A parallel multi-track coating apparatus

Abstract

The utility model discloses a kind of parallel connection multi-track coating equipment, and parallel connection multi-track coating equipment includes: multiple side-by-side annular tracks and coating die head are arranged. Coating platform is respectively arranged on each annular track;Coating die head includes multiple for discharging coating slurry discharge slot, and each discharge slot is respectively used to carry out coating to the substrate of coating platform;Wherein, the both ends of discharge slot are provided with mask assembly, mask assembly includes single-side mask assembly and double-side mask assembly, two single-side mask assemblies are respectively close to the both ends of coating die head and are arranged, and are used for the liquid coating of discharge slot at the both ends of coating die head, double-side mask assembly is arranged between adjacent annular tracks, and is used for the common liquid coating of adjacent discharge slot. Parallel connection multi-track coating equipment can simultaneously coat multiple substrates, and mask assembly volume can be reduced.

Description

[0001] This application claims priority to Chinese Patent Application No. 202411514088.9, filed on October 29, 2024, which is incorporated herein by reference in its entirety. Technical Field

[0002] This utility model relates to the field of coating equipment technology, and in particular to a parallel multi-track coating equipment. Background Technology

[0003] In existing technologies, the fabrication process of perovskite solar cells involves the following steps: the loading assembly transfers the substrate to the coating station, the coating die first pre-coats the substrate in a pre-coating device before coating it, and then the unloading assembly transfers the coated substrate from the coating station, and this cycle is repeated. However, the coating die can only coat one substrate at a time, which cannot meet the high-throughput fabrication requirements of perovskite solar cells. To increase the production capacity of perovskite solar cells, the number of coating devices needs to be increased, leading to increased cost and space requirements for the coating equipment, and consequently, increased cost of the perovskite solar cells.

[0004] Therefore, improving the efficiency of coating equipment is a pressing problem that needs to be solved. Utility Model Content

[0005] The purpose of this invention is to provide a parallel multi-track coating device that can coat multiple substrates simultaneously, thereby shortening the production cycle of perovskite solar cells, increasing the production capacity of perovskite solar cells, and reducing the size of the mask assembly.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A parallel multi-track coating device, comprising:

[0008] Multiple annular tracks are arranged side by side, and each annular track is provided with at least one coating platform. The coating platform is used to place the substrate to be coated, and the coating platform circulates on the corresponding annular track.

[0009] A coating die head includes multiple discharge slits for discharging coating slurry. Each discharge slit is used to coat a substrate supported by the coating platform. The coating width of each discharge slit is greater than the width of the corresponding substrate. Mask assemblies are provided at both ends of each discharge slit. The mask assemblies are used to provide liquid coating for discharge slits that exceed the width of the substrate. The mask assemblies include single-sided mask assemblies and double-sided mask assemblies. The two single-sided mask assemblies are respectively located near both ends of the coating die head and are used to provide liquid coating for discharge slits located at both ends of the coating die head. The double-sided mask assemblies are located between adjacent annular tracks and are used to provide liquid coating for adjacent discharge slits.

[0010] Preferably, when the coating die head coats the substrate located at the coating station, the coating platforms located at the coating stations of the multiple annular tracks move at the same speed.

[0011] Preferably, the system further includes a measurement module for measuring the surface height of the substrate to be coated on the coating platform.

[0012] Preferably, the coating platform includes a support platform and a support portion, and a first driving device disposed between the support platform and the support portion, wherein the first driving device drives the support platform to move up and down according to the measurement data of the measurement module;

[0013] The number of the first driving devices is two or three. When there are two first driving devices, the two first driving devices are respectively located at both ends of the support platform. When there are three first driving devices, the three first driving devices are arranged in a triangular distribution.

[0014] Preferably, it further includes a power supply module and a docking module, the docking module being disposed on the coating platform and connected to the first driving device, the power supply module supplying power to the first driving device through the docking module; and / or,

[0015] The first driving device is a piezoelectric ceramic adjusting screw.

[0016] Preferably, a plurality of magnetically driven sub-sliders are provided on the annular track, and the coating platform is disposed on the magnetically driven sub-sliders, which drive the coating platform to circulate on the annular track.

[0017] Preferably, the system further includes a loading assembly and a unloading assembly. The loading assembly is used to transfer the substrate to be coated onto the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform. The annular track has a first linear track and a second linear track arranged opposite to each other, as well as a first arc track and a second arc track arranged opposite to each other. The first linear track is located above the second linear track, and the coating die head is located above the first linear track. The loading assembly and the unloading assembly are respectively located close to the first arc track and the second arc track. When the magnetic drive sub-slider is located on the first linear track, the upper surface of the coating platform faces upward, and when the magnetic drive sub-slider is located on the second linear track, the upper surface of the coating platform faces downward.

