Crushing mechanism
Patent Information
- Application Number
- CN202522335056.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-04
- Publication Date
- 2026-10-20
- Estimated Expiration
- 2035-11-04
AI Technical Summary
[0002]元件加工过程中,通常通过吸盘吸取待加工元件,以将待加工元件送入下一工位进行后续加工,但吸盘难免会发生漏吸,或者吸盘所吸取的待加工元件出现破碎而导致吸盘仅吸取部分硅片,从而导致部分待加工元件残留在原位,影响待加工元件在不同工位之间流转的顺畅性
[0014]本申请提供的多个实施例,通过设置破碎杆、驱动件、遮挡件和轴杆,驱动件与破碎杆的第一端连接,驱动件能够驱动破碎杆伸出或者收缩,将遮挡件的挡板设置于驱动件的一侧,破碎杆插设于挡板,破碎杆的第二端的端部伸出挡板,且驱动件通过轴杆与挡板连接,驱动件能够驱动轴杆伸出或者收缩,以通过轴杆驱动挡板伸出或者收缩,在需要对残留的待破碎件进行破碎时,由于破碎杆的第二端的端部伸出挡板,因此驱动件驱动破碎杆沿第一方向伸出使得破碎杆的第二端与待破碎件接触以击碎待破碎件,去除残留的待破碎件,保证待加工元件在不同工序间流转的顺畅性。而且驱动件能够驱动挡板伸出以使得挡板靠近待破碎件,从而在破碎杆击碎待破碎件同时,通过挡板遮挡待破碎件破碎后所产生的至少部分碎片,降低碎片飞溅所导致的风险。
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Figure CN224865552U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of component crushing, and in particular to a crushing mechanism. Background Technology
[0002] During component processing, chucks are typically used to pick up components to be processed and send them to the next station for further processing. However, chucks may miss some components or the components they pick up may break, resulting in the chuck only picking up a portion of the silicon wafer. This leaves some components in place, affecting the smooth flow of components between different stations. Utility Model Content
[0003] Therefore, it is necessary to provide a crushing mechanism for the remaining components to be processed.
[0004] This application provides a crushing mechanism, comprising: a crushing rod, including a first end and a second end disposed opposite to each other along a first direction; a driving member connected to the first end, the driving member capable of driving the crushing rod to extend or retract; a blocking member, including a baffle disposed on one side of the driving member, the crushing rod inserted into the baffle, the end of the second end extending out of the baffle, the baffle being connected to the driving member, the driving member capable of driving the baffle to extend or retract; a shaft; along the first direction, one end of the shaft being connected to the driving member, and the other end being connected to the baffle; the driving member capable of driving the shaft to extend or retract, thereby driving the baffle to extend or retract via the shaft; wherein, along the first direction, the driving member drives the crushing rod to extend to crush the workpiece to be crushed, and the driving member drives the baffle to extend via the shaft to block at least some of the fragments generated after the workpiece to be crushed is crushed.
[0005] Optionally, the crushing mechanism further includes a connector and an elastic element; along the first direction, one end of the shaft is connected to the driving member, the connector protrudes from the side of the baffle facing the driving member, the end of the shaft away from the driving member is inserted into the connector, the elastic element is sleeved on the shaft, and the end of the elastic element away from the driving member is connected to the connector; the driving member can drive the shaft to extend or retract, and the shaft can move within the connector; along the first direction, the driving member drives the shaft to extend and compress the elastic element, and the elastic element drives the baffle to extend through the connector; along the first direction, the driving member drives the shaft to retract, and the elastic element drives the baffle to retract through the connector.
[0006] Optionally, the crushing mechanism further includes a connecting plate, which is connected to the output end of the driving member; the crushing rod and the shaft are respectively connected to the driving member through the connecting plate.
[0007] Optionally, the crushing mechanism further includes a conveying member; the conveying member is capable of traveling along a second direction, and the conveying member is provided with a bearing portion for carrying the workpiece to be crushed, the second direction being perpendicular to the first direction; along the first direction, the driving member and the blocking member are disposed on the same side of the conveying member, the bearing portion is provided with a through hole penetrating the bearing portion, and the crushing rod is disposed opposite to the bearing portion.
[0008] Optionally, there are multiple crushing rods, spaced apart along a third direction, and each of the multiple crushing rods is connected to the driving member through the connecting plate. The third direction, the second direction, and the first direction are mutually perpendicular. There are multiple bearing parts, arranged in an array. Multiple bearing parts in each column are spaced apart along the second direction, and multiple bearing parts in each row are spaced apart along the third direction. Along the first direction, the connecting plate is positioned opposite to at least a portion of the bearing parts in at least one row. Each bearing part is positioned opposite to at least one crushing rod.
