A transfer arm

Abstract

The application discloses a transfer supporting arm, which comprises a mounting section fixed to a mounting position and a supporting section connected with the mounting section, wherein the mounting section is provided with a limiting piece near one end of the supporting section to limit the displacement of a tray on the supporting section, the supporting section is provided with a mounting surface, the mounting surface is provided with two positioning pieces for supporting the tray, the two positioning pieces are oppositely and separately arranged along a preset direction, and the two positioning pieces and the mounting surface jointly form a space for accommodating a deformed area of the tray. The application provides the transfer supporting arm to solve the technical problem that the tray is prone to shaking or rotating during the transfer on the transfer supporting arm after the tray is deformed due to long-term use, and then the objects in the tray are shaken and damaged.

Description

Technical Field

[0001] This application belongs to the field of wafer transfer technology, specifically relating to a transfer arm. Background Technology

[0002] During wafer transfer, the wafer is first placed in a tray, then the tray is placed on the transfer arm of the transfer device. The drive system controls the movement, lifting, and rotation of the transfer arm to transfer the tray to the corresponding processing equipment such as the lithography machine or etching machine. Finally, a robotic arm or manual operation removes the tray from the transfer arm and places it in the corresponding location. However, the tray is prone to localized deformation due to frequent loading and unloading during use. When a deformed tray is placed on the transfer arm, its deformed area forms uneven contact with the mounting surface of the arm, with the protruding parts directly abutting the mounting surface, disrupting the stable fit between the tray and the arm. During the movement of the transfer arm, the protruding parts of the tray abutting the mounting surface generate rotational torque around the contact point during acceleration, deceleration, or turning, causing the tray to rotate or wobble on the arm. The rotation or shaking of the tray will be directly transmitted to the internal wafer, causing the wafer to shake within the limiting groove of the tray. This may not only cause friction and scratches between the wafer and the inner wall of the groove, but may also cause the wafer edge to crack due to the inertial force generated by the shaking, affecting the wafer processing and production. Utility Model Content

[0003] This application provides a transfer arm to solve the technical problem that after a pallet is deformed due to long-term use, it is prone to shaking or rotating during the transfer process on the transfer arm, which in turn leads to shaking and damage of the objects inside the pallet.

[0004] The technical solution adopted in this application is as follows: A transfer arm includes an installation section fixed to an installation position and a support section connected to the installation section. The installation section is provided with a limiting member near one end of the support section to limit the displacement of the pallet in the support section. The support section is provided with an installation surface, and the installation surface is provided with two positioning members for supporting the pallet. The two positioning members are arranged at intervals relative to each other along a preset direction. The two positioning members and the installation surface together form a space for accommodating the deformation area of ​​the pallet.

[0005] The transfer arm in this application also includes the following additional technical features: The supporting section is provided with a mounting groove. The positioning components include a fixing component set in the mounting groove and a telescopic component telescopically set in the fixing component. The top of the fixing component is parallel to the mounting surface. The telescopic component has a retracted state hidden in the fixing component and a supporting state abutting against the tray.

[0006] The top of the telescopic component is provided with an abutment that abuts against the tray. The abutment is provided with an elastic buffer that abuts against the tray. The elastic buffer is provided with an abutment surface that matches the outer contour of the tray.

[0007] The fastener has a guide hole, the telescopic component is axially movable along the guide hole, one of the telescopic component and the guide hole has a guide groove, and the other has a guide protrusion.

[0008] The fixing component has a positioning hole that communicates with the guide hole and protrudes from the surface of the supporting section. The transfer arm has a locking component. The telescopic component has multiple fixing holes that cooperate with the locking component. The multiple fixing holes are arranged sequentially at intervals along the circumference of the telescopic component. The locking component passes through the positioning hole and selectively cooperates with the fixing holes at different positions to fix the telescopic component in the corresponding position.

[0009] The supporting section includes a support section connected to the installation section and a positioning section connected to the support section and extending toward the side away from the installation section. The extension direction of the support section is perpendicular to the axial direction of the positioning section. Limiting protrusions are provided at both ends of the support section along the extension direction of the support section.

