Movable sampling and testing integrated cabinet

Abstract

The utility model relates to sampling test integrated cabinet technical field, concretely is a movable sampling test integrated cabinet, including mobile cabinet body, two baffle are fixedly connected in mobile cabinet body, through two baffle will be divided into three chambers in mobile cabinet body, located the top chamber is provided with rotary telescopic support, ion chromatograph and sampling mechanism, the top fixedly connected with fixed support in middle chamber, the fixed support is provided with sampling tube in, the top of sampling tube is located in the upper chamber. In the utility model, the rotary telescopic support is extended to the outside of mobile cabinet body, and the rotary telescopic support is convenient for people to sample outside the mobile cabinet body, so that physical isolation is realized when sampling, and one person can operate when sampling, so that the risk of splashing liquid on personnel is avoided, and the error of sampling amount is reduced as far as possible.

Description

Technical Field

[0001] This utility model relates to the technical field of integrated sampling and testing cabinets, specifically a mobile integrated sampling and testing cabinet. Background Technology

[0002] The manufacturing of semiconductors and display panels involves hundreds of processes, such as cleaning, etching, developing, resist removal, and chemical mechanical polishing. These processes all rely on high-purity chemicals and precise process parameters. For example, etching and developing processes require etching solutions and developing solutions. During continuous production, the effective components of etching solutions and developing solutions can change due to consumption, volatilization, or contamination. Low concentrations can lead to insufficient process capabilities, while high concentrations may cause over-reaction. Therefore, it is necessary to regularly sample and test etching solutions or developing solutions.

[0003] Currently, during the sampling process, multiple tests are required for the liquid. Therefore, the sampled liquid is then sampled again multiple times in quantitative amounts. However, during the secondary sampling, one person needs to hold the sampling tube and sampling container while another person operates the button. This leads to poor coordination among personnel, overflow of the sampling tube, and risk of liquid splashing and injury. Furthermore, there is a risk of personnel being splashed with the liquid during the testing process. Although quantitative sampling can be carried out using a syringe pump, liquid residue remains in the tube, resulting in insufficient sample volume and inaccurate liquid test results. Utility Model Content

[0004] The purpose of this invention is to provide a mobile sampling and testing integrated cabinet to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A mobile sampling and testing integrated cabinet includes a mobile cabinet body. Two partitions are fixedly connected inside the mobile cabinet body, dividing the mobile cabinet body into three chambers through the two partitions. A rotating telescopic support, an ion chromatograph and a sampling mechanism are installed in the uppermost chamber. A fixed support is fixedly connected to the top of the middle chamber, and a sampling tube is installed in the fixed support, with the top of the sampling tube located in the upper chamber.

[0007] The sampling mechanism includes an injection pump located in the upper chamber. The output end of the injection pump is fixedly connected to an outlet pipe, and the input end of the injection pump is fixedly connected to an inlet pipe that is detachably connected to the sampling tube. A three-way pipe is fixedly connected to the outside of the outlet pipe and close to the output end of the injection pump. One end of the three-way pipe is fixedly connected to a rigid pipe that extends to the outside of the movable cabinet. A solenoid valve is installed on the outside of the rigid pipe.

[0008] Furthermore, a stabilizing frame for supporting the rigid tube is fixedly connected to the top of the central chamber.

[0009] Furthermore, the top of the sampling tube is fixedly connected to a connector that plugs into the inlet tube.

[0010] Furthermore, both sides of the movable cabinet are hinged with cabinet doors, and a control panel is installed on the side of one of the cabinet doors.

[0011] Furthermore, a support frame is fixedly connected to the sampling tube at the bottom of the central chamber, and a fixing mechanism for fixing the container containing the liquid to be tested is provided on both sides of the top of the support frame.

[0012] Furthermore, a support frame is fixedly connected to the bottom of the central chamber, a pad is fixedly connected to the top of the support frame away from the support frame, and an ultrasonic cleaner is installed on the top of the pad.

[0013] Furthermore, a drain pipe is fixed through the top of the lower chamber, and a liquid receiving tank is installed inside the lower chamber.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] 1. The liquid outlet tube is extended to the outside of the mobile cabinet by rotating and telescopic bracket. The rotation and extension of the rotating and telescopic bracket makes it easy for people to take samples from the outside of the mobile cabinet, thus achieving physical isolation during sampling. Moreover, sampling can be operated by one person, avoiding the risk of overflowing sample tubes and splashing medicine due to poor coordination among personnel. In addition, the combination of three-way tube and solenoid valve can drain the residual liquid in the liquid outlet tube, minimizing the error of each sampling amount.

