Flashing apparatus

Abstract

The application provides a kind of flash evaporation equipment, it is related to the field of semiconductor or photovoltaic material processing field, solve the technical problem that traditional vacuum flash evaporation equipment is easy to make evaporated solvent gas condense on the pipe wall when contacting the pipe wall of air pipe when processing.The flash evaporation equipment includes: cavity assembly, cavity assembly has process cavity, process cavity is configured to accommodate product, product surface has solution;Vacuum pipe, the first end of vacuum pipe is communicated with process cavity;Vacuum pump group, with the second end of vacuum pipe is communicated;First heat tracing assembly, set to the outer periphery of vacuum pipe.Heat the vacuum pipe by setting first heat tracing assembly, can make the pipe wall of vacuum pipe have higher temperature, so that, when evaporated solvent gas contacts the pipe wall of vacuum pipe, it is difficult to condense on the pipe wall of vacuum pipe, therefore, by this structure, it can reduce the cleaning frequency of vacuum pipe, thereby improve production efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a flash evaporation device. Background Technology

[0002] Perovskite solar cells possess a series of advantages, including high photoelectric conversion efficiency, simple structure, low cost, and diverse applications, making them a promising industry. Vacuum connection drying (VCD) technology is one of the core technologies in the perovskite solar cell industry. VCD technology allows for precise control of the evaporation rate and deposition thickness of perovskite materials, thereby producing high-quality perovskite thin films.

[0003] Specifically, the vacuum flash evaporation equipment includes a chamber, gas pipes, a tailpipe, and a vacuum pump assembly, which are connected sequentially. During the process, a product coated with a perovskite solution is placed into the chamber, and the vacuum pump assembly is activated to evacuate the chamber. Because the boiling point of the liquid decreases under vacuum (low pressure), the solvent in the perovskite solution evaporates rapidly and enters the tailpipe. However, the evaporated solvent gas easily condenses on the pipe wall upon contact, requiring frequent cleaning of the pipe walls and impacting production efficiency. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. An embodiment of this application provides a flash evaporation apparatus.

[0005] In a first aspect, one embodiment of this application provides a flash evaporation apparatus, comprising: a cavity assembly having a process chamber configured to contain a product, the surface of which has a solution; a vacuum tube having a first end and a second end, the first end of which is connected to the process chamber; a vacuum pump assembly connected to the second end of the vacuum tube and configured to extract gas from the process chamber through the vacuum tube; and a first heating assembly disposed on the outer periphery of the vacuum tube and configured to heat the vacuum tube.

[0006] In some embodiments, the flash evaporation apparatus further includes: a second heat tracing component disposed on the outer periphery of the cavity component and configured to heat the cavity component; and / or, a vacuum valve and a third heat tracing component, wherein the vacuum valve is used to connect the process chamber and a first end of the vacuum tube, and the third heat tracing component is disposed on the outer periphery of the vacuum valve and configured to heat the vacuum valve.

[0007] In some embodiments, the first heat tracing assembly includes: a first insulation layer disposed on the outer periphery of the vacuum tube, the first insulation layer having a first receiving space; and a first heating element disposed within the first receiving space and configured to generate heat.

[0008] In some embodiments, the second heat tracing assembly includes: a second insulation layer disposed on the outer periphery of the cavity assembly, the second insulation layer having a second receiving space therein; a second heating element disposed in the second receiving space and configured to generate heat; and / or, the third heat tracing assembly includes: a third insulation layer disposed on the outer periphery of the evacuation valve, the third insulation layer having a third receiving space therein; a third heating element disposed in the third receiving space and configured to generate heat.

[0009] In some embodiments, the cavity assembly includes: a furnace body assembly having a process chamber and a feed inlet at the bottom of the furnace body assembly; a furnace door assembly disposed below the furnace body assembly and configured to open or close the feed inlet; and a carrier; at least one rotating mechanism connected to the furnace door assembly and the carrier and configured to drive the carrier to rotate about an axis extending in a vertical direction.

[0010] In some embodiments, the furnace door assembly includes a furnace door with a plurality of placement positions on the side of the furnace door facing the process chamber, the plurality of placement positions being configured to place a plurality of carriers.

