An automatic Nikon Reticle Case opener

Abstract

The utility model discloses an automatic Nikon Reticle Case mask box opening device, including base, fixed on the top cover of base, and install in the cover opening mechanism, detection mechanism, information reading mechanism, guide locking mechanism of base, the cover opening mechanism is used for driving mask box to complete the side open action, the detection mechanism is used for detecting the mask and mask protection film in mask box, the information reading mechanism is used for reading the identification information of mask box, the guide locking mechanism is used for the guide, positioning and fixed when mask box is put into, solve the problem such as high pollution risk of manual opening of Nikon mask box, unable to detect mask and protection film state, poor equipment integration, realize the automation side opening of Nikon mask box, accurate detection and integrated adaptation with process machine.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to an automatic Nikon Reticle Case opener. Background Technology

[0002] In the photolithography process of semiconductor manufacturing, the photomask is the core pattern master. Defects such as particle adhesion and scratches on its surface can directly lead to the degradation of wafer projection imaging quality. Therefore, the storage, transfer, and transportation of photomasks have extremely stringent environmental requirements. The carriers of photomasks are mainly divided into two categories: photomask packages / shipping boxes and photomask transport boxes (Reticle SMIF Pods). Among them, the photomask transport box follows the Standard Mechanical Interface Technology (SMIF) for isolated loading and unloading, and the matching box opener interface is standardized, which can realize the automated handling of photomasks and ensure that the photomask is isolated from the outside air. This significantly reduces the construction area of ​​high-cleanliness cleanrooms in wafer fabs and the investment cost of clean gas supply equipment.

[0003] However, due to the lack of a unified standard for the photomask transport boxes used to transport photomasks from the manufacturing plant to the wafer fab, different brands of lithography machines have different structures and operating specifications for their photomask transport boxes. Among them, the Nikon photomask case is designed with two states: side opening and full opening. In actual operation in the wafer fab, many problems have been exposed: when manually transferring or inspecting photomasks, the Nikon photomask case must be fully opened, which greatly increases the probability of the photomask coming into contact with external contaminants and easily causes photomask contamination; photomasks are divided into two categories according to whether the patterned surface has a protective film. If there is no clear indication during manual handling or inspection, the protective film is easily damaged, causing the photomask to be scrapped.

[0004] Existing photomask openers cannot be adapted to the structural characteristics of Nikon photomask boxes, and manual operation methods are difficult to meet the automation and high-cleanliness production requirements of wafer fabs. Therefore, the development of an automatic opener specifically for Nikon photomask boxes has become an urgent need in the industry. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide an automatic Nikon Reticle Case opener, which solves the problems of high risk of contamination from manual opening of Nikon photomasks, inability to detect the condition of photomasks and protective films, and poor equipment integration, thereby realizing automated side opening, accurate detection, and integration with process equipment for Nikon photomasks.

[0006] To achieve the above objectives, this utility model provides the following technical solution. An automatic Nikon Reticle Case opener includes a base, a top cover fixed to the base, and an opening mechanism, a detection mechanism, an information reading mechanism, and a guide locking mechanism mounted on the base. The opening mechanism drives the photomask to open to the side. The detection mechanism detects the presence or absence of the photomask and its protective film inside the photomask. The information reading mechanism reads the identification information of the photomask. The guide locking mechanism guides, positions, and secures the photomask when it is placed inside.

[0007] Furthermore, the opening mechanism includes an opening cylinder, a magnetic switch, and an opening roller; the cylinder body of the opening cylinder is connected to the base at a fixed angle via a connector; the opening roller is rotatably mounted on the end of the piston rod of the opening cylinder; the magnetic switch is mounted on the cylinder body of the opening cylinder and is used to detect the extension and retraction position of the piston rod of the opening cylinder; the opening roller pushes the lid of the photomask box to complete the side opening action as the piston rod of the opening cylinder moves.