[0010] The two positioning components are a first positioning component near the limiting component and a second positioning component located on the side of the first positioning component away from the limiting component. The first positioning component is located on the support section and extends along the extension direction of the support section. The second positioning component is located on the positioning section. An auxiliary limiting component is provided on the side of the second positioning component away from the limiting component. The auxiliary limiting component is higher than the second positioning component in the direction perpendicular to the mounting surface.

[0011] The transfer arm is also equipped with a detection device for detecting the distance between the pallet and the mounting surface, and the detection device is located between the two positioning components.

[0012] The support section is equipped with a positioning groove, and the detection device is set in the positioning groove. The top of the detection device is lower than the mounting surface or parallel to the mounting surface.

[0013] The limiting component has an inclined guide surface, the inclination direction of which points towards the mounting surface to guide the tray into the mounting surface.

[0014] Due to the adoption of the above technical solution, the beneficial effects achieved by this application are as follows: 1. This application, by incorporating limiting components, provides lateral obstruction to the pallet during placement, restricting its displacement towards the mounting section and preventing offset during transport arm movement, thus ensuring pallet positioning. Simultaneously, by setting two positioning components, which, together with the mounting surface, form a space to accommodate pallet deformation areas. Over long-term use, pallets are prone to warping, denting, and other deformations. The space between the two positioning components prevents direct contact between the deformed areas and the mounting surface, avoiding imbalances in pallet stress caused by localized contact with the support arm, thereby preventing swaying and rotation of the pallet and its internal load during transport. Furthermore, the two positioning components also provide auxiliary positioning of the pallet from both sides, improving positional stability during transport.

[0015] 2. In a preferred embodiment of this application, an installation groove is provided, offering a stable mounting base for the positioning component. The top of the fixing component remains parallel to the mounting surface, ensuring flatness when the positioning component contacts the pallet and preventing pallet tilting due to installation errors. The telescopic component has both a retractable and a support state, allowing it to flexibly adapt to pallets with varying degrees of deformation. When the pallet deforms, the telescopic component extends and closely abuts against the pallet, dynamically adjusting the support height to stably support the deformed pallet. Simultaneously, the telescopic component's retractable state, hidden within the fixing component, reduces its space occupation when not in use, lowers the risk of interference with other components, and improves the stability of the transfer process and the equipment's adaptability.

[0016] Furthermore, by setting an abutment at the top of the telescopic component, the abutment contacts the pallet through an elastic buffer. The elastic buffer absorbs minor vibrations during transport, reducing rigid impacts between the pallet and the positioning component, and preventing the load inside the pallet from shaking due to vibration transmission. The elastic buffer has an abutment surface that adapts to the outer contour of the pallet, making the force on the pallet more even. Simultaneously, the elastic buffer can adapt to pallet deformation, maintaining a stable fit even with irregular pallet deformation. Combined with the contour-adaptive design of the abutment surface, this further enhances the positioning component's tolerance and adaptability to deformed pallets.

[0017] 3. In a preferred embodiment of this application, the guide hole provides a basic path for the axial movement of the telescopic component. The cooperation between the guide groove and the guide protrusion restricts the direction of movement of the telescopic component, preventing deviation or rotation during the telescopic process. The cooperation between the guide groove and the guide protrusion also improves the smoothness of the telescopic component's movement and reduces jamming during adjustment. Furthermore, by setting a locking element that passes through the positioning hole and selectively engages with fixing holes at different positions, the extension height of the telescopic component can be precisely adjusted. This allows the positioning element to flexibly adapt to the degree of pallet deformation, ensuring effective support for deformed pallets. Simultaneously, the engagement of the locking element with the positioning and fixing holes ensures the telescopic component remains stable after adjustment, preventing accidental displacement due to vibration or external forces during transport. This guarantees the reliability of the support, further enhancing the stability of the pallet during transport and providing continuous and stable protection for the internal load.

[0018] 4. As a preferred embodiment of this application, by setting the extension direction of the support section perpendicular to the axial direction of the positioning section, a large-area, stable load-bearing support surface can be provided for the pallet. Combined with the positioning section extending towards the side away from the installation section, it can not only provide stable support for the pallet but also reduce the overall weight of the support arm. By setting limiting protrusions at both ends of the support section, a lateral obstruction can be formed on the pallet along the length direction of the support section, further preventing the pallet from shifting or swaying along the extension direction of the support section during the movement of the transfer support arm.