[0011] In some embodiments, the furnace door assembly has at least one first through hole extending in a vertical direction; wherein the rotating mechanism includes: a rotary motor configured to provide rotational power; a coupling connected to the rotary motor; and a magnetohydrodynamic transmission assembly having a fixed portion and a rotating portion, the rotating portion passing through the fixed portion and rotatably connected to the fixed portion, the fixed portion being sealed to the bottom of the furnace door assembly, one end of the rotating portion being connected to the coupling, and the other end of the rotating portion passing through the first through hole and connected to a carrier.

[0012] In some embodiments, the flash evaporation equipment further includes: a drive element; a guide rail extending in a vertical direction; and a slider slidably connected to the guide rail and connected to the furnace door assembly, configured to move along the extension direction of the guide rail under the drive of the drive element, thereby causing the furnace door assembly to move along the extension direction of the guide rail, thereby opening or closing the feed inlet.

[0013] In some embodiments, the furnace door assembly has a third through hole extending vertically through the furnace door assembly; wherein, the flash evaporation equipment further includes: a guide member disposed in the third through hole, the guide member having a second through hole extending vertically through the guide member; a first fixing member disposed adjacent to the cavity assembly; a second fixing member disposed below the first fixing member; a guide rod having two ends in the vertical direction, one end of the guide rod being connected to the first fixing member, the other end of the guide rod being connected to the second fixing member, and the guide rod passing through the second through hole.

[0014] In some embodiments, the top of the furnace body assembly has a vacuum port, and the first end of the vacuum tube is connected to the vacuum port; wherein, the flash evaporation equipment further includes: a flow equalizer, disposed in the process chamber, the flow equalizer having a third opening at the top and a fourth opening at the bottom, and the sidewall of the flow equalizer having a plurality of vent holes; and a flow guide, disposed above the flow equalizer and closing the third opening, the sidewall of the flow guide intersecting the vertical direction and configured to guide the airflow downward.

[0015] The flash evaporation equipment proposed in this application embodiment heats the vacuum tube by setting a first heating component, which can make the tube wall of the vacuum tube have a high temperature. In this way, when the evaporated solvent gas comes into contact with the tube wall, it is difficult to condense on the tube wall. Therefore, this structure can reduce the cleaning frequency of the vacuum tube, thereby improving production efficiency. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a flash evaporation device provided in an exemplary embodiment of this application.

[0018] Figure 2 The image shown is a partial cross-sectional view of a flash evaporation device provided in an exemplary embodiment of this application.

[0019] Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The image shows a partial enlarged view of the flash evaporation equipment in area A.

[0020] Figure 4 The diagram shown is a partial structural schematic of the pipe wall of the second heat tracing assembly and cavity assembly provided in an exemplary embodiment of this application.

[0021] Figure 5 The diagram shown is a structural schematic of a furnace door assembly and a carrier provided in an exemplary embodiment of this application.

[0022] Figure 6 The image shown is a cross-sectional view of a furnace door assembly, carrier, and rotating mechanism provided in an exemplary embodiment of this application.

[0023] Figure 7 The diagram shown is a structural schematic of the furnace door assembly and placement position provided in an exemplary embodiment of this application.

[0024] Figure 8 The diagram shown is a structural schematic of a flash evaporation device provided in another exemplary embodiment of this application.

[0025] Figure 9 The image shown is an exemplary embodiment of this application. Figure 8 The flash evaporator shown is a cross-sectional view along the CC direction.

[0026] Figure label: 100. Flash evaporation equipment; 101. Chamber assembly; 1011. Process chamber; 1012. Tube wall of chamber assembly; 1013. Furnace body assembly; 1014. Furnace door assembly; 10141. Furnace door; 101411. Placement position; 10142. Support frame; 1015. Rotation mechanism; 10151. Rotary motor; 10152. Magnetohydrodynamic transmission assembly; 10153. Coupling; 1016. Vacuum measurement interface; 1017. Air vent; 102. Vacuum tube ; 103. Vacuum pump assembly; 104. First heat tracing component; 105. Evacuation valve; 106. Second heat tracing component; 1061. Second insulation layer; 1062. Second heating element; 107. Thermocouple; 108. Carrier; 109. Guide rail; 110. Drive component; 111. Slider; 112. Flow equalization hood; 1121. Vent hole; 113. Flow guide hood; 114. Guide component; 115. First fixing component; 116. Square tube frame; 117. Guide rod; 200. Product. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] Figure 1 The diagram shown is a schematic representation of the structure of a flash evaporation device provided in an exemplary embodiment of this application. Figure 2 The image shown is a partial cross-sectional view of a flash evaporation device provided in an exemplary embodiment of this application.