[0008] Furthermore, the detection mechanism includes a lifting cylinder, a photomask detection sensor, and a photomask protective film detection sensor; the lifting cylinder is vertically installed below the top cover plate, and the photomask detection sensor and the photomask protective film detection sensor are both fixed to the telescopic end of the lifting cylinder; the lifting cylinder drives the photomask detection sensor and the photomask protective film detection sensor to rise and fall, so as to detect the presence or absence of the photomask and Pellicle protective film inside the photomask box.

[0009] Furthermore, the information reading mechanism includes an RFID reader and a barcode reader; the RFID reader is installed inside the upper cover above the top cover and is used to read the RFID information of the photomask box; the barcode reader is installed on one side of the top cover with its lens facing the barcode area at the rear of the photomask box and is used to read the barcode information of the photomask box.

[0010] Furthermore, the guide locking mechanism includes a bottom guide strip, two side guide strips, a cover pressure plate, and a catch ball; the bottom guide strip is installed on the top cover plate for bottom guidance of the photomask box; the two side guide strips are symmetrically installed on both sides of the bottom guide strip for side guidance of the photomask box; the cover pressure plate is installed on the two side guide strips, and the catch ball is embedded in the inner side of the two side guide strips. The catch ball is used to lock the body of the photomask box, and the cover pressure plate is used to press the cover of the photomask box to prevent displacement.

[0011] Furthermore, the guide locking mechanism also includes a lid detection sensor and a box detection sensor; the lid detection sensor is installed on the top cover plate and corresponds to the position of the photomask lid, and is used to detect the opening and closing state of the photomask lid; at least two box detection sensors are provided, respectively installed at the entrance end of the bottom guide strip and the positioning end of the two side guide strips, and are used to detect whether the photomask box is placed in place and in the correct position.

[0012] Furthermore, an upper protective cover is provided above the top cover plate. The upper protective cover is placed on the outside of the RFID reader of the information reading mechanism to protect the RFID reader. The upper protective cover is made of transparent anti-static material.

[0013] This utility model has the following beneficial effects: This invention enables the Nikon photomask box to open to the side via a cover-opening mechanism, replacing the traditional fully open method operated manually. This reduces the area and time the photomask is exposed to the outside air, effectively ensuring the cleanliness and performance of the photomask. The detection mechanism can accurately detect the presence or absence of the photomask inside the Nikon photomask box and the condition of the Pellicle protective film, avoiding damage to the protective film or mechanical damage to the photomask due to misoperation, thus significantly reducing economic losses.

[0014] To more clearly illustrate the structural features and effects of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an automatic Nikon Reticle Case opener mentioned in this utility model.

[0016] Figure 2 This is a schematic diagram of the Nikon box structure mentioned in this utility model.

[0017] Figure 3 , Figure 4 This is a schematic diagram of the internal structure of an automatic Nikon Reticle Case opener mentioned in this utility model.

[0018] Figure 5 This is a schematic diagram illustrating the working principle of the lid-opening mechanism mentioned in this utility model.

[0019] Figure 6 This is a schematic diagram illustrating the working principle of the testing mechanism mentioned in this utility model.

[0020] Figure 7 This is a schematic diagram of the photomask picking and placing action mentioned in this utility model.

[0021] Figure 8This is a schematic diagram comparing the Nikon case mentioned in this utility model with its side-open and fully open states.

[0022] Figure 9 This is a schematic diagram of the information reading mechanism mentioned in this utility model.

[0023] Figure 10 This is a flowchart of the process of the box opener mentioned in this utility model. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and relevant knowledge. Obviously, the described applications are only some embodiments of the present invention, and not all embodiments.

