Silicon rod processing cutting fluid emulsification system and silicon rod processing station

Abstract

The utility model relates to a kind of silicon rod processing cutting fluid emulsification system and silicon rod processing station. The raw liquid tank is used to store cutting raw liquid. Dilution tank is equipped with pure water injection port, cutting raw liquid injection port and discharge cutting fluid port, and emulsifying machine is arranged. Pure water injection port is used to inject the set amount of pure water into dilution tank. Cutting raw liquid injection port is connected with raw liquid tank, and used to inject the set amount of cutting raw liquid into dilution tank. Emulsifying machine includes stirrer inserted into dilution tank, and hollow mesh cover sleeved on the outer periphery of stirrer. When stirrer rotates, it can drive pure water and cutting raw liquid in dilution tank to mix uniformly to form cutting fluid, and negative pressure is formed in hollow mesh cover to suck liquid from top and upper part, and mixed cutting fluid is discharged from lower part and bottom of hollow mesh cover. Water tank is connected with discharge cutting fluid port, used to receive and store cutting fluid discharged from dilution tank. Dilution tank can mix pure water and cutting raw liquid uniformly to form cutting fluid, and also significantly improve emulsification efficiency and uniformity.

Description

Technical Field

[0001] This utility model relates to the field of silicon rod processing technology, and in particular to a silicon rod processing cutting fluid emulsification system and a silicon rod processing station. Background Technology

[0002] During silicon wafer processing, cutting fluid is supplied to the diamond wire used for cutting the wafers to cool the cutting heat generated during the cutting process, improve the cutting ability of the diamond wire, and enhance the surface quality of the resulting silicon wafers. The cutting fluid is composed of pure water and a cutting concentrate in a specific ratio. The traditional preparation method involves adding a certain amount of pure water to a water tank, followed by injecting a certain amount of cutting concentrate from a concentrate tank. Because the cutting concentrate is viscous, it is difficult to mix evenly with pure water. Furthermore, the water tank is relatively large, making it even more difficult to achieve uniform mixing between the cutting concentrate and pure water. This makes it challenging to ensure the concentration of the cutting concentrate in the cutting fluid discharged from the water tank to the cutting table, thus affecting the cutting quality of the silicon wafers by the diamond wire. Utility Model Content

[0003] (a) Technical problems to be solved

[0004] In view of the above-mentioned shortcomings and deficiencies of the prior art, this utility model provides a silicon rod processing cutting fluid emulsification system and silicon rod processing station, which solves the technical problem that the cutting fluid and pure water injected into the water tank are difficult to mix evenly.

[0005] (II) Technical Solution

[0006] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0007] In a first aspect, this utility model provides a silicon rod processing cutting fluid emulsification system, including a stock solution tank, a dilution tank, and a water tank;

[0008] The raw material tank is used to store cutting raw material;

[0009] The dilution tank is equipped with a pure water inlet, a cutting fluid inlet, and a cutting fluid outlet, and also includes an emulsifier. The pure water inlet is used to inject a predetermined amount of pure water into the dilution tank. The cutting fluid inlet is connected to the fluid tank and is used to inject a predetermined amount of cutting fluid into the dilution tank. The emulsifier includes a vertically oriented stirrer inserted into the dilution tank and a perforated mesh cover surrounding the stirrer. When the stirrer rotates, it can drive the pure water and cutting fluid in the dilution tank to mix evenly to form cutting fluid, and create a negative pressure inside the perforated mesh cover, drawing liquid in from the top and upper parts. The mixed cutting fluid is discharged from the lower and bottom parts of the perforated mesh cover.

[0010] The water tank is connected to the cutting fluid outlet and is used to receive and store the cutting fluid discharged from the dilution tank.

[0011] According to this utility model, the stirrer includes a stirring shaft;

[0012] The stirring shaft is vertically oriented and rotatable, and is connected to the dilution tank. The stirring shaft extends into the lower part of the dilution tank. A first stirring blade is provided on the peripheral wall between the top and bottom ends of the stirring shaft, and a second stirring blade is provided on the peripheral wall at the bottom end of the stirring shaft.

[0013] The perforated mesh cover is fitted around the outer periphery of the second stirring paddle.

[0014] According to this utility model, the emulsifier further includes a drive motor and a support ring;

[0015] The main body of the drive motor is fixed on the dilution tank;

[0016] The stirring shaft includes the motor shaft of the drive motor and an extension shaft, the extension shaft being coaxially fixed to the bottom of the motor shaft; the first stirring blade is disposed on the outer periphery of the motor shaft, and the second stirring blade is disposed on the outer periphery of the extension shaft.