[0029] like Figure 1 and Figure 2As shown in the illustration, this application provides a flash evaporation apparatus 100, which includes a cavity assembly 101, a vacuum tube 102, a vacuum pump assembly 103, and a first heat tracing assembly 104. The cavity assembly 101 has a process chamber 1011 configured to contain a product 200, the surface of which has a solution. The vacuum tube 102 has a first end and a second end, the first end of which is connected to the process chamber 1011. The vacuum pump assembly 103 is connected to the second end of the vacuum tube 102 and is configured to extract gas from the process chamber 1011 through the vacuum tube 102, creating a vacuum in the process chamber 1011 to accelerate the evaporation of the solvent in the solution. The evaporated solvent passes through the vacuum tube 102 under the action of the vacuum pump assembly 103. The first heat tracing component 104 is disposed on the outer periphery of the vacuum tube 102 and is configured to heat the vacuum tube 102 to reduce the condensation of evaporated solvent onto the tube wall of the vacuum tube 102.

[0030] For example, product 200 is a solar cell or silicon wafer, and the solution is a perovskite solution.

[0031] For example, the first heat tracing component 104 is wrapped around the vacuum tube 102.

[0032] For example, cavity assembly 101 includes a cavity and a flange.

[0033] In the above embodiments, by setting the first heat tracing component 104 to heat the vacuum tube 102, the tube wall of the vacuum tube 102 can be made to have a higher temperature. In this way, when the evaporated solvent gas comes into contact with the tube wall of the vacuum tube 102, it is difficult to condense on the tube wall of the vacuum tube 102. Therefore, this structure can reduce the cleaning frequency of the vacuum tube 102, thereby improving production efficiency.

[0034] Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The image shows a partial enlarged view of the flash evaporation equipment in area A.

[0035] In some embodiments, such as Figure 2 and Figure 3 As shown, the flash evaporation device 100 also includes a second heat tracing assembly 106. The second heat tracing assembly 106 is disposed on the outer periphery of the cavity assembly 101 and is configured to heat the cavity assembly 101 to reduce solvent condensation onto the inner wall of the cavity assembly 101.

[0036] For example, the second heat tracing component 106 is wrapped around the cavity component 101.

[0037] Because the evaporated solvent gas easily condenses on the inner wall of the cavity assembly 101 upon contact, frequent cleaning of the inner wall of the cavity assembly 101 is required, affecting production efficiency. In the above embodiment, by providing a second heating component 106 to heat the cavity assembly 101, the inner wall of the cavity assembly 101 can be made to have a higher temperature. In this way, when the evaporated solvent gas comes into contact with the inner wall of the cavity assembly 101, it is difficult for it to condense on the inner wall of the cavity assembly 101. Therefore, this structure can reduce the cleaning frequency of the inner wall of the cavity assembly 101, thereby improving production efficiency.

[0038] In some embodiments, such as Figure 2 As shown, the flash evaporation equipment 100 also includes: a vacuum valve 105 and a third heat tracing component. The vacuum valve 105 is used to connect the first end of the process chamber 1011 and the vacuum tube 102. The third heat tracing component is disposed on the outer periphery of the vacuum valve 105 and is configured to heat the vacuum valve 105 to reduce solvent condensation to the inner wall of the vacuum valve 105.

[0039] For example, the third heat tracing component is wrapped around the evacuation valve 105.

[0040] For example, the evacuation valve 105 is an angle valve.

[0041] Because the evaporated solvent gas easily condenses on the inner wall of the evacuation valve 105 upon contact, frequent cleaning of the inner wall of the evacuation valve 105 is required, affecting production efficiency. In the above embodiment, by setting a third heating component to heat the evacuation valve 105, the inner wall of the evacuation valve 105 can be made to have a higher temperature. In this way, when the evaporated solvent gas comes into contact with the inner wall of the evacuation valve 105, it is difficult for it to condense on the inner wall of the evacuation valve 105. Therefore, this structure can reduce the cleaning frequency of the inner wall of the evacuation valve 105, thereby improving production efficiency.

