A device for preparing an ultra-clean high-purity ammonium fluoride solution

Abstract

The utility model discloses a kind of super-clean high-purity ammonium fluoride solution preparation devices, it is related to ammonium fluoride solution preparation technical field, including jar body, support frame, the jar body is fixed in support frame top by supporting mechanism, the top of the jar body is detachably connected with top cover, the bottom of the top cover is rotatably connected with rotating rod in jar body, the both sides of the rotating rod are connected with scraper by multiple fixed rods, two the side of the scraper close to rotating rod is sequentially fixedly connected with multiple splitter plate, another end of multiple the splitter plate is fixedly connected on rotating rod, the top of the top cover is installed motor of driving rotating rod rotation, the bottom of the jar body is fixedly connected with lower liquid pipe communicated with its inside, the bottom of the lower liquid pipe is fixedly connected with processing frame. The utility model is prevented crystallization attachment by scraper and splitter plate cooperation, cooperate porous quartz filter precision filtration, the efficient preparation of super-clean high-purity ammonium fluoride solution is realized.

Description

Technical Field

[0001] This utility model relates to the field of ammonium fluoride solution preparation technology, and in particular to an ultra-clean, high-purity ammonium fluoride solution preparation device. Background Technology

[0002] Ammonium fluoride solution, as an important electronic-grade chemical, is widely used in semiconductor manufacturing, photovoltaic cell production and other fields. Its purity directly affects chip performance and battery efficiency.

[0003] During the preparation of ammonium fluoride solution, improper raw material ratios (such as a deviation of the NH3 to HF molar ratio from 1:1) or inaccurate concentration control can lead to supersaturation and crystal precipitation. Traditional preparation devices often employ simple stirred reactors with external filtration systems, which are insufficient to meet the demands of the modern electronics industry for ultra-clean, high-purity solutions. Furthermore, the transfer process to the external filtration system can easily cause secondary contamination. Therefore, there is an urgent need to develop an integrated, closed preparation device that can seamlessly integrate reaction and filtration, fundamentally solving the problems of crystallization contamination and secondary contamination, and meeting the stringent requirements of the semiconductor and other industries for ultra-clean, high-purity ammonium fluoride solutions. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an ultra-clean, high-purity ammonium fluoride solution preparation device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An apparatus for preparing ultra-clean, high-purity ammonium fluoride solution includes a tank and a support frame. The tank is fixed to the top of the support frame by a support mechanism. A top cover is detachably connected to the top of the tank. A rotating rod is rotatably connected to the bottom of the top cover inside the tank. Scrapers are connected to both sides of the rotating rod by multiple fixed rods. Multiple diverting plates are sequentially fixed to the side of each scraper near the rotating rod. The other ends of the diverting plates are fixedly connected to the rotating rod. A motor for driving the rotating rod is installed on the top of the top cover. A downcomer pipe communicating with the interior of the tank is fixedly connected to the bottom of the tank. A processing frame is fixedly connected to the bottom of the downcomer pipe. A guide groove communicating with the downcomer pipe is opened through the processing frame. A filtration mechanism is provided inside the guide groove.

[0007] As a further improvement of this utility model, the support mechanism includes an upper fixing ring fixedly sleeved on the tank body, and a lower fixing ring sleeved on the tank body below the upper fixing ring. The upper fixing ring and the lower fixing ring are connected by multiple connecting columns, and the support frame is fixedly connected to the bottom of the lower fixing ring.

[0008] As a further improvement of this utility model, the support frame consists of three support columns, a base plate, and an anti-slip pad.

[0009] As a further improvement of this utility model, the detachable connection includes lower fixing blocks fixedly connected to both sides of the tank body, and upper fixing blocks fixedly connected to the top cover are provided above the two lower fixing blocks. Each upper fixing block is fixedly connected to a lower fixing block by a bolt.

[0010] As a further improvement of this utility model, the filtration mechanism includes an outlet pipe fixedly connected to the bottom of the processing frame, an insertion slot communicating with the guide groove is provided on one side of the processing frame, a filter frame is inserted into the insertion slot, a porous quartz filter is fixedly installed in the bottom of the filter frame by a buckle, a handle is fixedly connected to one side of the filter frame, and a rotating block is provided in the handle that is rotatably connected to the processing frame.

[0011] As a further improvement of this utility model, the top of the top cover is fixedly connected to the feed frame and the liquid inlet pipe, which communicate with the inside of the motor, on both sides of the motor.

