High-temperature vertical furnace flower basket carrier and high-temperature vertical furnace

Abstract

The application relates to a high-temperature vertical furnace flower basket carrier and a high-temperature vertical furnace, which comprise a bottom plate provided with a middle groove, two limiting block assemblies oppositely arranged on the middle groove and provided with mounting clamping grooves, and two position switches oppositely arranged in the middle groove and located below the two mounting clamping grooves. The contact points of the position switches extend into the mounting clamping grooves, and the bottom of a wafer loading flower basket is provided with two symmetrical positioning vertical plates. When the wafer loading flower basket is placed in position, the two positioning vertical plates are embedded into the two mounting clamping grooves and press the contact points of the two position switches. The application can solve the problem that it is difficult to determine whether the flower basket is placed in position when the wafer loading flower basket is placed on the flower basket carrier clamping groove of the feeding port, so that the feeding door cannot be closed, and the flower basket and the wafer are damaged.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a high-temperature vertical furnace basket carrier and a high-temperature vertical furnace. Background Technology

[0002] In the manufacturing of integrated circuits, high-temperature vertical furnaces are widely used in the current third-generation semiconductor production lines in China. They are devices that oxidize or activate SiC wafers in a high-temperature environment. When oxidizing or activating SiC wafers, it is usually necessary to place the basket containing the wafers in the basket carrier slot at the feed port, and then close the feed door to transfer the basket into the machine to complete the subsequent processes. However, when placing the basket containing the wafers in the basket carrier slot at the feed port, it is difficult to determine whether the basket is placed in place, which may lead to the inability to close the feed door and damage to the basket and the wafer. Utility Model Content

[0003] This application provides a high-temperature vertical furnace basket carrier and a high-temperature vertical furnace, which can solve the problem that when placing the basket loaded with wafers in the basket carrier slot at the feed inlet, it is difficult to determine whether the basket is placed in place, which leads to the inability to close the feed door and damage to the basket and wafers.

[0004] In a first aspect, this application provides a high-temperature vertical furnace basket support platform, comprising: The base plate has a central groove. Two limiting block assemblies are disposed opposite to each other on the central groove, and mounting slots are provided thereon; Two position switches are obliquely opposite each other in the central groove and are respectively located below the two mounting slots; The contacts of the position switches extend into the mounting slots, and the bottom of the basket is provided with two symmetrical positioning plates. When the basket is placed in place, the two positioning plates are embedded in the two mounting slots and press against the contacts of the two position switches.

[0005] In some embodiments, the limiting block assembly includes: An inner limiting block is provided on the central groove; An outer limiting block is disposed on the central groove and located outside the inner limiting block, and the mounting slot is formed between the outer limiting block and the inner limiting block.

[0006] In some embodiments, one end of the outer limiting block is provided with a limiting protrusion, which extends toward the inner limiting block.

[0007] In some embodiments, the groove wall of the central groove is provided with a plurality of mounting waist holes, which extend along the width direction of the mounting slot and are used to connect the inner limiting block and the outer limiting block.

[0008] In some embodiments, the inner sidewall of the outer limiting block and the groove wall of the central groove are on the same vertical plane, and the position switch is mounted on the groove wall of the central groove by a fixing member.

[0009] In some embodiments, the two position switches are connected in series and connected to the alarm device of the high-temperature vertical furnace.

[0010] In some embodiments, the two position switches are connected in series and connected to the high-temperature vertical furnace control system.

[0011] In some embodiments, the position switch is a micro switch.

[0012] In some embodiments, the contacts of the position switch extend into the mounting slot to a depth equal to the trigger stroke of the position switch.

[0013] Secondly, this application provides a high-temperature vertical furnace, including a high-temperature vertical furnace basket carrier as described in any one of the first aspects.

[0014] The technical solutions provided in this application have the following advantages compared with the prior art: The high-temperature vertical furnace basket carrier and high-temperature vertical furnace provided in this application embodiment, by having two limiting block assemblies disposed opposite to each other on the central groove and by providing mounting slots on the limiting block assemblies, can position the basket by embedding the two positioning uprights of the basket into the two mounting slots when placing the basket. By having two position switches obliquely disposed opposite to each other in the central groove, with the two position switches respectively located below the two mounting slots and the contacts of the position switches extending into the mounting slots, the two positioning uprights can press against the contacts of the two position switches when the basket is placed in place, thereby completing the detection of the basket's position. This solves the problem in existing applications where it is difficult to determine whether the basket is placed in place when placing a basket loaded with wafers in the feed inlet basket carrier slot, leading to the inability to close the feed door and damage to the basket and wafers. Attached Figure Description

[0015] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the present invention and, together with the description, serve to explain the principles of the present invention.

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0018] Figure 1 This is a front view of the high-temperature vertical furnace basket carrier and the basket assembly provided in an embodiment of this application. Figure 2 A top view of a high-temperature vertical furnace basket support provided in an embodiment of this application; Figure 3 This is a front view of a high-temperature vertical furnace basket support provided in an embodiment of this application; Figure 4 This is a schematic diagram of a position switch connection provided in an embodiment of this application; Figure 5 This is a schematic diagram of PLC control provided in an embodiment of this application; Figure 6 This is a schematic diagram of the feeding gate of a high-temperature vertical furnace provided in one embodiment of this application; Figure label: 10. Base plate; 110. Central groove; 120. Mounting waist hole; 20. Limiting block assembly; 210. Outer limiting block; 2101. Limiting protrusion; 220. Inner limiting block; 230. Mounting slot; 30. Position switch; 40. Carrying flower basket; 410. Positioning stand; 50. High-temperature vertical furnace; 60. Robotic arm. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0021] For ease of description, spatial relative terms may be used in the text to describe the relative position or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or change of motion, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0022] In integrated circuit manufacturing, high-temperature vertical furnaces are widely used in current domestic third-generation semiconductor production lines. They are devices used to oxidize or activate SiC wafers in a high-temperature environment. Originally, the design of the high-temperature vertical furnace involved an operator placing a basket containing the wafers into the basket carrier slot at the inlet. The operator would then determine if the basket was properly positioned and close the inlet gate, transferring the basket into the machine to complete subsequent processes. Currently, with the factory production line undergoing automation upgrades and equipped with overhead cranes for unmanned operation, a robotic arm places the baskets onto the basket carrier (e.g., ...). Figure 6 As shown in the figure, the existing high-temperature vertical furnace basket carrier cannot detect whether the basket is placed in the slot. When the basket is not fully placed in the slot, the basket may collide with the equipment when the equipment automatically closes the feed door, causing the basket and wafer to fall or be damaged.

