A vacuum gauge anti-pollution shield
Patent Information
- Application Number
- CN202522523426.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-27
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2035-11-27
AI Technical Summary
[0004]针对现有技术的不足，本实用新型提供了一种真空计防污染护罩，解决了在实际应用场景中，真空计接口连接处面临着多重污染风险与工况挑战，一方面，半导体制造中的光刻胶挥发物、真空镀膜过程中产生的金属或非金属蒸发颗粒、航空航天模拟真空环境中的残留杂质等，易在接口缝隙处沉积附着，形成顽固性污染物，直接破坏接口密封面的平整度，导致真空泄漏，进而引发测量数据漂移、误差增大等问题，严重时甚至造成真空计传感元件失效，此外，部分极端工况下，高温、腐蚀性气体等环境因素还会加速接口污染物的化学反应与附着固化，显著缩短真空计接口的使用寿命的技术问题
选取与真空计本体型号匹配的防护罩，检查防护罩内侧固定安装的环形垫是否完好无损，随后将两个连接罩分别从防护罩的两端滑动套入，确保连接罩可沿防护罩外侧顺畅滑动，无卡顿现象，预装完成后，将防护罩整体套设在真空计本体的外部，按照设备安装规范，将真空计本体两端接口分别与对应的管路或部件连接；
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Figure CN224861227U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum gauge protection technology, and in particular to a vacuum gauge anti-pollution protective cover. Background Technology
[0002] In high-end industrial fields such as semiconductor manufacturing, vacuum coating, aerospace, and precision electronic processing, accurate measurement and stable control of the vacuum environment are core prerequisites for ensuring process precision, product quality, and safe equipment operation. Vacuum gauges, as key instruments for measuring the total pressure of rarefied gases below atmospheric pressure, directly determine the reliability of downstream production processes and the final product qualification rate through their measurement accuracy and operational stability. In actual operation, these devices require sealed connections with vacuum chambers, pipelines, and other components via specific interfaces. These interfaces are not only the core channels for pressure signal transmission but also crucial for ensuring the sealing performance of the vacuum system. Their structural integrity and cleanliness directly affect the pressure sensing sensitivity and long-term operational stability of the vacuum gauge, thus making them a key core area in the vacuum gauge protection system.
[0003] However, in practical applications, the interface connection of vacuum gauges faces multiple contamination risks and operating challenges. On the one hand, photoresist volatiles from semiconductor manufacturing, metal or non-metal evaporation particles generated during vacuum coating, and residual impurities in aerospace simulated vacuum environments are prone to deposit and adhere to the interface gaps, forming stubborn contaminants. This directly damages the flatness of the interface sealing surface, leading to vacuum leakage, which in turn causes problems such as measurement data drift and increased errors. In severe cases, it can even cause the vacuum gauge sensing elements to fail. In addition, under some extreme operating conditions, environmental factors such as high temperature and corrosive gases can accelerate the chemical reaction and adhesion solidification of interface contaminants, significantly shortening the service life of the vacuum gauge interface. Utility Model Content
[0004] To address the shortcomings of existing technologies, this utility model provides a vacuum gauge anti-contamination cover, which solves the problem that vacuum gauge interface connections face multiple contamination risks and operational challenges in practical applications. On the one hand, photoresist volatiles from semiconductor manufacturing, metal or non-metal evaporation particles generated during vacuum coating, and residual impurities from aerospace simulated vacuum environments can easily deposit and adhere at interface gaps, forming stubborn contaminants. This directly damages the flatness of the interface sealing surface, leading to vacuum leakage, and consequently causing problems such as measurement data drift and increased errors. In severe cases, it can even cause the vacuum gauge sensing elements to fail. In addition, under some extreme operating conditions, environmental factors such as high temperature and corrosive gases can accelerate the chemical reaction and adhesion solidification of interface contaminants, significantly shortening the service life of the vacuum gauge interface.
