A new high-speed XY micro-motion mechanism

Abstract

The utility model discloses a novel high -speed XY micro -actuator relates to precision moving technical field, wherein, novel high -speed XY micro -actuator includes base, and the moving block sliding is established in the base, and the first drive component is established in the base, and the first drive component is driven to connect with the moving block, to drive the moving block and slide on the base along the first direction, and the connecting block is along the second direction sliding and is established in the moving block, and the connecting block is used for bearing carrier, and the fixed block is established in the base, and the adjusting part penetrates the fixed block and is in the second direction with the connecting block and abuts, and the adjusting part and the connecting block are slidably connected in the first direction, and the adjusting part is screwed with the fixed block and makes the length of the side of the adjusting part protruding from the fixed block face the connecting block adjustable, and the elastic part can be deformed along the second direction and is connected the connecting block makes the connecting block have the tendency of moving close to the fixed block. The utility model provides technical scheme to simplify the drive structure, and reduces the structure complexity and cost.

Description

Technical Field

[0001] This utility model relates to the field of precision motion technology, and in particular to a novel high-speed XY micro-motion mechanism. Background Technology

[0002] As a fundamental device for motion control, the XY drive platform has a wide range of applications. Its basic function is to achieve high-precision movement of loads on a two-dimensional plane. The layered drive structure requires the lower-level motion unit to simultaneously bear the entire mass of the upper-level motion system, which in turn requires the lower level to provide a larger driving torque, making the entire drive structure more complex. Furthermore, in short-stroke motion positioning scenarios, the traditional electric drive structure will also increase the structural complexity of the entire system, resulting in a larger load and higher manufacturing costs. Utility Model Content

[0003] The main purpose of this invention is to propose a novel high-speed XY micro-motion mechanism, which aims to solve the technical problem of complex structure of the drive unit.

[0004] To achieve the above objectives, this utility model proposes a novel high-speed XY micro-motion mechanism, comprising: Base; The movable block is slidably mounted on the base; A first driving component is disposed on the base, and the first driving component is drivingly connected to the movable block to drive the movable block to slide on the base along a first direction; A connecting block is slidably disposed on the movable block along the second direction, and the connecting block is used to support the carrier. The second driving assembly includes a fixed block, an elastic element, and an adjusting element. The fixed block is disposed on the base. The adjusting element passes through the fixed block and abuts against the connecting block in the second direction. The adjusting element and the connecting block are slidably connected in the first direction. The adjusting element is threadedly connected to the fixed block so that the length of the adjusting element protruding from the fixed block facing the connecting block is adjustable. The elastic element can deform along the second direction and is connected to the connecting block so that the connecting block has a tendency to move closer to the fixed block.

[0005] In one embodiment, the second drive assembly further includes an adjustment plate disposed between the adjustment member and the connecting block, and the adjustment plate extends along the first direction.

[0006] In one embodiment, the second drive assembly further includes a support block disposed on the base, and the adjustment plate is slidably disposed on the top of the support block.

[0007] In one embodiment, the adjusting member is configured as an adjusting screw, the end of which abuts against the adjusting plate.

[0008] In one embodiment, the novel high-speed XY micro-motion mechanism further includes a rolling structure disposed on the adjusting plate and / or the connecting block, such that the connecting block is rolled relative to the adjusting plate when it moves along the first direction.

[0009] In one embodiment, the rolling structure is configured as a bearing or a ball.

[0010] In one embodiment, the connecting block includes a sliding plate and a mounting plate. The sliding plate is slidably disposed above the movable block, and the mounting plate is disposed at one end of the sliding plate near the fixed block and extends toward the base. The elastic element is disposed between the mounting plate and the movable block.

[0011] In one embodiment, the first driving assembly includes a drive motor, a first link, and a second link. The drive motor is driven to the first link to rotate. The first link extends radially along the output end of the drive motor. The end of the first link away from the drive motor is rotatably connected to the second link. The end of the second link away from the first link is hinged to the moving block. The drive motor drives the first link to rotate, thereby enabling the second link to drive the moving block to move on the base along the first direction.

[0012] In one embodiment, the first link is configured as an eccentric link.

