Wafer detection holding fixture

Abstract

The utility model relates to wafer detection technical field especially, relates to a wafer detection holding fixture. Its mainly for wafer holding needs to keep certain gap between it, like this just ensures that wafer has enough detection space and will not influence each other, and the upper and lower holding mode can lead to the problem of occupying larger space, and the following technical scheme is proposed, including placing assembly, the placing assembly includes the fender, the fender bottom fixedly connected with the foot pad, the fender inside fixedly connected with the long shaft, the long shaft has two groups and is symmetrically arranged. The utility model discloses that the wafer can be reserved enough gap for detection by placing plate holding, and the rotating shaft along the sliding groove sliding can make the handle lift the fender, and the sliding groove realizes the effect of reducing the gravity center of fender, and the positioning pin can lock when the rotating shaft is placed flat, increases the reducing effect of fender gravity center, improves the stability when fender carries.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, and in particular to a wafer inspection holding fixture. Background Technology

[0002] Wafer inspection is a key quality control process in semiconductor manufacturing. It refers to the use of imaging and measurement technologies such as optics and electron beams to detect defects, measure dimensions, and analyze performance of circuit patterns on the surface of a wafer during chip production. It runs through both front-end and back-end processes, aiming to detect process deviations in a timely manner, improve chip yield and performance, and is a core link in ensuring chip quality.

[0003] During wafer inspection, the wafers need to be transported to the inspection position and secured. However, during inspection, a certain gap needs to be maintained between the wafers to ensure sufficient inspection space and prevent them from interfering with each other. Placing the wafers vertically would result in a large space occupation and inconvenience for handling. In view of this, this utility model proposes a wafer inspection and placement fixture. Utility Model Content

[0004] The purpose of this invention is to address the problem in the prior art that wafers need to be placed with a certain gap between them to ensure that the wafers have sufficient testing space and do not interfere with each other, while placing them one above the other results in a large space occupation. Therefore, this invention proposes a wafer testing and holding fixture.

[0005] The technical solution of this utility model: A wafer inspection and placement fixture includes a placement assembly, the placement assembly including a protective plate, a pad fixedly connected to the bottom of the protective plate, a long shaft fixedly connected inside the protective plate, two sets of the long shafts arranged symmetrically, a placement plate fixedly connected outside the long shaft, two sets of the placement plates arranged symmetrically, a rear plate fixedly connected inside the protective plate near the placement plate, a short shaft fixedly connected to the opposite side of the placement plate, the top of the placement plate being inclined and open, and a lifting assembly provided outside the protective plate for transferring the protective plate;

[0006] A center of gravity lowering component is provided at the lifting component position, which is used to lower the center of gravity when moving the guard plate;

[0007] The center of gravity lowering component is equipped with a locking component, which is used to restrict the position of the lifting component.

[0008] Optionally, the lifting assembly includes a rotating shaft rotatably connected to the outside of the guard plate, and a handle is fixedly connected to the end of the rotating shaft away from the guard plate, the handle being U-shaped.

[0009] Optionally, the center of gravity lowering component includes a sliding groove, which is formed on the outside of the guard plate near the rotation axis.

[0010] Optionally, the sliding groove is L-shaped, and the interior of the sliding groove near the top is roughened.

[0011] Optionally, the locking assembly includes a lifting groove, and a positioning pin is slidably connected inside the lifting groove. The positioning pin is L-shaped, and the side of the positioning pin away from the rotation axis is beveled.

[0012] Optionally, the guard plate has an adjustment port near the positioning pin, and the bent position of the positioning pin is slidably connected inside the adjustment port.

[0013] Optionally, a slide rail is fixedly connected to the guard plate near the adjustment port, and a dustproof plate is slidably connected inside the slide rail, with the dustproof plate abutting against one side of the positioning pin.

[0014] In summary, this application includes at least one of the following beneficial technical effects:

[0015] This invention uses a placement plate to hold the wafers, which allows for sufficient clearance for testing. The rotating shaft slides along the sliding groove, allowing the handle to lift the protective plate. In this way, the sliding groove achieves the effect of lowering the center of gravity of the protective plate. The positioning pin can lock the rotating shaft when it is laid flat, which increases the effect of lowering the center of gravity of the protective plate and improves the stability of the protective plate during transportation. Attached Figure Description

[0016] Figure 1 A schematic diagram of a wafer inspection fixture is provided.