[0042] Figure 4 The image shown is a partial view of the pipe wall of the second heat tracing assembly and cavity assembly provided in an exemplary embodiment of this application (specifically...). Figure 3 Schematic diagram of the structure of region B in the middle area. Figure 4 In the diagram, 1012 represents the pipe wall of cavity assembly 101 (the inner wall of cavity assembly 101 is the inner sidewall of pipe wall 1012 of cavity assembly 101). The first heat tracing assembly 104 and the third heat tracing assembly have roughly the same structure as the second heat tracing assembly 106, which can be referenced. Figure 4 The structure of the second heat tracing assembly 106 shown.

[0043] In some embodiments, such as Figure 4As shown, the first heat tracing assembly 104 includes: a first insulation layer and a first heating element. The first insulation layer is disposed on the outer periphery of the vacuum tube 102 and has a first accommodating space. The first heating element is disposed in the first accommodating space and configured to generate heat. And / or, the second heat tracing assembly 106 includes: a second insulation layer 1061 and a second heating element 1062. The second insulation layer 1061 is disposed on the outer periphery of the cavity assembly 101 and has a second accommodating space. The second heating element 1062 is disposed in the second accommodating space and configured to generate heat. And / or, the third heat tracing assembly includes: a third insulation layer and a third heating element. The third insulation layer is disposed on the outer periphery of the vacuum valve 105 and has a third accommodating space. The third heating element is disposed in the third accommodating space and configured to generate heat.

[0044] For example, the first heat tracing component 104 is a heat tracing cable, and / or the second heat tracing component 106 is a heat tracing cable, and / or the third heat tracing component is a heat tracing cable.

[0045] For example, the first heating element is a heating wire, and / or the second heating element 1062 is a heating wire, and / or the third heating element is a heating wire.

[0046] In the above embodiments, the first heat tracing component 104, the second heat tracing component, and the third heat tracing component using this structure have a simple structure and are easy to manufacture.

[0047] In some embodiments, such as Figure 4 As shown, the flash evaporation device 100 further includes at least one thermocouple 107, which is disposed in at least one of the first receiving space, the second receiving space, and the third receiving space.

[0048] In the above embodiments, by setting thermocouple 107, the temperature of the first heat tracing component 104, and / or the second heat tracing component 106, and / or the third heat tracing component can be accurately detected, thereby achieving precise control of the heating temperature of the first heat tracing component 104, and / or the second heat tracing component 106, and / or the third heat tracing component.

[0049] Figure 5 The diagram shown is a structural schematic of a furnace door assembly and carrier provided in an exemplary embodiment of this application. Figure 6 The image shown is a cross-sectional view of a furnace door assembly, carrier, and rotating mechanism provided in an exemplary embodiment of this application.

[0050] In some embodiments, such as Figures 1-3 and Figures 5-6As shown, the cavity assembly 101 includes a furnace body assembly 1013, a furnace door assembly 1014, and at least one rotating mechanism 1015. The furnace body assembly 1013 has a process chamber 1011, and a feed inlet is located at its bottom. The furnace door assembly 1014 is disposed below the furnace body assembly 1013 and is configured to open or close the feed inlet, as well as to carry a carrier 108. The rotating mechanism 1015 is connected to the furnace door assembly 1014 and the carrier 108, and is configured to drive the carrier 108 to rotate about an axis extending vertically.

[0051] For example, vehicle 108 is a flower basket.

[0052] For example, such as Figure 6 As shown, the rotating mechanism 1015 may include a rotating motor 10151.

[0053] For example, such as Figure 5 As shown, the furnace door assembly 1014 includes a furnace door 10141 and a support frame 10142 connected to each other. The furnace door 10141 is configured to open or close the feed inlet and to carry a carrier 108.

[0054] In the above embodiments, by setting the rotating mechanism 1015 to drive the carrier 108 to rotate around the axis extending in the vertical direction, the gas field around the carrier 108 can be made more uniform, thereby making the solution film formation on the surface of the product 200 more uniform.

[0055] In some embodiments, the carrier 108 has a plurality of tray positions extending in a vertical direction, each tray position being configured to accommodate a product 200.

[0056] Currently, perovskite flash evaporation equipment, such as CN222607041U, mostly adopts a flat cavity with the substrate laid flat on a carrier plate. Therefore, this structure has a small substrate capacity and high cost for large-scale mass production. In the above embodiment, the carrier 108 can accommodate multiple products 200 arranged sequentially in the vertical direction, increasing the substrate capacity, improving production capacity, and occupying a smaller area.