[0025] Reference Figure 1 and Figure 2 As shown, the photomask box 100 comprises a box body 101, a top cover 102, and a front cover 103 (side-opening position). The box body 101 has positioning edges 104 at both ends to facilitate positioning and locking of the box on the box opener. Specifically, this invention addresses the problems of high risk of contamination during manual operation of Nikon photomask boxes, inability to detect the condition of the photomask and protective film, inconvenient information management, and poor equipment integration. The box opener includes a base, a top cover, and an opening mechanism, a detection mechanism, a guide locking mechanism, a limit protection mechanism, and a speed adjustment mechanism installed between the two. The opening mechanism uses an opening cylinder and opening rollers to achieve side opening of the Nikon photomask box. Figure 1 The front cover 103 of the device includes a detection mechanism that uses a lifting cylinder to drive a sensor to detect the presence or absence of the photomask and Pellicle protective film. An information reading mechanism consists of an RFID reader and a barcode reader to obtain the photomask box's identification information. A guiding and locking mechanism ensures precise guidance and fixation of the photomask box. A limit and protection mechanism limits and protects the photomask box. A speed adjustment mechanism regulates the cylinder's movement speed. This utility model has a compact structure, is equipped with a signal interaction interface for robot interaction, can be integrated into a process machine, reduces the probability of photomask contamination, avoids damage from misoperation, achieves information management of the photomask, and improves the efficiency of automated operations. Specifically, it includes: Reference Figures 1-10 As shown, this utility model provides an automatic Nikon Reticle Case opener, including a base 1, a top cover 2 fixed on the base 1, and an opening mechanism, a detection mechanism, an information reading mechanism, and a guide locking mechanism installed on the base 1. The opening mechanism is used to drive the photomask 100 to complete the side opening action, the detection mechanism is used to detect the presence or absence of the photomask and Pellicle protective film inside the photomask 100, the information reading mechanism is used to read the identification information of the photomask, and the guide locking mechanism is used to guide, position, and fix the photomask when it is placed in.

[0026] In this invention, the guide locking mechanism first guides and fixes the photomask box, then the opening mechanism opens it to the side, followed by the detection mechanism to inspect the photomask and protective film, while the information reading mechanism simultaneously reads the photomask box marking information. This integrated structural design significantly reduces the size of the equipment, allowing it to be directly embedded into the process equipment of the wafer fab, solving the problem of limited space in the fab. The coordinated operation of each mechanism replaces traditional manual operation, reducing the risk of photomask contamination from manual contact at the source, while making the opening process more standardized and improving overall operational efficiency.

[0027] Reference Figure 3 , Figure 5 As shown, in this utility model, the opening mechanism includes an opening cylinder 3, a magnetic switch 5, and an opening roller 4; the cylinder body of the opening cylinder 3 is connected to the base 1 at a fixed angle via a connector; the opening roller 4 is rotatably mounted on the end of the piston rod of the opening cylinder 3; the magnetic switch 5 is mounted on the cylinder body of the opening cylinder 3 and is used to detect the extension and retraction position of the piston rod; the opening roller 4, along with the movement of the piston rod of the opening cylinder, pushes the lid of the photomask box to complete the side opening action. Figure 5 As shown, the front cover 103 is pushed outward by the opening roller 4. Specifically, the opening cylinder 3 is the power source for the opening action. It is connected to the base 1 at a fixed angle (45° in the description) through a connector to ensure that the extension direction of the piston rod matches the movement trajectory of the photomask cover. The opening roller 4 is mounted at the end of the piston rod through a rotating joint and contacts the edge of the photomask cover, converting the linear motion of the cylinder into a side-opening action of pushing the cover. The magnetic switch 5 detects the extension and retraction position of the piston rod in real time to achieve precise control of the opening action. The mechanical opening method of using a cylinder-driven roller replaces manual opening, avoiding the problem of uneven force in manual operation and achieving smooth side opening of the photomask. Compared with manual full opening, the side-opening mode significantly reduces the probability of particulate contamination. The position detection function of the magnetic switch 5 can prevent damage to the photomask cover caused by excessive extension and retraction of the cylinder, improving the safety and accuracy of the opening action.