[0017] The support ring is sleeved on the outer periphery of the extension shaft, the extension shaft is rotatably connected to the support ring, and the support ring is fixed to the dilution tank by a support rod; the bottom of the support ring is fixedly connected to the perforated mesh cover.

[0018] The perforated mesh cover is a cylindrical body with openings at the top and bottom, and the perforated mesh cover and the support ring are arranged coaxially.

[0019] According to this utility model, a pure water flow meter is installed on the pure water inlet;

[0020] The dilution tank is also equipped with an exhaust port for balancing the internal and external air pressure;

[0021] The cutting fluid discharge port of the raw fluid tank is connected to the cutting fluid injection port, and a raw fluid flow meter is installed on the cutting fluid discharge port.

[0022] According to this utility model, a level gauge is provided on the raw material tank for monitoring the liquid level of the stored cutting raw material;

[0023] The original liquid tank is equipped with a first liquid pump, which is connected to the discharge port of the cutting original liquid through a drain pipe.

[0024] The stock solution tank is also equipped with a stock solution filling port.

[0025] According to this utility model, the raw material tank is further provided with a raw material stirrer for stirring the cutting raw material.

[0026] According to this utility model, a liquid filling valve is provided on the cutting fluid injection port;

[0027] A first drain valve is provided on the drain port for cutting fluid.

[0028] According to this utility model, it also includes a support frame;

[0029] The stock solution tank, the dilution tank, and the water tank are all fixed to the support frame;

[0030] Both the stock solution tank and the water tank are located below the dilution tank.

[0031] Secondly, this utility model also provides a silicon rod processing station, including the silicon rod processing cutting fluid emulsification system and a cutting table;

[0032] The water tank is used to circulate cutting fluid to the diamond wire of the cutting table.

[0033] According to this utility model, a second liquid pump is provided inside the water tank, and the second liquid pump is connected to the liquid discharge port of the water tank through a drain pipe;

[0034] The water tank is provided with a cleaning fluid inlet for injecting cleaning fluid into the water tank, and the bottom of the water tank is provided with a drain outlet for discharging cleaning fluid and residual material.

[0035] (III) Beneficial Effects

[0036] The beneficial effects of this utility model are as follows: The silicon rod processing cutting fluid emulsification system of this utility model injects a set amount of pure water and cutting fluid into a dilution tank in a certain proportion. When the stirrer in the dilution tank rotates, it can not only drive the pure water and cutting fluid in the dilution tank to mix evenly to form cutting fluid, but also create a vacuum environment inside the hollow mesh cover. This automatically guides the pure water and cutting fluid to enter from the top and upper part of the hollow mesh cover, and the mixed cutting fluid is discharged from the lower and bottom parts of the hollow mesh cover, forming an efficient directional circulation mixing path, improving liquid fluidity, and significantly improving emulsification efficiency and uniformity. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the silicon rod machining cutting fluid emulsification system of this utility model;

[0038] Figure 2 A schematic diagram of a silicon rod machining cutting fluid emulsification system (water tank not shown);

[0039] Figure 3 Assembly drawing for the stock solution tank and dilution tank;

[0040] Figure 4 for Figure 3 A sectional view;

[0041] Figure 5A 3D view of an emulsifier;

[0042] Figure 6 A 3D view of an emulsifier;

[0043] Figure 7 This is a cross-sectional view of the emulsifier;

[0044] Figure 8 This is a schematic diagram of the raw liquid tank.

[0045] [Explanation of Labels in the Attached Image]

[0046] 1: Raw material tank; 11: Raw material drain port; 12: Level gauge; 13: First pump; 14: Raw material inlet; 15: Raw material stirrer; 16: Second drain valve; 17: Waste liquid outlet;

[0047] 2: Dilution tank; 21: Pure water inlet; 22: Cutting fluid inlet; 23: Cutting fluid outlet; 24: Emulsifier; 241: Agitator; 24111: Motor shaft; 24112: Extension shaft; 2412: First agitator; 2413: Second agitator; 242: Perforated mesh cover; 243: Drive motor; 244: Support ring; 245: Support rod; 25: Pure water flow meter; 26: Liquid filling valve; 27: First drain valve; 28: Exhaust port; 29: Observation port;

[0048] 3: Supporting framework;

[0049] 4: Water tank; 41: First liquid inlet. Detailed Implementation

[0050] To better explain and facilitate understanding of this utility model, a detailed description of its specific embodiments is provided below with reference to the accompanying drawings. In this document, directional terms such as "upper" and "lower" are used interchangeably with... Figure 1 The orientation is used as a reference.