[0057] Figure 7 The diagram shown is a structural schematic of the furnace door assembly and placement position provided in an exemplary embodiment of this application.

[0058] In some embodiments, such as Figure 3 , Figure 5 , Figure 6 and Figure 7 As shown, the furnace door assembly 1014 includes a furnace door 10141, the side of the furnace door 10141 facing the process chamber 1011 having a plurality of placement positions 101411, the plurality of placement positions 101411 being configured to place a plurality of carriers 108.

[0059] For example, there may be two, three, or four placement positions 101411.

[0060] For example, a plurality of placement positions 101411 are arranged around the center line of the furnace door 10141 extending in the vertical direction.

[0061] In the above embodiments, by setting multiple placement positions 101411 to place multiple carriers 108, the wafer load can be further increased and the production capacity can be improved.

[0062] In some embodiments, such as Figure 6 As shown, the furnace door assembly 1014 has at least one first through hole extending vertically. The rotating mechanism 1015 includes a rotary motor 10151, a coupling 10153, and a magnetohydrodynamic (MHD) transmission assembly 10152. The rotary motor 10151 is configured to provide rotational power. The coupling 10153 is connected to the rotary motor 10151. The MHD transmission assembly 10152 has a fixed portion and a rotating portion. The rotating portion passes through and is rotatably connected to the fixed portion. The fixed portion is sealed to the bottom of the furnace door assembly 1014. One end of the rotating portion is connected to the coupling 10153, and the other end of the rotating portion passes through the first through hole and is connected to the carrier 108.

[0063] For example, the first through hole is provided in a one-to-one correspondence with the carrier 108, and the rotating mechanism 1015 is provided in a one-to-one correspondence with the carrier 108, so that each rotating mechanism 1015 can pass through a first through hole and drive a carrier 108 to rotate.

[0064] For example, the number of first through holes may be 2, 3 or 4.

[0065] For example, the furnace door 10141 has at least one first through hole extending in a vertical direction.

[0066] In the above embodiments, since the magnetohydrodynamic transmission assembly 10152 has good sealing performance, by setting the magnetohydrodynamic transmission assembly 10152, the rotational power provided by the rotary motor 10151 can be transmitted to the carrier 108 without affecting the sealing performance of the process chamber 1011, thereby driving the carrier 108 to rotate.

[0067] In some embodiments, such as Figure 5 As shown, the flash evaporator 100 also includes a drive element 110, a guide rail 109, and a slider 111. The guide rail 109 extends vertically. The slider 111 is slidably connected to the guide rail 109 and connected to the furnace door assembly 1014. It is configured to move along the extension direction of the guide rail 109 under the drive of the drive element 110, thereby causing the furnace door assembly 1014 to move along the extension direction of the guide rail 109, thus opening or closing the feed inlet.

[0068] For example, the drive unit 110 includes a motor.

[0069] For example, slider 111 is connected to support frame 10142.

[0070] In the above implementation, by setting the drive component 110, guide rail 109 and slider 111, the furnace door assembly 1014 can be smoothly driven to move in the vertical direction, and the structure is simple and easy to manufacture.

[0071] Figure 8 The diagram shown is a structural schematic of a flash evaporation device provided in another exemplary embodiment of this application.

[0072] Figure 9 The image shown is an exemplary embodiment of this application. Figure 8 The flash evaporator shown is a cross-sectional view along the CC direction.

[0073] In some embodiments, such as Figure 8 and Figure 9 As shown, the furnace door assembly 1014 has a third through hole extending vertically through the furnace door assembly 1014; the flash evaporation device 100 further includes: a guide member 114, a first fixing member 115, a second fixing member, and a guide rod 117. The guide member 114 is disposed in the third through hole, and the guide member 114 has a second through hole extending vertically through the guide member 114. The first fixing member 115 is disposed adjacent to the cavity assembly 101. The second fixing member is disposed below the first fixing member 115. The guide rod 117 has two ends in the vertical direction, one end of the guide rod 117 is connected to the first fixing member 115, and the other end of the guide rod 117 is connected to the second fixing member, and the guide rod 117 passes through the second through hole, and the guide rod 117 and the second through hole can move relative to each other, that is, the guide member 114 can move vertically relative to the guide rod 117.