[0023] Firstly, such as Figure 1-6 As shown, to address the aforementioned technical problems, this application provides a high-temperature vertical furnace basket support platform, comprising: The base plate 10 has a central groove 110 on it; Two limiting block assemblies 20 are disposed opposite to each other on the central groove 110, and are provided with mounting slots 230 thereon; Two-position switches 30 are obliquely oppositely disposed in the central groove 110 and respectively located below the two mounting slots 230; The contacts of the position switch 30 extend into the mounting slot 230. The bottom of the basket 40 is provided with two symmetrical positioning plates 410. When the basket 40 is placed in place, the two positioning plates 410 are embedded in the two mounting slots 230 and press against the contacts of the two position switches 30.

[0024] It should be noted that the two limit block assemblies 20 are usually located on the groove wall of the central groove 110 (i.e., on the upper surface of the base plate 10). The mounting slot 230 is connected to the central groove 110, that is, the central groove 110 is located below the mounting slot 230. In this way, a position switch 30 can be set in the central groove 110 to avoid the position switch 30 blocking the placement of the basket 40. By extending the contact of the position switch 30 into the mounting slot 230, the basket 40 can only be confirmed to be in place when the positioning plate 410 of the basket 40 is fully embedded in the slot and presses against the contact of the position switch 30. This can avoid the risk of the basket 40 being not properly placed but triggering the door to close.

[0025] It should be noted that the two limiting block assemblies 20 are typically arranged symmetrically from left to right, and the distance between the two mounting slots 230 is equal to the distance between the two positioning uprights 410 of the basket 40, so that the two positioning uprights 410 can be embedded in the mounting slots 230. The mounting slots 230 and the positioning uprights 410 extend along the length of the base plate 10 (i.e., as shown in the figure). Figure 2 (The indicated height direction).

[0026] It should be noted that by combining mechanical structure (limiting block assembly 20, positioning plate 410) with electronic detection (position switch 30), the basket offset can be limited at the physical level and the placement status can be verified at the electronic level. This ensures that the feed door can effectively prevent collisions with the offset basket 40 when it is closed, reducing basket deformation, wafer falling or breaking, and production losses.

[0027] In some embodiments, the limiting block assembly 20 includes: An inner limiting block 220 is provided on the central groove 110; The outer limiting block 210 is disposed on the central groove 110 and located outside the inner limiting block 220, and an installation slot 230 is formed between the outer limiting block 210 and the inner limiting block 220.

[0028] It should be noted that the inner limiting block 220 and the outer limiting block 210 are set on the groove wall of the central groove 110. The thickness (or width) of the groove wall on the left (and / or right) side of the central groove 110 is usually greater than or equal to the width of the outer limiting block 210, so as to facilitate the setting of the outer limiting block 210 on the left and right groove walls of the central groove 110, and to prevent the outer limiting block 210 from extending to the outer sides of the left and right ends of the base plate 10. The length of the inner limiting block 220 and the outer limiting block 210 is usually less than or equal to the length of the base plate 10, but greater than the length of the central groove 110 (i.e., as shown in the figure). Figure 2 (as shown in the height direction) so that the inner limiting block 220 and the outer limiting block 210 can straddle the central groove 110 and be installed on the upper and lower side walls (or upper and lower groove walls) of the central groove 110. The central groove 110 can be a rectangular groove. The portions of the upper and lower side walls of the central groove 110 not covered by the inner limiting block 220 and the outer limiting block 210 can be provided with rectangular weight-reducing grooves to reduce the weight of the base plate 10.

[0029] It should be noted that by setting the inner limit block 220 and the outer limit block 210 relative to each other to form the mounting slot 230, the basket 40 can be bidirectionally limited from the inside and outside. This bidirectional constraint can effectively prevent the basket 40 from shaking or shifting during the embedding process or when the equipment is running, and provide a stable physical basis for the contacts of the subsequent pressure position switch 30.

[0030] In some embodiments, one end of the outer limiting block 210 is provided with a limiting protrusion 2101, which extends toward the inner limiting block 220.

[0031] It should be noted that by setting the limiting protrusion 2101 and extending it inward (towards the inner limiting block 220), a blocking structure can be formed at the end of the mounting slot 230. When the basket 40 is inserted into the mounting slot 230, the limiting protrusion 2101 can restrict the movement of the basket 40 along the length of the mounting slot 230, preventing the basket 40 from sliding out of the mounting slot 230 due to equipment vibration or placement deviation of the robot 60, thus providing additional limiting protection at the end. Furthermore, the limiting protrusion 2101 can serve as a positioning reference when the basket 40 is inserted into the mounting slot 230. When the automated robot 60 places the basket 40, the limiting protrusion 2101 can guide the basket 40 to accurately stop at the preset position of the mounting slot 230, preventing the basket 40 from being pushed in too far or placed too far forward, which would affect the accurate contact with the position switch 30 and ensure the reliability of the detection signal.

[0032] It should be noted that the end of the limiting block assembly 20 away from the limiting protrusion 2101 can be aligned with the edge of the base plate 10 (i.e., as shown in the image). Figure 2The upper edge shown is flush with the bottom plate 10. By making the end of the limiting block assembly 20 flush with the edge of the bottom plate 10, the limiting block assembly 20 is prevented from exceeding the bottom plate 10 and forming a protruding obstacle. This provides a more open and unobstructed operating space for the robot arm 60 to grasp and place the basket 40, reducing the risk of collision between the robot arm 60 and the limiting block assembly 20, and ensuring smooth automated picking and placing. It can also reduce the safety hazards of operators (such as during maintenance) or other equipment parts being scratched by protrusions, and facilitate the accurate docking of the basket platform with the equipment inlet, transmission mechanism and other surrounding parts, reducing assembly gaps.

