Dual-position galvanometer switching device and laser confocal scanning microscope

Abstract

The utility model discloses a kind of double-station galvanometer switching device and laser confocal scanning microscope, wherein, double-station galvanometer switching device includes: low-speed galvanometer group;High-speed galvanometer group;Scan lens group;First reflection switching mechanism has first zero and first reflection position, for when first zero makes laser beam directly enter the low-speed galvanometer group, or when first reflection position, laser beam is reflected to the high-speed galvanometer group;And, second reflection switching mechanism has second zero and second reflection position, for when second zero makes laser beam from the low-speed galvanometer group enter the scan lens group, or when second reflection position, reflected laser beam from the high-speed galvanometer group is emitted and enters the scan lens group.The utility model has realized the switching of low-speed scanning function and high-speed scanning function, completed the integration of low-speed scanning function and high-speed scanning function in the limited space of same instrument, expand the application range of instrument.

Description

Technical Field

[0001] This utility model relates to the field of microscope technology, and in particular to a dual-station galvanometer switching device and a laser confocal scanning microscope. Background Technology

[0002] In the imaging process of laser confocal microscopy, for dynamic processes that need to be captured quickly, such as rapid physiological changes in living cells, high-speed galvanometers are used for rapid line scanning, which can complete the acquisition of a line of images in a short time; while low-speed galvanometers are used for frame scanning. Although the speed is slow, it can ensure that after each line of scanning is completed, there is enough time for positioning and adjustment of the next line, thereby achieving stable acquisition of the entire image.

[0003] Most confocal products only have one of the functions: low-speed scanning or high-speed scanning. As application scenarios become more diversified, how to make the instrument compatible with both low-speed and high-speed scanning functions has become an urgent problem to be solved. Utility Model Content

[0004] In order to overcome the shortcomings of the existing technology, the purpose of this utility model is to provide a dual-station galvanometer switching device and a laser confocal scanning microscope, which has the advantage of simultaneously possessing low-speed scanning and high-speed scanning functions.

[0005] The objective of this utility model is achieved through the following technical solution: According to a first aspect of the present disclosure, a dual-station galvanometer switching device is provided, comprising: The low-speed galvanometer assembly is used to achieve low-speed scanning functionality; High-speed galvanometer assembly, used to achieve high-speed scanning function; A scanning lens group, in conjunction with a low-speed or high-speed galvanometer group, is used to receive the laser beam; A first reflection switching mechanism, having a first zero position and a first reflection position, is used to allow the laser beam to directly enter the low-speed galvanometer group when in the first zero position, or to reflect the laser beam to the high-speed galvanometer group when in the first reflection position; and... The second reflection switching mechanism has a second zero position and a second reflection position, which is used to allow the laser beam to enter the scanning lens group from the low-speed galvanometer group when the laser beam is in the second zero position, or to reflect the laser beam emitted from the high-speed galvanometer group and enter the scanning lens group when the laser beam is in the second reflection position.

[0006] To achieve the above technical solution, when low-speed scanning is required, the first reflection switching mechanism is controlled at the first zero position and the second reflection switching mechanism is controlled at the second zero position. The laser beam emitted by the laser directly enters the low-speed galvanometer group, and after being deflected by the low-speed galvanometer group, it enters the scanning lens group, thus realizing the low-speed scanning function. When high-speed scanning is required, the first reflection switching mechanism is controlled at the first reflection position and the second reflection switching mechanism is controlled at the second reflection position. The laser beam emitted by the laser enters the reflection position of the first reflection switching mechanism, and after reflection, the laser beam enters the high-speed galvanometer group. After being deflected by the high-speed galvanometer group, it enters the reflection position of the second reflection switching mechanism, and after reflection, the laser beam enters the scanning lens group, thus realizing the high-speed scanning function. By switching between the first and second reflection switching mechanisms, the low-speed and high-speed scanning functions are switched, integrating the low-speed and high-speed scanning functions within the limited space of the same instrument, thus expanding the applicability of the instrument.

[0007] In some exemplary embodiments, the low-speed galvanometer assembly includes: Low-speed galvanometer mount; A first low-speed galvanometer, mounted on the low-speed galvanometer mount, for receiving the laser beam; and, A second low-speed galvanometer, mounted on the low-speed galvanometer mount, is used to reflect the laser beam emitted from the first low-speed galvanometer to the scanning lens group.

