Linear lifting mechanism and conveying device

Abstract

The utility model discloses a linear lifting mechanism and conveying device relates to semiconductor wafer transmission equipment technical field, include: the base body is set up and extends along the first direction's strip clearance, lift seat, synchronous dynamic seal subassembly, including open loop seal strip and fixed part, open loop seal strip is arranged in the accommodation space parallel to the first direction, and the both ends of open loop seal strip are located in the opposite sides of lift seat along the first direction, and fixed part is used for fixing the both ends of open loop seal strip on lift seat respectively, guide component, set up in the accommodation space, including at least two rotatable guide wheels along the first direction arrangement, wherein, the part of open loop seal strip is around through guide component, when lift seat moves along the first direction, open loop seal strip moves with lift seat synchronously and always dynamic seal strip clearance. The utility model can realize reliable dynamic seal with linear lifting movement synchronization under the premise of not increasing additional drive.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer transport equipment technology, and in particular to a linear lifting mechanism and transport device. Background Technology

[0002] In semiconductor manufacturing, wafers need to be precisely transferred between different process steps, such as photolithography, etching, deposition, and chemical mechanical polishing. The linear lifting mechanism in semiconductor wafer handling equipment, as a core component for achieving precise linear motion, directly affects the positioning accuracy and dynamic performance of the overall equipment. In vacuum, clean, or microparticle-sensitive working environments, the linear lifting mechanism must not only possess high rigidity and high repeatability, but also ensure airtightness within a limited space.

[0003] In existing technologies, linear lifting mechanisms generally adopt a split design, with the guide assembly, transmission assembly, and lifting module set up independently, forming an integral transmission chain through mechanical connection or splicing. While this design facilitates assembly and maintenance, it inevitably creates a strip-shaped opening extending along the direction of movement on the frame surface when achieving long-stroke linear motion, allowing the internal slider or transmission components to move. Since this opening runs through the entire movement path, sealing becomes significantly more difficult, allowing gas or particles to easily seep into the mechanism, leading to contamination, wear, or even jamming of internal components, severely impacting the system's operational stability. To address the leakage problem at the strip-shaped opening, some technical solutions attempt to install external sealing structures or independent driven sealing devices at the opening to achieve follow-up sealing. However, especially under high cleanliness and high-frequency reciprocating conditions, independently driven sealing mechanisms are prone to problems such as response lag, uneven sealing, or wear failure, making it difficult to meet the requirements for long-term stable operation.

[0004] Therefore, it is necessary to provide a linear lifting mechanism and a linear lifting mechanism and conveying device to solve the key technical problem of how to achieve a reliable dynamic seal synchronized with the linear lifting motion without adding additional drive. Utility Model Content

[0005] The purpose of this utility model is to provide a linear lifting mechanism and a conveying device to solve the technical problem of how to achieve a reliable dynamic seal that is synchronized with the linear lifting motion without adding an additional drive.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A linear lifting mechanism for driving a robotic arm to move up and down along a first direction, comprising: A substrate having an accommodating space, and a strip-shaped gap extending along a first direction on the substrate, wherein the accommodating space and the strip-shaped gap are in communication with each other; A lifting seat is slidably connected to the base along the first direction, and the lifting seat is used to support the robotic arm; A synchronous dynamic sealing assembly includes an open-loop sealing strip and a fixing member. The open-loop sealing strip is arranged parallel to the first direction within the accommodating space. The two ends of the open-loop sealing strip are located on opposite sides of the lifting seat along the first direction. The fixing member is used to fix the two ends of the open-loop sealing strip to the lifting seat respectively. A guide assembly, disposed within the accommodating space, includes at least two rotatable guide wheels arranged along a first direction; The open-loop sealing strip partially wraps around the guide assembly. When the lifting seat moves along the first direction, the open-loop sealing strip moves synchronously with the lifting seat and always dynamically seals the strip gap.