[0013] In one embodiment, the first driving component further includes an X-axis guide rail disposed on the base, the X-axis guide rail extending along a first direction, and the second driving component further includes a Y-axis guide rail disposed on the moving block, the Y-axis guide rail extending along a second direction.

[0014] In the technical solution of this utility model, the novel high-speed XY micro-motion mechanism includes a base, on which a first driving component and a second driving component are disposed. The first driving component drives a moving block to move along a first direction on the base, and the second driving component drives a connecting block to move along a second direction on the moving block. The connecting block is used to support the carrier to be moved. The second driving component includes a fixed block fixed on the base, and an adjusting component that slides along the second direction is disposed on the fixed block. The adjusting component is screwed to the fixed block. When the adjusting component is rotated, its position in the second direction can be adjusted, thereby pushing the connecting block to move away from the fixed block. Reverse rotation of the adjusting component... When the component is adjusted, the adjusting component releases its resistance to the connecting block. Under the reset and rebound of the elastic component, the driving connecting block moves on the moving block toward the direction closer to the fixed block. The cooperation of the elastic component and the adjusting component makes the movement adjustment of the connecting block in the second direction simpler, which simplifies the drive structure of the entire new high-speed XY micro-motion mechanism, reduces structural complexity and cost. Moreover, since the adjusting component and the fixed block are fixed on the base, the position adjustment in the second direction is more independent. The motion unit in the first direction does not need to bear the overall mass of the second drive component, which reduces the load requirement of the first drive component, enabling it to achieve higher speeds and smaller sizes. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0016] Figure 1 A schematic diagram of an embodiment of a novel high-speed XY micro-motion mechanism provided by this utility model; Figure 2 A structural schematic diagram of a novel high-speed XY micro-motion mechanism provided by this utility model from another perspective; Figure 3 A schematic diagram of the structure of the first drive component in a novel high-speed XY micro-motion mechanism provided by this utility model.

[0017] Explanation of icon numbers: 100. Base; 200. Move block; 300, First drive assembly; 310, Drive motor; 320, First connecting rod; 330, Second connecting rod; 340, X-axis guide rail; 400. Connecting block; 410. Sliding plate; 420. Mounting plate; 500, Second drive assembly; 510, Fixed block; 520, Elastic element; 530, Adjusting element; 540, Adjusting plate; 550, Support block; 560, Rolling structure; 570, Y-axis guide rail.

[0018] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0020] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0021] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0022] As a basic device for motion control, the XY drive platform has a wide range of applications. Its basic function is to realize high-precision movement of loads on a two-dimensional plane. In short-stroke motion positioning scenarios, the traditional electric drive structure makes the entire system structure more complex, with a large load and higher manufacturing cost. Moreover, the stacked drive structure also requires the lower motion unit to bear the entire mass of the upper motion system at the same time, which requires the lower layer to provide a larger driving torque.

[0023] This utility model proposes a novel high-speed XY micro-motion mechanism.

[0024] Please see Figure 1 and Figure 2 In one embodiment of this utility model, the novel high-speed XY micro-motion mechanism includes: Base 100; The movable block 200 is slidably mounted on the base 100; A first driving component 300 is disposed on the base 100. The first driving component 300 is drivingly connected to the movable block 200 to drive the movable block 200 to slide along the first direction on the base 100. The connecting block 400 is slidably disposed on the moving block 200 along the second direction, and the connecting block 400 is used to support the carrier; The second drive assembly 500 includes a fixed block 510, an elastic element 520, and an adjusting element 530. The fixed block 510 is disposed on the base 100. The adjusting element 530 passes through the fixed block 510 and abuts against the connecting block 400 in a second direction. The adjusting element 530 and the connecting block 400 are slidably connected in a first direction. The adjusting element 530 is threadedly connected to the fixed block 510, making the length of the adjusting element 530 protruding from the side of the fixed block 510 facing the connecting block 400 adjustable. The elastic element 520 can deform along the second direction and connects to the connecting block 400, making the connecting block 400 tend to move closer to the fixed block 510.