[0009] Optionally, the crushing mechanism further includes a scanner and a controller, the scanner and the drive unit being communicatively connected to the controller; the scanner is disposed on one side of the conveyor, the acquisition end of the scanner facing the conveyor, and the scanner is capable of detecting whether the workpiece to be crushed exists on the bearing portion; when the scanner detects the presence of the workpiece to be crushed on the bearing portion, the scanner transmits a signal to the controller, and the controller controls the drive unit to drive the crushing rod to extend and crush the workpiece to be crushed; wherein, the controller is capable of controlling the start or stop of the conveyor's movement; when the scanner detects the presence of the workpiece to be crushed on the bearing portion, the controller stops the movement of the conveyor, so that the row containing the bearing portion containing the workpiece to be crushed is positioned opposite to the crushing rod.
[0010] Optionally, the shielding member further includes a shielding portion; the shielding portion is disposed on the side of the baffle facing away from the driving member along the first direction, and the shielding portion surrounds the baffle along the circumferential direction of the baffle; the driving member drives the baffle to extend, and the shielding portion can abut against the conveying member along the first direction, and the baffle and the shielding portion cooperate to form a cover for the workpiece to be crushed; or, the driving member drives the baffle to extend, and the shielding portion can be spaced apart from the conveying member along the first direction, and the baffle and the shielding portion cooperate to form a cover for the workpiece to be crushed.
[0011] Optionally, the crushing mechanism further includes a storage box; the storage box is disposed on the side of the conveying member away from the driving member along the first direction; the storage box has a storage cavity inside, and the side of the storage box facing the shielding member has an opening communicating with the storage cavity, the opening being disposed opposite to at least a portion of the through holes on the bearing portion in at least one row; the storage box is capable of collecting at least a portion of the fragments generated after the object to be crushed is crushed.
[0012] Optionally, the storage box is provided with a guide plate on the side facing the conveyor, and the guide plate surrounds the opening in the circumferential direction of the opening.
[0013] Optionally, the crushing mechanism further includes a detector disposed on one side of the storage box, the detector being capable of detecting the number of fragments contained inside the storage box.
[0014] The embodiments provided in this application, by setting up a crushing rod, a driving member, a blocking member, and a shaft, wherein the driving member is connected to the first end of the crushing rod, and the driving member can drive the crushing rod to extend or retract, the baffle of the blocking member is set on one side of the driving member, the crushing rod is inserted into the baffle, the second end of the crushing rod extends out of the baffle, and the driving member is connected to the baffle through the shaft, and the driving member can drive the shaft to extend or retract, so as to drive the baffle to extend or retract through the shaft. When it is necessary to crush the remaining workpiece, since the second end of the crushing rod extends out of the baffle, the driving member drives the crushing rod to extend in the first direction so that the second end of the crushing rod contacts the workpiece to be crushed to break the workpiece, remove the remaining workpiece, and ensure the smooth flow of the workpiece between different processes. Moreover, the driving member can drive the baffle to extend so that the baffle is close to the workpiece to be crushed, so that while the crushing rod crushes the workpiece to be crushed, the baffle blocks at least some of the fragments generated after the workpiece to be crushed, reducing the risk caused by flying fragments. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the crushing mechanism provided in the embodiments of this application; Figure 2 This is a schematic diagram of the combined structure of the crushing unit, support unit, and collection unit in the crushing mechanism provided in the embodiments of this application; Figure 3 This is a schematic diagram of one embodiment of the crushing unit provided in this application. Figure 4 A schematic diagram illustrating another embodiment of the crushing unit provided in this application. Figure 5 This is a schematic diagram of the structure of the collection unit provided in the embodiments of this application; Figure 6 for Figure 5 The front view; Figure 7 This is a schematic diagram showing the connection relationship between the scanning component, controller, drive component, and power component in the crushing mechanism provided in the embodiments of this application.
[0016] Explanation of reference numerals in the attached figures 100. Crushing mechanism; 10. Crushing rod; 11. First end; 12. Second end; 20. Drive component; 21. Connecting plate; 22. Bracket; 221. Crossbeam; 222. Support rod; 23. Support component; 30. Covering component; 31. Baffle; 310. Insertion hole; 32. Covering part; 40. Shaft; 41. Connector; 42. Elastic component; 50. Conveying component; 51. Bearing unit; 510. Through hole; 52. Power component; 60. Scanned copy; 70. Controller; 80. Storage box; 800. Storage cavity; 801. Opening; 802. Hole; 81. Guide plate; 82. Detector. Detailed Implementation
[0017] To make the technical solution and beneficial effects of this application more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.
[0018] In this application, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this application and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this application.
[0019] In this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" may explicitly include at least one of those features. In this application, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.
[0020] In this application, unless otherwise expressly defined, the terms "installation," "connection," "linking," "fixing," "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0021] In this application, unless otherwise expressly defined, the terms "above," "on top of," "over," "above," "below," "below," "below," or "below" for "first feature over second feature" can refer to the first and second features being in direct contact, or to the first and second features being in indirect contact through an intermediate medium. Furthermore, "above," "over," and "below" for "first feature over second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature over second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.
[0022] In some embodiments of this application, a crushing mechanism 100 is provided, as shown in the reference... Figures 1-4 The crushing mechanism 100 includes a crushing unit, which includes a crushing rod 10, a driving component 20, a blocking component 30, and a shaft 40.