[0017] Figure 2 This is a structural diagram of the plate being placed.

[0018] Figure 3 This is a structural diagram of the protective plate;

[0019] Figure 4 This is a schematic diagram of the sliding groove structure;

[0020] Figure 5 for Figure 3 A schematic diagram of the cross-sectional structure;

[0021] Figure 6 for Figure 5 Enlarged diagram of point A in the middle.

[0022] Figure label:

[0023] 1. Protective plate; 2. Foot pad; 3. Back plate; 4. Long shaft; 5. Short shaft; 6. Placement plate; 7. Handle; 8. Sliding groove; 9. Rotating shaft; 10. Lifting groove; 11. Positioning pin; 12. Adjustment port; 13. Dustproof plate; 14. Slide rail. Detailed Implementation

[0024] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0025] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0026] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] Example

[0030] like Figures 1 to 3As shown, this utility model proposes a wafer inspection and placement fixture, including a placement assembly. The placement assembly includes a protective plate 1, with pads 2 fixedly connected to the bottom of the protective plate 1. A long shaft 4 is fixedly connected inside the protective plate 1, with two sets of long shafts 4 arranged symmetrically. A placement plate 6 is fixedly connected outside the long shafts 4, with two sets of placement plates 6 arranged symmetrically. A back plate 3 is fixedly connected inside the protective plate 1 near the placement plate 6. The long shafts 4 can fix the placement plate 6 inside the protective plate 1. A short shaft 5 is fixedly connected to the opposite side of the placement plate 6, which can reinforce the connection of the placement plate 6. The top of the placement plate 6 is set in an inclined opening shape, and the opening of the placement plate 6 can be used to hold wafers. A lifting assembly is provided outside the protective plate 1 for transferring the protective plate 1. A center of gravity lowering assembly is provided at the position of the lifting assembly for lowering the center of gravity when moving the protective plate 1. A locking assembly is provided inside the center of gravity lowering assembly for restricting the position of the lifting assembly.

[0031] For further details, please refer to Figures 3 to 6 The lifting assembly includes a rotating shaft 9, which is rotatably connected to the outside of the guard plate 1. A handle 7 is fixedly connected to the end of the rotating shaft 9 away from the guard plate 1. The handle 7 can lift the guard plate 1 by rotating the rotating shaft 9. The handle 7 is U-shaped. The center of gravity lowering assembly includes a sliding groove 8, which is opened on the outside of the guard plate 1 near the rotating shaft 9. The rotating shaft 9 can lower the center of gravity of the guard plate 1 by sliding along the sliding groove 8, which facilitates stable transfer. The sliding groove 8 is L-shaped. The structure of the sliding groove 8 makes it convenient to place the handle 7 on the outside of the guard plate 1. The inside of the sliding groove 8 near the top is rough. The rough structure of the sliding groove 8 can prevent the rotating shaft 9 from shaking inside the sliding groove 8.

[0032] For further details, please refer to Figures 4 to 6 The locking assembly includes a lifting groove 10, with a positioning pin 11 slidably connected inside the lifting groove 10. The positioning pin 11 can fix the position of the rotating shaft 9 by sliding along the lifting groove 10. The positioning pin 11 is L-shaped, and the side of the positioning pin 11 away from the rotating shaft 9 is beveled. The beveled surface of the positioning pin 11 facilitates the sliding of the rotating shaft 9 to the other side of the positioning pin 11. An adjustment port 12 is provided near the positioning pin 11 on the guard plate 1. The adjustment port 12 facilitates the operation of the positioning pin 11. The bent part of the positioning pin 11 is slidably connected inside the adjustment port 12. A slide rail 14 is fixedly connected to the guard plate 1 near the adjustment port 12. A dustproof plate 13 is slidably connected inside the slide rail 14. The dustproof plate 13 can prevent dust from entering the lifting groove 10 along the adjustment port 12 when the positioning pin 11 is operated. The dustproof plate 13 abuts against one side of the positioning pin 11.

[0033] In this embodiment, during placement, the wafers are embedded one by one into the opening of the placement plate 6 for fixation. The long axis 4 can support the placement plate 6, and the short axis 5 can reinforce the placement plate 6 between the placement plates. In this way, the protective plate 1 can place the wafers layer by layer, and there are gaps between the wafers for easy inspection.