[0028] Reference Figure 4 , Figure 6As shown, in this utility model, the detection mechanism includes a lifting cylinder 6, a photomask detection sensor 7, and a photomask protective film detection sensor 8. The lifting cylinder 6 is vertically installed below the top cover plate 2, and the photomask detection sensor 7 and the photomask protective film detection sensor 8 are both fixed to the telescopic end of the lifting cylinder 6. The lifting cylinder 6 drives the photomask detection sensor and the photomask protective film detection sensor to rise and fall, so as to detect the presence or absence of the photomask 106 and the protective film inside the photomask box. Specifically, the lifting cylinder 6 provides lifting power for the detection action and is vertically installed below the top cover plate 2 to ensure that the sensor's lifting direction corresponds to the detection position. The photomask detection sensor 7 and the photomask protective film detection sensor 8 are fixed side by side to the telescopic end of the lifting cylinder by a bracket. When the opening mechanism completes the side opening, the lifting cylinder 6 drives the sensor to rise and detect the inside of the photomask box, referring to... Figure 6 As shown, the lifting cylinder 6 is located below the side opening of the front cover 103, and the top cover 2 has a hollow structure for raising and lowering the lifting cylinder 6. Two sensors detect the presence or absence of the photomask and the presence or absence of the optical characteristics of the protective film using laser reflection principles, respectively. This system enables automated detection, replacing manual visual inspection and avoiding errors in human judgment. The sensor's lifting design allows it to extend only during detection, reducing unnecessary contact with the photomask box and lowering the risk of contamination. The detection signal is transmitted to the control system in real time. If no photomask or damaged protective film is detected, the system immediately pauses the robot's subsequent operations, effectively preventing collisions and damage to the photomask or protective film by the robot gripper, thus reducing economic losses.

[0029] Reference Figure 3 As shown, in this utility model, the information reading mechanism includes an RFID reader 9 and a barcode reader. The RFID reader 9 is installed inside the upper cover 15 above the top cover plate 1 and is used to read the RFID information of the photomask box. The barcode reader is installed on one side of the top cover plate, with its lens facing the barcode area at the rear of the photomask box, and is used to read the barcode information of the photomask box. It can be installed in different positions depending on the barcode area. The RFID reader 9 identifies the RFID tag of the photomask box through radio frequency signals to obtain electronic information such as the photomask model and production batch. Installing it inside the upper cover can avoid external interference. The barcode reader reads the barcode at the rear of the photomask box through optical scanning, forming a dual information reading mode of electronic tag and barcode with the RFID reader. The information read by both is uploaded to the control system and mutually verified to ensure the accuracy of the information. The dual information reading method solves the problem of single barcode reading being easily affected by dirt and improves the reliability of information reading.

[0030] Reference Figure 4As shown, in this utility model, the guide locking mechanism includes a bottom guide strip 10, two side guide strips 16, a lid pressure plate 11, and a catch ball 12. The bottom guide strip 10 is installed on the top cover plate 1 and is used for bottom guidance of the photomask box. The two side guide strips 16 are symmetrically installed on both sides of the guide strip 10 and are used for side guidance of the photomask box. The lid pressure plate 11 is installed on the two side guide strips 16, and the catch ball 12 is embedded in the inner side of the two side guide strips 16. The catch ball 12 is used to lock the body of the photomask box, and the lid pressure plate 11 is used to press the lid of the photomask box to prevent displacement. The bottom guide strip 10 and the two side guide strips 16 form a guide channel. When the photomask box is placed in, it slides along the channel to achieve initial positioning. The catch ball 12 is a spring-type positioning structure. When the photomask box is pushed to the designated position, the catch ball is engaged in the positioning groove of the box body (see reference). Figure 2 As shown, the groove 105 structure located on one side of the positioning edge 104 completes the locking of the box body; the box cover pressure plate 11 is installed on the guide strips on both sides to press the light cover box cover tightly and prevent the box cover from shifting during the opening process, see reference. Figure 2 As shown, when the photomask is pushed to the cover plate 11 and continues to be pushed forward, the cover plate 11 presses against the arc-shaped positioning edge. When it is pushed to the target position, the cover plate 11 presses against the arc-shaped concave area, which just locks the positioning edge and prevents the photomask from moving backward. It should be noted that a spring component is provided at one end of the cover plate 11.