[0033] In some embodiments, the groove wall of the central groove 110 is provided with a plurality of mounting waist holes 120. The mounting waist holes 120 extend along the width direction of the mounting slot 230 and are used to connect the inner limiting block 220 and the outer limiting block 210.

[0034] It should be noted that multiple mounting waist holes 120 can be set in groups, that is, a pair of mounting waist holes 120 facing each other vertically constitute a group. A group of mounting waist holes 120 is used to connect an inner limit block 220 or an outer limit block 210. By extending the mounting waist holes 120 along the width direction of the mounting slot 230, the installation positions of the inner limit block 220 and the outer limit block 210 can be moved along the mounting waist holes 120. By adjusting the distance between the two limit blocks, the width and position of the mounting slot 230 can be changed, thereby adapting to different sizes of cargo baskets 40 (especially those with different widths of the bottom positioning plate 410). The entire platform needs to be replaced, which improves the versatility of the equipment. During equipment assembly or maintenance, the fixed holes are prone to misalignment of the limit blocks due to machining errors. However, the adjustability of the waist hole allows the operator to fine-tune the position of the limit block, ensuring that the inner limit block 220 and the outer limit block 210 can accurately form the required mounting slot 230, reducing assembly rework caused by hole deviation and improving installation efficiency. The inner limit block 220 and the outer limit block 210 are provided with connecting through holes, and the inner limit block 220 and the outer limit block 210 are connected by connecting bolts passing through the mounting waist hole 120 and the connecting through hole.

[0035] In some embodiments, the inner sidewall of the outer limiting block 210 and the groove wall of the central groove 110 are on the same vertical plane, and the position switch 30 is mounted on the groove wall of the central groove 110 by means of a fixing member.

[0036] It should be noted that the left and right walls (or left and right groove walls) of the central groove 110 are provided with threaded holes for fixing the position switch 30. The fixing holes can be connected with screws or bolts. One position switch 30 is installed in a mounting slot 230 (e.g., Figure 2 The mounting slot 230 on the left side of the diagram is located near the limiting protrusion 2101 at one end, and the other position switch 30 is located in another mounting slot 230 (e.g., the one on the left side of the diagram). Figure 2 The mounting slot 230 on the right side of the diagram is located away from the end of the limiting protrusion 2101, so that the two position switches 30 form a cross detection of the front and rear ends of the bottom of the flower basket 40. Only when the front end of the flower basket 40 reaches the preset position and the rear end is fully embedded in the mounting slot 230 will the two position switches 30 be triggered at the same time, ensuring that the flower basket 40 is not misaligned in the length direction, avoiding the semi-embedded state where one end is in place and the other end is not in place (if the two position switches 30 are both located at the same end, they can only detect whether that end of the flower basket 40 is in place, and cannot determine whether the other end is offset. The oblique symmetrical layout of the two position switches 30 forms a double verification by detecting the "two key points at the front and rear" of the flower basket 40).

[0037] It should be noted that by making the inner sidewall of the outer limit block 210 flush with the groove wall (left groove wall or left side wall) of the central groove 110, the outer boundary of the mounting slot 230 can be aligned with the groove wall (left groove wall or left side wall) of the central groove 110. The position switch 30 is fixed on the left groove wall, and its contact extends into the mounting slot 230 to match the position of the mounting slot 230, thus avoiding detection deviation caused by misalignment between the groove wall of the central groove 110 and the limit block.

[0038] It should be noted that the position switch 30 can be replaced by a photoelectric sensor installed on the inner limit block 220 and the outer limit block 210. When the basket 40 blocks the two photoelectric sensors, it indicates that the basket 40 has been placed in place.

[0039] In some embodiments, the two-position switch 30 is connected in series and connected to the alarm device of the high-temperature vertical furnace 50.

[0040] In some embodiments, the two-position switch 30 is connected in series and connected to the control system of the high-temperature vertical furnace 50.

[0041] It should be noted that, as Figure 4 , 5 As shown, the output terminal b of one position switch 30 (left position switch 30) and the output terminal c of another position switch 30 (right position switch 30) are connected with a wire. The output terminal a of the left position switch 30 and the output terminal d of the right position switch 30 are respectively connected to the OV and input point X1 of the PLC input module. The signal X1 is added to the output statement of the PLC controlling the closing of the feed door. When X1 is closed, the door can be closed; when X1 is open, an alarm can be output that the flower basket is not placed properly.

[0042] It should be noted that the characteristic of a series circuit is that "the circuit is only conductive when all switches are closed." This ensures that the equipment receives a qualified "door can be closed" signal only when both position switches 30 are triggered by the load basket 40 (i.e., both the front and rear ends of the load basket 40 are fully inserted into the trough). If either position switch 30 is not triggered, the circuit remains open, directly preventing the feed door from closing. This eliminates collision problems caused by misjudgment of a single switch from the control logic perspective. Furthermore, when both position switches 30 are not triggered simultaneously (e.g., basket misalignment, switch malfunction), the circuit is in an open state. The equipment will not only not perform the door closing action, but will also trigger an alarm device (e.g., audible and visual alarm). At this time, the operator or the automation system can detect the abnormality immediately, adjust the basket position in time, or troubleshoot the fault, avoiding further losses caused by the equipment waiting idly or forcibly running, while shortening the abnormal handling time.

[0043] It should be noted that the series connection does not require a complex signal comparison procedure. "Dual verification" can be achieved through basic circuit logic alone, which reduces the programming complexity and failure probability of the equipment control system. At the same time, the linkage function of the alarm device makes abnormal status visible and reduces the pressure of manual inspection.

[0044] In some embodiments, position switch 30 is a micro switch.

[0045] It should be noted that the micro switch has a short contact travel (usually only 0.1-0.5mm), and can be triggered by slight pressure from the bottom positioning plate 410 of the basket 40. It can accurately capture the minute displacement of whether the basket 40 is fully embedded in the mounting slot 230, avoiding misjudgment that "the basket is in place but the switch does not respond" due to an excessively high trigger threshold, thus ensuring detection accuracy. In addition, the micro switch has a small overall size and does not occupy too much installation space. It can be easily embedded in narrow areas such as the groove wall of the central groove 110 or below the mounting slot 230, avoiding layout conflicts caused by excessive component size.