[0005] To achieve the above objectives, this utility model provides the following technical solution: A vacuum gauge anti-contamination cover includes a vacuum gauge body, with a protective cover fitted over the outside of the vacuum gauge body. Both ends of the protective cover are equipped with protective components for shielding the interface connections. Each protective component includes a connecting cover, an annular cloth, a guide rope loop, and an annular rope. The connecting cover is slidably connected to the outside of the protective cover, the annular cloth is fixedly connected to the end of the connecting cover, the guide rope loop is fixedly installed on the outside of the annular cloth, and the annular rope is movably connected to the inside of the guide rope loop. The connecting cover can move axially along the protective cover to adjust the position of the annular cloth, adapting to different length interface connection scenarios and ensuring complete coverage of the interface connection. Its rigid structure stably supports the annular cloth. After the connecting cover is adjusted to its position, the annular cloth can completely cover the outside of the interface connection of the vacuum gauge body, forming a flexible protective barrier to prevent contaminants from entering the interface gaps. The flexible material can conform to the outer periphery of interfaces of different shapes, achieving full coverage and effectively isolating fine contaminants such as dust and oil.
[0006] Preferably, each connecting cover has two threaded holes on its outer side, which are connected to the inner side of the connecting cover. Each threaded hole is threaded with a fixing screw. After the fixing screw is screwed into the threaded hole, its end can press against the outer wall of the protective cover. The connecting cover is fixed in a specific position of the protective cover by the self-locking of the threads and friction.
[0007] Preferably, the outer side of the protective cover has two screw holes that communicate with the inner side of the protective cover. Each screw hole is threaded with a limit screw. After the limit screw is screwed into the screw hole, its end passes through the annular washer through hole and abuts against the surface of the vacuum gauge body. The tightening force restricts the axial movement of the protective cover on the vacuum gauge body and fixes the overall position of the protective cover.
[0008] Preferably, the inner side of the protective cover has an annular pad that is attached to it. The annular pad is attached to the inner side of the protective cover, which can buffer the contact pressure between the protective cover and the vacuum gauge body, and prevent the protective cover from directly rubbing against the surface of the vacuum gauge body. The soft attachment feature can protect the surface of the vacuum gauge body from being scratched by the protective cover.
[0009] Preferably, the annular pad has a through hole on one side of each screw hole, and the inner side of the protective cover has a guide groove. A guide block is slidably connected inside the guide groove. The guide block is fixedly installed on the outside of the annular pad. The guide groove and the guide block cooperate to restrict the circumferential rotation of the annular pad and ensure that the through hole on the annular pad is always aligned with the screw hole of the protective cover, so as to facilitate the smooth passage of the limit screw.
[0010] Preferably, each fixing screw has a pad fixedly installed at its end, and each limiting screw has a pad fixedly installed at its end. The pads are made of soft rubber material, which can prevent the screw ends from scratching the surface of the protective cover, while increasing friction and improving fixing stability.
[0011] Compared with the prior art, the present invention has the following beneficial effects: Select a protective cover that matches the model of the vacuum gauge body. Check whether the annular gasket fixed inside the protective cover is intact. Then slide the two connecting covers into the protective cover from both ends respectively, ensuring that the connecting covers can slide smoothly along the outside of the protective cover without any jamming. After pre-installation, put the protective cover on the outside of the vacuum gauge body. According to the equipment installation specifications, connect the interfaces at both ends of the vacuum gauge body to the corresponding pipelines or components respectively. After the interface is connected, slide the connecting covers at both ends toward the interface of the vacuum gauge body, so that the annular cloth at the end of the connecting cover is aligned with the interface. Then pull up the annular cloth to completely cover the outside of the interface connection. Next, pull the annular rope to make the annular rope contract along the circular track inside the guide rope cloth loop until the opening of the annular cloth is tightened and tightly fits the outer periphery of the interface connection. Finally, tie and fix the annular rope in the tightened state.
[0012] Composed of a protective cover body with an annular pad, a sliding connecting cover, and sealing components such as annular cloth and annular rope, it forms a sealed protective space. This effectively blocks contaminants such as photoresist volatiles and evaporated particles from entering the interface gaps, avoiding vacuum leakage and measurement deviations caused by damage to the sealing surface, and ensuring the stable operation of the vacuum gauge sensing element. It also reduces the direct impact of high temperature and corrosive gases on the interface, delays the solidification of contaminants and aging of the sealing surface, and extends the service life of the interface. Attached Figure Description
[0013] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.
