Masking film sticking jig

Abstract

The utility model belongs to mask film die tool field, specifically is a kind of mask film die tool, including first frame and the connecting assembly of symmetric setting in its both sides, second frame is arranged in the side of connecting assembly, first frame and the inner top wall fixed connection protective film component and top surface are set up operating mouth;The protective film component includes the viscose layer fixed in the inner top wall of first frame and second frame, the protective film is bonded to the bottom surface of viscose layer, and pressure-sensitive adhesive is set on the bottom surface of protective film;Through the protective film component of preinstallation in the inner top wall of first frame and second frame, make protective film be fixed in mask directly above by viscose layer, and the pressure-sensitive adhesive of protective film bottom surface can be automatically adhered mask surface non-contact type by the vertical depression of operating personnel through operating mouth, completely avoid fingerprint pollution caused by hand directly touching mask or protective film active glue surface, and simultaneously, pressure-sensitive adhesive is synchronously adsorbed version surface dust when removing, realizes self-cleaning.

Description

Technical Field

[0001] This utility model relates to the field of mask plate application fixtures, specifically a mask plate application fixture. Background Technology

[0002] "Mask application fixture" or "film application fixture" is a special tool or jig used in photolithography processes such as semiconductors and flat panel displays (FPDs) to help accurately, dust-free and damage-free apply the protective film to the photomask.

[0003] Currently, the application of protective films requires manual application to the surface of the photomask. This process is prone to contamination due to external factors such as fingerprints. Furthermore, when placing multiple photomasks with protective films, simple stacking can cause the protective films to rub against each other, resulting in them falling off and affecting the protective effect. Therefore, a photomask film application fixture is proposed to address these issues. Utility Model Content

[0004] To overcome the shortcomings of existing technologies, the protective film needs to be manually pasted onto the surface of the photomask. However, the pasting process is easily affected by external factors such as fingerprints, which can lead to contamination of the photomask. In addition, when placing multiple photomasks with protective films, simple stacking can cause the protective films to rub against each other, resulting in the protective films falling off and affecting the protective effect. This utility model proposes a photomask pasting fixture.

[0005] The technical solution adopted by this utility model to solve its technical problem is: the mask plate application fixture of this utility model includes a first frame and connecting components symmetrically arranged on both sides of it. A second frame is arranged on the side of the connecting components. The first frame and the second frame both contain a mask plate. The protective film component is fixedly connected to the top wall of the first frame and the second frame and an operation port is opened on the top surface. The connecting assembly includes connecting blocks fixed to both sides of the first frame and a card seat disposed at the bottom of the connecting blocks. The inner sidewall of the card seat has symmetrically opened sleeve holes, and a spring is sleeved inside the sleeve hole. The end of the spring is fixedly connected to a limiting bead. The protective film assembly includes an adhesive layer fixed to the top wall of the first frame and the second frame, the bottom surface of the adhesive layer is bonded to the protective film, and the bottom surface of the protective film is provided with pressure-sensitive adhesive.

[0006] Preferably, when the connecting block is inserted into the card slot, the limiting bead is pressed against the side wall of the connecting block by the spring force to achieve a locking connection between the first frame and the second frame.

[0007] Preferably, the operating port penetrates the top surfaces of the first frame and the second frame and is vertically connected to the protective film assembly.

[0008] Preferably, the pressure-sensitive adhesive covers the entire bottom surface of the protective film and directly contacts the surface of the photomask.

[0009] Preferably, the axial direction of the sleeve hole is perpendicular to the insertion direction of the connecting block, and the compression direction of the spring is perpendicular to the moving path of the connecting block.

[0010] Preferably, the protective film is suspended and fixed directly above the photomask by an adhesive layer, and the pressure-sensitive adhesive can be peeled off and bonded to the surface of the photomask, allowing for cleaning of the mask surface upon removal.

