A multi-stage heating system for a wafer cleaning apparatus

Abstract

The utility model relates to wafer cleaning technical field, concretely relates to a kind of multistage heating system of wafer cleaning equipment, including multiple four-stage heating module being arranged in cleaning module;Cleaning module includes multiple cleaning chamber, and cleaning chamber is stacked to form tower structure;Four-stage heating module is respectively arranged in every layer of tower structure, and the liquid pipe of each layer is heated.Aiming at the problem that the wafer cleaning liquid supply module in the prior art is heated after liquid medicine, the long distance of pipeline transportation, the big problem of temperature fluctuation, in the scheme, four-stage heating module of miniaturization is integrated for each layer in the tower structure of wafer cleaning equipment, to maintain the temperature of liquid medicine pipe in cleaning machine, avoid the problem of unstable temperature possibly caused by long distance of liquid medicine pipe transportation.

Description

Technical Field

[0001] This utility model relates to the field of wafer cleaning technology, and specifically to a multi-stage heating system for wafer cleaning equipment. Background Technology

[0002] A wafer cleaning unit is a device mounted on a machine that moves above the wafer under the action of an external mechanical mechanism to spray appropriate cleaning agents onto the wafer surface. It typically consists of a chemical storage tank, pump, solution tubing, nozzles, and additional structural components. Some chemical agents, such as sulfuric acid and phosphoric acid, require a specific temperature to meet the cleaning process's temperature requirements, such as 180 degrees Celsius, to achieve effective cleaning. Therefore, cleaning equipment usually also requires a corresponding heating device.

[0003] For example, patent document CN202011005053.4 discloses a wafer cleaning device. The wafer cleaning device includes a process tank assembly, which includes a tank body assembly and a safety control circuit. The tank body assembly includes a tank body and a heater. The tank body is used to hold the cleaning fluid, and the heater is used to heat the cleaning fluid in the tank body. The safety control circuit includes a first control circuit and a second control circuit. The first control circuit is used to control the second control circuit to be on or off, and the second control circuit is used to control the heater to be on or off. The first control circuit includes a first controller and a leakage detection component connected in series. When the control part of the first controller is energized, its switch is closed; when the control part is de-energized, the switch is open. The control part of the first controller is connected in series in the first control circuit. The second control circuit includes a second controller. The switch part of the second controller is connected in series in the second control circuit, and the control part of the second controller is connected in series with the switch part of the first controller.

[0004] However, in actual implementation, the inventors found that the relevant wafer cleaning equipment is usually heated by the circulating heating pipe built into the liquid supply system, or by adding a heater at the end of the liquid supply system. The liquid supply system itself is set at a certain distance from the cleaning machine, and needs to be connected by pipes. During the external pipeline transportation process, the temperature of the liquid may drop due to heat dissipation from the pipeline, which does not meet the relevant cleaning requirements. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, a multi-stage heating system for a wafer cleaning device is provided.

[0006] The specific technical solution is as follows:

[0007] A multi-stage heating system for a wafer cleaning equipment includes multiple four-stage heating modules disposed in the cleaning module;

[0008] The cleaning module includes multiple cleaning chambers, which are stacked to form a tower-like structure.

[0009] The four-stage heating modules are respectively installed in each layer of the tower-shaped structure to heat the liquid medicine pipes in each layer.

[0010] On the other hand, the four-stage heating module is a pipe heater, an electric heat tracing device, or a trough heater.

[0011] On the other hand, the cleaning module includes multiple sets of liquid pipelines;

[0012] Each group of the medicine liquid pipelines is equipped with the four-stage heating module on each layer.

[0013] On the other hand, it also includes a three-stage heating module;

[0014] The three-stage heating module is installed on the input pipe of the cleaning module, and the input pipe is connected to the liquid medicine pipe.

[0015] On the other hand, it also includes a liquid supply module, which includes a liquid storage tank;

[0016] The liquid supply module is connected to the cleaning module through a liquid supply pipeline, and a secondary heating module is installed on the liquid supply pipeline.

[0017] On the other hand, the liquid supply module includes a main liquid supply pump;

[0018] The input end of the main liquid supply pump is connected to the first output end of the liquid storage tank;

[0019] The output end of the main liquid supply pump is connected to the liquid supply pipeline.

[0020] On the other hand, it also includes a return pipe, the first end of which is connected to the return end of the liquid medicine pipe of the cleaning module;

[0021] The second end of the return pipe is connected to the return end of the medicine storage tank.