[0023] Reference Figures 1-4 The crushing rod 10 is rod-shaped and extends along a first direction X, which is parallel to the length direction of the crushing rod 10. (Refer to...) Figures 2-4 The breaking rod 10 includes a first end 11 and a second end 12 disposed opposite to each other along the first direction X.
[0024] The drive unit 20 is connected to the first end 11 of the crushing rod 10. Specifically, the output end of the drive unit 20 is connected to the first end 11 of the crushing rod 10. The drive unit 20 can drive the crushing rod 10 to extend or retract along the first direction X.
[0025] The shielding member 30 includes a baffle 31 disposed on one side of the drive member 20. Specifically, the baffle 31 is disposed on the side of the output end of the drive member 20 along the first direction X. The crushing rod 10 is inserted into the baffle 31, and the end of the second end 12 of the crushing rod 10 extends out of the baffle 31, that is, the end of the second end 12 extends to the side of the baffle 31 away from the drive member 20 along the first direction X. The baffle 31 is connected to the drive member 20, and the drive member 20 can drive the baffle 31 to extend or retract. The crushing rod 10 passes through the baffle 31. Specifically, the end of the crushing rod 10 away from the drive member 20 along the first direction X passes through the baffle 31 and extends to the side of the baffle 31 opposite to the drive member 20.
[0026] Reference Figure 3 and Figure 4 The crushing unit in the crushing mechanism 100 also includes a shaft 40, which extends along a first direction X. One end of the shaft 40 is connected to the drive member 20, and the other end is connected to the baffle 31. The drive member 20 can drive the shaft 40 to extend or retract, thereby driving the baffle 31 to extend or retract. The shaft 40 is configured such that the drive member 20 is connected to the baffle 31 via the shaft 40.
[0027] Along the first direction X, the drive member 20 drives the crushing rod 10 to extend and break the workpiece to be crushed (not shown in the figure). The drive member 20 drives the baffle 31 to extend through the shaft 40 to block at least some of the fragments generated after the workpiece to be crushed is broken.
[0028] During component processing, chucks are typically used to pick up components and move them to the next processing station. However, chucks can sometimes miss components, or the components picked up by the chuck may break, resulting in the chuck only picking up a portion of the silicon wafer. This leaves some components behind, hindering subsequent processing. Manually removing these residual components would impede the smooth flow of components between different stations. Using only a crusher to break the residual components could easily result in flying debris and damage.
[0029] The crushing mechanism 100 provided in this embodiment connects the driving member 20 to the first end 11 of the crushing rod 10. The driving member 20 can drive the crushing rod 10 to extend or retract along the first direction X. The baffle 31 in the blocking member 30 is set on one side of the driving member 20 along the first direction X. The crushing rod 10 is inserted into the baffle 31, and the end of the second end 12 of the crushing rod 10 extends out of the baffle 31. The baffle 31 is connected to the driving member 20 through the shaft 40. The driving member 20 can drive the baffle 31 to extend or retract along the first direction X through the shaft 40, thereby allowing the material to be crushed (i.e., the remaining material to be crushed) to be extended or retracted. When the workpiece is being crushed, the drive unit 20 drives the crushing rod 10 to extend along the first direction X. Since the end of the second end 12 of the crushing rod 10 extends out through the baffle 31, the crushing rod 10 contacts and crushes the workpiece, thereby removing any remaining workpiece. After crushing the workpiece, the drive unit 20 drives the crushing rod 10 to retract and drives the baffle 31 to retract via the shaft 40, completing one crushing process. This avoids the situation where the workpiece occupies space and subsequent workpieces cannot flow smoothly, ensuring the smooth flow of workpieces between different processes. Moreover, while driving the crushing rod 10 to extend, the drive unit 20 also drives the baffle 31 to extend via the shaft 40, bringing the baffle 31 closer to the workpiece. This allows the baffle 31 to shield at least some of the fragments generated after the workpiece is crushed, reducing the risk caused by flying fragments.
[0030] Taking the coating process in photovoltaic solar cell production as an example, to ensure the coating efficiency of silicon wafers, the coated silicon wafers placed on the carrier plate need to be picked up by a suction cup and placed back on the track for inspection. Then, the carrier plate, after the suction cup has picked up the silicon wafers, is returned to the starting stage, ready to carry silicon wafers again for the next coating cycle. However, during the process of placing the coated silicon wafers on the track with the suction cup, the suction cup may inevitably miss some wafers, or the coated silicon wafers picked up by the suction cup may break, resulting in the suction cup only picking up a portion of the coated silicon wafers. This results in the carrier plate returning to the initial position with complete coated silicon wafers or fragments of coated silicon wafers, affecting the carrier plate's ability to carry the silicon wafers to be coated in the next coating process, and thus affecting the smooth flow of silicon wafers between different processes.