[0014] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This utility model Figure 1 Exploded view of the protective shield; Figure 3 This utility model Figure 1 Exploded view of the structure of the ring-shaped fabric; Figure 4 This utility model Figure 2 Exploded view of the protective shield; Figure 5 This utility model Figure 4 Structural diagram of the annular pad; Figure 6 This utility model Figure 2 Enlarged structural diagram at point A in the middle; Figure 7 This utility model Figure 2 Enlarged structural diagram at point B in the middle.
[0015] Legend: 1. Vacuum gauge body; 2. Protective cover; 3. Connecting cover; 4. Annular cloth; 5. Guide rope cloth ring; 6. Annular rope; 7. Threaded hole; 8. Fixing screw; 9. Screw hole; 10. Limiting screw; 11. Annular pad; 12. Through hole; 13. Guide groove; 14. Guide block; 15. Pad block. Detailed Implementation
[0016] This application provides a vacuum gauge anti-contamination cover, which effectively solves the multiple contamination risks and operating challenges faced by the vacuum gauge interface connection in practical application scenarios. On the one hand, photoresist volatiles in semiconductor manufacturing, metal or non-metal evaporation particles generated during vacuum coating, and residual impurities in aerospace simulated vacuum environments are prone to deposit and adhere at the interface gaps, forming stubborn contaminants. This directly damages the flatness of the interface sealing surface, leading to vacuum leakage, and subsequently causing problems such as measurement data drift and increased errors. In severe cases, it can even cause the vacuum gauge sensing element to fail. In addition, under some extreme operating conditions, environmental factors such as high temperature and corrosive gases can accelerate the chemical reaction and adhesion solidification of interface contaminants, significantly shortening the service life of the vacuum gauge interface.
[0017] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the technical solution in this application embodiment effectively solves the multiple contamination risks and operating challenges faced by the vacuum gauge interface connection in practical application scenarios. On the one hand, photoresist volatiles from semiconductor manufacturing, metal or non-metal evaporation particles generated during vacuum coating, and residual impurities in aerospace simulated vacuum environments are prone to deposit and adhere at the interface gaps, forming stubborn contaminants. This directly damages the flatness of the interface sealing surface, leading to vacuum leakage, and consequently causing problems such as measurement data drift and increased errors. In severe cases, it can even cause the vacuum gauge sensing element to fail. In addition, under some extreme operating conditions, environmental factors such as high temperature and corrosive gases can accelerate the chemical reaction and adhesion solidification of interface contaminants, significantly shortening the service life of the vacuum gauge interface. The overall approach is as follows: To address the problems existing in the prior art, this utility model provides a vacuum gauge anti-pollution cover, including a vacuum gauge body 1, and a protective cover 2 covering the outside of the vacuum gauge body 1. The protective cover 2 serves as the core protective carrier and is fully covered outside the vacuum gauge body 1. It can physically isolate external pollutants such as dust, oil, and water vapor, effectively protecting the vacuum gauge body 1 from external pollution and minor collision damage, extending the service life of the vacuum gauge body 1, and providing an installation base and sliding support for the protective components at both ends, limiting the movement trajectory of the connecting cover 3.
[0018] Both ends of the protective cover 2 are equipped with protective components for shielding the interface connection. Each protective component includes a connecting cover 3, an annular cloth 4, a guide rope loop 5, and an annular rope 6. The connecting cover 3 is slidably connected to the outside of the protective cover 2. The annular cloth 4 is fixedly connected to the end of the connecting cover 3. The guide rope loop 5 is fixedly installed on the outside of the annular cloth 4. The annular cloth 4 is made of a flexible, oil-resistant, and anti-aging fabric. The guide rope loop 5 has a ring-shaped structure with a channel on its inner side for the annular rope 6 to pass through. The annular rope 6 is a wear-resistant fiber rope used to tighten the opening of the annular cloth 4 to fit tightly against the outer periphery of the interface connection. The annular rope 6 is movably connected to the inner side of the guide rope loop 5. The connecting cover 3 can move along the axial direction of the protective cover 2 to adjust the position of the annular cloth 4, adapting to different length interface connection scenarios, ensuring that the interface connection is completely covered. Its rigid structure can stably... The fixed support ring cloth 4, after the connecting cover 3 is adjusted into place, can completely cover the outside of the interface connection of the vacuum gauge body 1, forming a flexible protective barrier to prevent contaminants from entering the interface gap. The flexible material can fit the outer periphery of interfaces of different shapes to achieve full coverage, effectively isolating fine contaminants such as dust and oil, avoiding problems such as sealing failure and air leakage due to contamination, and ensuring the stability of the vacuum system operation. The guide rope cloth ring 5 is fixed to the outside of the ring cloth 4, and an annular channel is formed on the inside for the ring rope 6 to pass through and slide along the channel, providing a movement trajectory for the ring rope 6, ensuring that the ring rope 6 can act evenly on the opening of the ring cloth 4 when it contracts. By pulling the ring rope 6, it can contract along the annular channel, causing the opening of the ring cloth 4 to tighten, so that the ring cloth 4 fits tightly against the outer periphery of the interface connection; after contraction, it is tied and fixed to maintain the tight state of the ring cloth 4.