[0022] On the other hand, the liquid supply module also includes a circulation pump and a storage tank circulation pipeline;

[0023] The first end of the storage tank circulation pipeline is connected to the second output end of the medicine storage tank;

[0024] The second end of the storage tank circulation pipe is connected to the circulation end of the medicine storage tank;

[0025] A circulation pump and a primary heating module are sequentially installed on the circulation pipeline of the storage tank.

[0026] On the other hand, the tower-like structure includes two layers, and the liquid medicine pipeline is provided with two branch pipelines;

[0027] The four-stage heating module is provided with four units.

[0028] On the other hand, the liquid medicine pipe is wrapped with heat insulation material.

[0029] The above technical solution has the following advantages or beneficial effects:

[0030] To address the issues of long pipeline transport distances and large temperature fluctuations in existing wafer cleaning solution supply modules after heating the solution, this solution integrates miniaturized four-stage heating modules on each layer of the tower-like structure of the wafer cleaning equipment. This maintains the temperature of the solution pipelines in the cleaning machine, avoiding the temperature instability that may result from long-distance solution transport. Attached Figure Description

[0031] Embodiments of the present invention will be described more fully with reference to the accompanying drawings. However, the accompanying drawings are for illustration and explanation only and do not constitute a limitation on the scope of the present invention.

[0032] Figure 1 This is an overall schematic diagram of an embodiment of the present utility model; Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0035] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention.

[0036] This utility model includes:

[0037] A multi-stage heating system for a wafer cleaning device, such as Figure 1 As shown, it includes multiple four-stage heating modules H4 disposed in the cleaning module 2;

[0038] The cleaning module 2 includes multiple cleaning chambers 21, which are stacked to form a tower-like structure.

[0039] The four-stage heating modules H4 are installed in each layer of the tower-like structure to heat the liquid medicine pipes in each layer.

[0040] Specifically, addressing the issues of long pipeline transport distances and large temperature fluctuations in existing wafer cleaning solution supply modules after heating the solution, this solution integrates miniaturized four-stage heating modules H4 into each layer of the tower-like structure of the wafer cleaning equipment to maintain the temperature of the solution pipelines in the cleaning machine, thus avoiding the temperature instability that may result from long-distance solution pipeline transport.

[0041] In practical implementation, the aforementioned multi-stage heating system is achieved by connecting multiple heating modules in series on the liquid medicine pipeline. Each heating module can be any of the following: a pipeline heater, an electric heat tracing device, or a tank heater. It is connected to or wrapped around the corresponding liquid medicine pipeline and powered by a corresponding power supply cable. The heating module mainly operates on the principle of electrothermal heating, generating heat by heating special conductive materials such as resistance wires or graphite sheets. Subsequently, heat is conducted between the module and the liquid medicine pipeline through relevant contact materials, thus heating the cleaning agent flowing through the pipeline.

[0042] In some embodiments, to achieve accurate temperature control, a temperature sensor may be integrated into the heating module to facilitate temperature loop control by the controller. This control process is common and easy to implement in the prior art, such as using a PID controller built based on temperature parameters for closed-loop control.

[0043] The chemical solution pipeline, as well as the supply pipeline and return pipeline mentioned below, are essentially the same pipeline. The different names are mainly used to distinguish different parts. Generally speaking, the chemical solution pipeline consists of pipes, bends, distributors, connectors, etc., and is built into different modules, including cleaning modules and supply modules, as well as the connection between the cleaning modules and supply modules for chemical solution transportation and return.

[0044] To achieve better thermal insulation properties, in some embodiments, the pipes are wrapped with thermal insulation material.

[0045] The liquid supply module 1 is a liquid delivery device, mainly composed of a liquid storage tank 11, a main liquid supply pump 12, and an auxiliary liquid supply pipeline. The liquid supply module 1 shown in the figure is a simplified structure for a single liquid, which only has a set of liquid storage tanks 11 and main liquid supply pumps 12. The liquid storage tanks 11 store the corresponding cleaning liquids, such as sulfuric acid, phosphoric acid, isopropanol, etc.

[0046] Depending on the needs of the actual application, multiple sets of liquid supply modules 1 may also be required to store and transport different types of liquid medicines. In this case, multiple sets of pipelines may need to be set up separately, or structures such as mixers may be added to mix the liquid medicines. These auxiliary structures can be set up arbitrarily as needed, and they can also be found in the existing technology.