[0025] In the technical solution of this utility model, the novel high-speed XY micro-motion mechanism includes a base 100, on which a first driving component 300 and a second driving component 500 are disposed. The first driving component 300 drives a moving block 200 to move along a first direction on the base 100, and the second driving component 500 drives a connecting block 400 to move along a second direction on the moving block 200. The connecting block 400 is used to support the carrier to be moved. The second driving component 500 includes a fixing block 510 fixed on the base 100, and an adjusting member 530 that slides along the second direction is disposed on the fixing block 510. The adjusting member 530 is screwed to the fixing block 510. When the adjusting member 530 is rotated, its position in the second direction can be adjusted, thereby pushing the connecting block 400 away from the fixing block 510. When the adjusting member 530 rotates in the opposite direction, it releases its resistance to the connecting block 400. Under the reset and rebound of the elastic member 520, the connecting block 400 is driven to move on the moving block 200 toward the direction closer to the fixed block 510. The cooperation of the elastic member 520 and the adjusting member 530 makes the movement adjustment of the connecting block 400 in the second direction simpler, which simplifies the drive structure of the entire new high-speed XY micro-motion mechanism, reduces structural complexity and cost. Moreover, since the adjusting member 530 and the fixed block 510 are fixed on the base 100, the position adjustment in the second direction is more independent. The motion unit in the first direction does not need to bear the overall mass of the second drive assembly 500, which reduces the load requirement of the first drive assembly 300, enabling it to achieve higher speeds and smaller sizes.

[0026] Specifically, this high-speed XY micro-motion mechanism can be applied in fields such as semiconductor manufacturing, laser processing, or automated assembly to drive the movement of operating components to pick up and place parts of workpieces. The application range of this novel high-speed XY micro-motion mechanism is wide, and will not be elaborated further here. The base 100 serves as the mounting base, and its shape, height, and material are not limited, as long as it has a mounting plane. In this embodiment, both the first drive component 300 and the second drive component 500 are mounted on the upper surface of the base 100. The structures of the first drive component 300 and the second drive component 500 can be the same or different, such as cylinders, electric telescopic rods, or lead screw modules to achieve linear drive. There are no limitations. Furthermore, the novel high-speed XY micro-motion mechanism of this application is suitable for scenarios where space is limited and minute movements are needed for position adjustment and calibration, such as driving the connecting block 400 to move the carrier over a short distance to achieve precise material picking or placing. It should be noted that the novel high-speed XY micro-motion mechanism of this application is not only suitable for short-distance movement scenarios but also for long-distance movement, as long as the length setting of the adjusting component can meet the movement distance. The movable block 200 is slidably mounted on the base 100, which can be achieved through a combination of guide rails and sliders, without limitation. The elastic element 520 can deform along the second direction and cooperates with the adjusting element 530 to drive the connecting block 400 to move along the second direction. In one embodiment, the elastic element 520 can be a helical spring, and in other embodiments, it can also be a disc spring, without limitation. The second driving assembly 500 drives the connecting block 400 to move on the movable block 200. The second driving assembly 500 is directly mounted on the base 100, avoiding the need for the first driving assembly 300 to bear the load of the second driving assembly 500 when driving the movable block 200, reducing the energy consumption of the first driving assembly 300 and the cost of the entire driving system, and facilitating high-speed movement of the connecting block 400.

[0027] In embodiments of this utility model, such as Figure 1 As shown, the second drive assembly 500 also includes an adjustment plate 540, which is disposed between the adjustment member 530 and the connecting block 400. The adjustment plate 540 extends along the first direction. As a force transmission structure between the adjustment member 530 and the connecting block 400, the adjustment plate 540 transforms the point contact of the adjustment member 530 into a surface contact between the adjustment plate 540 and the connecting block 400, increasing the contact area and making the movement in the second direction more stable. In addition, the adjustment plate 540 extends along the first direction so that its length direction is adapted to the sliding of the connecting block 400 along the first direction. No matter where the connecting block 400 moves along the first direction, it will not disengage from the adjustment plate 540. The adjustment plate 540 can always transmit the thrust of the adjustment member 530 to the connecting block 400 in a surface contact manner, so that the thrust of the adjustment member 530 can be evenly transmitted to the connecting block 400, improving the smoothness of the adjustment process.