[0031] In response, the crushing mechanism 100 provided in this application embodiment has a shielding member 30 and a driving member 20 disposed on the same side of the carrier plate along the first direction X. The driving member 20 drives the crushing rod 10 to extend along the first direction X to crush the coated silicon wafers remaining on the carrier plate, thereby removing the remaining coated silicon wafers, ensuring the smooth flow of silicon wafers between different processes, and the baffle 31 in the shielding member 30 can form a shield to block at least some of the fragments, reducing the risk caused by fragment splashing.
[0032] In this context, "extending" of the crushing rod 10 means that the second end 12 of the crushing rod 10 moves away from the driving member 20 along the first direction X. "Retracting" of the crushing rod 10 means that the second end 12 of the crushing rod 10 moves closer to the driving member 20 along the first direction X. "Blocking at least part of the fragments" means that the fragments generated after the component to be crushed are scattered in all directions, and the baffle 31 can at least block the fragments that are scattered towards the baffle 31 along the first direction X, thus providing protection for the side of the baffle 31 facing the driving member 20. "Extending" of the baffle 31 means that the baffle 31 moves away from the driving member 20 along the first direction X. "Retracting" of the baffle 31 means that the baffle 31 moves closer to the driving member 20 along the first direction X.
[0033] In some embodiments, the end of the second end 12 of the crushing rod 10 is tapered. In other implementations, the cross-sectional shape of the end of the second end 12 of the crushing rod 10 is trapezoidal to form a shovel-shaped structure at the end. This application does not specifically limit the shape of the end of the second end 12, as long as it meets the requirements for crushing the workpiece.
[0034] In some embodiments, the drive element 20 is a cylinder, and the piston rod of the cylinder is the output end of the drive element 20. In other embodiments, the drive element 20 is a hydraulic cylinder, and the piston rod of the hydraulic cylinder is the output end of the drive element 20. In other embodiments, the drive element 20 is a linear motor, and the output end of the linear motor is the output end of the drive element 20. This application does not specifically limit the type of drive element 20, as long as it satisfies the function of driving the crushing rod 10 to extend or retract, and driving the baffle 31 to extend or retract.
[0035] In some embodiments, refer to Figure 3 and Figure 4 The baffle 31 has an insertion hole 310 that extends through the baffle 31 along the first direction X. The second end 12 of the crushing rod 10 is inserted into the insertion hole 310, so that the crushing rod 10 can extend or retract under the drive of the driving member 20.
[0036] In some embodiments, refer to Figure 3 The end of the shaft 40 away from the drive component 20 is directly connected to the baffle 31, ensuring the smoothness of the drive component 20 driving the baffle 31 to extend or retract through the shaft 40, and ensuring that the baffle 31 blocks at least part of the debris.
[0037] In some embodiments, refer to Figure 3 The crushing mechanism 100 also includes a connecting plate 21. Specifically, the crushing unit in the crushing mechanism 100 also includes a connecting plate 21, which is connected to the output end of the drive member 20. The first end 11 of the crushing rod 10 is connected to the drive member 20 through the connecting plate 21, and the shaft 40 is connected to the drive member 20 through the connecting plate 21.
[0038] In some embodiments, refer to Figure 2 and Figure 4 The crushing mechanism 100 also includes a connector 41 and an elastic element 42. Specifically, the crushing unit in the crushing mechanism 100 also includes a connector 41 and an elastic element 42.
[0039] Along the first direction X, one end of the shaft 40 is connected to the drive member 20. A connector 41 is disposed on the side of the baffle 31 facing the drive member 20, and the end of the shaft 40 away from the drive member 20 is inserted into the connector 41. An elastic member 42 is sleeved on the shaft 40, and the end of the elastic member 42 away from the drive member 20 is connected to the connector 41. Specifically, the end of the elastic member 42 and the connector 41 opposite to the baffle 31 are connected. The drive member 20 can drive the shaft 40 to extend or retract, and the shaft 40 can move within the connector 41. Specifically, the end of the shaft 40 away from the drive member 20 can move within the connector 41.
[0040] Along the first direction X, the drive member 20 drives the shaft 40 to extend and compress the elastic member 42. The elastic member 42 drives the baffle 31 to extend through the connector 41. Specifically, the output end of the drive member 20 extends to drive the shaft 40 to extend. One end of the shaft 40, which is inserted into the connector 41, moves away from the drive member 20. During the extension of the shaft 40, the output end of the drive member 20 squeezes the elastic member 42. The elastic member 42 contracts and pushes the connector 41 to drive the baffle 31 to extend, so that the baffle 31 forms a shield to block the fragments generated after the workpiece to be crushed.
[0041] Along the first direction X, the drive member 20 drives the shaft 40 to retract, and the elastic member 42 drives the baffle 31 to retract via the connector 41. Specifically, the retraction of the output end of the drive member 20 drives the shaft 40 to retract. One end of the shaft 40, which is inserted into the connector 41, is close to the drive member 20. The retraction of the output end of the drive member 20 gradually releases the pressure on the elastic member 42. Under the action of elastic deformation, the elastic member 42 resets and extends. During the extension process, the elastic member 42 drives the baffle 31 to retract via the connector 41, so that the baffle 31 moves away from the workpiece to be crushed. After the crushing rod 10 completes the crushing action, the baffle 31 is reset, ready for the next crushing operation on the workpiece to be crushed.
