A high-efficiency deacidification treatment device for hexafluorobutadiene

Abstract

The utility model discloses a kind of high-efficiency deacidification treatment devices of hexafluorobutadiene, including processing platform, hexafluorobutadiene storage bottle is installed on the processing platform, deacidification treatment box is fixedly connected with on the processing platform by dismounting component, air inlet pipe is fixedly connected on the deacidification treatment box, hexafluorobutadiene storage bottle and air inlet pipe are mutually matched, processing cavity is opened in the deacidification treatment box, series adsorption plate is installed in the processing cavity, working opening is opened on the deacidification treatment box, series adsorption plate and working opening are mutually matched, sealing cover is also installed on the working opening, air outlet pipe is also installed on the deacidification treatment box, supporting frame is fixedly connected on the processing platform, supporting frame is fixedly connected with suction pump on it.The utility model can be fully and efficiently deacidification treatment to hexafluorobutadiene, and saturated spare can be quickly replaced, greatly improve work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of chemical process technology, and in particular to a high-efficiency deacidification treatment device for hexafluorobutadiene. Background Technology

[0002] Hexafluorobutadiene (HFT) is a colorless and odorless gas, a perfluoroolefin. Its most important characteristic is its very low global warming potential (GWP), making it an environmentally friendly alternative to traditional high-GWP gases used in semiconductor manufacturing. It is widely used in the semiconductor industry as a plasma etching gas and chamber cleaning gas, especially in advanced process nodes. However, trace amounts of harmful acidic impurities may remain during HFT production, the most common being hydrogen fluoride. Hydrogen fluoride is extremely corrosive and can severely damage precision components in semiconductor manufacturing equipment, shorten equipment lifespan, and increase maintenance costs. Therefore, to ensure the safety, process stability, and equipment reliability of HFT gas in semiconductor manufacturing, it must be purified, especially to remove acidic impurities.

[0003] Theoretically, the deacidification treatment of hexafluorobutadiene can be divided into adsorption and washing methods. However, the washing method is completely unusable because hexafluorobutadiene itself may react with water or alkali, such as hydrolysis or addition reactions, leading to a large loss and decomposition of hexafluorobutadiene and the formation of complex oxygen-containing fluorides or polymers. This is because it will destroy the target product itself. In actual purification systems, physical adsorbents such as molecular sieves and chemical adsorbents such as metal fluorides are often used in series or in combination in an adsorption bed to achieve the best deacidification effect and adsorption capacity. With the increase of use time, the series adsorption plates of existing high-efficiency hexafluorobutadiene deacidification devices will gradually become saturated, but the staff cannot quickly regenerate or replace them, which greatly reduces the work efficiency.

[0004] To address these issues, we propose a highly efficient deacidification device for hexafluorobutadiene. Utility Model Content

[0005] The purpose of this invention is to solve the problems existing in the prior art by proposing a high-efficiency deacidification device for hexafluorobutadiene.

[0006] An embodiment of this utility model provides a high-efficiency deacidification treatment device for hexafluorobutadiene, comprising:

[0007] A processing table is provided, on which a hexafluorobutadiene storage bottle is installed. A deacidification processing box is fixedly connected to the processing table via a disassembly assembly. An air inlet pipe is fixedly connected to the deacidification processing box. The hexafluorobutadiene storage bottle and the air inlet pipe cooperate with each other. A processing chamber is opened inside the deacidification processing box. A series adsorption plate is installed inside the processing chamber. A working opening is opened on the deacidification processing box. The series adsorption plate and the working opening cooperate with each other. A sealing cap is also installed on the working opening. An air outlet pipe is also installed on the deacidification processing box. A support frame is fixedly connected to the processing table. A vacuum pump is fixedly connected to the support frame. One end of the vacuum pump cooperates with the air outlet pipe. A collection bottle is also installed on the processing table. The other end of the vacuum pump cooperates with the collection bottle.