[0007] Furthermore, the fixing component includes a first pressure block and a second pressure block respectively disposed at the top and bottom of the lifting seat, and the two ends of the open-loop sealing strip are respectively pressed by the first pressure block and the second pressure block and detachably connected to the lifting seat.

[0008] Furthermore, the guiding assembly includes a first support module disposed at the top of the accommodating space and a second support module disposed at the bottom of the accommodating space, and each of the first support module and the second support module is provided with at least one guide wheel; the open-loop sealing strip passes sequentially around the guide wheel of the second support module and the guide wheel of the first support module.

[0009] Furthermore, the first support module is provided with two guide wheels along the second direction, and the second support module is provided with two guide wheels along the second direction; the open-loop sealing strip forms a surrounding path, passing sequentially around the guide wheels of the second support module and the guide wheels of the first support module.

[0010] Furthermore, the fastener includes a fastener, a pressing part, and fastening parts located at both ends thereon. The guide assembly includes a lifting slider and a lifting guide rail. The pressing part has an abutting surface facing the lifting slider. The end of the open-loop sealing strip is bent to form a bent part. The bent part is clamped between the abutting surface of the pressing part and the corresponding surface of the lifting slider. The fastener passes through the fastening part and is locked to the lifting slider to press and fix the bent part.

[0011] Furthermore, the pressing part of the fastener is provided with teeth on its contact surface, and the side of the bent part of the open-loop sealing strip that contacts the contact surface is provided with a toothed groove structure that meshes with the teeth.

[0012] Furthermore, the fastening part is provided with a through hole, and the lifting slider is provided with a corresponding screw hole. The fastener includes a screw, which passes through the through hole of the fastening part and is screwed into the screw hole.

[0013] Furthermore, it also includes a lifting component, which is fixedly connected to the lifting slider and is used to drive the lifting slider to move up and down in a first direction.

[0014] Furthermore, the lifting component includes a motor, a driving synchronous pulley driven by the motor, a driven synchronous pulley, and a closed-loop synchronous belt tensioned between the driving synchronous pulley and the driven synchronous pulley; the lifting slider is fixedly connected to one side of the closed-loop synchronous belt; the output shaft of the motor is drivenly connected to the driving synchronous pulley, and is used to drive the closed-loop synchronous belt to perform linear reciprocating motion and drive the lifting slider to rise and fall along a first direction.

[0015] Secondly, a transmission device includes: a linear lifting mechanism as described above; Linear actuator, used to provide driving force in a third direction; A robotic arm for carrying and transferring wafers, the robotic arm including a telescopic arm capable of driving the wafer to move along a second direction; The linear lifting mechanism includes two side frames, which are fixedly connected to the base of the linear actuation mechanism.

[0016] The beneficial effects of the linear lifting mechanism and conveying device provided by this utility model are as follows: The "synchronous dynamic sealing assembly" directly anchors the two ends of the open-loop sealing strip to the opposite sides of the lifting seat along the first direction, making the sealing strip and the lifting seat an integral unit. When the lifting seat is driven by an external force to move up and down along the substrate, the sealing strip is forced to move synchronously at the same speed and in the same direction, without any additional power. The sealing strip wraps around at least two guide wheels within the substrate's accommodating space, forming a "moving curtain" parallel to the strip gap. In addition, the width of the strip completely covers the strip gap, and because the two ends are continuously pulled by the lifting seat, it maintains a constant tension, always adhering to the inner wall of the substrate and sliding in real time, thus reliably sealing the strip gap throughout the entire lifting stroke. Using the above solution, the independently driven follow-up sealing mechanism in the traditional solution is not required, thereby completely eliminating the risk of particle intrusion caused by the lag in response and uneven sealing of the follow-up sealing mechanism. Furthermore, a long-term reliable dynamic seal can be obtained in a vacuum and clean environment, solving the problem of ensuring synchronous and reliable sealing with the lifting movement without adding additional drive. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a linear lifting mechanism and a conveying device according to an embodiment of the present invention; Figure 2This is a side view of a linear lifting mechanism according to an embodiment of the present utility model; Figure 3 This is an enlarged schematic diagram of the synchronous dynamic sealing assembly and its partial structure according to an embodiment of the present utility model; Figure 4 This is a schematic diagram of the structure of the guide component in an embodiment of the present utility model; Figure 5 This is a structural schematic diagram of the lifting component in an embodiment of the present utility model.

