A differential pressure pressure sensor testing mechanism

Abstract

The utility model discloses a kind of differential pressure pressure sensor testing mechanism, it includes test upper mould and test lower mould, test upper mould includes upper support seat and the test component detachably arranged below the upper support seat, test lower mould includes lower support seat, the upper middle of the lower support seat is provided with test cavity, positioning plate is detachably arranged in the test cavity, a plurality of locating seats are provided on the positioning plate, gas passage is provided on the lower support seat and communicated into the test cavity, the both sides of the lower support seat are provided with the sensing detection piece aligned with the locating seat. The utility model realizes the high-precision, high consistency, high yield and high efficiency of parallel test of differential pressure pressure sensor.

Description

Technical Field

[0001] This utility model belongs to the field of pressure sensor testing technology, and in particular relates to a differential pressure sensor testing mechanism. Background Technology

[0002] Differential pressure sensors are critical components in systems monitoring flow, level, leakage, health status, or process control. With the rapid development of the Internet of Things, smart manufacturing, new energy vehicles, and healthcare, the demand for high-precision, miniaturized, and intelligent differential pressure sensors is experiencing explosive growth. Differential pressure sensors typically measure the tiny difference between two large absolute pressures. This difference itself is very small, and any minute error can significantly amplify the relative error of the measurement result, severely affecting the final physical quantity obtained (such as flow, level, or health signals). Therefore, differential pressure sensors require high testing accuracy. With the rapid development of the semiconductor industry, there is an urgent need to design differential pressure sensor testing mechanisms with high testing accuracy, high stability, and multi-channel parallel testing capabilities.

[0003] In the prior art, Chinese invention application publication number CN111174971A discloses a detection component and pressure sensor calibration device, which includes a first detection station. The first detection station includes a first probe assembly, a first carrier assembly, and a first sealing assembly. The first probe assembly is a differential pressure probe assembly, the first carrier assembly is a differential pressure carrier assembly, and the first sealing assembly is a differential pressure sealing assembly. The differential pressure carrier assembly includes a differential pressure sensor tray containing multiple differential pressure sensor chips. The differential pressure sealing assembly includes multiple air connectors, each corresponding to one of the differential pressure sensor chips. Calibration pressure enters the corresponding differential pressure sensor chip through the air connector. Although this solution can automatically test multiple differential pressure sensors, it still has the following problems: (1) The differential pressure sealing assembly includes multiple air connectors, which correspond one-to-one with the multiple differential pressure sensor chips. That is, each differential pressure sensor chip corresponds to one air connector. The calibration pressure of each differential pressure sensor chip is connected to the external calibration pressure through a separate air connector. There may be inconsistencies in air pressure between multiple air connectors, which cannot guarantee the consistency of the test accuracy of multiple differential pressure sensors in each test. The test accuracy may vary, and the repeatability and stability are poor. (2) The differential pressure carrier assembly includes a carrier plate and a differential pressure sensor box disposed on the carrier plate. The carrier plate includes multiple first receiving holes, each of which corresponds to a differential pressure sensor chip in the differential pressure sensor box. The lower end of the differential pressure sensor chip extends through the first receiving hole toward the differential pressure sealing assembly. In this embodiment, when loading the differential pressure sensor, it is necessary to first position the differential pressure sensor on the differential pressure sensor box, and then position the differential pressure sensor box on the carrier plate so that the lower end of the differential pressure sensor is positioned in the first receiving hole and extends to the differential pressure sealing assembly. The design of the differential pressure sensor box and the multiple first receiving holes makes it difficult to position the differential pressure sensor. Moreover, if the differential pressure sensor is tilted or its position is offset, and the mold is closed directly for testing without detection, it will not only be impossible to test, but may also damage other products, which will not only affect the efficiency of testing, but also reduce the yield of testing.

[0004] Therefore, it is necessary to provide a differential pressure sensor testing mechanism to solve the above-mentioned technical problems. Utility Model Content

[0005] The main objective of this invention is to provide a differential pressure sensor testing mechanism that enables high-precision, high-consistency, high-yield, and high-efficiency parallel testing of differential pressure sensors.