[0016] 2. The stability of the rigid tube can be increased by the stabilizing frame. The two fixing mechanisms on the support frame can fix the container containing the liquid to be tested, preventing the container from shifting and detaching from the sampling tube due to vibration generated when the equipment inside the moving cabinet is working. The cabinet door can isolate the liquid to be tested from personnel, and the support frame can raise the container to prevent the container from coming into contact with the waste liquid after cleaning the test tube. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the internal structure of the cabinet in this utility model;

[0019] Figure 3 This is a schematic diagram of the interior of the cabinet in this utility model;

[0020] Figure 4This is a schematic diagram of the sampling mechanism in this utility model.

[0021] In the diagram: 1. Movable cabinet; 11. Partition; 12. Rotating telescopic bracket; 13. Fixed bracket; 14. Stabilizer; 15. Support frame; 16. Support frame; 17. Pad; 18. Cabinet door; 19. Control panel; 2. Ion chromatograph; 3. Sampling mechanism; 31. Injection pump; 32. Discharge pipe; 33. Inlet pipe; 34. T-connector; 35. Solenoid valve; 36. Rigid pipe; 4. Ultrasonic cleaner; 5. Liquid receiving tank. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1 - Figure 4 In this embodiment of the present invention, a movable sampling and testing integrated cabinet includes a movable cabinet 1. Two partitions 11 are fixedly connected inside the movable cabinet 1, dividing the movable cabinet 1 into three chambers. A rotating telescopic support 12, an ion chromatograph 2, and a sampling mechanism 3 are arranged in the uppermost chamber. A fixed support 13 is fixedly connected to the top of the middle chamber, and a sampling tube is arranged inside the fixed support 13. The top of the sampling tube is located in the upper chamber. The sampling mechanism 3 includes an injection pump 31 arranged in the upper chamber. An outlet pipe 32 is fixedly connected to the output end of the injection pump 31. An inlet pipe 33, which is detachably connected to the sampling tube, is fixedly connected to the input end of the injection pump 31. A three-way pipe 34 is fixedly connected to the outside of the outlet pipe 32 and close to the output end of the injection pump 31. A rigid pipe 36 extending to the outside of the movable cabinet 1 is fixedly connected to one end of the three-way pipe 34. A solenoid valve 35 is arranged on the outside of the rigid pipe 36.

[0024] Specifically, first, connect the inlet pipe 33 to the sampling tube, and extend the outlet pipe 32 out of the movable cabinet 1 and fix it on the rotating telescopic bracket 12 (the outlet pipe 32 is a flexible tube). Then, take out a portion of the etching solution or developing solution using a container, and place the container containing the etching solution or developing solution in the middle chamber, below the sampling tube. Driven by the syringe pump 31, the liquid in the container can be drawn into the outlet pipe 32, and the extracted liquid can be collected using a test tube. Since the syringe pump 31 is controlled by a stepper motor, the liquid output can be precisely controlled. (The syringe pump 31 is existing technology, and its specific working principle will not be elaborated here.) However, part of the outlet pipe 32 is located in the upper chamber, and one end of the rotating telescopic bracket 12 is located outside the movable cabinet 1. Therefore, some liquid will remain in the outlet pipe 32 located in the upper chamber. At this time, when the syringe pump 31 stops working, the test tube can be placed below the outlet of the rigid tube 36. When the solenoid valve 35 is opened, the residual liquid in the outlet tube 32 flows into the test tube under its own gravity, ensuring that as much of the quantitatively extracted liquid as possible flows into the test tube. Then, the liquid in the test tube is subjected to concentration testing by the ion chromatograph 2 (the ion chromatograph 2 is existing technology and will not be described in detail here; additional testing equipment can be added to the upper chamber according to the needs of liquid testing, such as testing the content of impurities in the liquid). The device extends the outlet tube 32 to the outside of the mobile cabinet 1 through the rotating telescopic bracket 12. The rotation and extension of the rotating telescopic bracket 12 facilitates sampling from the outside of the mobile cabinet 1, thus achieving physical isolation during sampling. Sampling can be operated by a single person, avoiding the risk of overflowing test tubes due to poor coordination, which could lead to personnel splashing liquid. Furthermore, the residual liquid in the outlet tube 32 can be discharged through the cooperation of the three-way pipe 34 and the solenoid valve 35, minimizing the error in the sampling amount each time.