[0028] In one embodiment, if the novel high-speed XY micro-motion mechanism in this embodiment is applicable to movement between two or more working positions, and the movement process is always reciprocating between these working positions, with each working position remaining unchanged, the side of the adjusting plate 540 that contacts the connecting block 400 can be set to an S-shape, that is, when the first driving component 300 drives the moving block 200 and the connecting block 400 to move along the first direction, they also move synchronously in the second direction.

[0029] In embodiments of this utility model, such as Figure 1 As shown, the second drive assembly 500 also includes a support block 550, which is disposed on the base 100. The adjustment plate 540 is slidably disposed on the top of the support block 550. By setting the support block 550 to support the adjustment plate 540, the adjustment plate 540 is prevented from bending and deforming during the pushing process due to being suspended in the air. This ensures that the thrust of the adjustment component 530 is transmitted to the connecting block 400. Furthermore, the support block 550 is fixed on the base 100, which reduces the vibration impact generated by the moving block 200 along the first direction, making the movement of the connecting block 400 along the second direction more stable.

[0030] It should be noted that, since the novel high-speed XY micro-motion mechanism in this embodiment is particularly suitable for structures that move a short distance in the second direction, especially in material handling applications, only two working positions are set in the second direction. In the first working position, the adjusting member 530 is in its original position, and the adjusting plate 540 is fixed to the support block 550 by screws. When it is necessary to adjust the position in the second direction, the fixing screws are removed or slightly loosened so that the adjusting plate 540 can move slightly. The adjusting member 530 is turned to push the adjusting plate 540 to the second working position, and then the fixing screws pass through the adjusting plate 540 and are fixedly connected to the support block 550. Since the support block 550 is fixed on the base 100 and does not move, the adjusting plate 540 can be provided with an elongated hole extending in the second direction. The fixing screws pass through the elongated hole and are screwed to the support block 550.

[0031] In embodiments of this utility model, such as Figure 1 As shown, the adjusting member 530 is configured as an adjusting screw. The end of the adjusting screw abuts against the adjusting plate 540. The adjusting screw passes through the fixing block 510 and is threadedly connected to the fixing block 510, which can achieve precise length adjustment. The adjustment screw is easy to rotate. By rotating the adjusting screw, the length of the adjusting screw protruding from the fixing block 510 can be controlled, thereby adjusting the position of the connecting block 400 in the second direction. The end of the adjusting screw abuts against the adjusting plate 540, and the torque is transmitted to the connecting block 400 through the adjusting plate 540, so that the connecting block 400 moves in the second direction away from the fixing block 510.

[0032] In the embodiments of this utility model, please refer to Figure 1 The novel high-speed XY micro-motion mechanism also includes a rolling structure 560, which is disposed on the adjusting plate 540 and / or the connecting block 400, so that the connecting block 400 is rolled relative to the adjusting plate 540 when moving along the first direction. The rolling structure 560 transforms the original hard sliding friction between the adjusting plate 540 and the connecting block 400 into rolling friction. The rolling structure 560 forms point contact or line contact between the adjusting plate 540 and the connecting block 400. When the first driving assembly 300 drives the connecting block 400 to move along the first direction, the rolling structure 560... The rolling motion of the 0 itself offsets the relative displacement of the contact surface, reduces motion friction and resistance, avoids component wear caused by sliding friction, and also solves the motion jamming problem caused by friction, achieving smooth linear movement. It should be noted that the rolling structure 560 can be set on the side of the connecting block 400 facing the adjusting plate 540, or on the side of the adjusting plate 540 facing the connecting block 400, or on both sides of the connecting block 400 and the adjusting plate 540. There are no restrictions here, as long as relative rolling between the two can be achieved.

[0033] In one embodiment, the rolling structure 560 is configured as a bearing, which is mounted on the connecting block 400 and rotates relative to the adjusting plate 540, thereby reducing the motion resistance between the connecting block 400 and the adjusting plate 540 when the connecting block 400 moves in the first direction.

[0034] In one embodiment, the rolling structure 560 is configured as a ball (not shown). The ball can be set on the adjusting plate 540 or on the connecting block 400. The ball is set so that the adjusting plate 540 and the connecting block 400 are in point contact, reducing the contact area. When the connecting block 400 moves, the ball rolls at the same time, reducing the friction between the movements and making the movement of the connecting block 400 more smooth along the first direction.