[0019] Two threaded holes 7 are opened on the outer side of each connecting cover 3. The threaded holes 7 communicate with the inner side of the connecting cover 3. Each threaded hole 7 is threaded with a fixing screw 8. After the fixing screw 8 is screwed into the threaded hole 7, the end can press against the outer wall of the protective cover 2. The connecting cover 3 is fixed in a specific position of the protective cover 2 by the self-locking of the thread and friction, preventing the connecting cover 3 from sliding. The threaded connection method is stable and reliable, which can effectively limit the axial sliding of the connecting cover 3 during equipment operation and transportation, and prevent the annular cloth 4 from falling off the interface connection due to the displacement of the connecting cover 3, ensuring stable protection effect. The fixing point of the connecting cover 3 can be flexibly adjusted according to the interface position to adapt to different installation requirements.
[0020] Two screw holes 9 are provided on the outer side of the protective cover 2. The screw holes 9 communicate with the inner side of the protective cover 2. Each screw hole 9 is threaded with a limiting screw 10. The screw holes 9 on the outer side of the protective cover 2 provide an installation channel for the limiting screw 10. After the limiting screw 10 is screwed into the screw hole 9, its end passes through the through hole 12 of the annular pad 11 and abuts against the surface of the vacuum gauge body 1. The tightening force restricts the axial movement of the protective cover 2 on the vacuum gauge body 1, fixes the overall position of the protective cover 2, and effectively prevents the protective cover 2 from shifting in scenarios with large vibrations or frequent movement. This avoids the protective cover 2 from shifting and causing interface protection failure. The thread adjustment design allows for flexible adjustment of the tightening force according to the structure of the vacuum gauge body 1, ensuring a stable fixation while avoiding excessive tightening that could damage the vacuum gauge body 1.
[0021] An annular pad 11 is attached to the inner side of the protective cover 2. The annular pad 11 has a through hole 12 on one side of each screw hole 9. The annular pad 11 is attached to the inner side of the protective cover 2, which can buffer the contact pressure between the protective cover 2 and the vacuum gauge body 1, and prevent the protective cover 2 from directly rubbing against the surface of the vacuum gauge body 1. The soft attachment feature can protect the surface of the vacuum gauge body 1 from being scratched by the protective cover 2.
[0022] The inner side of the protective cover 2 is provided with a guide groove 13, and a guide block 14 is slidably connected inside the guide groove 13. The guide block 14 is fixedly installed on the outside of the annular pad 11 to restrict the circumferential rotation of the annular pad 11 and ensure that the through hole 12 on the annular pad 11 is always aligned with the screw hole 9 of the protective cover 2, so that the limit screw 10 can pass through smoothly.
[0023] Both the fixing screw 8 and the limiting screw 10 are fixedly installed with pads 15. The pads 15 are made of soft rubber, which can prevent the screw ends from scratching the surface of the protective cover 2, while also increasing friction and improving the fixing stability.