[0025] Example 1

[0026] like Figure 2 and Figure 3 As shown, in this embodiment, a support frame 16 is fixedly connected to the bottom of the middle chamber, a pad 17 is fixedly connected to the top of the support frame 16 and away from the support frame 15, an ultrasonic cleaner 4 is provided on the top of the pad 17, a drain pipe is fixedly connected through the top of the lower chamber, and a liquid receiving tank 5 is provided inside the lower chamber.

[0027] In this embodiment, the liquid receiving tank 5 is placed in the lower chamber, cleaning fluid is added to the ultrasonic cleaner 4, and then the test tube is placed in the ultrasonic cleaner 4 to clean the test tube (the ultrasonic cleaner 4 is existing technology and will not be described in detail here). The waste liquid after cleaning can be discharged through a pipe between the support frame 16 and the lower partition 11, and then discharged into the liquid receiving tank 5 through a drain pipe.

[0028] Example 2

[0029] like Figure 2 and Figure 3 As shown, in this embodiment, a stabilizing frame 14 for supporting the rigid tube 36 is fixedly connected to the top of the central chamber. A connector for inserting into the liquid inlet tube 33 is fixedly connected to the top of the sampling tube. Cabinet doors 18 are hinged on both sides of the movable cabinet 1. A control panel 19 is provided on the side of one of the cabinet doors 18. A support frame 15 is fixedly connected to the bottom of the central chamber corresponding to the sampling tube. Fixing mechanisms for fixing containers containing the liquid to be tested are provided on both sides of the top of the support frame 15.

[0030] In this embodiment, a control panel 19 is installed on one of the cabinet doors 18. The control panel 19 can control the opening and closing of the ion chromatograph 2, the syringe pump 31, the solenoid valve 35, and the ultrasonic cleaner 4. The stability of the rigid tube 36 can be increased by the stabilizing frame 14. The two fixing mechanisms on the support frame 15 can fix the container containing the liquid to be tested, preventing the container from shifting and detaching from the sampling tube due to vibrations generated when the equipment inside the moving cabinet 1 is working. The cabinet door 18 can isolate the liquid to be tested from personnel, and the support frame 15 can raise the container to prevent the container from contacting the waste liquid after cleaning the test tube.

[0031] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0032] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A movable sampling and testing integrated cabinet, comprising a movable cabinet body (1), characterized in that, The mobile cabinet (1) is fixedly connected to two partitions (11), which divide the mobile cabinet (1) into three chambers. The uppermost chamber is equipped with a rotating telescopic bracket (12), an ion chromatograph (2), and a sampling mechanism (3). The middle chamber is fixedly connected to a fixed bracket (13), which is equipped with a sampling tube. The top of the sampling tube is located in the upper chamber. The sampling mechanism (3) includes an injection pump (31) installed in the upper chamber. The output end of the injection pump (31) is fixedly connected to an outlet pipe (32). The input end of the injection pump (31) is fixedly connected to an inlet pipe (33) that is detachably connected to the sampling tube. A three-way pipe (34) is fixedly connected to the outside of the outlet pipe (32) and close to the output end of the injection pump (31). One end of the three-way pipe (34) is fixedly connected to a rigid pipe (36) extending to the outside of the movable cabinet (1). A solenoid valve (35) is installed on the outside of the rigid pipe (36).

2. The movable sampling and testing integrated cabinet according to claim 1, characterized in that, A stabilizing frame (14) for supporting the rigid tube (36) is fixedly connected to the top of the central chamber.

3. The movable sampling and testing integrated cabinet according to claim 2, characterized in that, The top of the sampling tube is fixedly connected to a connector that plugs into the inlet tube (33).

4. The movable sampling and testing integrated cabinet according to claim 3, characterized in that, The movable cabinet (1) has cabinet doors (18) hinged on both sides, and a control panel (19) is installed on the side of one of the cabinet doors (18).

5. The movable sampling and testing integrated cabinet according to claim 4, characterized in that, A support frame (15) is fixedly connected to the bottom of the middle chamber corresponding to the sampling tube. The top two sides of the support frame (15) are provided with fixing mechanisms for fixing the container containing the liquid to be tested.

6. The movable sampling and testing integrated cabinet according to claim 5, characterized in that, A support frame (16) is fixedly connected to the bottom of the middle chamber. A pad (17) is fixedly connected to the top of the support frame (16) away from the support frame (15). An ultrasonic cleaner (4) is installed on the top of the pad (17).

7. The movable sampling and testing integrated cabinet according to claim 6, characterized in that, A drain pipe is fixed through the top of the lower chamber, and a liquid receiving tank (5) is installed inside the lower chamber.

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