[0006] This utility model achieves the above objective through the following technical solution: a differential pressure sensor testing mechanism, comprising: The test module includes an upper support base and a test component detachably disposed below the upper support base; The test module includes a lower support base, a test cavity is provided in the upper center of the lower support base, a positioning plate is detachably provided in the test cavity, a plurality of positioning seats are provided on the positioning plate, a gas channel is provided on the lower support base to the test cavity, and sensing detection elements aligned with the positioning seats are provided on both sides of the lower support base.

[0007] Furthermore, the test assembly includes a test board and a probe mounting plate detachably disposed at one end of the test board. The test board is provided with a mounting slot for mounting the probe mounting plate, and the probe mounting plate is provided with a plurality of probe groups.

[0008] Furthermore, a first sealing element is provided between the test plate and the upper support base, a first groove for installing the first sealing element is provided on the test plate, and an avoidance groove is provided on the lower surface of the test plate on the outer periphery of the probe mounting plate.

[0009] Furthermore, the lower support is provided with a second sealing element at the edge of the test cavity, and the lower support is provided with a second groove for installing the second sealing element.

[0010] Furthermore, the first air port at one end of the gas channel is located on the side of the lower support, and the second air port at the other end is located inside the test chamber and on the side of the positioning plate.

[0011] Furthermore, the gas channels are provided in a plurality of form and are evenly distributed around the outer periphery of the positioning plate.

[0012] Furthermore, the positioning seat is provided with a positioning groove, and a gas flow groove is provided in the lower middle of the positioning groove. The positioning seat has a first opening and a second opening extending vertically at both ends of the gas flow groove. The first opening, the second opening, the gas flow groove, and the positioning groove are interconnected. The width of the gas flow groove is smaller than the width of the positioning groove.

[0013] Furthermore, the positioning base is provided in several rows, and several sensing detection elements are provided accordingly, with the detection light of the sensing detection elements aligned with the first opening and the second opening.

[0014] Furthermore, both the test plate and the probe mounting plate are detachably mounted on the upper support seat via a first fastener, and the positioning plate is detachably disposed within the test cavity via a second fastener.

[0015] Furthermore, the upper support base is provided with a plurality of positioning pins, and the lower support base is provided with a plurality of positioning holes that cooperate with the positioning pins.