[0012] The beneficial effects of this utility model are:

[0013] The synergistic effect of the scraper and the diverter plate effectively prevents ammonium fluoride crystals from adhering to the inner wall of the tank. At the same time, the porous quartz filter can efficiently intercept particulate matter, ensuring the ultra-clean and high-purity characteristics of the solution. Furthermore, the filter frame is designed for quick replacement through a plug-in mechanism, which significantly improves production efficiency and product quality.

[0014] This invention achieves efficient preparation of ultra-clean, high-purity ammonium fluoride solution by using a scraper and a flow divider to prevent crystal adhesion, combined with a porous quartz filter for precision filtration. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of an ultra-clean high-purity ammonium fluoride solution preparation device proposed in this utility model;

[0016] Figure 2 This is a partial cross-sectional structural diagram from a frontal view of the ultra-clean high-purity ammonium fluoride solution preparation device proposed in this utility model;

[0017] Figure 3 This is a partial cross-sectional structural diagram of the connection between the lower liquid pipe, processing frame, filtration mechanism, and liquid outlet pipe of the ultra-clean high-purity ammonium fluoride solution preparation device proposed in this utility model.

[0018] In the diagram: 1. Tank body, 2. Upper fixing ring, 3. Connecting column, 4. Lower fixing ring, 5. Support frame, 6. Top cover, 7. Upper fixing block, 8. Lower fixing block, 9. Bolt, 10. Motor, 11. Feed frame, 12. Liquid inlet pipe, 13. Liquid outlet pipe, 14. Processing frame, 15. Liquid outlet pipe, 16. Rotating rod, 17. Fixing rod, 18. Diverter plate, 19. Scraper, 20. Insertion groove, 21. Guide groove, 22. Filter frame, 23. Porous quartz filter, 24. Rotating block, 25. Handle. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] Figures 1-3 A device for preparing ultra-clean, high-purity ammonium fluoride solution includes a tank 1 and a support frame 5. The support frame 5 consists of three support columns, a base plate, and an anti-slip pad. The three support columns are vertically fixed to the edge of the base plate to form a triangular support structure. The anti-slip pad prevents displacement of the equipment during operation. The tank 1 is fixed to the top of the support frame 5 by a support mechanism. The support mechanism includes an upper fixing ring 2 fixedly sleeved on the tank 1. The upper fixing ring 2 is uniformly stressed along the circumference of the tank 1. Below the upper fixing ring 2, there is a lower fixing ring 4 sleeved on the tank 1. The lower fixing ring 4 shares the axial load of the tank 1. The upper fixing ring 2 and the lower fixing ring 4 are connected by multiple connecting columns 3. The connecting columns 3 maintain the parallel spacing between the two fixing rings. The support frame 5 is fixedly connected to the bottom of the lower fixing ring 4 to form an integral support frame.

[0021] The top of the tank body 1 is detachably connected to a top cover 6. The detachable connection includes lower fixing blocks 8 fixedly connected to both sides of the tank body 1. The two lower fixing blocks 8 provide an installation surface. Above the two lower fixing blocks 8, there are upper fixing blocks 7 fixedly connected to the top cover 6. The two upper fixing blocks 7 move synchronously with the top cover 6. Each upper fixing block 7 is fixedly connected to a lower fixing block 8 by a bolt 9. The bolt 9 enables quick disassembly and maintenance.

[0022] The bottom of the top cover 6 is rotatably connected to a rotating rod 16 inside the tank body 1. The rotating rod 16 serves as the transmission shaft for stirring power. Both sides of the rotating rod 16 are connected to scrapers 19 via multiple fixed rods 17. The fixed rods 17 ensure that the radial distance between the scrapers 19 and the rotating rod 16 is constant. The two scrapers 19 are used to scrape off the crystals adhering to the inner wall of the tank body 1. On the side of the two scrapers 19 closest to the rotating rod 16, multiple flow dividers 18 are fixedly connected in sequence. The multiple flow dividers 18 guide the liquid to form a vortex to enhance mixing. The other ends of the multiple flow dividers 18 are fixedly connected to the rotating rod 16 to form a stable triangular support structure. The top of the top cover 6 is equipped with a motor 10 that drives the rotating rod 16 to rotate. The motor 10 is coaxially driven with the rotating rod 16 via a coupling.