[0018] Reference numerals: 1. Base; 11. Strip gap; 2. Lifting seat; 3. Synchronous sealing assembly; 31. Open-loop sealing strip; 311. Bending part; 32. Fixing part; 321. Pressing part; 322. Fastening part; 323. Fastener; 4. Guide assembly; 41. First support module; 411. Upper support; 42. Second support module; 421. Lower support; 43. Guide wheel; 44. Lifting slider; 45. Lifting guide rail; 46. Pressure plate; 5. Lifting component; 51. Motor; 52. Active synchronous wheel; 53. Driven synchronous wheel; 54. Closed-loop synchronous belt; 6. Linear actuation mechanism; 7. Robotic arm; 8. Side frame; 9. Base. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] The following is in conjunction with the appendix Figure 1 - Appendix Figure 5 The specific embodiments of this utility model will be further described in detail below.

[0021] Firstly, such as Figures 1-3As shown, an embodiment of this utility model provides a linear lifting mechanism mainly used to drive a robotic arm 7 to achieve lifting motion along a first direction. The linear lifting mechanism includes a base 1, a lifting seat 2, a synchronous sealing assembly 3, a guide assembly 4, and a lifting component 5. The base 1 serves as the support and installation platform for the entire machine, and its interior defines an accommodating space for installing the guide assembly 4 and the synchronous sealing assembly 3. A strip-shaped gap 11 is formed on the base 1 along the first direction, allowing part of the lifting seat 2 to protrude and connect to an external mechanism. The accommodating space and the strip-shaped gap 11 are interconnected, allowing the lifting seat 2 to slide linearly within the base 1. To ensure the overall structural rigidity and airtightness of the mechanism, the base 1 can be integrally formed from high-strength aluminum alloy or stainless steel, with the outer surface treated by anodizing or vacuum plating to improve wear resistance and corrosion resistance.

[0022] Reference Figure 3 In some specific embodiments of this utility model, the lifting seat 2 is slidably connected to the base 1 along a first direction. The lifting seat 2 is used to support the robot arm 7 or other execution modules, and its bottom or side is fixedly connected to the lifting component 5, thereby realizing the overall lifting transmission. To reduce frictional resistance and ensure linear motion accuracy, a ball bearing, linear bearing, or precision guide pair structure can be used between the lifting seat 2 and the base 1. Preferably, the clearance of the sliding pair is controlled within the micrometer range to balance guiding accuracy and sealing stability. In addition, the lifting seat 2 and the strip gap 11 are relatively corresponding, and a protruding section or sealing connection part can be formed on its outer surface to form an integral linkage sealing path with the synchronous dynamic sealing assembly 3.

[0023] In some embodiments of this utility model, the synchronous dynamic sealing assembly 3 includes an open-loop sealing strip 31 and a fixing member 32. The open-loop sealing strip 31 is arranged parallel to the first direction in the accommodating space of the base 1, and its two ends are respectively fixed to the opposite sides of the lifting seat 2 along the first direction by the fixing member 32. The open-loop sealing strip 31 is in a tensioned state when stationary, and the width of the strip covers the entire width of the strip gap 11, so that it can continuously form a dynamic seal on the gap throughout the entire lifting stroke. Since the two ends of the open-loop sealing strip 31 are rigidly connected to the lifting seat 2, when the lifting seat 2 reciprocates along the first direction under the drive of the lifting member 5, the open-loop sealing strip 31 can maintain synchronous movement with it, so that no independent sealing drive structure is required. This design not only simplifies the overall structure, but also avoids the response lag problem of traditional follow-up sealing mechanisms. It blocks the air convection inside and outside the accommodating space to achieve dynamic sealing.