[0011] The advantages of this utility model are: 1. This utility model uses a protective film assembly pre-installed on the top wall of the first and second frames to suspend and fix the protective film above the photomask through an adhesive layer. The operator can press down vertically through the operating port to make the pressure-sensitive adhesive on the bottom of the protective film automatically adhere to the surface of the photomask in a non-contact manner, completely avoiding fingerprint contamination caused by direct human contact with the photomask or the active adhesive surface of the protective film. At the same time, the pressure-sensitive adhesive absorbs micro dust on the photomask surface when it is removed, achieving self-cleaning. 2. This utility model utilizes the connecting block on the side of the first frame and the card holder on the side of the second frame for insertion and cooperation. When the connecting block is inserted into the card holder, the spring in the inner sleeve hole of the card holder pushes the limiting bead to radially squeeze the side wall of the connecting block to form a mechanical interlock, so that the stacked first frame and the second frame maintain a rigid connection and fixed interval, completely avoiding the protective film on the surface of the mask from being rubbed off due to stacking and shaking. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the protective component structure of this utility model; Figure 3 This is a schematic diagram of the connection component structure of this utility model; Figure 4 This is a schematic diagram of the disassembled structure of this utility model.

[0014] In the diagram: 1. First frame; 2. Connecting component; 21. Connecting block; 22. Card holder; 23. Spring; 24. Limiting bead; 3. Second frame; 4. Mask plate; 5. Protective film assembly; 51. Adhesive layer; 52. Protective film; 53. Pressure-sensitive adhesive. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0016] Please see Figures 1-4 As shown, a mask application fixture includes a first frame 1 and connecting components 2 symmetrically arranged on both sides of the first frame 1 and the second frame 3 is arranged on the side of the connecting components 2. The first frame 1 and the second frame 3 both contain a mask 4. The protective film component 5 is fixedly connected to the top wall of the first frame 1 and the second frame 3 and an operation port is opened on the top surface. The connecting component 2 includes connecting blocks 21 fixed on both sides of the first frame 1 and a card seat 22 provided at the bottom of the connecting block 21. The inner side wall of the card seat 22 is symmetrically provided with sleeve holes, and a spring 23 is sleeved inside the sleeve holes. The end of the spring 23 is fixedly connected to a limiting bead 24. During operation, in scenarios involving multiple mask stacks, the retainer 22 on the side of the second frame 3 is aligned with the connecting block 21 on the side of the first frame 1 and pressed down vertically. As the connecting block 21 is inserted into the retainer 22, it squeezes the limiting bead 24, causing it to radially compress the spring 23. When the connecting block 21 is fully inserted, the spring 23 rebounds and pushes the limiting bead 24 tightly against the side wall of the connecting block 21, forming a mechanical interlocking force perpendicular to the stacking direction. This ensures that the first frame 1 and the second frame 3 are rigidly fixed and maintain a constant distance, ensuring that the protective film 52 on the surface of the mask 4 has no risk of contact friction in the stacked state.

[0017] Furthermore, the protective film assembly 5 includes an adhesive layer 51 fixed to the top wall of the first frame 1 and the second frame 3, the bottom surface of the adhesive layer 51 is bonded to the protective film 52, and the bottom surface of the protective film 52 is provided with pressure-sensitive adhesive 53. During operation, the mask 4 is placed horizontally on the base inside the first frame 1. The operator presses the protective film assembly 5 vertically downward through the operating port on the top surface of the first frame 1, causing the protective film 52, which is pre-fixed at the bottom of the adhesive layer 51, to move downward. The pressure-sensitive adhesive 53, which fully covers the bottom surface of the protective film 52, automatically adheres to the surface of the mask 4 in a non-contact manner, completely isolating the operator's hands from direct contact with the mask 4 or the pressure-sensitive adhesive 53, thus completely avoiding fingerprint contamination. When the protective film needs to be removed, the protective film 52 is peeled off through the operating port, and the pressure-sensitive adhesive 53 simultaneously removes the micro-dust on the surface of the mask 4, achieving self-cleaning.

[0018] Furthermore, the operating port penetrates the top surfaces of the first frame 1 and the second frame 3 and is vertically connected to the protective film assembly 5; During operation, when applying the protective film, the operator applies pressure directly downwards to the protective film assembly 5 through the operating port that penetrates vertically through the top surface of the first frame 1 or the second frame 3. The operating port is perpendicular and coaxial with the center of the protective film 52. This structure ensures that the pressure is evenly transmitted along the vertical direction of the protective film 52 and the pressure-sensitive adhesive 53, forcing the pressure-sensitive adhesive 53 to cover the surface of the mask 4 smoothly without air bubbles. At the same time, the diameter of the operating port is larger than the size of a human hand or tool, avoiding accidental contact with the edge of the mask 4 during operation and causing contamination. This design makes the film application action precise and controllable, significantly improving the yield.