[0008] The high-efficiency replacement component includes a lifting connecting plate slidably connected to the inner side wall of the processing chamber. The series adsorption plate and the lifting connecting plate cooperate with each other. A working chamber is opened in the deacidification treatment box. A threaded sleeve is rotatably connected in the working chamber. A lifting screw is threadedly connected in the threaded sleeve. A lifting slide rod is fixedly connected to the end of the lifting screw away from the threaded sleeve. The lifting slide rod slides through the working chamber. The end of the lifting slide rod away from the lifting screw is fixedly connected to the lifting connecting plate. A transmission component is also installed in the working chamber.

[0009] Preferably, the transmission assembly includes a bevel gear one fixedly connected to the threaded sleeve, a working shaft rotatably connected inside the working cavity, one end of the working shaft rotatably passing through the working cavity, and a bevel gear two fixedly connected to the other end of the working shaft. The bevel gear one and the bevel gear two are meshed with each other. A limit plate is also fixedly connected to the inner side wall of the working cavity, and the lifting screw slides through the limit plate.

[0010] Preferably, the disassembly assembly includes a disassembly connecting plate fixedly connected to the outer wall of the deacidification treatment tank. The disassembly connecting plate and the treatment table cooperate with each other, and multiple disassembly bolts are also installed on the disassembly connecting plate.

[0011] Preferably, a working handle is fixedly connected to the working shaft, the working handle being disc-shaped, and the working handle and the working shaft cooperating with each other.

[0012] Preferably, a protective coating is sprayed onto the processing table, and the protective coating adheres to the outer wall of the processing table.

[0013] Preferably, a plurality of sturdy bases are fixedly connected to the processing table, and each of the plurality of sturdy bases is equipped with an anti-slip pad.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] In this utility model: 1. Through the cooperation of the processing table, hexafluorobutadiene storage bottle, deacidification treatment box, air inlet pipe, series adsorption plate, sealing cover, air outlet pipe, air pump, and collection bottle, hexafluorobutadiene will enter the deacidification treatment box along the air inlet pipe and be purified by the series adsorption plate, thereby collecting the deacidified hexafluorobutadiene into the collection bottle.

[0016] 2. Through the cooperation of the lifting connecting plate, threaded sleeve, lifting screw, lifting slide bar, bevel gear one, working shaft, and bevel gear two, the operator only needs to rotate the working shaft to drive the lifting connecting plate to move using the relevant transmission, thereby quickly removing the series adsorption plates, which is convenient for regeneration or replacement after they are saturated, greatly improving work efficiency. Attached Figure Description

[0017] Figure 1 This is a three-dimensional front view of the efficient deacidification device for hexafluorobutadiene proposed in this utility model.

[0018] Figure 2 This is a three-dimensional side view of the efficient deacidification device for hexafluorobutadiene proposed in this utility model.

[0019] Figure 3 This is a three-dimensional schematic diagram of the deacidification treatment box section of a high-efficiency deacidification treatment device for hexafluorobutadiene proposed in this utility model.

[0020] In the diagram: 1. Processing table, 2. Hexafluorobutadiene storage bottle, 3. Deacidification treatment box, 4. Inlet pipe, 5. Series adsorption plate, 6. Sealing cap, 7. Outlet pipe, 8. Vacuum pump, 9. Collection bottle, 10. Lifting connecting plate, 11. Threaded sleeve, 12. Lifting screw, 13. Lifting slide bar, 14. Bevel gear one, 15. Working shaft, 16. Bevel gear two. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] like Figures 1-3 As shown in the figure, this utility model embodiment proposes a high-efficiency deacidification treatment device for hexafluorobutadiene, comprising:

[0023] The processing table 1 is fixedly connected to multiple stable bases, each equipped with anti-slip pads to ensure stable placement. A protective coating is applied to the outer wall of the processing table 1, enhancing its strength and preventing easy damage. A hexafluorobutadiene storage bottle 2 is installed on the processing table 1, allowing for the filling of untreated hexafluorobutadiene. A deacidification treatment box 3 is fixedly connected to the processing table 1 via a disassembly assembly, which includes a disassembly connecting plate fixedly connected to the outer wall of the deacidification treatment box 3. The disassembly connecting plate and the processing table 1 cooperate with each other, and multiple disassembly bolts are installed on the disassembly connecting plate to ensure stable connection while facilitating disassembly and installation by personnel. An inlet pipe 4 is fixedly connected to the deacidification treatment box 3, and the hexafluorobutadiene storage bottle 2 and the inlet pipe 4 cooperate with each other, allowing gas from the hexafluorobutadiene storage bottle 2 to enter the deacidification treatment box 3.