[0024] In some specific embodiments of this utility model, the open-loop sealing strip 31 is an open-loop strip body. The fixing member 32 is used to reliably anchor both ends of the open-loop sealing strip 31 to the lifting seat 2. The fixing member 32 includes a first pressure block disposed at the top of the lifting seat 2 and a second pressure block disposed at the bottom of the lifting seat 2. Both ends of the open-loop sealing strip 31 are respectively pressed and fixed by the first and second pressure blocks, and can be detachably connected to the lifting seat 2 by fasteners 323. With this design, the open-loop sealing strip 31 can be easily disassembled during maintenance or replacement, significantly improving the convenience of assembly and maintenance. Furthermore, the pressing portion 321 of the fixing member 32 forms an abutment surface facing the surface of the lifting seat 2, and the end of the open-loop sealing strip 31 is bent to form a bent portion 311, which is clamped between the abutment surface and the surface of the lifting seat 2. Fasteners 323, such as screws, pass through the fastening part 322 of the fixing member 32 and are screwed into the screw hole of the lifting seat 2 to generate axial preload, thereby achieving stable compression of the end of the open-loop sealing strip 31.

[0025] In some other embodiments of this utility model, anti-slip teeth can be provided on the abutment surface of the fixing member 32, and the side of the sealing strip bend 311 that contacts the abutment surface forms a meshing tooth groove structure. Through the mechanical meshing of the teeth and the tooth groove, micro-displacement or slippage of the sealing strip during long-term movement can be prevented, thereby ensuring a constant tension and avoiding dynamic changes in the sealing gap. In addition, to prevent the screw from loosening, an anti-loosening structure can be provided at the screw thread or an anti-loosening adhesive can be applied.

[0026] In some embodiments of this invention, the guide assembly 4 is disposed within the accommodating space of the base 1 to guide the running path of the open-loop sealing strip 31 and maintain its parallel movement. The guide assembly 4 includes a first support module disposed at the top of the accommodating space and a second support module disposed at the bottom, which are arranged opposite to each other along a first direction. Each support module is equipped with at least one rotatable guide wheel 43, and the open-loop sealing strip 31 partially wraps around these guide wheels 43 to form a closed or encircling path. Preferably, the first support module and the second support module are each provided with two guide wheels 43 along a second direction, and the open-loop sealing strip 31 sequentially wraps around the guide wheels 43 of the bottom module, the top module, and the bottom module. Through this path design, the open-loop sealing strip 31 maintains a stable parallel posture during reciprocating motion, and the rotation of the guide wheels 43 can effectively reduce the bending stress and wear of the open-loop sealing strip 31. In some other embodiments of this utility model, the first support module 41 further includes an upper support 411 for mounting guide wheels 43 on the first support module 41. The upper support 411 has two mounting holes, and the guide wheel 43 includes a pin, which is mounted in the mounting holes of the upper support 411. The second support module 42 further includes a lower support 421 for mounting guide wheels 43 on the second support module 42. The lower support 421 has two mounting holes, and the guide wheel 43 includes a pin, which is mounted in the mounting holes of the lower support 421.

[0027] In some other embodiments of the present invention, the guide assembly 4 further includes a lifting slider 44 and a lifting guide rail 45. The lifting guide rail 45 is mounted on the base 1 along a first direction, and the lifting slider 44 is slidably connected to the lifting guide rail 45. A portion of the lifting slider 44 is located within the accommodating space, and a portion protrudes from the accommodating space through the strip gap 11. The protruding portion of the lifting slider 44 is fixedly connected to the lifting seat 2. When the lifting slider 44 rises along the first direction, its bottom contact surface pulls one end of the open-loop sealing strip 31 upwards synchronously. The open-loop sealing strip 31 drives the remaining guide wheels 43 to rotate through engagement with the guide wheels 43, while the other end of the sealing strip moves synchronously under the traction constraint of the strip body. The descent process is the opposite; the guide wheels 43 rotate adaptively in the opposite direction, ensuring that the open-loop sealing strip 31 is always taut and moves synchronously with the lifting slider 44.