[0016] Compared with existing technologies, the beneficial effects of this differential pressure sensor testing mechanism are as follows: it solves the core problems of poor air pressure consistency, easy product positioning errors, and low equipment versatility in existing technologies, and achieves high-precision, high-consistency, high-yield, and high-efficiency parallel testing of differential pressure sensors. It is particularly suitable for large-scale production testing scenarios in fields such as intelligent manufacturing, new energy vehicles, and medical health, where stringent requirements for testing stability and reliability are present. Specifically: 1. Significantly improved test accuracy and consistency: By setting an L-shaped gas channel through the test chamber in the lower support, the test gas can quickly and evenly fill the entire sealed test chamber after entering from a single gas port. All differential pressure sensors under test are located in the same pressure environment, which fundamentally solves the problem of inconsistent gas pressure between multiple independent gas connectors in the existing technology. This ensures that all differential pressure sensors are subjected to the same calibration pressure, greatly improving the accuracy, consistency, repeatability and stability of multi-channel parallel testing. 2. Efficient unified gas supply and sealing design: The gas channel adopts an L-shaped design and is evenly distributed on the outer periphery of the positioning plate, which optimizes the airflow path and ensures that the pressure in the test chamber is built up quickly and evenly. The upper test module and the lower test module form a reliable static seal through the second seal and the first seal on the test plate. Combined with the conformal fit of the clearance groove, gas leakage is effectively prevented, providing a stable pressure environment for high-precision testing. 3. Reliable pre-positioning detection and damage prevention mechanism: An optical detection path is set under the positioning seat, passing through the first and second openings. Together with the sensing detection components installed on both sides of the support seat, it can perform non-contact in-situ detection of each row of differential pressure sensors before mold closing. If the differential pressure sensor is placed crookedly, tilted, or misaligned, the detection light will be blocked and an alarm will be triggered, thereby avoiding test failure, product damage, or probe damage caused by poor positioning, significantly improving test yield and equipment safety. 4. Enhanced versatility and ease of maintenance: The highly modular design allows for the detachable installation of the test board and probe mounting plate in the upper test module, as well as the positioning plate in the lower test module, all via fasteners. When testing products of different models, sizes, or packaging forms, only the corresponding module components (such as probe mounting plates and positioning plates) need to be replaced, without replacing the entire testing mechanism. This greatly improves the equipment's versatility and adaptability, and reduces changeover costs and time. 5. Optimized product positioning and gas path design: The positioning groove, gas flow groove and the first and second openings in the positioning seat form a continuous limiting and gas guiding channel. This design not only makes the differential pressure sensor stable, but also ensures that the test gas can directly and effectively act on the sensing area of ​​the differential pressure sensor chip, improving the accuracy and efficiency of the test response. 6. Precise mold alignment: By setting positioning pins and positioning holes on the upper and lower support bases respectively, the precise alignment of the upper and lower modules is ensured each time the mold is closed, further ensuring the reliability of the contact between the probe and the differential pressure sensor pin and the integrity of the seal, providing a foundation for highly repeatable automated testing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the differential pressure sensor testing mechanism according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the test module in an embodiment of this utility model; Figure 3 This is a schematic diagram of the structure of the test component in an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the test module in an embodiment of this utility model; Figure 5This is a schematic diagram of the structure of multiple positioning seats in an embodiment of the present utility model; The numbers in the diagram represent: 100 - Differential pressure sensor testing mechanism; 200 - Differential pressure sensor; 1-Test upper module, 11-Upper support base, 111-Positioning pin, 12-Test component, 122-Test board, 123-Mounting slot, 124-Probe mounting plate, 125-Probe group, 126-First seal, 127-First groove, 128-First fastener, 129-Allowing groove; 2-Test lower module, 21-Lower support, 211-Positioning hole, 212-Second groove, 22-Test chamber, 23-Positioning plate, 231-Second fastener, 24-Positioning seat, 241-Positioning groove, 242-Gas flow groove, 243-First opening, 244-Second opening, 25-First air port, 26-Second air port, 27-Second seal, 28-Sensing detection element, 281-Detection light. Detailed Implementation

[0018] Please refer to Figures 1-5 This embodiment is a differential pressure sensor testing mechanism 100, which includes: The test module 1 includes an upper support base 11 and a test component 12 detachably disposed below the upper support base 11; The test module 2 includes a lower support base 21, a test cavity 22 is provided in the middle of the upper part of the lower support base 21, a positioning plate 23 is detachably provided in the test cavity 22, a plurality of positioning seats 24 are provided on the positioning plate 23, a gas channel is provided on the lower support base 21 to the test cavity 22, and sensing detection elements 28 aligned with the positioning seats 24 are provided on both sides of the lower support base 21.

[0019] The test assembly 12 includes a test plate 122 and a probe mounting plate 124 detachably mounted on one end of the test plate 122. The test plate 122 has a mounting slot 123 for mounting the probe mounting plate 124. The probe mounting plate 124 has several probe groups 125, each containing several probes. Each probe group 125 corresponds to a positioning seat 24, and each positioning seat 24 houses a differential pressure sensor 200. Both the test plate 122 and the probe mounting plate 124 are detachably mounted on the upper support base 11 using a first fastener 128 to accommodate products of different models and sizes. The probe mounting plate 124 is detachably mounted on the test plate 122, allowing for easy replacement of products of different sizes but with consistent testing requirements. The corresponding probe mounting plate 124 can be directly removed and installed to continue testing.