[0051] Example 1

[0052] See Figure 1-8 The present invention provides a silicon rod processing cutting fluid emulsification system, comprising a stock solution tank 1, a dilution tank 2, and a water tank 4.

[0053] The stock solution tank 1 is used to store cutting fluid. The dilution tank 2 is equipped with a pure water inlet 21, a cutting fluid inlet 22, and a cutting fluid outlet 23, and is also equipped with an emulsifier 24. The pure water inlet 21 is used to inject a set amount of pure water into the dilution tank 2. The cutting fluid inlet 22 is connected to the stock solution tank 1 and is used to inject a set amount of cutting fluid into the dilution tank 2. The emulsifier 24 includes a vertically oriented stirrer 241 inserted into the dilution tank 2, and a perforated mesh cover 242 surrounding the stirrer 241. When the stirrer 241 rotates, it can drive the pure water and cutting fluid in the dilution tank 2 to mix evenly to form cutting fluid, and create a negative pressure inside the perforated mesh cover 242, drawing liquid from the top and upper parts. The mixed cutting fluid is discharged from the lower and bottom parts of the perforated mesh cover 242. The water tank 4 is connected to the cutting fluid outlet 23 through a pipeline and is used to receive and store the cutting fluid discharged from the dilution tank 2.

[0054] By injecting a set amount of pure water and cutting fluid into the dilution tank 2 in a specific ratio, the agitator 241 inside the dilution tank 2 rotates, which not only drives the pure water and cutting fluid in the dilution tank 2 to mix evenly to form cutting fluid, but also creates a vacuum environment inside the perforated mesh cover 242 covering it. This automatically guides the pure water and cutting fluid to enter from the top and upper part of the perforated mesh cover 242, and the mixed cutting fluid is discharged from the lower part and bottom of the perforated mesh cover 242, forming an efficient directional circulation flow path, improving the fluidity of the liquid, and significantly improving the emulsification efficiency and uniformity.

[0055] Furthermore, the stirrer 241 includes a stirring shaft.

[0056] A vertically oriented and rotatable stirring shaft is connected to the dilution tank 2, extending into the lower part of the dilution tank 2. A first stirring blade 2412 is installed on the peripheral wall between the top and bottom ends of the stirring shaft, and a second stirring blade 2413 is installed on the peripheral wall at the bottom end of the stirring shaft. A perforated mesh cover 242 is fitted around the outer periphery of the second stirring blade 2413.

[0057] When the agitator 241 is working, the first agitator 2412 and the second agitator 2413 rotate synchronously to achieve uniform mixing of pure water and cutting fluid throughout the entire tank. When the second agitator 2413 rotates, it can form a local negative pressure inside the perforated mesh cover, which improves the fluidity of the liquid and enhances the mixing efficiency.

[0058] Furthermore, the emulsifier 24 also includes a drive motor 243 and a support ring 244.

[0059] The main body of the drive motor 243 is fixed to the dilution tank 2. The stirring shaft includes the motor shaft 24111 of the drive motor 243 and an extension shaft 24112, with the extension shaft 24112 coaxially fixed to the bottom of the motor shaft 24111. A first stirring blade 2412 is arranged on the outer periphery of the motor shaft 24111, and a second stirring blade 2413 is arranged on the outer periphery of the extension shaft 24112. By fixing the extension shaft 24112 to the motor shaft 24111, the overall length of the stirring shaft is extended to meet the depth requirements of the large-capacity dilution tank 2, ensuring that the liquid at the bottom can also be fully mixed.

[0060] A support ring 244 is sleeved on the outer circumference of the extension shaft 24112, and the extension shaft 24112 is rotatably connected to the support ring 244. The support ring 244 is fixed to the dilution tank 2 by a support rod 245. A perforated mesh cover 242 is fixedly connected to the bottom of the support ring 244. The support ring 244 and the support rod 245 are used to support the extended shaft 24112 and the perforated mesh cover 242, ensuring the stable operation of the extension shaft 24112.

[0061] The perforated mesh cover 242 and the support ring 244 are arranged coaxially. The perforated mesh cover 242 is a cylindrical body with openings at the top and bottom to ensure that liquid enters from the top of the perforated mesh cover 242 and exits from the bottom.

[0062] In use, the motor shaft 24111 of the drive motor 243 drives the extension shaft 24112 to rotate synchronously around the vertical axis, thereby driving the first stirring paddle 2412 and the second stirring paddle 2413 to rotate synchronously, so as to achieve comprehensive and efficient emulsification of the liquid in the dilution tank 2.