[0019] Furthermore, by extending the first positioning member along the extension direction of the support section, the contact area between the first positioning member and the pallet is increased, providing stable support for the pallet. By setting an auxiliary limiting member on the side of the second positioning member away from the limiting member, the auxiliary limiting member is higher than the second positioning member in the direction perpendicular to the mounting surface. The second positioning member can support the pallet, and the auxiliary limiting member can block the pallet from shifting laterally, preventing the pallet from shifting or rotating during transportation.

[0020] 5. As a preferred embodiment of this application, by placing the detection device between the two positioning components, the overall fit of the pallet can be accurately captured, achieving accurate detection of the pallet. By detecting the distance between the pallet and the mounting surface, the degree of pallet deformation can be fed back. When the pallet is severely deformed, the corresponding deformed area is too close to the mounting surface, which can remind the operator to replace the pallet and avoid the pallet shaking or rotating during transportation.

[0021] Furthermore, by setting positioning grooves, which provide installation space for the detection device, a physical limit is created for the device, ensuring that the detection points always accurately correspond to the detection area of ​​the tray. By setting the top of the detection device to be lower than or parallel to the mounting surface, direct contact between the detection device and the tray can be avoided, preventing damage to the detection device due to external pressure.

[0022] 6. In a preferred embodiment of this application, the limiting member is provided with an inclined guide surface, the inclined direction of which points towards the mounting surface. The guide surface can guide the pallet into the mounting surface, reducing the difficulty of pallet alignment and improving pallet loading efficiency. At the same time, the guiding effect of the guide surface can ensure that the pallet finally fits precisely against the mounting surface, avoiding uneven contact between the pallet and the mounting surface and positioning member due to initial placement offset. Attached Figure Description

[0023] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a main schematic diagram of the transfer arm according to one embodiment of this application; Figure 2 This is a right schematic diagram of a transfer arm according to one embodiment of this application; Figure 3 for Figure 2 Enlarged view of part A in the middle.

[0024] List of components and reference numerals: 1. Installation section; 2. Support section; 21. Support section; 22. Positioning section; 23. Limiting protrusion; 24. Positioning groove; 3. Limiting component; 31. Guide surface; 4. Installation surface; 5. Positioning component; 51. Fixing component; 52. Telescopic component; 53. Abutment component; 54. Elastic buffer component; 6. Locking component; 7. Auxiliary limiting component; 8. Detection device. Detailed Implementation

[0025] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0026] Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below. It should be noted that, unless otherwise specified, the embodiments of this application and the features thereof can be combined with each other.

[0027] Furthermore, it should be understood in the description of this application that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0028] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0030] like Figure 1 , Figure 2 As shown, a transfer arm includes an installation section 1 fixed at an installation position and a support section 2 connected to the installation section 1. The installation section 1 is provided with a limiting member 3 near the support section 2 to limit the displacement of the pallet on the support section 2. The support section 2 has an installation surface 4 on the side away from the limiting member 3. The installation surface 4 is provided with two positioning members 5 for supporting the pallet. The two positioning members 5 are arranged at intervals relative to each other along a preset direction. The two positioning members 5 and the installation surface 4 together form a space for accommodating the deformable area of ​​the pallet.

[0031] This application incorporates a limiting component 3, which laterally blocks the pallet during placement, limiting its displacement towards the mounting section 1 and preventing it from shifting towards the mounting section 1 during transport arm movement, thus ensuring pallet positioning. Simultaneously, two positioning components 5, together with the mounting surface 4, form a space to accommodate the pallet's deformation area. Over long-term use, pallets are prone to warping and denting; the space between the two positioning components 5 prevents the deformed area from directly contacting the mounting surface 4, avoiding localized pressure imbalance on the pallet caused by contact with the support arm, and thus preventing the pallet and its internal load from shaking or rotating during transport. Furthermore, the two positioning components 5 also provide auxiliary positioning for the pallet from both sides, improving positional stability during transport.