[0031] In this utility model, the guide locking mechanism further includes a lid detection sensor 13 and a box detection sensor 14. The lid detection sensor 13 is installed on the top cover plate 1 and corresponds to the position of the photomask lid, used to detect the opening and closing state of the photomask lid. At least two box detection sensors 14 are provided, respectively installed at the entrance end of the bottom guide strip 10 and the positioning ends of the side guide strips, used to detect whether the photomask box is placed in place and in the correct position. The box detection sensor 14 is divided into an entrance end and a positioning end. The entrance end sensor detects whether the photomask box has started to be placed, and the positioning end sensor confirms whether the photomask box has been pushed to the designated position. The two work together to realize the full monitoring of the photomask box placement process. Figure 4 The positioning end is equipped with two box detection sensors 14; the lid detection sensor corresponds to the position of the photomask lid and detects the opening and closing status of the lid in real time, providing feedback confirmation signals for the opening mechanism. The dual-position box detection sensors ensure that the box opener only starts subsequent actions after the photomask box is fully positioned, avoiding mechanical collisions caused by the photomask box not being in position; the lid detection sensor can provide real-time feedback on the opening and closing status of the lid, making it easy for the control system to determine whether the opening action is completed, ensuring the continuity of the actions of each mechanism; the coordination of the entire detection and guide locking system makes the fixation and status detection of the photomask box more comprehensive, improving the automation fault tolerance of the equipment.

[0032] This invention also includes a limiting and protective mechanism, which comprises a limiting block 17 and a protective component. The limiting block 17 is installed below the upper cover 15 to limit the insertion position of the photomask box. The protective component covers the limiting block and provides safety protection for the internal structure of the box opener. The limiting block 17 is made of polyurethane cushioning material. When the photomask box is pushed to this position, the limiting block prevents it from going further through mechanical contact, forming a double limiting function with the positioning function of the guide locking mechanism. The upper cover 15 is a transparent plastic cover that covers the limiting block, isolating external contaminants and preventing personnel from contacting the moving parts.

[0033] This invention also includes a speed adjustment mechanism, which is a speed regulating valve. The speed regulating valve is mounted on the base and connected to the air passages of the opening cylinder and the lifting cylinder, respectively, for adjusting the movement speed of the opening cylinder and the lifting cylinder. The speed regulating valve is a pneumatic throttle valve, connected in series in the air passages of the opening cylinder and the lifting cylinder. By adjusting the valve opening, the airflow entering the cylinder is controlled, thereby changing the extension and retraction speed of the cylinder piston rod. The operator can adjust the speed of the opening cylinder and the lifting cylinder according to actual operational needs, matching the rhythm of the opening and detection actions.

[0034] In a preferred embodiment, the base 1 is further provided with a signal handshake interface, which includes an industrial Ethernet interface and a digital I / O interface for signal interaction with robots and process equipment, enabling automated operations such as photomask cleaning and replacement of photomask storage boxes. The industrial Ethernet interface is used for high-speed data transmission between the box opener and the robot / process equipment, such as photomask information and equipment status; the digital I / O interface is used to transmit switching signals, such as box opening signal, detection completion signal, and robot gripping ready signal. Through the cooperation of these two types of interfaces, the box opener can form a closed-loop control with the wafer fab's automated production line, completing operations such as photomask opening, detection, transfer, and cleaning according to a preset process. The signal handshake interface enables seamless integration between the box opener and the robot / process equipment, eliminating the need for manual intervention throughout the entire photomask processing process. The design, compatible with both industrial Ethernet and digital I / O, adapts to the communication standards of existing automated equipment in wafer fabs, requiring no additional production line modifications and reducing equipment application costs. Automated signal interaction also reduces human error and improves the stability of photomask transfer and processing.