[0024] Example 1 Select a protective cover 2 that matches the model of the vacuum gauge body 1. Check whether the annular pad 11 fixedly installed inside the protective cover 2 is intact. Then slide the two connecting covers 3 into the protective cover 2 from both ends respectively, ensuring that the connecting covers 3 can slide smoothly along the outside of the protective cover 2 without any jamming. After the pre-installation is completed, put the protective cover 2 on the outside of the vacuum gauge body 1. According to the equipment installation specifications, connect the interfaces at both ends of the vacuum gauge body 1 to the corresponding pipelines or components respectively. After the interface connection is completed, slide the connecting covers 3 at both ends toward the interface of the vacuum gauge body 1, so that the annular cloth 4 at the end of the connecting cover 3 is aligned with the interface connection. Then pull up the annular cloth 4 to completely cover the outside of the interface connection. Next, pull the part of the annular rope 6 located outside the guide rope cloth ring 5, so that the annular rope 6 contracts along the annular trajectory inside the guide rope cloth ring 5 until the opening of the annular cloth 4 is tightened and tightly fits the outer periphery of the interface connection. Finally, tie and fix the annular rope 6 in the tightened state.
[0025] Example 2 After the protective components are fixed, the connecting cover 3 can be positioned by fixing screw 8. Slowly screw the fixing screw 8 into the threaded hole 7 and continue screwing the fixing screw 8 until the soft rubber pad 15 at the end of the screw tightly abuts against the outer wall of the protective cover 2. The position of the connecting cover 3 is fixed by the pressing friction between the pad 15 and the outer wall of the protective cover 2. After tightening, gently pull the connecting cover 3 to confirm that there is no slippage. This prevents it from slipping during equipment operation or transportation and ensures stable protection. If it is necessary to restrict the overall position of the protective cover 2 on the vacuum gauge body 1, it can be achieved by using the limiting screw 10. The limiting screw 10 is slowly screwed into the screw hole 9, and the end of the screw needs to pass through the through hole 12 corresponding to the annular pad 11. Continue to screw it in until the soft rubber pad 15 is tightly pressed against the surface of the vacuum gauge body 1. The axial movement of the protective cover 2 is restricted by the tightening force of the limiting screw 10, which further improves the stability of the protective structure.
[0026] Finally, it should be noted that the above embodiments are merely examples for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.
Claims
1. A vacuum gauge anti-contamination cover, comprising a vacuum gauge body (1), wherein a protective cover (2) is fitted over the outside of the vacuum gauge body (1), characterized in that, Both ends of the protective cover (2) are provided with protective components for shielding the interface connection. Each protective component includes a connecting cover (3), an annular cloth (4), a guide rope cloth ring (5), and an annular rope (6). The connecting cover (3) is slidably connected to the outside of the protective cover (2), the annular cloth (4) is fixedly connected to the end of the connecting cover (3), the guide rope cloth ring (5) is fixedly installed on the outside of the annular cloth (4), and the annular rope (6) is movably connected to the inside of the guide rope cloth ring (5).
2. The vacuum gauge anti-pollution protective cover as described in claim 1, characterized in that, Each of the connecting covers (3) has two threaded holes (7) on its outer side, which are connected to the inner side of the connecting cover (3). Each threaded hole (7) is threaded with a fixing screw (8).
3. The vacuum gauge anti-pollution protective cover as described in claim 1, characterized in that, The outer side of the protective cover (2) has two screw holes (9), which are connected to the inner side of the protective cover (2). Each screw hole (9) is threaded with a limit screw (10).
4. The vacuum gauge anti-pollution protective cover as described in claim 1, characterized in that, The inner side of the protective cover (2) is fitted with an annular pad (11).
5. A vacuum gauge anti-pollution protective cover as described in claim 4, characterized in that, The annular pad (11) has a through hole (12) on one side of each screw hole (9).
6. A vacuum gauge anti-pollution protective cover as described in claim 1, characterized in that, The inner side of the protective cover (2) is provided with a guide groove (13), and a guide block (14) is slidably connected inside the guide groove (13). The guide block (14) is fixedly installed on the outside of the annular pad (11).
7. A vacuum gauge anti-pollution protective cover as described in claim 2, characterized in that, Each of the fixed screws (8) has a pad (15) fixedly installed at its end.
8. A vacuum gauge anti-pollution protective cover as described in claim 3, characterized in that, Each of the limiting screws (10) has a pad (15) fixedly installed at its end.