[0034] When it is necessary to move the plate, first pull the positioning pin 11 at the adjustment port 12 position, so that the positioning pin 11 slides along the adjustment port 12 and the inside of the lifting groove 10. In this way, the positioning pin 11 will disengage from the rotating shaft 9 position. Then, you can pull the handle 7, so that the handle 7 drives the rotating shaft 9 to slide along the inside of the sliding groove 8. When the rotating shaft 9 slides to the vertical position, you can lift the guard plate 1 through the handle 7. In this way, the guard plate 1 can be transferred. Since the guard plate 1 is relatively heavy, the center of gravity of the guard plate 1 is low, which can reduce swaying.

[0035] The rough position of the rotating shaft 9 inside the sliding groove 8 can further reduce the shaking of the guard plate 1 during transportation. After transportation, the handle 7 can be laid flat, so that the rotating shaft 9 can slide along the inside of the sliding groove 8. Then push the handle 7 to move the rotating shaft 9 towards the positioning pin 11. At this time, the rotating shaft 9 will be pressed against the oblique position of the positioning pin 11. When the rotating shaft 9 is fully pushed into the sliding groove 8, the positioning pin 11 will fall down to restrict the rotating shaft 9.

[0036] When the positioning pin 11 slides repeatedly, the positioning pin 11 will drive the dustproof plate 13 to slide along the inside of the slide rail 14, so that the dustproof plate 13 can prevent dust from entering the lifting groove 10 from the adjustment port 12.

[0037] It should be noted that the placement plate 6 of this device can hold the wafer and leave enough gap for testing, while the rotating shaft 9 slides along the sliding groove 8 so that the handle 7 can lift the protective plate 1. In this way, the sliding groove 8 achieves the effect of lowering the center of gravity of the protective plate 1. The positioning pin 11 can lock the rotating shaft 9 when it is laid flat, which increases the effect of lowering the center of gravity of the protective plate 1 and improves the stability of the protective plate 1 during transportation.

[0038] The above specific embodiments are merely optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A wafer inspection and holding fixture, characterized in that, include: The placement assembly includes a protective plate (1), a foot (2) fixedly connected to the bottom of the protective plate (1), a long shaft (4) fixedly connected inside the protective plate (1), two sets of the long shaft (4) arranged symmetrically, a placement plate (6) fixedly connected outside the long shaft (4), two sets of the placement plate (6) arranged symmetrically, a back plate (3) fixedly connected inside the protective plate (1) near the placement plate (6), a short shaft (5) fixedly connected to the opposite side of the placement plate (6), the top of the placement plate (6) is arranged in an inclined opening shape, and a lifting assembly is provided outside the protective plate (1) for transferring the protective plate (1). A center of gravity lowering component is provided at the lifting component position, which is used to lower the center of gravity when moving the guard plate (1); The center of gravity lowering component is equipped with a locking component, which is used to restrict the position of the lifting component.

2. The wafer inspection and placement fixture according to claim 1, characterized in that, The lifting assembly includes a rotating shaft (9), which is rotatably connected to the outside of the guard plate (1). A handle (7) is fixedly connected to the end of the rotating shaft (9) away from the guard plate (1), and the handle (7) is U-shaped.

3. A wafer inspection and placement fixture according to claim 2, characterized in that, The center of gravity lowering component includes a sliding groove (8), which is located on the outside of the guard plate (1) near the rotating shaft (9).

4. A wafer inspection and placement fixture according to claim 3, characterized in that, The sliding groove (8) is L-shaped, and the interior of the sliding groove (8) near the top is rough.

5. A wafer inspection and holding fixture according to claim 4, characterized in that, The locking assembly includes a lifting groove (10), and a positioning pin (11) is slidably connected inside the lifting groove (10). The positioning pin (11) is L-shaped and has an oblique cut on the side away from the rotating shaft (9).

6. A wafer inspection and placement fixture according to claim 5, characterized in that, The guard plate (1) has an adjustment port (12) near the positioning pin (11), and the positioning pin (11) is slidably connected inside the adjustment port (12) at the bent position.

7. A wafer inspection and placement fixture according to claim 6, characterized in that, The guard plate (1) is fixedly connected to a slide rail (14) near the adjustment port (12). A dustproof plate (13) is slidably connected inside the slide rail (14). The dustproof plate (13) abuts against one side of the positioning pin (11).

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