[0020] Because the test plate 122 is provided with a mounting groove 123, in order to prevent gas from leaking through the mounting groove 123 from the gap between the test plate 122 and the upper support base 11 during testing, a first sealing element 126 is provided between the test plate 122 and the upper support base 11, and a first groove 127 for installing the first sealing element 126 is provided on the test plate 122. An avoidance groove 129 is provided on the lower surface of the test plate 122 around the probe mounting plate 124 to facilitate conformal fitting with the lower test module 2 to achieve a seal and ensure airtightness.

[0021] The positioning plate 23 is detachably installed in the test chamber 22 by the second fastener 231, so that when changing products of different sizes or models, different test components 12 and positioning plates 23 can be replaced accordingly, thereby improving the versatility of the test mechanism.

[0022] The lower support 21 is provided with a second sealing element 27 at the edge of the test cavity 22 to ensure the sealing effect when the upper test module 1 and the lower test module 2 are closed. The lower support 21 is provided with a second groove 212 for installing the second sealing element 27.

[0023] A first air port 25 at one end of the gas channel is located on the side of the lower support 21, and a second air port 26 at the other end is located inside the test chamber 22 and on the side of the positioning plate 23. The gas channel extends horizontally from the first air port 25 and vertically upwards into the test chamber 22, forming an L-shaped gas channel. During testing, gas enters the gas channel through the first air port 25 and then enters the test chamber 22 through the second air port 26. After the upper test module 1 and the lower test module 2 are closed and sealed, the gas evenly fills the entire test chamber 22. Several positioning seats 24 are located within the test chamber 22, ensuring that the gas pressure at the several differential pressure sensors 200 remains consistent, thereby guaranteeing the consistency of the testing accuracy of the several differential pressure sensors 200 within the entire test chamber 22.

[0024] Several gas channels are evenly distributed around the outer periphery of the positioning plate 23, ensuring that the gas can quickly fill the test chamber 22 and that the gas uniformity within the test chamber 22 is maintained. In this embodiment, the gas channels are located on the same side of the lower support 21. In other embodiments, gas channels may be added on the other side of the support 21. The specific number and location of the gas channels can be set according to the actual situation and are not limited here.

[0025] The positioning base 24 is provided with a positioning groove 241 for positioning the differential pressure sensor 200. A gas flow groove 242 is provided in the lower middle of the positioning groove 241. The positioning base 24 has a first opening 243 and a second opening 244 extending vertically at both ends of the gas flow groove 242. The first opening 243, the second opening 244, the gas flow groove 242, and the positioning groove 241 are interconnected. When positioning the differential pressure sensor 200, the side of the differential pressure sensor 200 with the pins facing up and the side with the chip facing down is positioned at the bottom of the positioning groove 241. The width of the gas flow groove 242 is smaller than the width of the positioning groove 241 so that the bottom of the positioning groove 241 can support the differential pressure sensor 200. The gas entering the test chamber 22 enters the gas flow groove 242 through the first opening 243 and the second opening 244, and then flows into the chip of the differential pressure sensor 200 through the gas flow groove 242, which facilitates pressure testing.

[0026] The positioning base 24 is arranged in several rows, and the sensing elements 28 are arranged in corresponding rows. The detection light beam 281 of the sensing elements 28 is aligned with the first opening 243 and the second opening 244. When the differential pressure sensor 200 is accurately positioned in the positioning groove 241, the detection light beam 281 of the sensing element 28 passes through the upper surface of the differential pressure sensor 200 without any obstruction. It is then determined that the differential pressure sensors 200 in that row are all accurately positioned. If the detection light beam 281 is obstructed, for example, if one or more differential pressure sensors 200 in that row are offset or tilted upwards and block the detection light beam 281, it is determined that there is a differential pressure sensor 200 in that row that is not completely positioned in the positioning groove 241. An alarm will be triggered to prompt the staff to confirm the test and avoid affecting the test accuracy or damaging the product.