[0008] To achieve the above technical solution, the low-speed galvanometer mount is used as the mounting base for the first and second low-speed galvanometers. After the laser beam enters the center of the photosensitive surface of the first low-speed galvanometer, it will be reflected into the center of the photosensitive surface of the second low-speed galvanometer, and finally deflected and shot into the scanning lens group.

[0009] In some exemplary embodiments, the high-speed galvanometer assembly includes: High-speed galvanometer mount; A first high-speed galvanometer, mounted on the high-speed galvanometer mount, is used to receive the laser beam reflected from the first reflection switching mechanism; and, The second high-speed galvanometer, which is mounted on the low-speed galvanometer mount and corresponds to the first high-speed galvanometer, is used to receive the laser beam reflected from the first high-speed galvanometer and reflect it to the second reflection switching mechanism.

[0010] To achieve the above technical solution, the high-speed galvanometer mount is used as the mounting base for the first high-speed galvanometer and the second high-speed galvanometer. After being reflected by the first reflection switching mechanism, the laser beam enters the center of the photosensitive surface of the first high-speed galvanometer, then is reflected into the center of the photosensitive surface of the second high-speed galvanometer, and finally deflected into the second reflection switching mechanism in the scanning lens group.

[0011] In some exemplary embodiments, the first reflection switching mechanism includes: First substrate; A first reflective mount for mounting a first reflector, which is slidably assembled onto the first substrate; and, A first switching drive component, which is connected to the first reflector, is used to drive the first reflector to reciprocate between the first zero position and the first reflector position.

[0012] To achieve the above technical solution, the first reflector is driven to reciprocate between the first zero position and the first reflection position by the first switching drive component. When the first reflector is in the first reflection position, the laser beam emitted from the laser can be reflected by the first reflector.

[0013] In some exemplary embodiments, the second reflection switching mechanism includes: Second substrate; A second reflector mount for mounting a second reflector is slidably assembled onto the second substrate; and, A second switching drive component, which is connected to the second reflector, is used to drive the second reflector to reciprocate between the second zero position and the second reflector position.

[0014] To achieve the above technical solution, the second reflector is driven to reciprocate between the second zero position and the second reflection position by the second switching drive component. When the second reflector is in the second reflection position, the laser beam deflected by the high-speed galvanometer group can be reflected by the second reflector.

[0015] In some exemplary embodiments, the first switching drive component and the second switching drive component are selected individually or in combination from the following structures: cylinder, electric cylinder or lead screw drive mechanism.

[0016] In some exemplary embodiments, the first reflector is connected to a first zero-position baffle, and a first photoelectric sensor is provided on the first substrate. When the first photoelectric sensor detects the first zero-position baffle, the first reflector is located at the first zero position.

[0017] To achieve the above technical solution, the zero-position calibration of the first reflector is realized through the first zero-position baffle and the first photoelectric sensor.

[0018] In some exemplary embodiments, the second reflector is connected to a second zero-position baffle, and a second photoelectric sensor is provided on the second substrate. When the second photoelectric sensor detects the second zero-position baffle, the second reflector is located at the second zero position.

[0019] To achieve the above technical solution, the second zero-position baffle and the second photoelectric sensor are used to achieve zero-position calibration of the second reflector.

[0020] In some exemplary embodiments, the first low-speed oscillating mirror, the second low-speed oscillating mirror, and the second high-speed oscillating mirror are Galvano oscillating mirrors, and the first high-speed oscillating mirror is a resonant oscillating mirror.

[0021] According to a second aspect of the present disclosure, a laser confocal scanning microscope is provided, including a dual-station galvanometer switching device as described in the first aspect.