[0047] The first output end of the liquid medicine storage tank 11 is connected to the input end of the main liquid supply pump 12 through the liquid supply pipeline. The main liquid supply pump 12 operates according to the control signals input from the remote end and pumps the liquid medicine to the cleaning module 2.

[0048] In general, in the actual equipment structure, the output end of the main liquid supply pump 12 is first connected to the output connector of the liquid supply module 1 through the liquid supply pipeline. The output connector of the liquid supply module 1 is then connected to the input connector of the cleaning module 2 through the liquid supply pipeline installed during later construction to form a complete pipeline.

[0049] The liquid supply module 1 is usually equipped with at least one heating device to heat the liquid output from the liquid supply pipeline, so that the liquid temperature during the cleaning process meets the expectations.

[0050] Cleaning module 2 is a device used for wafer cleaning, such as a cleaning machine. To achieve functional zoning and piping layout, the cleaning module typically contains multiple cleaning chambers, arranged in a stacked, tower-like structure. Each cleaning chamber is equipped with corresponding nozzles for spraying the wafers.

[0051] In cleaning module 2, the outside of the input connector is connected to the liquid supply pipeline, and the inside of the input connector is connected to the medicine pipeline. The medicine pipeline is laid out in the internal structure of the machine according to the relevant design of the equipment. It can be adjusted arbitrarily as needed, but each medicine pipeline must be connected to the corresponding connector of the cleaning chamber. There may be corresponding conversion connectors, branches, tees or other equivalent connectors in the middle.

[0052] Considering that the temperature at the nozzle may decrease after long-distance transport and the degree of decrease is uncontrollable, this solution integrates a corresponding four-stage heating module H4 in each layer of the tower structure. The module is set on the liquid pipeline to heat the liquid pipeline near the cleaning chamber, thereby achieving a more precise temperature control process and improving cleaning efficiency.

[0053] In one embodiment, to achieve the recycling of the medicine solution, a return pipe is also included, the first end of which is connected to the return end of the medicine solution pipe of the cleaning module 2.

[0054] The second end of the return pipe is connected to the return end of the medicine storage tank 11.

[0055] When the medicine solution is not used up in the medicine solution pipeline, it is returned to the medicine solution storage tank 11 through the return pipeline for recycling.

[0056] In one embodiment, the fourth-stage heating module H4 is a pipe heater, an electric heat tracing device, or a trough heater.

[0057] Specifically, by designing the four-stage heating module H4 as a pipeline heater, electric heat tracing, or tank heater, a better heating effect can be achieved on the cleaning solution inside the pipeline.

[0058] In one embodiment, the liquid medicine pipeline in the cleaning module 2 includes multiple sets of liquid medicine pipelines;

[0059] Each set of medicine liquid pipelines is equipped with a four-stage heating module H4 on each layer.

[0060] Specifically, in order to achieve a better local heating effect, in this embodiment, in the cleaning module 2 which is equipped with multiple sets of liquid pipes, a corresponding four-level heating module H4 is set on each layer for each set of liquid pipes to achieve a better precise heating effect.

[0061] For example, in a certain type of cleaning module 2, the tower-shaped structure includes two layers, and the liquid pipeline is provided with two branch pipelines. Each branch pipeline is connected to the nozzle of the cleaning chamber of each layer. Then, a four-stage heating module H4 is set on each branch pipeline of each layer, for a total of four, so as to achieve a better heating effect for each nozzle.

[0062] In one embodiment, a three-stage heating module H3 is also included;

[0063] The three-stage heating module H3 is installed on the input pipe of the cleaning module 2, and the input pipe is connected to the liquid medicine pipe.

[0064] Specifically, considering the high integration of the cleaning chamber and the liquid pipeline in existing cleaning modules, which may result in limited remaining space, this embodiment first installs a three-stage heating module H3 on the input pipeline of cleaning module 2. The first end of this input pipeline is directly connected to the inside of the input connector of cleaning module 2, and the other end is connected to the liquid pipeline. In embodiments with multiple branches in the liquid pipeline, the input pipeline is directly connected to the multi-port connector at the very front of each branch of the liquid pipeline.

[0065] The third-stage heating module H3 is equipped with a temperature controller with a predetermined heating power. It can be implemented based on a pipeline heater, electric heat tracing, or tank heater. Its function is to first heat and compensate the liquid after passing through the external pipeline between the liquid supply module 1 and the cleaning module 2. At the same time, it reduces the temperature compensation requirements on the subsequent branch liquid pipelines through preheating compensation, which is conducive to the miniaturization of the fourth-stage heating module H4.