[0035] In this invention, an upper protective cover 15 is provided above the top cover plate. The upper protective cover 15 covers the outside of the RFID reader of the information reading mechanism to protect the RFID reader, and the upper protective cover is made of transparent anti-static material. (Refer to...) Figure 3 As shown, the base 1 is also equipped with a fan 18, an air duct 19, a solenoid valve 20, a wiring board 21, a controller 22, a cylinder throttle valve 26, a cover-opening cylinder mounting base 27; and reference Figure 4As shown, a buckle 23 is also designed.

[0036] In this invention, after the Nikon photomask box is positioned and fixed, the piston rod of the opening cylinder 3 extends, driving the opening roller 4 to conform to the edge of the front cover of the photomask box and pushing the front cover 103 to one side, thus achieving the side opening of the photomask box 100. The magnetic switch 5 detects the extension and retraction position of the piston rod of the opening cylinder 3 in real time. When the piston rod extends or retracts into place, it sends a signal to the control system to ensure precise start and stop of the opening action, avoiding excessive opening that could damage the photomask box structure. The side opening method significantly reduces the exposed area of ​​the photomask, effectively reducing the risk of contamination.

[0037] After the opening mechanism completes the side opening action of the photomask box, the lifting cylinder 6 drives the photomask detection sensor 7 and the photomask protective film detection sensor 8 to rise to the corresponding height. The photomask detection sensor 7 determines whether a photomask exists inside the box by emitting a laser and receiving the reflected signal. The photomask protective film detection sensor 8 determines whether the Pellicle protective film exists and is intact by identifying the optical reflection characteristics of the protective film. The detection signals are transmitted to the control system in real time via a data cable. If no photomask is detected or the protective film is damaged, the system will immediately send a prohibition signal to the robot to prevent the robot gripper from making invalid grasping attempts or causing collision damage. Figure 7 , Figure 8 As shown, 24 is the robot gripper, 25 is the photomask, and 110 is the photomask box opener.

[0038] The RFID reader 9 reads data such as photomask model, production batch, manufacturer information, and usage records from the RFID tags inside the photomask box using radio frequency signals; the barcode reader reads the barcode information printed on the tail of the photomask box using optical scanning. The two types of information are uploaded to the control system and cross-verified to ensure the accuracy of the photomask information; the read information is synchronized to the wafer fab MES system to realize full-process tracking and information management of the photomask.

[0039] The bottom guide strip 10 is fixed to the bottom center of the top cover plate by bolts and extends along the pushing direction of the photomask box 100; the two side guide strips 16 are symmetrically installed on the left and right sides of the bottom guide strip, forming a guide channel with the bottom guide strip; the box cover pressure plate 11 is pressed onto the positioning edge of the photomask box by a spring structure, and the ball bearing 12 is installed on one side of the box cover pressure plate, corresponding to the positioning groove of the Nikon photomask box body; the box cover detection sensor 13 is installed at the front end of the top cover plate, corresponding to the opening and closing position of the photomask box cover; the two box detection sensors are respectively installed at the entrance end of the bottom guide strip and the end positioning position of the two side guide strips.

[0040] When the Nikon photomask is placed in, the bottom guide strip and the side guide strips form a channel that guides the photomask to slide precisely along a predetermined trajectory. When the photomask 100 is pushed to the designated position, the catch ball is engaged in the positioning groove of the photomask body under the action of the spring force, thereby locking the body. The lid pressure plate 11 presses the positioning edge of the photomask to prevent it from coming out during the opening process. The lid detection sensor 13 detects the opening and closing status of the lid in real time, and the box detection sensor 14 confirms whether the photomask is placed in place. Multiple positioning and detection ensure that the photomask does not shift during the opening process.