[0074] For example, the furnace door assembly 1014 includes a furnace door 10141 and a connecting plate connected to each other, the connecting plate having a third through hole.

[0075] For example, guide 114 is a linear bearing or bushing.

[0076] For example, the flash steaming equipment 100 further includes a square tube frame 116, with a first fastener 115 and a second fastener connected to the square tube frame 116.

[0077] In the above implementation, by setting the guide 114 and the guide rod 117, the movement of the furnace door assembly 1014 can be guided, so that the furnace door assembly 1014 can move accurately in the vertical direction.

[0078] In some embodiments, the top of the furnace body assembly 1013 has a vacuum port, and the first end of the vacuum tube 102 is connected to the vacuum port. The flash evaporation equipment 100 further includes a flow equalization hood 112 and a flow guide hood 113. The flow equalization hood 112 is disposed in the process chamber 1011. The top of the flow equalization hood 112 has a third opening, and the bottom of the flow equalization hood 112 has a fourth opening, which is connected to the feed inlet. The sidewall of the flow equalization hood 112 has a plurality of vent holes 1121. The flow guide hood 113 is disposed above the flow equalization hood 112 and closes the third opening. The sidewall of the flow guide hood 113 intersects the vertical direction, i.e., the sidewall of the flow guide hood 113 is inclined, and the flow guide hood 113 is configured to guide the airflow downwards.

[0079] For example, the fairing 113 is a conical structure with a fifth opening at the bottom, which is connected to the third opening.

[0080] When the vacuum pump unit 103 evacuates air, the airflow is drawn away from the vacuum port at the top of the process chamber 1011. If the airflow direction is not controlled, the airflow at the top of the process chamber 1011 will be drawn away rapidly, while the airflow at the bottom will be drawn away more slowly. This will result in different crystallization quality on the surfaces of the products 200 placed at the top and the products 200 placed at the bottom. In the above embodiment, since the flow guide shroud 113 is a closed structure, the airflow entering the flow guide shroud 113 during evacuation will move downward along the side wall of the flow guide shroud 113 and flow out from the vent 1121 of the flow equalization shroud 112. This allows the airflow around the products 200 at different heights to be drawn away at similar speeds, thereby making the crystallization quality of the products 200 at different heights more consistent and improving the uniformity of the process.

[0081] In some embodiments, such as Figure 3 As shown, the cavity assembly 101 also has a vacuum measurement interface 1016, and the flash evaporation equipment 100 also includes a vacuum gauge that can be connected to the vacuum measurement interface 1016 to measure the vacuum level of the process chamber 1011.

[0082] In some embodiments, such as Figure 3 As shown, the cavity assembly 101 also has a vent 1017 and a vent valve. The vent valve is connected to the vent 1017 and the gas supply device, respectively. After the process is completed, the vent valve is opened so that the nitrogen or dry air supplied by the gas supply device can enter the process chamber 1011 through the vent 1017.

[0083] In summary, based on the flash evaporation equipment 100 provided in the embodiments of this application, the following steps 301 to 310 can be performed to process the product 200.

[0084] Step 301: Place the product into carrier 108.

[0085] Step 302: Drive component 110 drives slider 111 to move downward, causing furnace door 10141 to move downward to the upper or lower material position.

[0086] Step 303: Place the carrier 108 onto the furnace door 10141 using a robotic arm, and then retract the robotic arm.

[0087] Step 304: Drive component 110 drives slider 111 to move upward, causing furnace door 10141 to move upward and close the feed port.

[0088] Step 305: Rotation mechanism 1015 drives vehicle 108 to rotate.

[0089] Step 306: The evacuation valve 105 is opened, and the process chamber 1011 is evacuated by the vacuum pump group 103 to complete the vacuum flash drying process.

[0090] Step 307: Close the evacuation valve 105 and open the venting valve to supply nitrogen or dry air through the gas supply device to break the vacuum in the process chamber 1011.

[0091] Step 308: The rotating mechanism 1015 stops the rotation of the drive vehicle 108.

[0092] Step 309: Drive component 110 drives slider 111 to move downward, causing furnace door 10141 to move downward to the upper or lower material position.

[0093] Step 310: Remove the vehicle 108 using a robotic arm.