[0046] In some embodiments, the contacts of the position switch 30 extend into the mounting slot 230 to a depth equal to the trigger stroke of the position switch 30.

[0047] It should be noted that when the positioning plate 410 of the basket 40 is fully embedded in the mounting slot 230, its bottom just presses against the contact to the critical position of the trigger stroke. At this time, the position switch 30 is immediately turned on, which can avoid the "bamboo basket 40 is not fully in the slot but triggers prematurely" (false judgment of being in position) caused by "the contact is inserted too deeply", or the "bamboo basket 40 is fully in the slot but does not trigger" (missed judgment of being in position) caused by "the contact is inserted too shallowly". This ensures that the action nodes of mechanical positioning and electrical detection are completely synchronized. Moreover, the contact only reaches the trigger stroke when the basket 40 is fully in position. It will not be over-pressed when it is not in position. When the basket is removed, the contact can immediately reset. This "non-over-triggering" state can reduce mechanical fatigue or deformation of the contact caused by long-term over-travel pressure, extend the service life of the micro switch and reduce the maintenance frequency.

[0048] In summary, the high-temperature vertical furnace basket carrier and high-temperature vertical furnace provided in this application embodiment, by having two limiting block assemblies 20 disposed opposite to each other on the central groove 110 and by providing mounting slots 230 on the limiting block assemblies 20, can position the basket 40 by embedding the two positioning uprights 410 of the basket 40 into the two mounting slots 230 when placing the basket 40; and by having two position switches 30 disposed obliquely opposite to each other in the central groove 110, can position the basket 40 by embedding the two positioning uprights 410 of the basket 40 into the two mounting slots 230. Position switches 30 are located below the two mounting slots 230 respectively, and extend the contacts of the position switches 30 into the mounting slots 230. When the basket 40 is placed in place, the two positioning plates 410 can press against the contacts of the two position switches 30 to complete the detection of the basket 40's position. This solves the problem that when placing the basket loaded with wafers into the basket carrier slot at the feed inlet, it is difficult to determine whether the basket is placed in place, which leads to the inability to close the feed door and damage to the basket and wafers.

[0049] Secondly, embodiments of this application provide a high-temperature vertical furnace, including a high-temperature vertical furnace basket support as described in any embodiment of the first aspect, wherein the high-temperature vertical furnace basket support includes: The base plate 10 has a central groove 110 on it; Two limiting block assemblies 20 are disposed opposite to each other on the central groove 110, and are provided with mounting slots 230 thereon; Two-position switches 30 are obliquely opposite to each other in the central groove 110 and are respectively located below the two mounting slots 230; The contacts of the position switch 30 extend into the mounting slot 230. The bottom of the basket 40 is provided with two symmetrical positioning plates 410. When the basket 40 is placed in place, the two positioning plates 410 are embedded in the two mounting slots 230 and press against the contacts of the two position switches 30.

[0050] It should be noted that the two limit block assemblies 20 are usually located on the groove wall of the central groove 110 (i.e., on the upper surface of the base plate 10). The mounting slot 230 is connected to the central groove 110, that is, the central groove 110 is located below the mounting slot 230. In this way, a position switch 30 can be set in the central groove 110 to avoid the position switch 30 blocking the placement of the basket 40. By extending the contact of the position switch 30 into the mounting slot 230, the basket 40 can only be confirmed to be in place when the positioning plate 410 of the basket 40 is fully embedded in the slot and presses against the contact of the position switch 30. This can avoid the risk of the basket 40 being not properly placed but triggering the door to close.

[0051] It should be noted that the two limiting block assemblies 20 are typically arranged symmetrically from left to right, and the distance between the two mounting slots 230 is equal to the distance between the two positioning uprights 410 of the basket 40, so that the two positioning uprights 410 can be embedded in the mounting slots 230. The mounting slots 230 and the positioning uprights 410 extend along the length of the base plate 10 (i.e., as shown in the figure). Figure 2 (The height direction is shown).

[0052] It should be noted that by combining mechanical structure (limiting block assembly 20, positioning plate 410) with electronic detection (position switch 30), the basket offset can be limited at the physical level and the placement status can be verified at the electronic level. This ensures that the feed door can effectively prevent collisions with the offset basket 40 when it is closed, reducing basket deformation, wafer falling or breaking, and production losses.

[0053] In some embodiments, the limiting block assembly 20 includes: An inner limiting block 220 is provided on the central groove 110; The outer limiting block 210 is disposed on the central groove 110 and located outside the inner limiting block 220, and an installation slot 230 is formed between the outer limiting block 210 and the inner limiting block 220.

[0054] It should be noted that the inner limiting block 220 and the outer limiting block 210 are set on the groove wall of the central groove 110. The thickness (or width) of the groove wall on the left (and / or right) side of the central groove 110 is usually greater than or equal to the width of the outer limiting block 210, so as to facilitate the setting of the outer limiting block 210 on the left and right groove walls of the central groove 110, and to prevent the outer limiting block 210 from extending to the outer sides of the left and right ends of the base plate 10. The length of the inner limiting block 220 and the outer limiting block 210 is usually less than or equal to the length of the base plate 10, but greater than the length of the central groove 110 (i.e., as shown in the figure). Figure 2(as shown in the height direction) so that the inner limiting block 220 and the outer limiting block 210 can straddle the central groove 110 and be installed on the upper and lower side walls (or upper and lower groove walls) of the central groove 110. The central groove 110 can be a rectangular groove. The portions of the upper and lower side walls of the central groove 110 not covered by the inner limiting block 220 and the outer limiting block 210 can be provided with rectangular weight-reducing grooves to reduce the weight of the base plate 10.

[0055] It should be noted that by setting the inner limit block 220 and the outer limit block 210 relative to each other to form the mounting slot 230, the basket 40 can be bidirectionally limited from the inside and outside. This bidirectional constraint can effectively prevent the basket 40 from shaking or shifting during the embedding process or when the equipment is running, and provide a stable physical basis for the contacts of the subsequent pressure position switch 30.