[0066] The aforementioned three-stage and four-stage heating methods can also be configured in conjunction with other heating methods, for example:

[0067] In one embodiment, the liquid supply module further includes a circulation pump 13 and a storage tank circulation pipeline;

[0068] The first end of the storage tank circulation pipeline is connected to the second output end of the medicine storage tank 11;

[0069] The second end of the storage tank circulation pipeline is connected to the circulation end of the medicine storage tank 11;

[0070] A circulation pump 13 and a primary heating module H1 are sequentially installed on the circulation pipeline of the storage tank.

[0071] Specifically, in order to effectively maintain the temperature of the liquid medicine in the liquid medicine storage tank 11, this embodiment integrates a circulation pump 13 and a storage tank circulation pipe in the liquid supply module 1. The two ends of the storage tank circulation pipe are the second output end of the liquid medicine storage tank 11 and the circulation end of the liquid medicine storage tank 11, respectively. The circulation pump 13 drives the liquid medicine from the second output end of the liquid medicine storage tank 11 and pumps it to the circulation end of the liquid medicine storage tank 11 for return flow.

[0072] During this process, the primary heating module H1 behind the circulation pump 13 will continuously heat the liquid medicine in the circulation pipeline of the storage tank to maintain the temperature of the liquid medicine in the storage tank.

[0073] In one embodiment, a secondary heating module H2 is provided on the liquid supply pipeline, and the secondary heating module H2 is located behind the main liquid supply pump 12.

[0074] Specifically, in order to achieve effective temperature control of the output liquid medicine, in this embodiment, a secondary heating module H2 is added to the liquid supply module 1. The secondary heating module H2 is located behind the main liquid supply pump 12. When the main liquid supply pump 12 starts pumping liquid medicine according to the corresponding requirements, it is first heated to a certain temperature by the secondary heating module H2 before being output.

[0075] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-stage heating system for a wafer cleaning equipment, characterized in that, Includes multiple four-stage heating modules installed within the cleaning module; The cleaning module includes multiple cleaning chambers, which are stacked to form a tower-like structure. The four-stage heating modules are respectively installed in each layer of the tower-shaped structure to heat the liquid medicine pipes in each layer.

2. The multi-stage heating system according to claim 1, characterized in that, The four-stage heating module is a pipe heater, an electric heat tracing device, or a trough heater.

3. The multi-stage heating system according to claim 1, characterized in that, The cleaning module includes multiple sets of liquid medicine pipelines. Each group of the medicine liquid pipelines is equipped with the four-stage heating module on each layer.

4. The multi-stage heating system according to claim 1, characterized in that, It also includes a three-stage heating module; The three-stage heating module is installed on the input pipe of the cleaning module, and the input pipe is connected to the liquid medicine pipe.

5. The multi-stage heating system according to claim 1, characterized in that, It also includes a liquid supply module, which includes a liquid storage tank; The liquid supply module is connected to the cleaning module through a liquid supply pipeline, and a secondary heating module is installed on the liquid supply pipeline.

6. The multi-stage heating system according to claim 5, characterized in that, The liquid supply module includes a main liquid supply pump; The input end of the main liquid supply pump is connected to the first output end of the liquid storage tank; The output end of the main liquid supply pump is connected to the liquid supply pipeline.

7. The multi-stage heating system according to claim 5, characterized in that, It also includes a return pipe, the first end of which is connected to the return end of the liquid medicine pipe of the cleaning module; The second end of the return pipe is connected to the return end of the medicine storage tank.

8. The multi-stage heating system according to claim 5, characterized in that, The liquid supply module also includes a circulation pump and a storage tank circulation pipeline; The first end of the storage tank circulation pipeline is connected to the second output end of the medicine storage tank; The second end of the storage tank circulation pipe is connected to the circulation end of the medicine storage tank; A circulation pump and a primary heating module are sequentially installed on the circulation pipeline of the storage tank.

9. The multi-stage heating system according to claim 3, characterized in that, The tower-like structure comprises two layers, and the liquid medicine pipeline is provided with two branch pipelines; The four-stage heating module is provided with four units.

10. The multi-stage heating system according to claim 1, characterized in that, The liquid medicine pipeline is wrapped with thermal insulation material.

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