[0024] The deacidification treatment box 3 has a treatment chamber, in which a series adsorption plate 5 is installed. The series adsorption plate 5 is a mature existing technology, which uses physical adsorbents such as molecular sieves and chemical adsorbents such as metal fluorides in series or in combination in an adsorption bed to achieve the best deacidification effect and adsorption capacity. The deacidification treatment box 3 has a working opening, and the series adsorption plate 5 and the working opening cooperate with each other. A sealing cover 6 is also installed on the working opening to facilitate the entry, exit and replacement of the series adsorption plate 5. The deacidification treatment box 3 is also equipped with an exhaust pipe 7. A support frame is fixedly connected to the treatment table 1, and a vacuum pump 8 is fixedly connected to the support frame. One end of the vacuum pump 8 cooperates with the exhaust pipe 7. A collection bottle 9 is also installed on the treatment table 1, and the other end of the vacuum pump 8 cooperates with the collection bottle 9. Thus, when the vacuum pump 8 is working, it can extract the gas from the hexafluorobutadiene storage bottle 2, process it through the series adsorption plate 5 in the deacidification treatment box 3, and collect the purified gas into the collection bottle 9.

[0025] The high-efficiency replacement component includes a lifting connecting plate 10 slidably connected to the inner wall of the processing chamber, a series adsorption plate 5 and the lifting connecting plate 10 cooperating with each other, a working chamber is opened inside the deacidification processing box 3, a threaded sleeve 11 is rotatably connected inside the working chamber, a lifting screw 12 is threadedly connected inside the threaded sleeve 11, a lifting slide rod 13 is fixedly connected to the end of the lifting screw 12 away from the threaded sleeve 11, the lifting slide rod 13 slides through the working chamber, and the end of the lifting slide rod 13 away from the lifting screw 12 is fixedly connected to the lifting connecting plate 10, thus the threaded sleeve... When the cylinder 11 rotates, it can drive the lifting connecting plate 10 to move up and down through the lifting screw 12 and the lifting slide 13, thereby pushing the series adsorption plate 5 to move together. A transmission component is also installed in the working chamber. The transmission component includes a bevel gear 14 fixedly connected to the threaded sleeve 11. A working shaft 15 is rotatably connected in the working chamber. One end of the working shaft 15 rotatably passes through the working chamber. A working handle is fixedly connected to the working shaft 15. The working handle is disc-shaped. The working handle and the working shaft 15 cooperate with each other, making it more convenient for the operator to rotate the working shaft 15.

[0026] The other end of the working shaft 15 is fixedly connected to a bevel gear 16. The bevel gear 14 and the bevel gear 16 are meshed with each other, so that when the working shaft 15 is rotated, the threaded sleeve 11 can be driven to rotate through the gear meshing transmission. A limit plate is also fixedly connected to the inner side wall of the working cavity. The lifting screw 12 slides through the limit plate. The limit plate is provided with a limit key, and the lifting screw 12 is provided with a limit keyway. The limit key and the limit keyway cooperate with each other to limit the lifting screw 12, so that it will only slide along the direction of the threaded sleeve 11.

[0027] In the process of using this utility model, the staff first connects the hexafluorobutadiene storage bottle 2 to the air inlet pipe 4 on the deacidification treatment box 3, then connects the air outlet pipe 7 to the collection bottle 9, and then opens the relevant valves and starts the air pump 8. At this time, the hexafluorobutadiene in the hexafluorobutadiene storage bottle 2 will be drawn into the deacidification treatment box 3, and then purified by the adsorption treatment of the series adsorption plate 5, so that the deacidified hexafluorobutadiene enters the collection bottle 9 for collection and storage.