[0042] The design of the elastic element 42 and the plug-in element 41 allows the elastic element 42 to drive the baffle 31 to extend or retract along the first direction X via the plug-in element 41. The elastic element 42 transmits the force generated by the extension or retraction of the output end of the drive element 20. During the resetting process of the baffle 31, the elastic deformation of the elastic element 42 is gradually released as the output end of the drive element 20 retracts, thereby slowing down the speed at which the elastic element 42 drives the baffle 31 to retract via the plug-in element 41. This allows the baffle 31 to retract at a slower speed, ensuring the service life of the baffle 31 and ensuring the shielding effect of the shielding element 30 on the fragments generated after breakage.
[0043] In some embodiments, refer to Figure 2 and Figure 4 The crushing mechanism 100 also includes a connecting plate 21. Specifically, the crushing unit in the crushing mechanism 100 also includes a connecting plate 21, which is connected to the output end of the driving member 20. The shaft 40 is connected to the driving member 20 through the connecting plate 21. The output end of the driving member 20 drives the shaft 40 to extend or retract through the connecting plate 21, and the output end of the driving member 20 compresses the elastic member 42 through the connecting plate 21.
[0044] In some embodiments, the elastic element 42 is a spring. In other implementations, the elastic element 42 is elastic rubber. This application does not limit the specific type of the elastic element 42, as long as it satisfies the function of extending the baffle 31 via the connector 41 under the driving compression of the driving element 20, and also satisfies the function of retracting the baffle 31 via the connector 41 during the reset and extension process.
[0045] In some embodiments, the connector 41 is a bearing. This application does not limit the specific type of connector 41, as long as it satisfies the function of allowing the shaft 40 to move within the connector 41 and can cooperate with the elastic member 42 to extend or retract the baffle 31.
[0046] In some embodiments, refer to Figure 1 The crushing mechanism 100 also includes a conveying member 50, which is capable of traveling along a second direction Y, which intersects with the first direction X, as detailed below. Figure 1 In the illustrated embodiment, the second direction Y is perpendicular to the first direction X. The conveyor 50 is provided with a support portion 51 for carrying the workpiece to be crushed. The support portion 51 has a through hole 510 extending along the first direction X. The crushing rod 10 is disposed opposite to the support portion 51 along the first direction X. The conveyor 50 allows residual workpieces to be crushed to be transported to the crushing unit in the crushing mechanism 100. The workpieces are then crushed through the cooperation of the drive member 20, the crushing rod 10, and the blocking member 30, thereby improving crushing efficiency.
[0047] In some other embodiments, the conveyor 50 is provided to facilitate the transfer of the component to be processed between two adjacent processes. The design of the conveyor 50 and the crushing unit makes the crushing unit in the crushing mechanism 100 more suitable for the transfer of the component to be processed between different processes. That is, the crushing unit can promptly crush the component to be crushed remaining on the bearing part 51 of the conveyor 50, ensuring the smooth transfer of the component to be processed between different processes.
[0048] For example, taking the coating process in the production of photovoltaic solar cells as an example, the conveyor 50 can be used as a carrier for conveying silicon wafers between different processes. The bearing part 51 on the conveyor 50 is used to carry the silicon wafers. Through the cooperation of the conveyor 50 and the crushing unit, the coated silicon wafers remaining on the bearing part 51 are crushed, thereby removing the residual coated silicon wafers, ensuring the smooth flow of silicon wafers between different processes, and the baffle 31 in the shielding member 30 can form a shield to block at least some of the fragments, reducing the risk caused by fragment splashing.
[0049] To ensure efficient silicon wafer coating, coated silicon wafers placed on a carrier plate are picked up using a chuck and returned to the track for inspection. The carrier plate, having removed the wafers, is then returned to the starting point, ready to support new wafers for the next coating cycle. However, during the process of placing the coated wafers onto the track using the chuck, some wafers may be missed, or the wafers picked up by the chuck may break, resulting in the chuck only picking up a portion of the coated wafer. This leaves intact or fragmented coated wafers on the carrier plate upon return, affecting its ability to support the wafers to be coated in the next process and thus hindering the smooth flow of wafers between different stages.
[0050] In some embodiments, refer to Figures 1-4 There are multiple crushing rods 10, which are spaced apart along the third direction Z. Each crushing rod 10 is connected to the driving component 20 via a connecting plate 10. Specifically, the first ends 11 of each crushing rod 10 are connected to the driving component 20 via connecting plates 21. The first direction X, the second direction Y, and the third direction Z intersect each other. (Details follow...) Figures 1-4 In the embodiment shown, the first direction X is parallel to the length direction of the crushing rod 10, the second direction Y is the travel direction of the conveying member 50, the connecting plate 21 is a square plate, the third direction Z is parallel to the length direction of the connecting plate 10, and the first direction X, the second direction Y and the third direction Z are mutually perpendicular.