[0019] Furthermore, the pressure-sensitive adhesive 53 covers the entire bottom surface of the protective film 52 and directly contacts the surface of the mask 4; During operation, the pressure-sensitive adhesive 53 completely covers the entire bottom surface of the protective film 52 and directly contacts the surface of the photomask 4 to form a continuous sealing layer, completely preventing air and dust from entering the film-mask interface. When the protective film 52 needs to be removed, it is lifted vertically upward to peel the pressure-sensitive adhesive 53 off the surface of the photomask 4 as a whole. Its viscoelastic properties adsorb micron-sized particles on the mask surface, achieving both film removal and cleaning functions simultaneously. Full surface coverage avoids oxidation or scratches on the photomask 4 due to localized delamination, extending the service life of the photomask 4.

[0020] Working principle: After the operator places the mask plate 4 on the base of the first frame 1, the operator presses the protective film assembly 5 vertically downward through the top operating port. This drives the protective film 52, which is pre-fixed to the bottom of the adhesive layer 51, along with the fully covered pressure-sensitive adhesive 53, to move downward together. This allows the pressure-sensitive adhesive 53 to automatically adhere to the surface of the mask plate 4 in a non-contact manner, forming a sealed protective layer. When multiple units need to be stacked, the card holder 22 on the side of the second frame 3 is aligned with the connecting block 21 on the side of the first frame 1 and pressed down to insert it. The connecting block 21 squeezes the limiting bead 24 inside the card holder 22 to press it down. The spring 23 retracts and pushes the limiting bead 24 to radially lock the side wall of the connecting block 21 after the connecting block 21 is fully inserted, thus achieving rigid fixation of the first frame 1 and the second frame 3 and maintaining a constant distance. When removing the protective film 52 after use, the pressure-sensitive adhesive 53 is peeled off vertically through the operating port, and residual particles are simultaneously adsorbed on the surface of the mask plate 4, completing the cleaning and recycling of the frame. The mechanical interlocking mechanism of the connecting component 2 eliminates the risk of stacking displacement friction, the pre-installed protective film component 5 eliminates human contact contamination, and the dual-frame structure supports modular expansion.

[0021] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, or similar improvements made within the theoretical and principle content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A mask-applying fixture, characterized in that: It includes a first frame (1) and connecting components (2) symmetrically arranged on both sides of it. A second frame (3) is arranged on the side of the connecting components (2). The first frame (1) and the second frame (3) both contain a mask plate (4). The protective film component (5) is fixedly connected to the top wall of the first frame (1) and the second frame (3) and an operation port is opened on the top surface. The connecting component (2) includes connecting blocks (21) fixed on both sides of the first frame (1) and a card seat (22) provided at the bottom of the connecting block (21). The inner side wall of the card seat (22) is symmetrically provided with sleeve holes, and a spring (23) is sleeved inside the sleeve holes. The end of the spring (23) is fixedly connected to a limiting bead (24). The protective film assembly (5) includes an adhesive layer (51) fixed to the inner top wall of the first frame (1) and the second frame (3), the bottom surface of the adhesive layer (51) is bonded with a protective film (52), and the bottom surface of the protective film (52) is provided with pressure-sensitive adhesive (53).

2. The mask-applying fixture according to claim 1, characterized in that: When the connecting block (21) is inserted into the card holder (22), the limiting bead (24) is pressed by the elastic force of the spring (23) to the side wall of the connecting block (21) to achieve a locking connection between the first frame (1) and the second frame (3).

3. The mask-applying fixture according to claim 1, characterized in that: The operating port penetrates the top surface of the first frame (1) and the second frame (3) and is vertically connected to the protective film assembly (5).

4. The mask-applying fixture according to claim 1, characterized in that: The pressure-sensitive adhesive (53) covers the entire bottom surface of the protective film (52) and directly contacts the surface of the mask (4).

5. A mask-applying fixture according to claim 1, characterized in that: The axial direction of the sleeve hole is perpendicular to the insertion direction of the connecting block (21), and the compression direction of the spring (23) is perpendicular to the moving path of the connecting block (21).

6. A mask-applying fixture according to claim 1, characterized in that: The protective film (52) is suspended and fixed above the mask (4) by the adhesive layer (51), and the pressure-sensitive adhesive (53) is peelable and bonded to the surface of the mask (4) and cleans the mask when it is removed.

Images