[0027] The upper support base 11 is provided with several positioning pins 111, and the lower support base 21 is provided with several positioning holes 211 that cooperate with the positioning pins 111, so as to ensure the accuracy of mold closing positioning of the upper test module 1 and the lower test module 2.

[0028] When using the differential pressure sensor testing mechanism 100 provided in this solution, the differential pressure sensor 200 is first positioned in the positioning groove 241, with the side of the differential pressure sensor 200 with the pins facing up and the side with the chip facing down, positioned at the bottom of the positioning groove 241. Several sensing elements 28 simultaneously detect whether the differential pressure sensors 200 in the corresponding row are accurately positioned. If there is an abnormality, an alarm is triggered. If the positioning is accurate, the mold closing action begins. The driving element drives the upper test module 1 to move down, and the lower test module 2 descends to meet the lower test module. The module 2 achieves sealing through conformal fitting. At the same time, several probe groups 125 are in contact with the pins of several differential pressure sensors 200. Gas enters the gas channel from the first gas port 25 and then enters the test chamber 22 through the second gas port 26. The gas entering the test chamber 22 enters the gas flow channel 242 through the first opening 243 and the second opening 244. Then the gas flows into the chip of the differential pressure sensor 200 through the gas flow channel 242. At the same time, the test board 122 is powered on to perform differential pressure testing.

[0029] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A differential pressure sensor testing mechanism, characterized in that, It includes: The test module includes an upper support base and a test component detachably disposed below the upper support base; The test module includes a lower support base, a test cavity is provided in the upper center of the lower support base, a positioning plate is detachably provided in the test cavity, a plurality of positioning seats are provided on the positioning plate, a gas channel is provided on the lower support base to the test cavity, and sensing detection elements aligned with the positioning seats are provided on both sides of the lower support base.

2. The differential pressure sensor testing mechanism as described in claim 1, characterized in that: The test assembly includes a test board and a probe mounting plate detachably disposed at one end of the test board. The test board is provided with a mounting slot for mounting the probe mounting plate, and the probe mounting plate is provided with a plurality of probe groups.

3. The differential pressure sensor testing mechanism as described in claim 2, characterized in that: A first sealing element is provided between the test plate and the upper support base. A first groove for installing the first sealing element is provided on the test plate. An avoidance groove is provided on the lower surface of the test plate on the outer periphery of the probe mounting plate.

4. The differential pressure sensor testing mechanism as described in claim 1, characterized in that: The lower support is provided with a second sealing element at the edge of the test chamber, and a second groove for installing the second sealing element is provided on the lower support.

5. The differential pressure sensor testing mechanism as described in claim 1, characterized in that: The first air port at one end of the gas channel is located on the side of the lower support, and the second air port at the other end is located inside the test chamber and on the side of the positioning plate.

6. The differential pressure sensor testing mechanism as described in claim 5, characterized in that: The gas channels are provided in several places and are evenly distributed on the outer periphery of the positioning plate.

7. The differential pressure sensor testing mechanism as described in claim 1, characterized in that: The positioning seat is provided with a positioning groove, and a gas flow groove is provided in the lower middle of the positioning groove. The positioning seat has a first opening and a second opening extending vertically at both ends of the gas flow groove. The first opening, the second opening, the gas flow groove, and the positioning groove are interconnected. The width of the gas flow groove is smaller than the width of the positioning groove.

8. The differential pressure sensor testing mechanism as described in claim 7, characterized in that: The positioning base is arranged in several rows, and the sensing detection element is arranged in several corresponding rows, with the detection light of the sensing detection element aligned with the first opening and the second opening.

9. A differential pressure sensor testing mechanism as described in claim 2, characterized in that: Both the test plate and the probe mounting plate are detachably mounted on the upper support base by a first fastener, and the positioning plate is detachably disposed inside the test cavity by a second fastener.

10. A differential pressure sensor testing mechanism as described in claim 1, characterized in that: The upper support base is provided with a number of positioning pins, and the lower support base is provided with a number of positioning holes that cooperate with the positioning pins.

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