[0032] In this application, the positioning element 5 can be configured in any of the following embodiments: Implementation method one: such as Figure 1 , Figure 2 , Figure 3 As shown, the support section 2 is provided with a mounting groove (not shown in the attached figure). The positioning member 5 includes a fixing member 51 disposed in the mounting groove and a telescopic member 52 telescopically disposed in the fixing member 51. The top end of the fixing member 51 is parallel to the mounting surface 4. The telescopic member 52 has a retracted state hidden in the fixing member 51 and a supporting state abutting against the tray.

[0033] By providing a mounting slot, the positioning component 5 has a stable mounting base. The top of the fixing component 51 remains parallel to the mounting surface 4, ensuring the flatness of the positioning component 5 when in contact with the pallet and preventing pallet tilting due to installation errors. The telescopic component 52 has both a retracted and a supporting state, allowing the positioning component 5 to flexibly adapt to pallets with different degrees of deformation. When the pallet deforms, the telescopic component 52 extends and closely abuts against the pallet, dynamically adjusting the support height to stably support the deformed pallet. Simultaneously, the retracted state of the telescopic component 52, hidden within the fixing component 51, reduces the space occupied by the positioning component 5 when not in use, lowers the risk of interference with other components, and improves the stability of the transfer process and the adaptability of the equipment.

[0034] Implementation Method 2: Unlike Implementation Method 1, the telescopic member 52 is telescopically disposed in the mounting groove. The telescopic member 52 has a storage state hidden in the mounting groove and a support state abutting against the tray.

[0035] Implementation method 3: The positioning component 5 is fixed to the mounting surface 4.

[0036] As a preferred embodiment of the implementation method, such as Figure 2 As shown, the top of the telescopic member 52 is provided with an abutment member 53 that abuts against the tray. The abutment member 53 is provided with an elastic buffer member 54 that abuts against the tray. The elastic buffer member 54 is provided with an abutment surface that matches the outer contour of the tray.

[0037] By providing an abutment 53 at the top of the telescopic member 52, the abutment 53 contacts the pallet via an elastic buffer 54. The elastic buffer 54 absorbs minor vibrations during transport, reducing rigid impacts between the pallet and the positioning member 5, and preventing the load inside the pallet from shaking due to vibration transmission. The elastic buffer 54 has an abutment surface that matches the outer contour of the pallet, making the force on the pallet more even. Simultaneously, the elastic buffer 54 can adapt to pallet deformation, maintaining a stable fit even with irregular pallet deformation. Combined with the contour-adaptive design of the abutment surface, this further enhances the positioning member 5's tolerance and adaptability to deformed pallets.

[0038] Furthermore, the abutment member 53 is rotatably positioned at the top of the telescopic member 52.

[0039] As a preferred embodiment 2 of the implementation method (not shown in the figure), the fixing member is provided with a guide hole, the telescopic member is axially movable along the guide hole, one of the telescopic member and the guide hole is provided with a guide groove, and the other of the two is provided with a guide protrusion.

[0040] The guide hole provides a basic path for the axial movement of the telescopic component 52. The cooperation between the guide groove and the guide protrusion restricts the direction of movement of the telescopic component 52, preventing offset or rotation during the telescopic process. The cooperation between the guide groove and the guide protrusion also improves the smoothness of the movement of the telescopic component 52 and reduces jamming during adjustment. Furthermore, such as Figure 1 , Figure 2 , Figure 3 As shown, the fixing member 51 is provided with a positioning hole (not shown in the figure), the positioning hole communicates with the guide hole and is exposed on the surface of the supporting section 2, the transfer arm is provided with a locking member 6, and the telescopic member 52 is provided with multiple fixing holes (not shown in the figure) that cooperate with the locking member 6. The multiple fixing holes are arranged sequentially at intervals along the circumference of the telescopic member 52. The locking member 6 passes through the positioning hole and selectively cooperates with the fixing holes at different positions to fix the telescopic member 52 in the corresponding position.

[0041] By setting the locking element 6 to pass through the positioning hole and selectively engage with the fixing holes at different positions, the extension height of the telescopic element 52 can be precisely adjusted. This allows the positioning element 5 to flexibly adapt to the degree of deformation of the pallet, ensuring effective support for deformed pallets. Simultaneously, the engagement of the locking element 6 with the positioning and fixing holes ensures that the telescopic element 52 maintains a stable position after adjustment, preventing accidental displacement of the telescopic element 52 due to vibration or external forces during transport. This ensures the reliability of the support, further enhances the stability of the pallet during transport, and provides continuous and stable protection for the internal load.