[0028] As the usage time increases, when the series adsorption plate 5 gradually becomes saturated, the operator only needs to pause the work, open the sealing cover 6, and then rotate the working shaft 15. This will cause the bevel gear 16, which is fixedly connected to the working shaft 15, to rotate. Due to the meshing characteristics of the gears, the bevel gear 14 will also start to rotate, thereby driving the threaded sleeve 11 to rotate. Due to the characteristics of the threaded connection, the lifting screw 12 will slide upward along the direction of the threaded sleeve 11 under the limiting action of the limiting plate, thereby driving the lifting slide rod 13, which is fixedly connected to the lifting screw 12, to move together, thereby driving the lifting connecting plate 10 to move together, and then pushing the series adsorption plate 5 upward, so that the series adsorption plate 5 slides out from the working opening. At this time, the operator can regenerate or replace it, and then put it back into the deacidification treatment box 3 and cover it with the sealing cover 6.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-efficiency deacidification treatment device for hexafluorobutadiene, characterized in that, include: A processing table (1) is provided, on which a hexafluorobutadiene storage bottle (2) is installed. A deacidification processing box (3) is fixedly connected to the processing table (1) via a disassembly assembly. An air inlet pipe (4) is fixedly connected to the deacidification processing box (3). The hexafluorobutadiene storage bottle (2) and the air inlet pipe (4) cooperate with each other. A processing chamber is provided inside the deacidification processing box (3). A series adsorption plate (5) is installed inside the processing chamber. A working opening is provided on the deacidification processing box (3). The series adsorption plate (5) and the working opening cooperate with each other. A sealing cover (6) is also installed on the working opening. An exhaust pipe (7) is also installed on the deacidification treatment box (3). A support frame is fixedly connected to the treatment table (1). An air pump (8) is fixedly connected to the support frame. One end of the air pump (8) cooperates with the exhaust pipe (7). A collection bottle (9) is also installed on the treatment table (1). The other end of the air pump (8) cooperates with the collection bottle (9). The high-efficiency replacement component includes a lifting connecting plate (10) slidably connected to the inner side wall of the processing chamber. The series adsorption plate (5) and the lifting connecting plate (10) cooperate with each other. The deacidification treatment box (3) has a working chamber. A threaded sleeve (11) is rotatably connected in the working chamber. A lifting screw (12) is threadedly connected in the threaded sleeve (11). A lifting slide rod (13) is fixedly connected to the end of the lifting screw (12) away from the threaded sleeve (11). The lifting slide rod (13) slides through the working chamber. The end of the lifting slide rod (13) away from the lifting screw (12) is fixedly connected to the lifting connecting plate (10). A transmission component is also installed in the working chamber.

2. The high-efficiency deacidification device for hexafluorobutadiene according to claim 1, characterized in that, in: The transmission assembly includes a bevel gear one (14) fixedly connected to the threaded sleeve (11), a working shaft (15) rotatably connected inside the working cavity, one end of the working shaft (15) rotatably passing through the working cavity, and the other end of the working shaft (15) fixedly connected to a bevel gear two (16). The bevel gear one (14) and the bevel gear two (16) mesh with each other. A limit plate is also fixedly connected to the inner side wall of the working cavity, and the lifting screw (12) slides through the limit plate.

3. The high-efficiency deacidification device for hexafluorobutadiene according to claim 1, characterized in that, in: The disassembly assembly includes a disassembly connecting plate fixedly connected to the outer wall of the deacidification treatment box (3). The disassembly connecting plate and the treatment table (1) cooperate with each other. Multiple disassembly bolts are also installed on the disassembly connecting plate.

4. The high-efficiency deacidification device for hexafluorobutadiene according to claim 2, characterized in that, in: A working handle is fixedly connected to the working shaft (15). The working handle is disc-shaped and the working shaft (15) cooperate with each other.

5. The high-efficiency deacidification device for hexafluorobutadiene according to claim 1, characterized in that, in: The processing table (1) is coated with a protective coating that adheres to the outer wall of the processing table (1).

6. The high-efficiency deacidification device for hexafluorobutadiene according to claim 1, characterized in that, in: The processing table (1) is fixedly connected to multiple sturdy bases, and each of the multiple sturdy bases is equipped with an anti-slip pad.

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