[0028] Reference Figure 4 and Figure 5In some specific embodiments of this utility model, the lifting component 5 is used to drive the lifting seat 2 to move up and down in a first direction. The lifting component 5 includes a motor 51, a driving synchronous pulley 52, a driven synchronous pulley 53, and a closed-loop synchronous belt 54 tensioned between the two pulleys. The output shaft of the motor 51 is connected to the driving synchronous pulley 52, and drives the lifting seat 2 to move linearly reciprocally through the closed-loop synchronous belt 54. Specifically, a pressure plate 46 is provided inside the closed-loop conveyor belt 54, and the pressure plate 46 fixes the closed-loop synchronous belt 54 to the lifting slider 44 with screws. To ensure smooth transmission and prevent belt slippage, meshing teeth can be formed on the outer circumference of the closed-loop synchronous pulley, and toothed grooves are correspondingly provided on the inner surface of the closed-loop synchronous belt 54. The lifting slider 43 is fixedly connected to one side of the closed-loop synchronous belt 54, so that when the motor 51 rotates, the closed-loop synchronous belt 54 can directly drive the lifting slider 43 to move synchronously, realizing precise lifting control.

[0029] In some other embodiments of this utility model, to further improve the reliability and adaptability of the system, the open-loop sealing strip 31 can be made of polytetrafluoroethylene, fluororubber, or metal spring sheet composite material to take into account wear resistance, vacuum resistance, and chemical corrosion resistance. The rotating part of the guide wheel 43 can be made of ceramic bearing or dry self-lubricating bearing to avoid contamination caused by lubricant evaporation. If a high airtightness is required in the application scenario, a micro-convex guide surface or flexible sealing lip can be provided at the contact point between the inner wall of the substrate 1 and the open-loop sealing strip 31 to further improve the sealing fit.

[0030] Secondly, this utility model provides a conveying device, comprising: a linear lifting mechanism as described above; a linear actuation mechanism 6 for providing driving force along a third direction; and a robotic arm 7 for carrying and conveying wafers, the robotic arm 7 including a telescopic arm capable of driving the wafer to move along a second direction; wherein, the two side frames 8 of the linear lifting mechanism are fixedly connected to the base 9 of the linear actuation mechanism 6. The two side frames 8 of the linear lifting mechanism are fixedly connected to the base 9 of the linear actuation mechanism 6, and the robotic arm 7 is mounted on a lifting base 2 and moves along the second direction via the telescopic arm. The linear lifting mechanism is responsible for lifting the wafer, and the linear actuation mechanism 6 provides horizontal movement; the two work together to complete multi-station wafer transfer operations in a vacuum environment, with a compact structure and convenient installation.

[0031] In summary, this invention achieves a dynamic seal synchronized with the lifting movement by incorporating a "synchronous dynamic sealing component 3" within the substrate 1, forming a rigid synchronous structure between the open-loop sealing strip 31 and the lifting seat 2. This is accomplished without introducing an independent drive. The above solution significantly simplifies the sealing of the wafer transfer lifting mechanism, improves sealing reliability and service life, and is particularly suitable for high-precision wafer handling devices in vacuum and clean environments. Of course, those skilled in the art can make various modifications or improvements to the guide structure, the material of the open-loop sealing strip 31, or the lifting transmission method without departing from the principles of this invention. All such equivalent alternatives should fall within the protection scope of this invention.

[0032] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A linear lifting mechanism for driving a robotic arm (7) to move up and down along a first direction, characterized in that, include: The substrate (1) has an accommodating space and a strip-shaped gap (11) extending in a first direction on the substrate (1). The accommodating space and the strip-shaped gap (11) are interconnected. The lifting seat (2) is slidably connected to the base (1) along the first direction, and the lifting seat (2) is used to support the robot arm (7). The synchronous dynamic sealing assembly (3) includes an open-loop sealing strip (31) and a fixing member (32). The open-loop sealing strip (31) is arranged parallel to the first direction in the accommodating space. The two ends of the open-loop sealing strip (31) are located on opposite sides of the lifting seat (2) along the first direction. The fixing member (32) is used to fix the two ends of the open-loop sealing strip (31) to the lifting seat (2) respectively. The guide assembly (4) is disposed within the accommodating space and includes at least two rotatable guide wheels (43) arranged along a first direction. The open-loop sealing strip (31) partially wraps around the guide assembly (4). When the lifting seat (2) moves along the first direction, the open-loop sealing strip (31) moves synchronously with the lifting seat (2) and always dynamically seals the strip gap (11).