[0056] In some embodiments, one end of the outer limiting block 210 is provided with a limiting protrusion 2101, which extends toward the inner limiting block 220.

[0057] It should be noted that by setting the limiting protrusion 2101 and extending it inward (towards the inner limiting block 220), a blocking structure can be formed at the end of the mounting slot 230. When the basket 40 is inserted into the mounting slot 230, the limiting protrusion 2101 can restrict the movement of the basket 40 along the length of the mounting slot 230, preventing the basket 40 from sliding out of the mounting slot 230 due to equipment vibration or placement deviation of the robot 60, thus providing additional limiting protection at the end. Furthermore, the limiting protrusion 2101 can serve as a positioning reference when the basket 40 is inserted into the mounting slot 230. When the automated robot 60 places the basket 40, the limiting protrusion 2101 can guide the basket 40 to accurately stop at the preset position of the mounting slot 230, preventing the basket 40 from being pushed in too far or placed too far forward, which would affect the accurate contact with the position switch 30 and ensure the reliability of the detection signal.

[0058] It should be noted that the end of the limiting block assembly 20 away from the limiting protrusion 2101 can be aligned with the edge of the base plate 10 (i.e., as shown in the image). Figure 2 The upper edge shown is flush with the bottom plate 10. By making the end of the limiting block assembly 20 flush with the edge of the bottom plate 10, the limiting block assembly 20 is prevented from exceeding the bottom plate 10 and forming a protruding obstacle. This provides a more open and unobstructed operating space for the robot arm 60 to grasp and place the basket 40, reducing the risk of collision between the robot arm 60 and the limiting block assembly 20, and ensuring smooth automated picking and placing. It can also reduce the safety hazards of operators (such as during maintenance) or other equipment parts being scratched by protrusions, and facilitate the accurate docking of the basket platform with the equipment inlet, transmission mechanism and other surrounding parts, reducing assembly gaps.

[0059] In some embodiments, the groove wall of the central groove 110 is provided with a plurality of mounting waist holes 120. The mounting waist holes 120 extend along the width direction of the mounting slot 230 and are used to connect the inner limiting block 220 and the outer limiting block 210.

[0060] It should be noted that multiple mounting waist holes 120 can be set in groups, that is, a pair of mounting waist holes 120 facing each other vertically constitute a group. A group of mounting waist holes 120 is used to connect an inner limit block 220 or an outer limit block 210. By extending the mounting waist holes 120 along the width direction of the mounting slot 230, the installation positions of the inner limit block 220 and the outer limit block 210 can be moved along the mounting waist holes 120. By adjusting the distance between the two limit blocks, the width and position of the mounting slot 230 can be changed, thereby adapting to different sizes of cargo baskets 40 (especially those with different widths of the bottom positioning plate 410). The entire platform needs to be replaced, which improves the versatility of the equipment. During equipment assembly or maintenance, the fixed holes are prone to misalignment of the limit blocks due to machining errors. However, the adjustability of the waist hole allows the operator to fine-tune the position of the limit block, ensuring that the inner limit block 220 and the outer limit block 210 can accurately form the required mounting slot 230, reducing assembly rework caused by hole deviation and improving installation efficiency. The inner limit block 220 and the outer limit block 210 are provided with connecting through holes, and the inner limit block 220 and the outer limit block 210 are connected by connecting bolts passing through the mounting waist hole 120 and the connecting through hole.

[0061] In some embodiments, the inner sidewall of the outer limiting block 210 and the groove wall of the central groove 110 are on the same vertical plane, and the position switch 30 is mounted on the groove wall of the central groove 110 by means of a fixing member.

[0062] It should be noted that the left and right walls (or left and right groove walls) of the central groove 110 are provided with threaded holes for fixing the position switch 30. The fixing holes can be connected with screws or bolts. One position switch 30 is installed in a mounting slot 230 (e.g., Figure 2 The mounting slot 230 on the left side of the diagram is located near the limiting protrusion 2101 at one end, and the other position switch 30 is located in another mounting slot 230 (e.g., the one on the left side of the diagram). Figure 2The mounting slot 230 on the right side of the diagram is located away from the end of the limiting protrusion 2101, so that the two position switches 30 form a cross detection of the front and rear ends of the bottom of the flower basket 40. Only when the front end of the flower basket 40 reaches the preset position and the rear end is fully embedded in the mounting slot 230 will the two position switches 30 be triggered at the same time, ensuring that the flower basket 40 is not misaligned in the length direction, avoiding the semi-embedded state where one end is in place and the other end is not in place (if the two position switches 30 are both located at the same end, they can only detect whether that end of the flower basket 40 is in place, and cannot determine whether the other end is offset. The oblique symmetrical layout of the two position switches 30 forms a double verification by detecting the "two key points at the front and rear" of the flower basket 40).

[0063] It should be noted that by making the inner sidewall of the outer limit block 210 flush with the groove wall (left groove wall or left side wall) of the central groove 110, the outer boundary of the mounting slot 230 can be aligned with the groove wall (left groove wall or left side wall) of the central groove 110. The position switch 30 is fixed on the left groove wall, and its contact extends into the mounting slot 230 to match the position of the mounting slot 230, thus avoiding detection deviation caused by misalignment between the groove wall of the central groove 110 and the limit block.

[0064] It should be noted that the position switch 30 can be replaced by a photoelectric sensor installed on the inner limit block 220 and the outer limit block 210. When the basket 40 blocks the two photoelectric sensors, it indicates that the basket 40 has been placed in place.

[0065] In some embodiments, the two-position switch 30 is connected in series and connected to the alarm device of the high-temperature vertical furnace 50.

[0066] In some embodiments, the two-position switch 30 is connected in series and connected to the control system of the high-temperature vertical furnace 50.

[0067] It should be noted that, as Figure 4 , 5 As shown, the output terminal b of one position switch 30 (left position switch 30) and the output terminal c of another position switch 30 (right position switch 30) are connected with a wire. The output terminal a of the left position switch 30 and the output terminal d of the right position switch 30 are respectively connected to the OV and input point X1 of the PLC input module. The signal X1 is added to the output statement of the PLC controlling the closing of the feed door. When X1 is closed, the door can be closed; when X1 is open, an alarm can be output that the flower basket is not placed properly.