[0018] Preferably, cleaning components are provided at both ends of the discharge slit, and the cleaning components are used to clean the mask assembly.

[0019] Preferably, it further includes a liquid supply system, which is connected to the coating die and provides coating liquid to the coating die.

[0020] Preferably, each of the annular tracks is provided with multiple coating platforms; when the coating die head coats the substrate located at the coating station, the substrate on the coating platform at the coating station is attached to the substrate to be coated on the adjacent coating platform on the same annular track.

[0021] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0022] This invention relates to a parallel multi-track coating equipment. By setting multiple discharge slits, the coating equipment can simultaneously coat multiple substrates, increasing the production capacity of perovskite solar cells. It also reduces the number of coating devices, lowering their cost and space requirements, thereby reducing the production cost of perovskite solar cells. By placing mask assemblies at both ends of the discharge slits, the mask assemblies prevent the coating liquid from being applied to the substrate, ensuring uniform coating liquid distribution and avoiding uneven coating at the substrate edges. Furthermore, the fact that the ends of the discharge slits extend beyond the substrate edges also prevents missed coating at the substrate edges, ensuring the coating quality of the perovskite solar cells. By setting up a double-sided mask assembly for joint liquid discharge coating of adjacent discharge slits, the volume of the double-sided mask assembly is smaller than that of two single-sided mask assemblies, thereby reducing the volume of the mask assembly and the parallel multi-track coating equipment using the mask assembly. The double-sided mask assembly can not only reduce the overall volume of the parallel multi-track coating equipment, but also ensure that the pre-coating of the adjacent ends of the first and second discharge slits is consistent, thus improving the coating quality of the first and second discharge slits.

[0023] Multiple coating platforms circulate on a ring track. When the coating die head coats the substrate at the coating station, the substrate on the coating platform at the coating station is placed close to the substrate to be coated on the adjacent coating platform. In other words, the substrate being coated and the substrate to be coated can be spliced ​​together under the drive of the coating platform. The feeding component, coating die head and unloading component can operate synchronously. The coating die head can continuously coat the substrate, which not only improves the coating efficiency of the substrate and shortens the production cycle of perovskite solar cells, but also makes the coating of each substrate more uniform and improves the coating quality of perovskite solar cells. Moreover, when the coating die head coats different substrates, it does not need to pre-coat on the pre-coating device, which reduces the waste of coating liquid and the amount of cleaning liquid used in the pre-coating device, thereby reducing the production cost of perovskite solar cells. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of the parallel multi-track coating equipment according to an embodiment of the present invention.

[0025] Figure 2 This is a schematic diagram of the planar structure of the parallel multi-track coating equipment according to an embodiment of the present invention.

[0026] Figure 3 This is a three-dimensional structural schematic diagram of the coating platform and magnetically driven sub-slider in one embodiment of the present invention.

[0027] Figure 4 This is a three-dimensional structural schematic diagram of the coating platform and magnetically driven sub-slider in another embodiment of this utility model.

[0028] Figure 5 This is a schematic diagram of the material outlet slit of the coating die head in an embodiment of this utility model.

[0029] Figure 6 This is a flowchart of the coating method according to an embodiment of the present invention.

[0030] In the diagram: 100. Parallel multi-track coating equipment; 1. Circular track; 11. First circular track; 12. Second circular track; 13. Magnetic drive sub-slider; 14. First linear track; 15. Second linear track; 16. First arc track; 17. Second arc track; 2. Coating platform; 21. Support platform; 22. Support unit; 23. First drive device; 3. Coating assembly; 31. Bracket; 311. Crossbeam; 312. First column; 313. Second column; 32. Coating die head; 321. Discharge slit; 3211. First discharge slit; 3212. Second discharge slit; 4. Mask assembly; 41. Single-sided mask assembly; 42. Double-sided mask assembly; 43. Rotating shaft; 44. Third drive device; 5. Cleaning assembly; 6. Measurement module; 7. Power supply module; 71. Power supply terminal; 8. Docking module; 81. Docking terminal. Detailed Implementation