[0022] In summary, compared with the prior art, this utility model has the following beneficial effects: This utility model provides a dual-station galvanometer switching device and a laser confocal scanning microscope. The dual-station galvanometer switching device includes: a low-speed galvanometer group for low-speed scanning; a high-speed galvanometer group for high-speed scanning; a scanning lens group that cooperates with the low-speed or high-speed galvanometer group to receive a laser beam; a first reflection switching mechanism having a first zero position and a first reflection position, for allowing the laser beam to directly enter the low-speed galvanometer group in the first zero position, or reflecting the laser beam to the high-speed galvanometer group in the first reflection position; and a second reflection switching mechanism having a second zero position and a second reflection position, for allowing the laser beam to enter the scanning lens group from the low-speed galvanometer group in the second zero position, or reflecting the laser beam emitted from the high-speed galvanometer group and entering the scanning lens group in the second reflection position. When low-speed scanning is required, the first reflection switching mechanism is controlled at the first zero position and the second reflection switching mechanism is controlled at the second zero position. The laser beam emitted by the laser directly enters the low-speed galvanometer group, and after being deflected by the low-speed galvanometer group, it enters the scanning lens group, thus realizing the low-speed scanning function. When high-speed scanning is required, the first reflection switching mechanism is controlled at the first reflection position and the second reflection switching mechanism is controlled at the second reflection position. The laser beam emitted by the laser enters the reflection position of the first reflection switching mechanism, and after reflection, the laser beam enters the high-speed galvanometer group. After being deflected by the high-speed galvanometer group, it enters the reflection position of the second reflection switching mechanism, and after reflection, the laser beam enters the scanning lens group, thus realizing the high-speed scanning function. By switching between the first and second reflection switching mechanisms, the low-speed and high-speed scanning functions are switched, integrating the low-speed and high-speed scanning functions within the limited space of the same instrument, thus expanding the applicability of the instrument. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the dual-station galvanometer switching device in an embodiment of this utility model.

[0024] Figure 2 This is a schematic diagram of the low-speed galvanometer assembly in an embodiment of the present invention.

[0025] Figure 3This is a schematic diagram of the high-speed galvanometer group and scanning lens group in an embodiment of this utility model.

[0026] Figure 4 This is a schematic diagram of the structure of the first reflection switching mechanism in an embodiment of this utility model.

[0027] Figure 5 This is a schematic diagram of the structure of the second reflection switching mechanism in an embodiment of this utility model.

[0028] The numbers and letters in the diagram represent the names of the corresponding components: 10. Low-speed galvanometer assembly; 11. Low-speed galvanometer mount; 12. First low-speed galvanometer; 13. Second low-speed galvanometer; 20. High-speed galvanometer assembly; 21. High-speed galvanometer mount; 22. First high-speed galvanometer; 23. Second high-speed galvanometer; 30. Scanning lens assembly; 40. First reflection switching mechanism; 41. First substrate; 411. Bearing seat; 412. Motor mounting plate; 413. Slide rail assembly; 42. First reflector mount; 43. First switching drive assembly; 431. Drive motor; 432. Coupling; 433. Ball screw; 434. Screw nut; 44. First zero-position baffle; 45. First photoelectric sensor; 50. Second reflection switching mechanism; 51. Second substrate; 52. Second reflector mount; 53. Second switching drive assembly; 54. Second zero-position baffle; 55. Second photoelectric sensor. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] like Figures 1 to 5 As shown, a first aspect of this utility model provides a dual-station galvanometer switching device, comprising: a low-speed galvanometer group 10 for realizing a low-speed scanning function; a high-speed galvanometer group 20 for realizing a high-speed scanning function; a scanning lens group 30, which cooperates with the low-speed galvanometer group 10 or the high-speed galvanometer group 20 to receive a laser beam; a first reflection switching mechanism 40 having a first zero position and a first reflection position, for directly injecting the laser beam into the low-speed galvanometer group 10 when in the first zero position, or reflecting the laser beam to the high-speed galvanometer group 20 when in the first reflection position; and a second reflection switching mechanism 50 having a second zero position and a second reflection position, for injecting the laser beam from the low-speed galvanometer group 10 into the scanning lens group 30 when in the second zero position, or reflecting the laser beam emitted from the high-speed galvanometer group 20 and injecting it into the scanning lens group 30 when in the second reflection position.