[0068] It should be noted that the characteristic of a series circuit is that "the circuit is only conductive when all switches are closed." This ensures that the equipment receives a qualified "door can be closed" signal only when both position switches 30 are triggered by the load basket 40 (i.e., both the front and rear ends of the load basket 40 are fully inserted into the trough). If either position switch 30 is not triggered, the circuit remains open, directly preventing the feed door from closing. This eliminates collision problems caused by misjudgment of a single switch from the control logic perspective. Furthermore, when both position switches 30 are not triggered simultaneously (e.g., basket misalignment, switch malfunction), the circuit is in an open state. The equipment will not only not perform the door closing action, but will also trigger an alarm device (e.g., audible and visual alarm). At this time, the operator or the automation system can detect the abnormality immediately, adjust the basket position in time, or troubleshoot the fault, avoiding further losses caused by the equipment waiting idly or forcibly running, while shortening the abnormal handling time.

[0069] It should be noted that the series connection does not require a complicated signal comparison procedure. "Dual verification" can be achieved through basic circuit logic alone, which reduces the programming complexity and failure probability of the equipment control system. At the same time, the linkage function of the alarm device makes abnormal status visible and reduces the pressure of manual inspection.

[0070] In some embodiments, position switch 30 is a micro switch.

[0071] It should be noted that the micro switch has a short contact travel (usually only 0.1-0.5mm), and can be triggered by slight pressure from the bottom positioning plate 410 of the basket 40. It can accurately capture the minute displacement of whether the basket 40 is fully embedded in the mounting slot 230, avoiding misjudgment that "the basket is in place but the switch does not respond" due to an excessively high trigger threshold, thus ensuring detection accuracy. In addition, the micro switch has a small overall size and does not occupy too much installation space. It can be easily embedded in narrow areas such as the groove wall of the central groove 110 or below the mounting slot 230, avoiding layout conflicts caused by excessive component size.

[0072] In some embodiments, the contacts of the position switch 30 extend into the mounting slot 230 to a depth equal to the trigger stroke of the position switch 30.

[0073] It should be noted that when the positioning plate 410 of the basket 40 is fully embedded in the mounting slot 230, its bottom just presses against the contact to the critical position of the trigger stroke. At this time, the position switch 30 is immediately turned on, which can avoid the "bamboo basket 40 is not fully in the slot but triggers prematurely" (false judgment of being in position) caused by "the contact is inserted too deeply", or the "bamboo basket 40 is fully in the slot but does not trigger" (missed judgment of being in position) caused by "the contact is inserted too shallowly". This ensures that the action nodes of mechanical positioning and electrical detection are completely synchronized. Moreover, the contact only reaches the trigger stroke when the basket 40 is fully in position. It will not be over-pressed when it is not in position. When the basket is removed, the contact can immediately reset. This "non-over-triggering" state can reduce mechanical fatigue or deformation of the contact caused by long-term over-travel pressure, extend the service life of the micro switch and reduce the maintenance frequency.

[0074] Thirdly, embodiments of this application provide a high-temperature vertical furnace basket support platform, comprising: The base plate 10 has a central groove 110 on it; Two limiting block assemblies 20 are disposed opposite to each other on the central groove 110, and are provided with mounting slots 230 thereon; Two-position switches 30 are obliquely oppositely disposed in the central groove 110 and respectively located below the two mounting slots 230; The contacts of the position switch 30 extend into the mounting slot 230. The bottom of the basket 40 is provided with two symmetrical positioning plates 410. When the basket 40 is placed in place, the two positioning plates 410 are embedded in the two mounting slots 230 and press against the contacts of the two position switches 30.

[0075] It should be noted that the two limit block assemblies 20 are usually located on the groove wall of the central groove 110 (i.e., on the upper surface of the base plate 10). The mounting slot 230 is connected to the central groove 110, that is, the central groove 110 is located below the mounting slot 230. In this way, a position switch 30 can be set in the central groove 110 to avoid the position switch 30 blocking the placement of the basket 40. By extending the contact of the position switch 30 into the mounting slot 230, the basket 40 can only be confirmed to be in place when the positioning plate 410 of the basket 40 is fully embedded in the slot and presses against the contact of the position switch 30. This can avoid the risk of the basket 40 being not properly placed but triggering the door to close.

[0076] It should be noted that the two limiting block assemblies 20 are typically arranged symmetrically from left to right, and the distance between the two mounting slots 230 is equal to the distance between the two positioning uprights 410 of the basket 40, so that the two positioning uprights 410 can be embedded in the mounting slots 230. The mounting slots 230 and the positioning uprights 410 extend along the length of the base plate 10 (i.e., as shown in the figure). Figure 2 (The indicated height direction).

[0077] It should be noted that by combining mechanical structure (limiting block assembly 20, positioning plate 410) with electronic detection (position switch 30), the basket offset can be limited at the physical level and the placement status can be verified at the electronic level. This ensures that the feed door can effectively prevent collisions with the offset basket 40 when it is closed, reducing basket deformation, wafer falling or breaking, and production losses.

[0078] In some embodiments, the limiting block assembly 20 includes: An inner limiting block 220 is provided on the central groove 110; The outer limiting block 210 is disposed on the central groove 110 and located outside the inner limiting block 220, and an installation slot 230 is formed between the outer limiting block 210 and the inner limiting block 220.

[0079] It should be noted that the inner limiting block 220 and the outer limiting block 210 are set on the groove wall of the central groove 110. The thickness (or width) of the groove wall on the left (and / or right) side of the central groove 110 is usually greater than or equal to the width of the outer limiting block 210, so as to facilitate the setting of the outer limiting block 210 on the left and right groove walls of the central groove 110, and to prevent the outer limiting block 210 from extending to the outer sides of the left and right ends of the base plate 10. The length of the inner limiting block 220 and the outer limiting block 210 is usually less than or equal to the length of the base plate 10, but greater than the length of the central groove 110 (i.e., as shown in the figure). Figure 2 (as shown in the height direction) so that the inner limiting block 220 and the outer limiting block 210 can straddle the central groove 110 and be installed on the upper and lower side walls (or upper and lower groove walls) of the central groove 110. The central groove 110 can be a rectangular groove. The portions of the upper and lower side walls of the central groove 110 not covered by the inner limiting block 220 and the outer limiting block 210 can be provided with rectangular weight-reducing grooves to reduce the weight of the base plate 10.