2. The linear lifting mechanism according to claim 1, characterized in that, The fixing component (32) includes a first pressing block and a second pressing block respectively disposed on the top and bottom of the lifting seat (2). The two ends of the open-loop sealing strip (31) are respectively pressed by the first pressing block and the second pressing block and detachably connected to the lifting seat (2).

3. A linear lifting mechanism according to claim 1, characterized in that, The guide assembly (4) includes a first support module disposed at the top of the accommodating space and a second support module disposed at the bottom of the accommodating space. At least one guide wheel (43) is disposed on both the first support module and the second support module. The open-loop sealing strip (31) passes around the guide wheel (43) of the second support module and the guide wheel (43) of the first support module in sequence.

4. A linear lifting mechanism according to claim 3, characterized in that, The first support module is provided with two guide wheels (43) along the second direction, and the second support module is provided with two guide wheels (43) along the second direction; the open-loop sealing strip (31) forms a surrounding path and passes around the guide wheels (43) of the second support module and the guide wheels (43) of the first support module in sequence.

5. A linear lifting mechanism according to claim 1, characterized in that, The fastener (32) includes a fastener (323), a pressing part (321), and fastening parts (322) located at both ends thereon. The guide assembly (4) includes a lifting slider (44) and a lifting guide rail (45). The pressing part (321) has an abutting surface facing the lifting slider (44). The end of the open-loop sealing strip (31) is bent to form a bent part (311). The bent part (311) is clamped between the abutting surface of the pressing part (321) and the corresponding surface of the lifting slider (44). The fastener (323) passes through the fastening part (322) and is locked to the lifting slider (44) to press and fix the bent part (311).

6. A linear lifting mechanism according to claim 5, characterized in that, The pressing part (321) of the fastener (32) has teeth on its contact surface, and the side of the bent part (311) of the open-ring sealing strip (31) that contacts the contact surface has a tooth groove structure that meshes with the teeth.

7. A linear lifting mechanism according to claim 5, characterized in that, The fastening part (322) is provided with a through hole, and the lifting slider (44) is provided with a corresponding screw hole. The fastener (323) includes a screw, which passes through the through hole of the fastening part (322) and is screwed into the screw hole.

8. A linear lifting mechanism according to claim 5, characterized in that, It also includes a lifting component (5), which is fixedly connected to the lifting slider (44) and is used to drive the lifting slider (44) to move up and down in a first direction.

9. A linear lifting mechanism according to claim 8, characterized in that, The lifting component (5) includes a motor (51), an active synchronous pulley (52) driven by the motor (51), a driven synchronous pulley (53), and a closed-loop synchronous belt (54) tensioned between the active synchronous pulley (52) and the driven synchronous pulley (53); the lifting slider (44) is fixedly connected to one side of the closed-loop synchronous belt (54); the output shaft of the motor (51) is connected to the active synchronous pulley (52) for driving the closed-loop synchronous belt (54) to perform linear reciprocating motion and driving the lifting slider (44) to rise and fall along a first direction.

10. A transmission device, characterized in that, include: A linear lifting mechanism as described in any one of claims 1-9; A linear actuator (6) is used to provide driving force in a third direction; A robotic arm (7) is used to carry and transfer wafers. The robotic arm (7) includes a telescopic arm that can drive the wafers to move along a second direction. The linear lifting mechanism includes two side frames (8), which are fixedly connected to the base (9) of the linear actuation mechanism (6).

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