[0042] Those skilled in the art will understand that the telescopic component 52 can also be freely extended and retracted by a drive motor, and can be held in the support position by the drive motor. Simultaneously, the telescopic component 52 can be rotatably mounted in the guide hole, the inner wall of the guide hole has an internal thread, and the telescopic component 52 has an external thread that mates with the internal thread. First, rotate the telescopic component 52 to adjust its extension distance; after the telescopic component 52 is fixed, place the tray.

[0043] In this application, the supporting segment 2 can be configured in any of the following embodiments: Implementation Method Four: (e.g.) Figure 1 , Figure 2 As shown, the supporting section 2 includes a support section 21 connected to the mounting section 1 and a positioning section 22 connected to the support section 21 and extending toward the side opposite to the mounting section 1. The extending direction of the support section 21 is perpendicular to the axial direction of the positioning section 22. Limiting protrusions 23 are provided at both ends of the support section 21 along its extending direction. Figure 1 The horizontal direction in the middle.

[0044] By setting the extension direction of the support section 21 perpendicular to the axis of the positioning section 22, a large-area, stable load-bearing support surface can be provided for the pallet. Combined with the fact that the positioning section 22 extends towards the side away from the installation section 1, it can provide stable support for the pallet while reducing the overall weight of the support arm. By setting limiting protrusions 23 at both ends of the support section 21, a lateral obstruction can be formed on the pallet along the length of the support section 21, further preventing the pallet from shifting or swaying along the extension direction of the support section 21 during the movement of the transport support arm.

[0045] Implementation Method 5: This implementation method is not illustrated. The supporting section extends towards the side opposite to the installation section and extends to both sides along the extension direction to make the supporting section a square structure. Along the extension direction, two limiting protrusions are provided at the left and right ends of the supporting section, and two positioning members are provided at the front and rear ends of the supporting section.

[0046] As a preferred embodiment of implementation method four: such as Figure 1 , Figure 2 As shown, the two positioning members 5 are a first positioning member close to the limiting member 3 and a second positioning member located on the side of the first positioning member away from the limiting member 3. The first positioning member is provided on the support section 21 and extends along the extension direction of the support section 21. The second positioning member is provided on the positioning section 22. An auxiliary limiting member 7 is provided on the side of the second positioning member away from the limiting member 3. The auxiliary limiting member 7 is higher than the second positioning member in the direction perpendicular to the mounting surface 4.

[0047] By extending the first positioning member along the extension direction of the support section 21, the contact area between the first positioning member and the pallet is increased, providing stable support for the pallet. By setting an auxiliary limiting member 7 on the side of the second positioning member away from the limiting member 3, the auxiliary limiting member 7 is higher than the second positioning member in the direction perpendicular to the mounting surface 4. The second positioning member can support the pallet, and the auxiliary limiting member 7 can block the pallet from shifting from the side, preventing the pallet from shifting or rotating during transportation.

[0048] As a preferred embodiment of this application, such as Figure 1 As shown, the transfer arm is also equipped with a detection device 8 for detecting the distance between the pallet and the mounting surface 4. The detection device 8 is located between two positioning members 5.

[0049] By placing the detection device 8 between the two positioning components 5, the overall fit of the pallet can be accurately captured, enabling accurate detection of the pallet. The detection device 8 also measures the distance between the pallet and the mounting surface 4, providing feedback on the degree of pallet deformation. When the pallet is severely deformed, the corresponding deformed area is too close to the mounting surface 4, alerting the operator to replace the pallet and preventing it from shaking or rotating during transport.

[0050] Those skilled in the art will understand that this application does not limit the number of detection devices 8; there can be one or more. Detection device 8 can be an infrared rangefinder or a proximity audible and visual alarm, etc.

[0051] Furthermore, the supporting section 2 is provided with a positioning groove 24, and the detection device 8 is set in the positioning groove 24. The top of the detection device 8 is lower than the mounting surface 4 or parallel to the mounting surface 4.