[0063] Specifically, the extension shaft 24112 is rotatably connected to the support ring 244 via a bearing.

[0064] It should be noted that when the rotational speed of the stirring shaft driven by the drive motor 243 is constant, the larger the aperture of the perforated mesh cover 242, the higher the liquid flow rate, and the better the stirring effect and efficiency. However, the aperture should not be too large, as this will lead to insufficient mixing. Therefore, the aperture of the perforated mesh cover 242 is preferably 10-15 mm, more preferably 12 mm. The length of the perforated mesh cover 242 is preferably 7 cm, and the outer diameter is preferably 10.4 mm. Of course, the above dimensions of the perforated mesh cover 242 are only preferred embodiments, and the specific dimensions can be determined according to actual needs.

[0065] Specifically, a pure water flow meter 25 is installed on the pure water inlet 21 to monitor the pure water injection volume. An exhaust port 28 is also installed on the dilution tank 2 to balance the internal and external air pressure. The cutting fluid discharge port 11 of the stock solution tank 1 is connected to the cutting fluid injection port 22 via a pipeline, allowing cutting fluid to be injected into the cutting fluid injection port 22 through the discharge port 11. A stock solution flow meter is installed on the discharge port 11 to accurately measure the amount of cutting fluid added.

[0066] Specifically, the raw material tank 1 is equipped with a level gauge 12 to monitor the level of the stored cutting fluid, indicating whether replenishment is needed. The raw material tank 1 is also equipped with a raw material inlet 14 for timely replenishment. A first pump 13 is installed inside the raw material tank 1, connected to a cutting fluid discharge port 11 via a drain pipe, for pumping fluid to the discharge port 11. A raw material agitator 15 is also installed inside the raw material tank 1 to stir the cutting fluid, preventing high viscosity from hindering delivery.

[0067] More specifically, a fluid inlet valve 26 is provided on the cutting fluid inlet 22 to open and close the cutting fluid inlet 22. A first drain valve 27 is provided on the cutting fluid outlet 23 to open and close the cutting fluid outlet 23.

[0068] Furthermore, the silicon rod processing cutting fluid emulsification system also includes a support frame 3.

[0069] The stock solution tank 1, dilution tank 2, and water tank 4 are all fixed on the support frame 3, which supports the stock solution tank 1, dilution tank 2, and water tank 4. The stock solution tank 1 and water tank 4 are located below the dilution tank 2 to reduce the overall footprint of the equipment and improve space utilization.

[0070] Example 2

[0071] This embodiment provides a silicon rod processing station, including the silicon rod processing cutting fluid emulsification system in Embodiment 1, and also includes a cutting table.

[0072] Water tank 4 is used to circulate emulsified cutting fluid to the diamond wire cutting table, ensuring cooling and lubrication during the cutting process.

[0073] Furthermore, a first liquid inlet 41 is provided on the water tank 4. The first liquid inlet 41 is connected to the cutting fluid outlet 23 through a pipeline to receive the emulsified cutting fluid discharged from the dilution tank 2.

[0074] A second liquid pump is installed inside the water tank 4. The second liquid pump is connected to the drain port of the water tank 4 through a drain pipe. The cutting fluid drain port is connected to the cutting table through a pipeline. The second liquid pump pumps the cutting fluid in the water tank 4 to the cutting table in sequence through the cutting fluid drain port and the pipeline.

[0075] The water tank 4 is also equipped with a second liquid inlet, which is connected to the cutting table through a pipeline to receive the cutting fluid flowing back from the cutting table.

[0076] Preferably, for ease of maintenance and cleaning, the water tank 4 is provided with a cleaning fluid inlet for injecting cleaning fluid into the water tank 4, and the bottom of the water tank 4 is provided with a drain outlet for discharging cleaning fluid and residual material. When the cutting fluid in the water tank 4 needs to be replaced due to contamination by oil or other impurities after the cutting cycle of the cutting table, the old cutting fluid can be discharged through the drain outlet, and then cleaning fluid can be injected through the cleaning fluid inlet to flush the water tank 4, and then new cutting fluid can be re-injected to shorten the fluid replacement time.