[0031] Specifically, the low-speed galvanometer assembly 10 includes: a low-speed galvanometer mount 11; a first low-speed galvanometer 12 mounted on the low-speed galvanometer mount 11 for receiving the laser beam; and a second low-speed galvanometer 13 mounted on the low-speed galvanometer mount 11 for reflecting the laser beam emitted from the first low-speed galvanometer 12 to the scanning lens assembly 30. The first low-speed galvanometer 12 and the second low-speed galvanometer 13 are both Galvano galvanometers. The first low-speed galvanometer 12 and the second low-speed galvanometer 13 are arranged vertically aligned. The tilt angle of the first low-speed galvanometer 12 and the second low-speed galvanometer 13 can be set according to actual needs, for example, 45°. The low-speed galvanometer base 11 is provided with mounting slots for clamping and fixing the first low-speed galvanometer 12 and the second low-speed galvanometer 13. The first low-speed galvanometer 12 and the second low-speed galvanometer 13 are clamped and fixed by tightening the bolts at the opening of the mounting slots. The photosensitive surfaces of the first low-speed galvanometer 12 and the second low-speed galvanometer 13 correspond to the scanning lens group 30. The low-speed galvanometer base 11 is used as the mounting base for the first low-speed galvanometer 12 and the second low-speed galvanometer 13. After the laser beam enters the center of the photosensitive surface of the first low-speed galvanometer 12, it will be reflected into the center of the photosensitive surface of the second low-speed galvanometer 13 and finally deflected into the scanning lens group 30.

[0032] The high-speed galvanometer assembly 20 includes: a high-speed galvanometer mount 21; a first high-speed galvanometer 22 mounted on the high-speed galvanometer mount 21 for receiving laser beams reflected from the first reflection switching mechanism 40; and a second high-speed galvanometer 23 mounted on the low-speed galvanometer mount 11 and corresponding to the first high-speed galvanometer 22 for receiving laser beams reflected from the first high-speed galvanometer 22 and reflecting them to the second reflection switching mechanism 50. The first high-speed galvanometer 22 is a resonant galvanometer, and the second high-speed galvanometer 23 is a Galvano galvanometer. Similarly, the first high-speed galvanometer 22 and the second high-speed galvanometer 23 are vertically aligned. The tilt angle of the first high-speed galvanometer 22 and the second high-speed galvanometer 23 can be set according to actual needs, for example, 45°. The high-speed galvanometer mount 21 has mounting slots for respectively clamping and fixing the first high-speed galvanometer 22 and the second high-speed galvanometer 23. The first high-speed galvanometer 22 and the second high-speed galvanometer 23 are secured by tightening bolts at the openings of the mounting slots. 3. Clamping and fixing: The photosensitive surfaces of the first high-speed galvanometer 22 and the second high-speed galvanometer 23 correspond to the reflective parts of the first reflection switching mechanism 40 and the second reflection switching mechanism 50. The high-speed galvanometer mount 21 is used as the mounting base for the first high-speed galvanometer 22 and the second high-speed galvanometer 23. After being reflected by the first reflection switching mechanism 40, the laser beam enters the center of the photosensitive surface of the first high-speed galvanometer 22, then is reflected into the center of the photosensitive surface of the second high-speed galvanometer 23, and finally deflected into the second reflection switching mechanism 50 in the scanning lens group 30.

[0033] In this embodiment, the scanning lens group 30 is disposed on the high-speed galvanometer mount 21 and located on one side of the first high-speed galvanometer. A mounting tube is provided on the high-speed galvanometer mount 21, and the scanning lens group 30 is fixedly inserted into the mounting tube. In other embodiments, the scanning lens group 30 may also be disposed separately from the high-speed galvanometer mount 21.

[0034] The first reflection switching mechanism 40 includes: a first substrate 41; a first reflector seat 42 slidably mounted on the first substrate 41 for mounting a first reflector; and a first switching drive assembly 43 drivenly connected to the first reflector seat 42 for driving the first reflector seat 42 to reciprocate between a first zero position and a first reflection position. The first reflector can be glued to the first reflector seat 42. The first reflector seat 42 is driven to reciprocate between the first zero position and the first reflection position by the first switching drive assembly 43. When the first reflector seat 42 is in the first reflection position, the laser beam emitted from the laser can be reflected by the first reflector.

[0035] The second reflection switching mechanism 50 includes: a second substrate 51; a second reflector seat 52 slidably mounted on the second substrate 51 for mounting the second reflector; and a second switching drive assembly 53 drivenly connected to the second reflector seat 52 for driving the second reflector seat 52 to reciprocate between a second zero position and a second reflection position. The second reflector can be glued to the second reflector seat 52, and the second reflector seat 52 is driven to reciprocate between the second zero position and the second reflection position by the second switching drive assembly 53. When the second reflector seat 52 is in the second reflection position, the laser beam deflected by the high-speed galvanometer group 20 can be reflected by the second reflector.