[0041] The technical principles of this utility model have been described above with reference to specific embodiments, which are merely preferred embodiments of this utility model. The protection scope of this utility model is not limited to the above embodiments; all technical solutions falling within the scope of this utility model's concept are protected. Those skilled in the art can conceive of other specific embodiments of this utility model without creative effort, and these embodiments will all fall within the protection scope of this utility model.

Claims

1. An automatic Nikon Reticle Case opener, characterized in that, It includes a base, a top cover plate fixed on the base, and an opening mechanism, a detection mechanism, an information reading mechanism, and a guide locking mechanism installed on the base; the opening mechanism is used to drive the photomask box to complete the side opening action, the detection mechanism is used to detect the photomask and photomask protective film inside the photomask box, the information reading mechanism is used to read the identification information of the photomask box, and the guide locking mechanism is used to guide, position and fix the photomask box when it is placed in.

2. The photomask box opener according to claim 1, characterized in that, The opening mechanism includes an opening cylinder, a magnetic switch, and an opening roller. The cylinder body of the opening cylinder is connected to the base at a fixed angle via a connector. The opening roller is rotatably mounted on the end of the piston rod of the opening cylinder. The magnetic switch is mounted on the cylinder body of the opening cylinder and is used to detect the extension and retraction position of the piston rod. The opening roller pushes the lid of the photomask box to complete the side opening action as the piston rod of the opening cylinder moves.

3. The photomask box opener according to claim 1, characterized in that, The detection mechanism includes a lifting cylinder, a photomask detection sensor, and a photomask protective film detection sensor; the lifting cylinder is vertically installed below the top cover plate, and the photomask detection sensor and the photomask protective film detection sensor are both fixed to the telescopic end of the lifting cylinder; the lifting cylinder drives the photomask detection sensor and the photomask protective film detection sensor to rise and fall, so as to detect the photomask and the photomask protective film inside the photomask box.

4. The photomask box opener according to claim 1, characterized in that, The information reading mechanism includes an RFID reader and a barcode reader; the RFID reader is installed inside the upper cover above the top cover and is used to read the RFID information of the photomask box; the barcode reader is installed on one side of the top cover with its lens facing the barcode area at the rear of the photomask box and is used to read the barcode information of the photomask box.

5. The photomask box opener according to claim 1, characterized in that, The guide locking mechanism includes a bottom guide strip, two side guide strips, a cover pressure plate, and a catch ball. The bottom guide strip is installed on the top cover plate and is used for bottom guidance of the photomask box. The two side guide strips are symmetrically installed on both sides of the bottom guide strip and are used for side guidance of the photomask box. The cover pressure plate is installed on the two side guide strips, and the catch ball is embedded in the inner side of the two side guide strips. The catch ball is used to lock the body of the photomask box, and the cover pressure plate is used to press the cover of the photomask box to prevent displacement.

6. The photomask box opener according to claim 5, characterized in that, The guide locking mechanism also includes a lid detection sensor and a box detection sensor; the lid detection sensor is installed on the top cover plate and corresponds to the position of the photomask lid, and is used to detect the opening and closing state of the photomask lid; at least two box detection sensors are provided, respectively installed at the entrance end of the bottom guide strip and the positioning end of the two side guide strips, and are used to detect whether the photomask box is placed in place and in the correct position.

7. The photomask box opener according to claim 2, characterized in that, It also includes a speed adjustment mechanism, which is a speed adjustment valve. The speed adjustment valve is installed on the base and is connected to the air passages of the cover opening cylinder and the lifting cylinder respectively, and is used to adjust the movement speed of the cover opening cylinder and the lifting cylinder.

8. The photomask box opener according to claim 1, characterized in that, An upper protective cover is provided above the top cover plate. The upper protective cover is placed on the outside of the RFID reader of the information reading mechanism to protect the RFID reader.

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