[0023] The top of the top cover 6 is fixedly connected to the two sides of the motor 10, with a feed frame 11 and a liquid inlet pipe 12 communicating with its interior. The feed frame 11 is used for adding solid raw materials, and the liquid inlet pipe 12 is connected to the liquid conveying system. The bottom of the tank body 1 is fixedly connected to a drain pipe 13 communicating with its interior. The bottom of the drain pipe 13 is fixedly connected to a processing frame 14, which integrates filtration and collection functions. A guide channel 21 communicating with the drain pipe 13 is opened through the processing frame 14. The guide channel 21 ensures that the liquid flows in a directional manner to the filtration area. A filtration mechanism is provided in the guide channel 21. The filtration mechanism includes a liquid outlet pipe 15 fixedly connected to the bottom of the processing frame 14. The filtered solution is output from tube 15. A plug-in groove 20 communicating with the guide groove 21 is provided on one side of the treatment frame 14. The plug-in groove 20 provides a horizontal installation path for the filter. A filter frame 22 is inserted into the plug-in groove 20. The filter frame 22 slides horizontally along the plug-in groove 20 and is limited. A porous quartz filter 23 is fixedly installed at the bottom of the filter frame 22 by a buckle. The porous quartz filter 23 intercepts particulate matter. A handle 25 is fixedly connected to one side of the filter frame 22. The handle 25 is convenient for the operator to pull and replace. A rotating block 24 is provided in the handle 25 and is rotatably connected to the treatment frame 14. The rotatability of the rotating block 24 can restrict or not restrict the extraction of the filter frame 22.

[0024] When using this utility model, solid raw materials are first added through the feed frame 11, and solvent is injected through the liquid inlet pipe 12. Then, the motor 10 is started, and the rotating rod 16 drives the scraper 19 and the diverter plate 18 to rotate to achieve mixing and prevent crystallization. After the reaction is completed, the solution flows into the processing frame 14 through the liquid outlet pipe 13, is filtered through the porous quartz filter 23, and is discharged from the liquid outlet pipe 15. The filter frame 22 can be pulled out by the handle 25 for cleaning or replacement.

[0025] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A device for preparing ultra-clean, high-purity ammonium fluoride solution, comprising a tank (1) and a support frame (5), characterized in that, The tank body (1) is fixed to the top of the support frame (5) by a support mechanism. A top cover (6) is detachably connected to the top of the tank body (1). A rotating rod (16) is rotatably connected to the bottom of the top cover (6) inside the tank body (1). Scrapers (19) are connected to both sides of the rotating rod (16) by multiple fixed rods (17). Multiple diversion plates (18) are sequentially fixed to the side of each scraper (19) near the rotating rod (16). The other end of 18) is fixedly connected to the rotating rod (16). The top of the top cover (6) is equipped with a motor (10) that drives the rotating rod (16) to rotate. The bottom of the tank (1) is fixedly connected to a liquid drain pipe (13) that communicates with its interior. The bottom of the liquid drain pipe (13) is fixedly connected to a processing frame (14). The processing frame (14) is provided with a guide groove (21) that communicates with the liquid drain pipe (13). A filter mechanism is provided in the guide groove (21).

2. The apparatus for preparing ultra-clean, high-purity ammonium fluoride solution according to claim 1, characterized in that, The support mechanism includes an upper fixing ring (2) fixedly sleeved on the tank body (1), and a lower fixing ring (4) sleeved on the tank body (1) below the upper fixing ring (2). The upper fixing ring (2) and the lower fixing ring (4) are connected by multiple connecting columns (3). The support frame (5) is fixedly connected to the bottom of the lower fixing ring (4).

3. The apparatus for preparing ultra-clean, high-purity ammonium fluoride solution according to claim 1, characterized in that, The support frame (5) consists of three support columns, a base plate, and an anti-slip pad.

4. The apparatus for preparing ultra-clean, high-purity ammonium fluoride solution according to claim 1, characterized in that, The detachable connection includes lower fixing blocks (8) fixedly connected to both sides of the tank body (1), and upper fixing blocks (7) fixedly connected to the top cover (6) are provided above the two lower fixing blocks (8). Each upper fixing block (7) is fixedly connected to a lower fixing block (8) by a bolt (9).

5. The apparatus for preparing ultra-clean, high-purity ammonium fluoride solution according to claim 1, characterized in that, The filtration mechanism includes an outlet pipe (15) fixedly connected to the bottom of the processing frame (14). A plug-in groove (20) communicating with the guide groove (21) is provided on one side of the processing frame (14). A filter frame (22) is inserted into the plug-in groove (20). A porous quartz filter (23) is fixedly installed at the bottom of the filter frame (22) by a snap fastener. A handle (25) is fixedly connected to one side of the filter frame (22). A rotating block (24) rotatably connected to the processing frame (14) is provided in the handle (25).

6. The apparatus for preparing ultra-clean, high-purity ammonium fluoride solution according to claim 1, characterized in that, The top of the top cover (6) is located on both sides of the motor (10) and is fixedly connected to the feed frame (11) and the liquid inlet pipe (12) that communicate with its interior.

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