[0035] In embodiments of this utility model, such as Figure 1As shown, the connecting block 400 includes a sliding plate 410 and a mounting plate 420. The sliding plate 410 is slidably disposed above the movable block 200. The mounting plate 420 is disposed at one end of the sliding plate 410 near the fixed block 510 and extends toward the base 100. An elastic element 520 is disposed between the mounting plate 420 and the movable block 200. The sliding plate 410 slides on the movable block 200 and carries the carrier. The carrier can be mounted on the sliding plate 410 by screwing. The shape of the sliding plate 410 is not limited, but it needs to have a mounting surface to carry the carrier. The mounting plate 420 is provided at the bottom of the end of the sliding plate 410 near the fixed block 510. The mounting plate 420 extends downward to form an "L"-shaped cantilever structure, and the mounting plate 420 is disposed between the fixed plate and the movable plate. There is a gap extending along the second direction between the mounting plate 420 and the movable plate. The elastic element 520 is installed in this gap. The compression deformation direction of the elastic element 520 is consistent with the second direction. When the adjusting member 530 is rotated, the adjusting member 530 and the adjusting plate 540 move toward the connecting block 400 and push the connecting block 400. At this time, the elastic element 520 is compressed. When the adjusting member 530 and the adjusting plate 540 move away from the connecting block 400 along the second direction, the pushing force on the connecting block 400 along the second direction is released. The elastic element 520 rebounds, forcing the entire connecting block 400 to continue moving toward the fixed block 510. Moreover, the mounting plate 420 and the sliding plate 410 are integrally formed, making the structure of the entire connecting block 400 more stable and avoiding deformation and displacement of the mounting plate 420 during the pushing process due to separate settings, which would affect the moving accuracy.

[0036] In an embodiment of this utility model, the first driving assembly 300 includes a driving motor 310, a first connecting rod 320, and a second connecting rod 330. The driving motor 310 is drivingly connected to the first connecting rod 320 to drive the first connecting rod 320 to rotate. The first connecting rod 320 extends radially along the output end of the driving motor 310. The end of the first connecting rod 320 away from the driving motor 310 is rotatably connected to the second connecting rod 330. The end of the second connecting rod 330 away from the first connecting rod 320 is hinged to the moving block 200 so that the first connecting rod 320 is driven to rotate by the driving motor 310, thereby enabling the second connecting rod 330 to drive the moving block 200 to move along the first direction on the base 100.

[0037] Specifically, the first drive assembly 300 includes a drive motor 310, which is mounted on the base 100. The output shaft of the drive motor 310 extends along a second direction. One end of the first connecting rod 320 is connected to the output shaft of the drive motor 310 at its axis, and the other end is away from the axis of the drive motor 310's output end and is drivenly connected to the second connecting rod 330. Since both ends of the second connecting rod 330 are rotatably connected to the first connecting rod 320 and the moving block 200 respectively, as... Figure 2 and Figure 3 As shown, when the drive motor 310 drives the first link 320 to rotate clockwise, it drives the second link 330 to move in the first direction away from the drive motor 310. The second link 330 drives the moving block 200 to move in the first direction, so that the moving block 200 drives the connecting block 400 to slide in the first direction.

[0038] In one embodiment, the drive motor 310 can also adopt an arbitrary rotating structure such as a crank, or a voice coil motor, etc. In other embodiments, the first drive assembly 300 can adopt a linear drive structure such as a cylinder and an electric telescopic rod. The piston rod extends along the first direction and is directly connected to the moving block 200. The piston rod extends and retracts along the first direction, causing the moving block 200 to slide on the base 100 along the first direction, thereby causing the connecting block 400 to slide in the first direction.

[0039] In embodiments of this utility model, such as Figure 2 and Figure 3 As shown, the first link 320 is configured as an eccentric link, which can convert rotational motion into linear reciprocating motion. The rotation center of the eccentric link is offset from the geometric center. One end is coaxially connected to the output end of the drive motor 310, and the other end is rotatably connected to the second link 330, converting the rotation of the first link 320 into the linear reciprocating motion of the second link 330. One end of the first link 320 rotates with the output end of the drive motor 310, and the other end performs circular motion accordingly. By rotating with the second link 330, the second link 330 performs linear motion. The eccentric link configuration makes the linear movement more stable and more accurate. By changing the length of the eccentric link, the movement distance of the second link 330 can be adjusted.