[0051] Reference Figure 1 The number of carrier parts 51 is multiple, and the multiple carrier parts 51 are arranged in an array. The multiple carrier parts 51 in each column are spaced apart along the second direction Y, and the multiple carrier parts 51 in each row are spaced apart along the third direction Z.
[0052] In some embodiments, the connecting plate 21 is disposed opposite to at least a portion of the bearing portion 51 in at least one row along a first direction X.
[0053] In some embodiments, along the third direction Z, the length of the baffle 31 is the same as or different from the length of the connecting plate 21. The baffle 31 is arranged parallel to the connecting plate 21. The baffle 31 is arranged opposite to at least a portion of the bearing portion 51 in at least one row along the first direction X.
[0054] In some embodiments, each support portion 51 is disposed opposite to at least one crushing rod 10 along a first direction X. In other embodiments, the support portion 51 is square in shape, and its shape corresponds to the shape of the component to be processed (e.g., a silicon wafer). One support portion 51 is disposed opposite to five crushing rods 10. Specifically, four of the five crushing rods 10 are spaced apart along the circumferential direction of the support portion 51, for example, corresponding to the four corners of the support portion 51 respectively. The remaining crushing rod 10 is disposed opposite to the center of the support portion 51, thereby improving the crushing effect on the component to be crushed remaining on the support portion 51. In other implementations, the number of crushing rods 10 corresponding to one support portion 51 can be selected according to the actual application.
[0055] The connection plate 21 allows one drive unit 20 to simultaneously drive multiple crushing rods 10 to extend or retract, thereby improving crushing efficiency and reducing energy consumption and saving costs.
[0056] Specifically, such as Figure 1 In the illustrated embodiment, there are two connecting plates 21, spaced apart along the third direction Z. One connecting plate 21 is connected to a driving member 20, and one connecting plate 21 is positioned opposite to a portion of the bearing portions 51 in a row, while the other connecting plate 21 is positioned opposite to another portion of the bearing portions 51 in the row. This forms a coverage of all bearing portions 51 located in the same row, ensuring the crushing of any remaining parts to be crushed in the bearing portions 51 during the crushing operation. Furthermore, the through holes 510 on the bearing portions 51 allow at least some of the fragments generated after the parts to be crushed to fall through the through holes 510, reducing the risk of fragments accumulating on the conveyor 50.
[0057] In some embodiments, refer to Figures 1-4The shielding member 30 also includes a shielding part 32, which is disposed on the side of the baffle 31 facing away from the driving member 20 along the first direction X. The shielding part 32 surrounds the baffle 31 in the circumferential direction. The driving member 20 drives the baffle 31 to extend via the shaft 40. The baffle 31 and the shielding part 32 cooperate to form a cover for the workpiece to be broken. The design of the shielding part 32 and the baffle 31 makes the shielding member 30 as a whole cover. When the baffle 31 extends, the shielding part 32 and the baffle 31 cooperate to define a closed space on the inner side, and form a cover for the workpiece to be broken through this closed space. This further improves the shielding effect of the fragments generated after the workpiece is broken, prevents the fragments from flying around, and can block the fragments from flying, allowing the fragments to fall through the through hole 510 on the bearing part 51, preventing the fragments from scattering.
[0058] In some embodiments, the drive member 20 drives the baffle 31 to extend via the shaft 40, and the blocking part 32 can abut against the conveyor 50 along the first direction X. Specifically, the drive member 20 drives the baffle 31 to extend via the shaft 40, and the baffle 31 drives the blocking part 32 to extend synchronously, so that the blocking part 32 abuts against the side of the conveyor 50 facing the drive member 20, thereby covering the conveyor 50 with the blocking part 30, and enclosing the bearing part 51 in the closed space defined by the cooperation of the baffle 31 and the blocking part 32. While the crushing rod 10 crushes the part to be crushed, it forms a shield for the generated fragments, allowing the fragments to fall through the through hole 510, increasing the degree of fragment aggregation and preventing fragments from scattering.
[0059] In some embodiments, the drive member 20 drives the baffle 31 to extend through the shaft 40, and the blocking part 32 and the conveying member 50 are spaced apart along the first direction X. That is, along the first direction X, there is a gap between the end of the blocking part 32 away from the baffle 31 and the side of the conveying member 50 facing the drive member 20, thereby forming a semi-closed state of the blocking part 30 on the conveying member 50.
[0060] The term "cover" refers to the fact that the shielding part 32 and the baffle 31 cooperate to form a cover structure with one end open and the other end closed, thereby covering and shielding the parts to be broken on the bearing part 51.
[0061] In some embodiments, refer to Figure 7The crushing mechanism 100 also includes a scanner 60 and a controller 70. The scanner 60 and the drive unit 20 are communicatively connected to the controller 70. The scanner 60 is mounted on one side of the conveyor 50, with its scanning end facing the conveyor 50. The scanner 60 can detect whether there is a piece to be crushed on the bearing part 51. When the scanner 60 detects a piece to be crushed on the bearing part 51, it transmits a signal to the controller. The controller 70 controls the drive unit 20 to extend the crushing rod 10 to crush the piece to be crushed, and also controls the drive unit 20 to extend the baffle 31 to block the fragments. The coordinated design of the scanner 60, drive unit 20, and controller 70 can improve the automation level of the crushing unit's crushing operation, thereby improving the crushing efficiency.
