performance degradation of the pressure sensor 52 and acceleration sensor 57 caused by the high temperature environment, and ensure that the sensor operates stably at a suitable temperature. The dustproof nets 62 fixed at the side heat dissipation holes 61 by the mounting bolts 63 can block external dust from entering the interior of the encapsulation shell 1 without affecting heat dissipation, prevent dust from adhering to the sensor surface and affecting the detection accuracy, reduce sensor failures caused by dust contamination, and reduce maintenance frequency and cost. The auxiliary mechanism 6 achieves efficient heat dissipation, stabilizes sensor operation, achieves dust protection, and reduces maintenance costs. The bottom of the encapsulation shell 1 is fixedly connected to the mounting base 2, and the four corners of the mounting base 2 are fixedly connected to the connecting mounting seats 3; The pressure sensor 52 has its top sensitive diaphragm facing upwards and exposed inside the cavity. The pressure detection chamber 11 is located on the left side inside the encapsulation housing 1, and the acceleration detection chamber 12 is located on the right side inside the encapsulation housing 1.

[0019] In actual operation, when this device is used, the encapsulation cover 4 is opened, and the pressure sensor 52, silicone pad 56, and acceleration sensor 57 are installed inside the encapsulation housing 1. Then, the encapsulation cover 4 is closed, and the encapsulation housing 1 is installed in a suitable position via the connecting mounting base 3. The pressure sensor 52 is fixed to the pressure detection chamber 11 via the sensor mounting base 51, with the top sensitive diaphragm exposed upwards. Combined with the pressure guide hole 58 of the encapsulation cover 4, it can quickly capture the airbag pressure. The two sets of acceleration sensors 57 are fixed to the acceleration detection chamber 12 via the silicone pad 56, enabling accurate sensing of acceleration changes. The combination of these two sensors achieves integrated pressure and acceleration detection, eliminating the need for separate installation of two independent sensors. The plug-in base 54 inside the encapsulation housing 1 is fixed at 0.1 mm. A millimeter-thick single-crystal silicon separator 55 can strictly separate the pressure detection chamber 11 and the acceleration detection chamber 12, avoiding environmental interference between the two chambers. At the same time, the low-elasticity modulus silicone pad 56 can buffer the influence of external vibration on the acceleration sensor 57. The airbag is detected through the pressure guide hole 58. The airbag pressure introduced by the pressure guide hole 58 directly contacts the sensitive diaphragm on the top of the pressure sensor 52 for detection. While the acceleration sensor 57 is detecting, the silicone pad 56 can effectively absorb the stress generated by the deformation of the pressure chip, block the mechanical transmission path, and make the acceleration chip only respond to the inertial force of the airbag movement, further improving the accuracy of the detection data. The sensor mounting mechanism 5 achieves integrated and precise detection, ensuring the independence and accuracy of detection. The package size is 4 mm × 4 mm × 1.2 mm, sharing a single MEMS chip, with I²C dual address output, saving 50% space and 30% power consumption compared to two discrete devices. The integrated packaging of the two sets of sensors effectively solves the problem of limited seat thickness and local bulging of the airbag caused by the stacking of discrete sensors. The side heat dissipation holes 61 at the center of the left and right sides of the enclosure 1 can quickly dissipate the heat generated by the internal sensors during operation, preventing the performance degradation of the pressure sensor 52 and acceleration sensor 57 caused by high temperature environment, and ensuring stable operation of the sensors at a suitable temperature. The dustproof net 62 fixed at the side heat dissipation holes 61 by the mounting bolts 63 can block external dust from entering the enclosure 1 without affecting heat dissipation, prevent dust from adhering to the sensor surface and affecting detection accuracy, reduce sensor failures caused by dust contamination, and reduce maintenance frequency and cost. The auxiliary mechanism 6 achieves efficient heat dissipation, stabilizes sensor operation, achieves dust protection, and reduces maintenance costs.

[0020] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A micro-sensor packaging structure integrating airbag pressure-acceleration, comprising a packaging shell (1), characterized in that: The top of the encapsulation shell (1) is provided with an encapsulation cover (4), the surface of the encapsulation shell (1) and the encapsulation cover (4) is provided with a sensor mounting mechanism (5), and the surface of the encapsulation shell (1) is provided with an auxiliary mechanism (6). The sensor mounting mechanism (5) includes a sensor mounting base (51). The sensor mounting mechanism (5) is installed on the bottom left side inside the encapsulation shell (1). The inner end of the sensor mounting base (51) is installed with a pressure sensor (52). The outer end of the pressure sensor (52) is installed with a pressure sensor protective shell (53). The center of the front and rear ends of the encapsulation shell (1) is fixedly connected with a plug (54). The inner end of the plug (54) is inserted with a silicon separator (55). The right side of the front and rear ends of the encapsulation shell (1) is installed with a silicone pad (56). The inner end of the silicone pad (56) is installed with an acceleration sensor (57). The top of the encapsulation cover (4) is provided with a pressure guiding hole (58).

2. The integrated micro-sensor packaging structure for airbag pressure-acceleration according to claim 1, characterized in that: The accelerometer (57) and silicone pad (56) are provided in two sets, and the silicon separator (55) is made of single crystal silicon with a thickness of 0.1 mm.

3. The integrated micro-sensor packaging structure for airbag pressure-acceleration according to claim 1, characterized in that: The silicone pad (56) is made of a low elastic modulus material, and the accelerometer (57) is attached to the inner sidewall of the encapsulation shell (1) through the silicone pad (56).

4. The integrated micro-sensor packaging structure for airbag pressure-acceleration according to claim 1, characterized in that: The auxiliary mechanism (6) includes side heat dissipation holes (61), which are opened at the center of the left and right sides of the encapsulation shell (1). Dustproof nets (62) are provided at the center of the left and right sides of the encapsulation shell (1). Mounting bolts (63) are installed at the four corners of the surface of the dustproof nets (62). The dustproof nets (62) are installed at the center of the left and right sides of the encapsulation shell (1) by means of mounting bolts (63).

5. The integrated micro-sensor packaging structure for airbag pressure-acceleration according to claim 1, characterized in that: The bottom of the encapsulation shell (1) is fixedly connected to the mounting base (2), and the four corners of the mounting base (2) are fixedly connected to the connecting mounting base (3).

6. The integrated micro-sensor packaging structure for airbag pressure-acceleration according to claim 1, characterized in that: The pressure sensor (52) has its top sensitive diaphragm facing upwards and exposed inside the cavity. The pressure detection chamber (11) is opened on the left side inside the encapsulation shell (1), and the acceleration detection chamber (12) is opened on the right side inside the encapsulation shell (1).

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