[0094] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0095] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0096] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0097] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0098] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A flash evaporation device, characterized in that, include: A cavity assembly having a process chamber configured to contain a product having a solution on its surface; A vacuum tube having a first end and a second end, the first end of the vacuum tube being connected to the process chamber; A vacuum pump assembly, connected to the second end of the vacuum tube, is configured to extract gas from the process chamber through the vacuum tube. A first heat tracing component is disposed on the outer periphery of the vacuum tube and is configured to heat the vacuum tube.

2. The flash evaporation equipment according to claim 1, characterized in that, Also includes: The second heat tracing component is disposed on the outer periphery of the cavity component and is configured to heat the cavity component; And / or, The vacuum valve is used to connect the process chamber and the first end of the vacuum tube, and the third heat tracing component is disposed on the outer periphery of the vacuum valve and configured to heat the vacuum valve.

3. The flash evaporation equipment according to claim 1 or 2, characterized in that, The first heat tracing assembly includes: A first insulation layer is disposed on the outer periphery of the vacuum tube, and the first insulation layer has a first accommodating space. A first heating element is disposed within the first accommodating space and configured to generate heat.

4. The flash evaporation equipment according to claim 2, characterized in that, The second heat tracing assembly includes: A second insulation layer is disposed on the outer periphery of the cavity assembly, and the second insulation layer has a second accommodating space; The second heating element is disposed within the second accommodating space and configured to generate heat; And / or, the third heat tracing assembly includes: A third insulation layer is disposed on the outer periphery of the evacuation valve, and the third insulation layer has a third accommodating space. The third heating element is disposed within the third accommodating space and is configured to generate heat.

5. The flash evaporation equipment according to any one of claims 1, 2, and 4, characterized in that, The cavity assembly includes: A furnace body assembly having the process chamber and a feed inlet at the bottom; A furnace door assembly, located below the furnace body assembly, is configured to open or close the feed inlet and the carrying carrier; At least one rotating mechanism, connected to the furnace door assembly and the carrier, is configured to drive the carrier to rotate about an axis extending in a vertical direction.

6. The flash evaporation equipment according to claim 5, characterized in that, The furnace door assembly includes a furnace door, the side of which facing the process chamber has a plurality of placement positions, the plurality of placement positions being configured to place a plurality of the carriers.

7. The flash evaporation equipment according to claim 5, characterized in that, The furnace door assembly has at least one first through hole extending along the vertical direction; The rotating mechanism includes: A rotary motor, configured to provide rotational power; A coupling is used to connect to the rotary motor; A magnetohydrodynamic (MHD) transmission assembly has a fixed part and a rotating part. The rotating part passes through the fixed part and is rotatably connected to the fixed part. The fixed part is sealed to the bottom of the furnace door assembly. One end of the rotating part is connected to the coupling, and the other end of the rotating part passes through the first through hole and is connected to the carrier.

8. The flash evaporation equipment according to claim 5, characterized in that, Also includes: Drive components; The guide rail extends vertically. The slider, which is slidably connected to the guide rail and connected to the furnace door assembly, is configured to move along the extension direction of the guide rail under the drive of the drive member, so as to drive the furnace door assembly to move along the extension direction of the guide rail, thereby opening or closing the feed port.

9. The flash evaporation equipment according to claim 8, characterized in that, The furnace door assembly has a third through hole that extends vertically through the furnace door assembly; The flash evaporation equipment also includes: A guide member is disposed in the third through hole, the guide member having a second through hole extending through the guide member along the vertical direction; The first fixing member is disposed adjacent to the cavity assembly; The second fastener is located below the first fastener; The guide rod has two ends in the vertical direction. One end of the guide rod is connected to the first fixing member, and the other end of the guide rod is connected to the second fixing member. The guide rod passes through the second through hole.

10. The flash evaporation equipment according to claim 6, characterized in that, The top of the furnace body assembly has a vacuum port, and the first end of the vacuum tube is connected to the vacuum port; The flash evaporation equipment also includes: A flow equalizer is disposed in the process chamber. The top of the flow equalizer has a third opening, the bottom of the flow equalizer has a fourth opening, and the sidewall of the flow equalizer has multiple vent holes. A flow guide is disposed above the flow equalizer and closes the third opening. The sidewall of the flow guide intersects the vertical direction and is configured to guide the airflow downward.

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