[0062] When residual parts to be processed are detected, they are usually manually sucked out with a handheld suction nozzle, which affects work efficiency. However, the crushing mechanism 100 provided in this embodiment detects residual parts to be crushed using a scanner 60. The controller 70 sends a command signal to the drive unit 20, which drives the crushing rod 10 to extend and crush the parts. The drive unit 20 also drives the baffle 31 to extend and block the fragments. The conveyor 50 travels along the second direction Y. Each time the carrier 51 moves one row, the drive unit 20 drives the crushing rod 10 to extend and automatically strike the parts once. After striking, the drive unit 20 drives the crushing rod 10 to retract, completing one striking operation, until the conveyor 50 completely leaves. During the striking operation, the baffle 31 extends to block the fragments, preventing at least some fragments from splashing, thereby improving the automation level of the crushing unit's striking operation and thus improving crushing efficiency.
[0063] In some embodiments, the controller 70 can control the start or stop of the movement of the conveyor 50, specifically, referring to... Figure 7 The crushing mechanism 100 also includes a power component 52, which drives the conveyor 50 to move along the second direction Y. The power component 52 is communicatively connected to the controller 70, enabling the controller 70 to control the start or stop of the conveyor 50's movement via the power component 52. The scanning component 60 detects the presence of a piece to be crushed on the bearing portion 51 and transmits a signal to the controller. The controller 70 stops the conveyor 52's movement via the power component 52, so that the row containing the bearing portion 51 with the piece to be crushed is positioned opposite the crushing rod 10. Then, the controller 70 controls the drive component 20 to extend the crushing rod 10 to crush the piece to be crushed and controls the drive component 20 to extend the baffle 31 to block the fragments. This allows the controller 70 to simultaneously crush multiple pieces to be crushed on the bearing portions 51 in the same row with a single command, improving crushing efficiency and ensuring the efficient flow of the processed components between different processes.
[0064] In some embodiments, the scanning element 60 is selected from a 2D line scan camera and a CCD camera (a digital camera with a charge-coupled device image sensor). This application does not limit the specific type of the scanning element 60, as long as it satisfies the function of detecting whether a piece to be broken exists on the support portion 51.
[0065] In some embodiments, controller 70 is a PLC controller.
[0066] In some embodiments, refer to Figures 1-2 as well as Figures 5-6 The crushing mechanism 100 also includes a collection unit, which includes a storage box 80, as shown in the figure. Figure 1 The storage box 80 is located on the side of the conveyor 50 away from the drive member 20 along the first direction X, as shown in the reference. Figure 5 The storage box 80 has a storage cavity 800 inside, and an opening 801 communicating with the storage cavity 800 is opened on the side of the storage box 80 facing the shielding member 30. The opening 801 is opposite to the through hole 510 on at least a portion of the bearing part 51 in at least one row. The storage box 80 can collect at least a portion of the fragments generated after the component to be broken is broken. Specifically, the fragments generated after the component to be broken can fall into the storage cavity 800 through the through hole 510 and the opening 801, thereby forming a concentrated collection of fragments and improving collection efficiency.
[0067] In some embodiments, refer to Figure 1 The storage box 80 has a guide plate 81 on the side facing the conveyor 50, as shown in the reference. Figure 5 The guide plate 81 surrounds the opening 801 in the circumferential direction. The guide plate 81 can guide the fragments falling through the through hole 510, so that the fragments can fall smoothly and accurately into the storage box 80, avoid the fragments from scattering, and improve the collection efficiency.
[0068] In some embodiments, refer to Figure 5 and Figure 6 The crushing mechanism 100 also includes a detector 82. Specifically, the collection unit in the crushing mechanism 100 also includes a detector 82, which is disposed on one side of the storage box 80. The detector 82 can detect the number of fragments contained inside the storage box 80. Specifically, refer to... Figure 5 An opening 802 is provided on the side wall of the storage box 80, and the detection end of the detector 82 faces the opening 802, enabling the detector 82 to detect the number of fragments contained inside the storage box 80. When the number of fragments accumulated in the storage cavity 800 reaches a preset value, the detector 82 issues a warning signal to remind the operator to handle the situation.
[0069] In some embodiments, the detector 82 is a sensor. This application does not limit the specific type of the detector 82, as long as it can detect the number of fragments inside the storage cavity 800.
[0070] In some embodiments, refer to Figure 1 and Figure 2 The crushing mechanism 100 also includes a support unit. Specifically, the support unit includes a bracket 22, which includes a crossbeam 221 and support rods 222. The crossbeam 221 extends along a third direction Z, and support rods 22 are connected to both ends of the crossbeam 221 along the third direction Z, so that the bracket 22 forms a gantry structure. (Refer to...) Figure 1 The drive component 20 is mounted on the crossbeam 221 of the bracket 22 via the support component 23.