[0077] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0078] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0079] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A cutting fluid emulsification system for silicon rod processing, characterized in that, It includes a stock solution tank (1), a dilution tank (2), and a water tank (4); The raw material tank (1) is used to store cutting raw material; The dilution tank (2) is provided with a pure water inlet (21), a cutting fluid inlet (22), and a cutting fluid outlet (23), and is equipped with an emulsifier (24); the pure water inlet (21) is used to inject a set amount of pure water into the dilution tank (2); the cutting fluid inlet (22) is connected to the fluid tank (1) and is used to inject a set amount of cutting fluid into the dilution tank (2); the emulsifier (24) includes a stirrer (241) inserted into the dilution tank (2) and oriented vertically, and a perforated mesh cover (242) sleeved on the outer periphery of the stirrer (241); when the stirrer (241) rotates, it can drive the pure water and cutting fluid in the dilution tank (2) to mix evenly to form cutting fluid, and create a negative pressure in the perforated mesh cover (242) and draw liquid from the top and upper part, and the mixed cutting fluid is discharged from the lower part and bottom of the perforated mesh cover (242); The water tank (4) is connected to the cutting fluid outlet (23) and is used to receive and store the cutting fluid discharged from the dilution tank (2).

2. The silicon rod machining cutting fluid emulsification system as described in claim 1, characterized in that, The stirrer (241) includes a stirring shaft; The stirring shaft is vertically oriented and rotatable, and is connected to the dilution tank (2). The stirring shaft extends into the lower part of the dilution tank (2). A first stirring paddle (2412) is provided on the peripheral wall between the top and bottom ends of the stirring shaft, and a second stirring paddle (2413) is provided on the peripheral wall at the bottom end of the stirring shaft. The perforated mesh cover (242) is fitted around the outer periphery of the second stirring paddle (2413).

3. The silicon rod machining cutting fluid emulsification system as described in claim 2, characterized in that, The emulsifier (24) also includes a drive motor (243) and a support ring (244); The main body of the drive motor (243) is fixed on the dilution tank (2); The stirring shaft includes a motor shaft (24111) and an extension shaft (24112) of the drive motor (243), and the extension shaft (24112) is coaxially fixed to the bottom of the motor shaft (24111); the first stirring paddle (2412) is arranged on the outer periphery of the motor shaft (24111), and the second stirring paddle (2413) is arranged on the outer periphery of the extension shaft (24112); The support ring (244) is sleeved on the outer periphery of the extension shaft (24112), the extension shaft (24112) is rotatably connected to the support ring (244), and the support ring (244) is fixed to the dilution tank (2) by a support rod (245); the bottom of the support ring (244) is fixedly connected to the perforated mesh cover (242); The perforated mesh cover (242) is a cylindrical body with openings at the top and bottom, and the perforated mesh cover (242) and the support ring (244) are arranged coaxially.

4. The silicon rod machining cutting fluid emulsification system as described in claim 1, characterized in that, A pure water flow meter (25) is installed on the pure water inlet (21); The dilution tank (2) is also provided with an exhaust port (28) for balancing the internal and external air pressure; The cutting fluid discharge port (11) of the raw fluid tank (1) is connected to the cutting fluid injection port (22), and a raw fluid flow meter is installed on the cutting fluid discharge port (11).

5. The silicon rod machining cutting fluid emulsification system as described in claim 4, characterized in that, The raw material tank (1) is equipped with a level gauge (12) for monitoring the liquid level of the stored cutting raw material; The original liquid tank (1) is equipped with a first liquid pump (13), and the first liquid pump (13) is connected to the discharge port (11) of the cutting original liquid through a drain pipe; The original liquid tank (1) is also provided with an original liquid inlet (14).

6. The silicon rod machining cutting fluid emulsification system as described in claim 5, characterized in that, The original liquid tank (1) is also equipped with an original liquid agitator (15) for stirring the cutting original liquid.

7. The silicon rod machining cutting fluid emulsification system as described in claim 4, characterized in that, A liquid filling valve (26) is provided on the cutting fluid injection port (22); A first drain valve (27) is provided on the drain port (23) for cutting fluid.

8. The silicon rod machining cutting fluid emulsification system as described in claim 1, characterized in that, It also includes the supporting framework (3); The stock solution tank (1), the dilution tank (2) and the water tank (4) are all fixed on the support frame (3); The stock solution tank (1) and the water tank (4) are both located below the dilution tank (2).

9. A silicon rod processing station, characterized in that, Includes the silicon rod machining cutting fluid emulsification system as described in any one of claims 1-8, and a cutting table; The water tank (4) is used to circulate cutting fluid to the diamond wire of the cutting table.

10. The silicon rod processing station as described in claim 9, characterized in that, A second liquid pump is installed inside the water tank (4), and the second liquid pump is connected to the liquid discharge port of the water tank (4) through a drain pipe; The water tank (4) is provided with a cleaning liquid inlet for injecting cleaning liquid into the water tank (4), and the bottom of the water tank (4) is provided with a drain outlet for discharging cleaning liquid and residual material.

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