[0080] It should be noted that by setting the inner limit block 220 and the outer limit block 210 relative to each other to form the mounting slot 230, the basket 40 can be bidirectionally limited from the inside and outside. This bidirectional constraint can effectively prevent the basket 40 from shaking or shifting during the embedding process or when the equipment is running, and provide a stable physical basis for the contacts of the subsequent pressure position switch 30.

[0081] In some embodiments, one end of the outer limiting block 210 is provided with a limiting protrusion 2101, which extends toward the inner limiting block 220.

[0082] It should be noted that by setting the limiting protrusion 2101 and extending it inward (towards the inner limiting block 220), a blocking structure can be formed at the end of the mounting slot 230. When the basket 40 is inserted into the mounting slot 230, the limiting protrusion 2101 can restrict the movement of the basket 40 along the length of the mounting slot 230, preventing the basket 40 from sliding out of the mounting slot 230 due to equipment vibration or placement deviation of the robot 60, thus providing additional limiting protection at the end. Furthermore, the limiting protrusion 2101 can serve as a positioning reference when the basket 40 is inserted into the mounting slot 230. When the automated robot 60 places the basket 40, the limiting protrusion 2101 can guide the basket 40 to accurately stop at the preset position of the mounting slot 230, preventing the basket 40 from being pushed in too far or placed too far forward, which would affect the accurate contact with the position switch 30 and ensure the reliability of the detection signal.

[0083] It should be noted that the end of the limiting block assembly 20 away from the limiting protrusion 2101 can be aligned with the edge of the base plate 10 (i.e., as shown in the image). Figure 2 The upper edge shown is flush with the bottom plate 10. By making the end of the limiting block assembly 20 flush with the edge of the bottom plate 10, the limiting block assembly 20 is prevented from exceeding the bottom plate 10 and forming a protruding obstacle. This provides a more open and unobstructed operating space for the robot arm 60 to grasp and place the basket 40, reducing the risk of collision between the robot arm 60 and the limiting block assembly 20, and ensuring smooth automated picking and placing. It can also reduce the safety hazards of operators (such as during maintenance) or other equipment parts being scratched by protrusions, and facilitate the accurate docking of the basket platform with the equipment inlet, transmission mechanism and other surrounding parts, reducing assembly gaps.

[0084] In some embodiments, the groove wall of the central groove 110 is provided with a plurality of mounting waist holes 120. The mounting waist holes 120 extend along the width direction of the mounting slot 230 and are used to connect the inner limiting block 220 and the outer limiting block 210.

[0085] It should be noted that multiple mounting waist holes 120 can be set in groups, that is, a pair of mounting waist holes 120 facing each other vertically constitute a group. A group of mounting waist holes 120 is used to connect an inner limit block 220 or an outer limit block 210. By extending the mounting waist holes 120 along the width direction of the mounting slot 230, the installation positions of the inner limit block 220 and the outer limit block 210 can be moved along the mounting waist holes 120. By adjusting the distance between the two limit blocks, the width and position of the mounting slot 230 can be changed, thereby adapting to different sizes of cargo baskets 40 (especially those with different widths of the bottom positioning plate 410). The entire platform needs to be replaced, which improves the versatility of the equipment. During equipment assembly or maintenance, the fixed holes are prone to misalignment of the limit blocks due to machining errors. However, the adjustability of the waist hole allows the operator to fine-tune the position of the limit block, ensuring that the inner limit block 220 and the outer limit block 210 can accurately form the required mounting slot 230, reducing assembly rework caused by hole deviation and improving installation efficiency. The inner limit block 220 and the outer limit block 210 are provided with connecting through holes, and the inner limit block 220 and the outer limit block 210 are connected by connecting bolts passing through the mounting waist hole 120 and the connecting through hole.

[0086] In some embodiments, the inner sidewall of the outer limiting block 210 and the groove wall of the central groove 110 are on the same vertical plane, and the position switch 30 is mounted on the groove wall of the central groove 110 by means of a fixing member.

[0087] It should be noted that the left and right walls (or left and right groove walls) of the central groove 110 are provided with threaded holes for fixing the position switch 30. The fixing holes can be connected with screws or bolts. One position switch 30 is installed in a mounting slot 230 (e.g., Figure 2 The mounting slot 230 on the left side of the diagram is located near the limiting protrusion 2101 at one end, and the other position switch 30 is located in another mounting slot 230 (e.g., the one on the left side of the diagram). Figure 2 The mounting slot 230 on the right side of the diagram is located away from the end of the limiting protrusion 2101, so that the two position switches 30 form a cross detection of the front and rear ends of the bottom of the flower basket 40. Only when the front end of the flower basket 40 reaches the preset position and the rear end is fully embedded in the mounting slot 230 will the two position switches 30 be triggered at the same time, ensuring that the flower basket 40 is not misaligned in the length direction, avoiding the semi-embedded state where one end is in place and the other end is not in place (if the two position switches 30 are both located at the same end, they can only detect whether that end of the flower basket 40 is in place, and cannot determine whether the other end is offset. The oblique symmetrical layout of the two position switches 30 forms a double verification by detecting the "two key points at the front and rear" of the flower basket 40).

[0088] It should be noted that by making the inner sidewall of the outer limit block 210 flush with the groove wall (left groove wall or left side wall) of the central groove 110, the outer boundary of the mounting slot 230 can be aligned with the groove wall (left groove wall or left side wall) of the central groove 110. The position switch 30 is fixed on the left groove wall, and its contact extends into the mounting slot 230 to match the position of the mounting slot 230, thus avoiding detection deviation caused by misalignment between the groove wall of the central groove 110 and the limit block.