[0036] The first switching drive assembly 43 and the second switching drive assembly 53 are selected individually or in combination from the following structures: a cylinder, an electric cylinder, or a screw drive mechanism. Preferably, both the first switching drive assembly 43 and the second switching drive assembly 53 employ a screw drive mechanism. Taking the first switching drive assembly 43 employing a screw drive mechanism as an example, the screw drive mechanism includes: a drive motor 431, a ball screw 433, and a screw nut 434. A bearing seat 411 and a motor mounting plate 412 are provided on the first base plate 41. The motor mounting plate 412 is used to mount and fix the drive motor 431. The ball screw 433 is rotatably connected to the bearing seat 411 through a bearing. The ball screw 433 is fixed to the power output shaft of the drive motor 431 through a coupling 432. The screw nut 434 is fixed to the first reflector seat 42 and threadedly connected to the ball screw 433. A slide rail assembly 413 is provided between the first reflector 42 and the first substrate 41. The slide rail assembly 413 includes a slider and a guide rail that cooperate with each other, so that the first reflector 42 is slidably connected to the first substrate 41. The drive motor 431 is preferably a servo motor or a stepper motor. The drive motor 431 drives the ball screw 433 to rotate, which can generate threaded transmission with the screw nut 434, thereby driving the first reflector 42 to move back and forth, realizing the switching between the first zero position and the first reflection position. The second switching drive assembly 53 has the same structure as the first switching drive assembly 43, and will not be described in detail here.

[0037] Furthermore, the first reflector 42 is connected to a first zero-position baffle 44, and a first photoelectric sensor 45 is provided on the first substrate 41. When the first photoelectric sensor 45 detects the first zero-position baffle 44, the first reflector 42 is located at the first zero position. The first photoelectric sensor 45 includes a first light emitter and a first light receiver. When the first zero-position baffle 44 is located between the first light emitter and the first light receiver, it can block the first light receiver from receiving the light signal emitted by the first light emitter, thereby forming a detection signal. The zero-position calibration of the first reflector 42 is achieved through the first zero-position baffle 44 and the first photoelectric sensor 45.

[0038] The second reflector 52 is connected to a second zero-position baffle 54. A second photoelectric sensor 55 is provided on the second substrate 51. When the second photoelectric sensor 55 detects the second zero-position baffle 54, the second reflector 52 is located at the second zero position. The second photoelectric sensor 55 includes a second light emitter and a second light receiver. When the second zero-position baffle 54 is located between the second light emitter and the second light receiver, it can block the second light receiver from receiving the light signal emitted by the second light emitter, thereby forming a detection signal. The zero-position calibration of the second reflector 52 is achieved through the second zero-position baffle 54 and the second photoelectric sensor 55.

[0039] like Figure 1 As shown, Figure 1 The arrow in the diagram indicates the incident direction of the laser beam L. Figure 1 The first reflector 42 is positioned at the first reflection position, and the second reflector 52 is positioned at the second reflection position. When low-speed scanning is required, the first switching drive component 43 drives the first reflector 42 to the first zero position, and the second switching drive component 53 drives the second reflector 52 to the second zero position. The laser beam emitted by the laser directly enters the low-speed galvanometer group 10. After the laser beam enters the center of the photosensitive surface of the first low-speed galvanometer 12, it is reflected into the center of the photosensitive surface of the second low-speed galvanometer 13, and finally deflected into the scanning lens group 30 to achieve low-speed scanning. When high-speed scanning is required, the first switching drive component 43 drives the first reflector 42 to the first reflection position, and the second switching drive component 53 drives the second reflector 52 to the second zero position. The second reflector 52 moves to the second reflective position, and the laser beam emitted by the laser enters the first reflector on the first reflector 42. After reflection, the laser beam enters the high-speed galvanometer group 20. The laser beam first enters the center of the photosensitive surface of the first high-speed galvanometer 22, and then reflects into the center of the photosensitive surface of the second high-speed galvanometer 23. After being deflected by the high-speed galvanometer group 20, it enters the second reflector of the second reflector 52. After reflection, the laser beam enters the scanning lens group 30, realizing the high-speed scanning function. Through the switching action of the first reflection switching mechanism 40 and the second reflection switching mechanism 50, the switching between low-speed scanning function and high-speed scanning function is realized. The integration of low-speed scanning function and high-speed scanning function is completed within the limited space of the same instrument, expanding the applicability of the instrument.