[0052] By providing installation space for the detection device 8 through the positioning groove 24, the detection device 8 can be physically limited, ensuring that the detection point always accurately corresponds to the detection area of ​​the tray. By setting the top of the detection device 8 to be lower than or parallel to the mounting surface 4, direct contact between the detection device 8 and the tray can be avoided, preventing damage to the detection device 8 due to external pressure.

[0053] As a preferred embodiment of this application, seventh: (e.g.) Figure 1 , Figure 2 As shown, the limiting member 3 is provided with an inclined guide surface 31, and the inclined direction of the guide surface 31 points to the mounting surface 4 to guide the tray into the mounting surface 4.

[0054] By setting the limiting component 3 with an inclined guide surface 31, the inclined direction of the guide surface 31 points towards the mounting surface 4. The guide surface 31 can guide the pallet into the mounting surface 4, reducing the difficulty of pallet alignment and improving pallet loading efficiency. At the same time, the guiding effect of the guide surface 31 can ensure that the pallet finally fits precisely against the mounting surface 4, avoiding uneven contact between the pallet and the mounting surface 4 and the positioning component 5 due to initial placement offset.

[0055] For any parts not mentioned in this application, existing technologies may be used or referenced.

[0056] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0057] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A transfer arm, characterized in that, The device includes a mounting section fixed to the installation position and a support section connected to the mounting section. The mounting section has a limiting member at one end near the support section to limit the displacement of the pallet in the support section. The support section has a mounting surface, and the mounting surface has two positioning members for supporting the pallet. The two positioning members are arranged at intervals relative to each other along a preset direction. The two positioning members and the mounting surface together form a space for accommodating the deformation area of ​​the pallet.

2. A transfer arm according to claim 1, characterized in that, The supporting section is provided with an installation groove. The positioning component includes a fixing component disposed in the installation groove and a telescopic component telescopically disposed in the fixing component. The top end of the fixing component is parallel to the installation surface. The telescopic component has a storage state hidden in the fixing component and a support state abutting against the tray.

3. A transfer arm according to claim 2, characterized in that, The top of the telescopic member is provided with an abutment member that abuts against the tray. The abutment member is provided with an elastic buffer member that abuts against the tray. The elastic buffer member is provided with an abutment surface that is adapted to the outer contour of the tray.

4. A transfer arm according to claim 2, characterized in that, The fixing member is provided with a guide hole, the telescopic member is axially movable along the guide hole, one of the telescopic member and the guide hole is provided with a guide groove, and the other of the two is provided with a guide protrusion.

5. A transfer arm according to claim 4, characterized in that, The fixing member is provided with a positioning hole, which communicates with the guide hole and exposes the surface of the supporting section. The transfer arm is provided with a locking member. The telescopic member is provided with multiple fixing holes that cooperate with the locking member. The multiple fixing holes are arranged sequentially at intervals along the circumference of the telescopic member. The locking member passes through the positioning hole and selectively cooperates with the fixing holes at different positions to fix the telescopic member in the corresponding position.

6. A transfer arm according to claim 1, characterized in that, The supporting section includes a support section connected to the mounting section and a positioning section connected to the support section and extending toward the side opposite to the mounting section. The extension direction of the support section is perpendicular to the axial direction of the positioning section, and limiting protrusions are provided at both ends of the support section along the extension direction of the support section.

7. A transfer arm according to claim 6, characterized in that, The two positioning members are a first positioning member close to the limiting member and a second positioning member located on the side of the first positioning member away from the limiting member. The first positioning member is disposed on the support section and extends along the extension direction of the support section. The second positioning member is disposed on the positioning section. An auxiliary limiting member is provided on the side of the second positioning member away from the limiting member. The auxiliary limiting member is higher than the second positioning member in a direction perpendicular to the mounting surface.

8. A transfer arm according to claim 1, characterized in that, The transfer arm is also equipped with a detection device for detecting the distance between the pallet and the mounting surface, and the detection device is disposed between the two positioning members.

9. A transfer arm according to claim 8, characterized in that, The supporting section is provided with a positioning groove, and the detection device is disposed in the positioning groove. The top of the detection device is lower than the mounting surface or parallel to the mounting surface.

10. A transfer arm according to claim 1, characterized in that, The limiting member has an inclined guide surface, the inclination direction of which points towards the mounting surface to guide the tray into the mounting surface.

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