[0040] In embodiments of this utility model, such as Figure 1 and Figure 2 As shown, the first drive assembly 300 also includes an X-axis guide rail 340 disposed on the base 100, which extends along the first direction. The second drive assembly 500 also includes a Y-axis guide rail 570 disposed on the moving block 200, which extends along the second direction. The X-axis guide rail 340 and the Y-axis guide rail 570 are intersected. The setting of the X-axis guide rail 340 provides a guiding constraint for the sliding of the moving block 200 along the first direction, ensuring that the moving block 200 can slide along a predetermined trajectory and improving the accuracy of movement in the first direction. Similarly, the Y-axis guide rail 570 is disposed on the moving block 200 to guide the movement of the connecting block 400 along the sliding direction. When the elastic member 520 rebounds, it can quickly return to its original position and avoid deviation.

[0041] The above description is merely an exemplary embodiment of the present utility model and does not limit the scope of protection of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present utility model.

Claims

1. A novel high-speed XY micro-motion mechanism, characterized in that, include: Base; The movable block is slidably mounted on the base; A first driving component is disposed on the base, and the first driving component is drivingly connected to the movable block to drive the movable block to slide on the base along a first direction; A connecting block is slidably disposed on the movable block along the second direction, and the connecting block is used to support the carrier. The second driving assembly includes a fixed block, an elastic element, and an adjusting element. The fixed block is disposed on the base. The adjusting element passes through the fixed block and abuts against the connecting block in the second direction. The adjusting element and the connecting block are slidably connected in the first direction. The adjusting element is threadedly connected to the fixed block so that the length of the adjusting element protruding from the fixed block facing the connecting block is adjustable. The elastic element can deform along the second direction and is connected to the connecting block so that the connecting block has a tendency to move closer to the fixed block.

2. The novel high-speed XY micro-motion mechanism as described in claim 1, characterized in that, The second drive assembly further includes an adjustment plate disposed between the adjustment member and the connecting block, and the adjustment plate extends along the first direction.

3. The novel high-speed XY micro-motion mechanism as described in claim 2, characterized in that, The second drive assembly further includes a support block disposed on the base, and the adjustment plate is slidably disposed on the top of the support block.

4. The novel high-speed XY micro-motion mechanism as described in claim 2, characterized in that, The adjusting component is configured as an adjusting screw, the end of which abuts against the adjusting plate.

5. The novel high-speed XY micro-motion mechanism as described in claim 2, characterized in that, The novel high-speed XY micro-motion mechanism further includes a rolling structure, which is disposed on the adjusting plate and / or the connecting block, so that the connecting block is rolled relative to the adjusting plate when it moves along the first direction.

6. The novel high-speed XY micro-motion mechanism as described in claim 5, characterized in that, The rolling structure is configured as a bearing or a ball bearing.

7. The novel high-speed XY micro-motion mechanism as described in claim 1, characterized in that, The connecting block includes a sliding plate and a mounting plate. The sliding plate is slidably disposed above the moving block. The mounting plate is disposed at one end of the sliding plate near the fixed block and extends toward the base. The elastic element is disposed between the mounting plate and the moving block.

8. The novel high-speed XY micro-motion mechanism as described in any one of claims 1-7, characterized in that, The first drive assembly includes a drive motor, a first link, and a second link. The drive motor is driven to the first link to rotate. The first link extends radially along the output end of the drive motor. The end of the first link away from the drive motor is rotatably connected to the second link. The end of the second link away from the first link is hinged to the moving block. The drive motor drives the first link to rotate, thereby enabling the second link to drive the moving block to move on the base along the first direction.

9. The novel high-speed XY micro-motion mechanism as described in claim 8, characterized in that, The first link is configured as an eccentric link.

10. The novel high-speed XY micro-motion mechanism as described in claim 9, characterized in that, The first driving component further includes an X-axis guide rail disposed on the base, the X-axis guide rail extending along a first direction, and the second driving component further includes a Y-axis guide rail disposed on the moving block, the Y-axis guide rail extending along a second direction.

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