[0040] A second aspect of this utility model provides a laser confocal scanning microscope, including a dual-station galvanometer switching device as described in the first aspect, the dual-station galvanometer switching device being configured corresponding to a laser.

[0041] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model patent. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this utility model. These are all equivalent modifications and improvements made to the above embodiments based on the essential technology of this utility model, and all of these fall within the protection scope of this utility model.

Claims

1. A dual-station galvanometer switching device, characterized in that, include: The low-speed galvanometer assembly is used to achieve low-speed scanning functionality; High-speed galvanometer assembly, used to achieve high-speed scanning function; A scanning lens group, in conjunction with a low-speed or high-speed galvanometer group, is used to receive the laser beam; A first reflection switching mechanism, having a first zero position and a first reflection position, is used to allow the laser beam to directly enter the low-speed galvanometer group when in the first zero position, or to reflect the laser beam to the high-speed galvanometer group when in the first reflection position; and... The second reflection switching mechanism has a second zero position and a second reflection position, which is used to allow the laser beam to enter the scanning lens group from the low-speed galvanometer group when the laser beam is in the second zero position, or to reflect the laser beam emitted from the high-speed galvanometer group and enter the scanning lens group when the laser beam is in the second reflection position.

2. The dual-station galvanometer switching device according to claim 1, characterized in that, The low-speed galvanometer assembly includes: Low-speed galvanometer mount; A first low-speed galvanometer, mounted on the low-speed galvanometer mount, for receiving the laser beam; and, A second low-speed galvanometer, mounted on the low-speed galvanometer mount, is used to reflect the laser beam emitted from the first low-speed galvanometer to the scanning lens group.

3. The dual-station galvanometer switching device according to claim 2, characterized in that, The high-speed galvanometer assembly includes: High-speed galvanometer mount; A first high-speed galvanometer, mounted on the high-speed galvanometer mount, is used to receive the laser beam reflected from the first reflection switching mechanism; and, The second high-speed galvanometer, which is mounted on the low-speed galvanometer mount and corresponds to the first high-speed galvanometer, is used to receive the laser beam reflected from the first high-speed galvanometer and reflect it to the second reflection switching mechanism.

4. The dual-station galvanometer switching device according to claim 1, characterized in that, The first reflection switching mechanism includes: First substrate; A first reflective mount for mounting a first reflector, which is slidably assembled onto the first substrate; and, A first switching drive component, which is connected to the first reflector, is used to drive the first reflector to reciprocate between the first zero position and the first reflector position.

5. The dual-station galvanometer switching device according to claim 4, characterized in that, The second reflection switching mechanism includes: Second substrate; A second reflector mount for mounting a second reflector is slidably assembled onto the second substrate; and, A second switching drive component, which is connected to the second reflector, is used to drive the second reflector to reciprocate between the second zero position and the second reflector position.

6. The dual-station galvanometer switching device according to claim 5, characterized in that, The first switching drive component and the second switching drive component are selected individually or in combination from the following structures: cylinder, electric cylinder or lead screw drive mechanism.

7. The dual-station galvanometer switching device according to claim 4, characterized in that, The first reflector is connected to a first zero-position baffle, and a first photoelectric sensor is provided on the first substrate. When the first photoelectric sensor detects the first zero-position baffle, the first reflector is located at the first zero position.

8. The dual-station galvanometer switching device according to claim 5, characterized in that, The second reflector is connected to a second zero-position baffle, and a second photoelectric sensor is provided on the second substrate. When the second photoelectric sensor detects the second zero-position baffle, the second reflector is located at the second zero position.

9. The dual-station galvanometer switching device according to claim 3, characterized in that, The first low-speed oscillating mirror, the second low-speed oscillating mirror, and the second high-speed oscillating mirror are Galvano oscillating mirrors, and the first high-speed oscillating mirror is a resonant oscillating mirror.

10. A laser confocal scanning microscope, characterized in that, Includes the dual-station galvanometer switching device as described in any one of claims 1-9.

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