[0089] It should be noted that the position switch 30 can be replaced by a photoelectric sensor installed on the inner limit block 220 and the outer limit block 210. When the basket 40 blocks the two photoelectric sensors, it indicates that the basket 40 has been placed in place.

[0090] In some embodiments, the two-position switch 30 is connected in series and connected to the alarm device of the high-temperature vertical furnace 50.

[0091] In some embodiments, the two-position switch 30 is connected in series and connected to the control system of the high-temperature vertical furnace 50.

[0092] It should be noted that, as Figure 4 , 5 As shown, the output terminal b of one position switch 30 (left position switch 30) and the output terminal c of another position switch 30 (right position switch 30) are connected with a wire. The output terminal a of the left position switch 30 and the output terminal d of the right position switch 30 are respectively connected to the OV and input point X1 of the PLC input module. The signal X1 is added to the output statement of the PLC controlling the closing of the feed door. When X1 is closed, the door can be closed; when X1 is open, an alarm can be output that the flower basket is not placed properly.

[0093] It should be noted that the characteristic of a series circuit is that "the circuit is only conductive when all switches are closed." This ensures that the equipment receives a qualified "door can be closed" signal only when both position switches 30 are triggered by the load basket 40 (i.e., both the front and rear ends of the load basket 40 are fully inserted into the trough). If either position switch 30 is not triggered, the circuit remains open, directly preventing the feed door from closing. This eliminates collision problems caused by misjudgment of a single switch from the control logic perspective. Furthermore, when both position switches 30 are not triggered simultaneously (e.g., basket misalignment, switch malfunction), the circuit is in an open state. The equipment will not only not perform the door closing action, but will also trigger an alarm device (e.g., audible and visual alarm). At this time, the operator or the automation system can detect the abnormality immediately, adjust the basket position in time, or troubleshoot the fault, avoiding further losses caused by the equipment waiting idly or forcibly running, while shortening the abnormal handling time.

[0094] It should be noted that the series connection does not require a complex signal comparison procedure. "Dual verification" can be achieved through basic circuit logic alone, which reduces the programming complexity and failure probability of the equipment control system. At the same time, the linkage function of the alarm device makes abnormal status visible, reducing the pressure of manual inspection.

[0095] In some embodiments, position switch 30 is a micro switch.

[0096] It should be noted that the micro switch has a short contact travel (usually only 0.1-0.5mm), and can be triggered by slight pressure from the bottom positioning plate 410 of the basket 40. It can accurately capture the minute displacement of whether the basket 40 is fully embedded in the mounting slot 230, avoiding misjudgment that "the basket is in place but the switch does not respond" due to an excessively high trigger threshold, thus ensuring detection accuracy. In addition, the micro switch has a small overall size and does not occupy too much installation space. It can be easily embedded in narrow areas such as the groove wall of the central groove 110 or below the mounting slot 230, avoiding layout conflicts caused by excessive component size.

[0097] In summary, the high-temperature vertical furnace basket carrier and high-temperature vertical furnace provided in this application embodiment, by having two limiting block assemblies 20 disposed opposite to each other on the central groove 110 and by providing mounting slots 230 on the limiting block assemblies 20, can position the basket 40 by embedding the two positioning uprights 410 of the basket 40 into the two mounting slots 230 when placing the basket 40; and by having two position switches 30 disposed obliquely opposite to each other in the central groove 110, can position the basket 40 by embedding the two positioning uprights 410 of the basket 40 into the two mounting slots 230. Position switches 30 are located below the two mounting slots 230 respectively, and extend the contacts of the position switches 30 into the mounting slots 230. When the basket 40 is placed in place, the two positioning plates 410 can press against the contacts of the two position switches 30 to complete the detection of the basket 40's position. This solves the problem that when placing the basket loaded with wafers into the basket carrier slot at the feed inlet, it is difficult to determine whether the basket is placed in place, which leads to the inability to close the feed door and damage to the basket and wafers.

[0098] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0099] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0100] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A high-temperature vertical furnace basket support platform, characterized in that, include: The base plate has a central groove. Two limiting block assemblies are disposed opposite to each other on the central groove, and mounting slots are provided thereon; Two position switches are obliquely opposite each other in the central groove and are respectively located below the two mounting slots; The contacts of the position switches extend into the mounting slots, and the bottom of the basket is provided with two symmetrical positioning plates. When the basket is placed in place, the two positioning plates are embedded in the two mounting slots and press against the contacts of the two position switches.

2. The high-temperature vertical furnace basket support platform according to claim 1, characterized in that, The limiting block assembly includes: An inner limiting block is provided on the central groove; An outer limiting block is disposed on the central groove and located outside the inner limiting block, and the mounting slot is formed between the outer limiting block and the inner limiting block.

3. The high-temperature vertical furnace basket support platform according to claim 2, characterized in that, One end of the outer limiting block is provided with a limiting protrusion, which extends toward the inner limiting block.

4. The high-temperature vertical furnace basket support platform according to claim 2, characterized in that, The groove wall of the central recess is provided with a plurality of mounting waist holes, which extend along the width direction of the mounting slot and are used to connect the inner limiting block and the outer limiting block.

5. The high-temperature vertical furnace basket support platform according to claim 2, characterized in that, The inner wall of the outer limiting block and the groove wall of the central groove are on the same vertical plane, and the position switch is fixed on the groove wall of the central groove by a fixing member.

6. The high-temperature vertical furnace basket support platform according to claim 1, characterized in that, The two position switches are connected in series and connected to the alarm device of the high-temperature vertical furnace.

7. The high-temperature vertical furnace basket support platform according to claim 1, characterized in that, The two position switches are connected in series and connected to the high-temperature vertical furnace control system.

8. The high-temperature vertical furnace basket support platform according to any one of claims 1-7, characterized in that, The position switch is a micro switch.

9. The high-temperature vertical furnace basket support platform according to any one of claims 1-7, characterized in that, The depth to which the contacts of the position switch extend into the mounting slot is equal to the trigger stroke of the position switch.

10. A high-temperature vertical furnace, characterized in that, Includes the high-temperature vertical furnace basket carrier as described in any one of claims 1-9.

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