[0071] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.
Claims
1. A crushing mechanism, characterized in that, The crushing mechanism includes: A crushing rod includes a first end and a second end disposed opposite to each other along a first direction; A driving component, connected to the first end, is capable of driving the crushing rod to extend or retract. The shielding component includes a baffle disposed on one side of the driving component, the breaking rod is inserted into the baffle, the end of the second end extends out of the baffle, the baffle is connected to the driving component, and the driving component can drive the baffle to extend or retract. A shaft, along the first direction, has one end connected to the driving member and the other end connected to the baffle; The driving component can drive the shaft to extend or retract, so as to drive the baffle to extend or retract via the shaft; In the first direction, the driving member drives the crushing rod to extend and break the workpiece to be crushed, and the driving member drives the baffle to extend through the shaft to block at least some of the fragments generated after the workpiece to be crushed is broken.
2. The crushing mechanism according to claim 1, characterized in that, The crushing mechanism also includes a connector and an elastic element; Along the first direction, one end of the shaft is connected to the driving member, the plug protrudes from the side of the baffle facing the driving member, the end of the shaft away from the driving member is inserted into the plug, the elastic member is sleeved on the shaft, and the end of the elastic member away from the driving member is connected to the plug. The driving component can drive the shaft to extend or retract, and the shaft can move within the connector; Along the first direction, the driving member drives the shaft to extend and compress the elastic member, and the elastic member drives the baffle to extend through the plug; Along the first direction, the driving member drives the shaft to retract, and the elastic member drives the baffle to retract via the plug.
3. The crushing mechanism according to claim 2, characterized in that, The crushing mechanism further includes a connecting plate, which is connected to the output end of the driving component; The crushing rod and the shaft are respectively connected to the driving component through the connecting plate.
4. The crushing mechanism according to claim 3, characterized in that, The crushing mechanism also includes a conveying component; The conveyor can travel along a second direction, and the conveyor is provided with a bearing part for carrying the piece to be crushed, the second direction being perpendicular to the first direction; Along the first direction, the driving member and the blocking member are disposed on the same side of the conveying member, the bearing part is provided with a through hole that passes through the bearing part, and the crushing rod is disposed opposite to the bearing part.
5. The crushing mechanism according to claim 4, characterized in that, The number of the crushing rods is multiple, and they are spaced apart along a third direction. The multiple crushing rods are respectively connected to the driving component through the connecting plate. The third direction, the second direction and the first direction are perpendicular to each other. The number of the carrier parts is multiple, arranged in an array, with multiple carrier parts in each column spaced apart along the second direction, and multiple carrier parts in each row spaced apart along the third direction; Along the first direction, the connecting plate is disposed opposite to at least a portion of the bearing portion in at least one row; each bearing portion is disposed opposite to at least one breaking rod.
6. The crushing mechanism according to claim 4, characterized in that, The crushing mechanism further includes a scanning component and a controller, wherein the scanning component and the driving component are respectively communicatively connected to the controller; The scanning element is disposed on one side of the conveyor, with the acquisition end of the scanning element facing the conveyor, and the scanning element is capable of detecting whether the part to be crushed exists on the bearing part; The scanning element detects the presence of the piece to be crushed on the bearing portion, and the scanning element transmits a signal to the controller, which controls the driving element to extend the crushing rod to crush the piece to be crushed. The controller is capable of controlling the start or stop of the conveyor's movement; When the scanner detects the presence of the piece to be crushed on the carrier, the controller stops the conveyor from moving, so that the row containing the carrier containing the piece to be crushed is positioned opposite the crushing rod.
7. The crushing mechanism according to claim 4, characterized in that, The shielding component also includes a shielding part; The shielding part is disposed on the side of the baffle that is away from the driving member along the first direction, and the shielding part surrounds the baffle along the circumferential direction of the baffle; The driving component drives the baffle to extend, and the blocking part can abut against the conveying component along the first direction. The baffle and the blocking part cooperate to form a cover for the part to be crushed. Alternatively, the driving member drives the baffle to extend, and the blocking part can be spaced apart from the conveying member along the first direction, with the baffle and the blocking part cooperating to form a cover for the part to be crushed.
8. The crushing mechanism according to claim 4, characterized in that, The crushing mechanism also includes a storage box; The storage box is located on the side of the conveyor component away from the drive component along the first direction; The storage box has a storage cavity inside, and the side of the storage box facing the shield has an opening that communicates with the storage cavity. The opening is arranged opposite to the through hole on at least a portion of the bearing part in at least one row. The storage box is capable of collecting at least some of the fragments produced after the object to be broken is broken.
9. The crushing mechanism according to claim 8, characterized in that, The storage box has a guide plate on the side facing the conveyor, and the guide plate surrounds the opening in the circumferential direction.
10. The crushing mechanism according to claim 9, characterized in that, The crushing mechanism also includes a detector, which is disposed on one side of the storage box and is capable of detecting the number of fragments contained inside the storage box.