[0031] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0032] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0033] refer to Figures 1 to 5This utility model provides a parallel multi-track coating device 100, including: multiple annular tracks 1, multiple coating platforms 2, coating components 3, a feeding component (not shown), and a discharging component (not shown). The coating platforms 2 can circulate on the annular tracks 1. The coating die 32 of the coating component 3 can be disposed above the multiple annular tracks 1. The feeding component and the discharging component are respectively disposed near the two ends of the annular tracks 1. The parallel multi-track coating device 100 may also include a mask assembly 4, a cleaning component 5, a measuring module 6, a power supply module 7, a docking module 8, and a liquid supply system (not shown). The coating width of the discharge slit 321 of the coating die 32 is greater than the width of the corresponding substrate (not shown). The two ends of the discharge slit 321 are provided with mask assemblies 4. The coating liquid at both ends of the discharge slit 321 is coated on the mask assembly 4. The cleaning component 5 can remove foreign matter such as coating liquid from the mask assembly 4 to ensure that the surface of the mask assembly 4 remains clean. The measuring module 6 is used to measure the surface of the substrate. The surface height of the substrate to be coated on the coating platform 2 is determined by the power supply module 7, which supplies power to the first drive device 23 through the docking module 8. The first drive device 23 and the second drive device are adjusted to ensure that the coating die 32 is parallel to the upper surface of the substrate and the distance between them is equal. The liquid supply system is connected to the coating die 32 and provides coating liquid to the coating die 32. The liquid supply system can transport the coating liquid in the solution tank to the coating die 32. The liquid supply system can provide the coating die 32 with a continuous and stable coating liquid, ensuring that the coating die 32 can continuously coat.

[0034] For details, please refer to Figure 1 , Figure 2 Multiple annular tracks 1 are arranged side by side, meaning they can be parallel to each other or on the same horizontal plane. In this embodiment, the multiple annular tracks 1 are arranged parallel to each other. The number of annular tracks 1 can be two or more. As an example, there are two annular tracks 1, including a first annular track 11 and a second annular track 12. The first annular track 11 and the second annular track 12 preferably have the same shape.

[0035] refer to Figure 1The circular track 1 can be circular, elliptical, or approximately elliptical in shape. Preferably, the circular track 1 is approximately elliptical. It can have a first straight track 14 and a second straight track 15 arranged opposite each other, as well as a first arc track 16 and a second arc track 17 arranged opposite each other. Specifically, the first arc track 16 and the second arc track 17 are respectively located at both ends of the first straight track 14, or vice versa. The first straight track 14 and the second straight track 15 can be on the same horizontal plane, meaning the circular track 1 is parallel to the horizontal plane. Alternatively, the first straight track 14 and the second straight track 15 can be at an angle, meaning the circular track 1 is at an angle to the horizontal plane. In this embodiment, the circular track 1 is perpendicular to the horizontal plane, and the first straight track 14 is located above the second straight track 15.

[0036] The coating platform 2 is used to place the substrate and can circulate on the annular track 1. The number of coating platforms 2 on the first annular track 11 and the second annular track 12 is equal or approximately equal. In this embodiment, half of the coating platforms 2 can circulate on the first annular track 11, and the other half can circulate on the second annular track 12. The structures of the coating platforms 2 on the first annular track 11 and the second annular track 12 can be the same or different. In this embodiment, the structures of the coating platforms 2 on the first annular track 11 and the second annular track 12 are the same. The coating platforms 2 move in the same direction on the first annular track 11 and the second annular track 12, that is, the coating platforms 2 move clockwise or counterclockwise simultaneously on the first annular track 11 and the second annular track 12.

[0037] Each coating platform 2 can hold one or more substrates; in this embodiment, each coating platform 2 holds one substrate. Each coating platform 2 can operate independently, meaning that multiple coating platforms 2 will not interfere with each other. When the coating platform 2 is located on the first linear track 14, the upper surface of the coating platform 2 can be set upwards. This ensures that the coating die 32 can coat the substrate while preventing the substrate from falling off the coating platform 2. When the coating platform 2 is located on the second linear track 15, the upper surface of the coating platform 2 is set downwards. This allows foreign objects on the coating platform 2 to fall off under the action of gravity, preventing foreign objects from contaminating the substrate and ensuring the quality of the perovskite solar cell. The substrate can be a crystalline silicon substrate, a glass substrate, etc. In this application, a crystalline silicon substrate is used as an example for illustration, where a crystalline silicon perovskite solar cell is formed by coating a perovskite solution onto a crystalline silicon substrate.

[0038] As a preferred method, refer to Figure 1Multiple magnetically driven sub-sliders 13 can be arranged on the annular track 1. The coating platform 2 can be arranged on the magnetically driven sub-sliders 13, which can drive the coating platform 2 to circulate on the annular track 1. When the magnetically driven sub-slider 13 is located on the first linear track 14, the upper surface of the coating platform 2 faces upward. When the magnetically driven sub-slider 13 is located on the second linear track 15, the upper surface of the coating platform 2 faces downward. The magnetically driven sub-slider 13 can rotate clockwise or counterclockwise on the annular track 1. In this embodiment, the magnetically driven sub-slider 13 rotates counterclockwise on the annular track 1, that is, the magnetically driven sub-slider 13 drives the coating platform 2 to rotate counterclockwise on the annular track 1. The magnetically driven sub-slider 13 drives the coating platform 2 to rotate counterclockwise on the first annular track 11 and the second annular track 12.

[0039] refer to Figure 1 , Figure 2 The coating assembly 3 may include a support 31 and a coating die 32 disposed on the support 31. The coating die 32 may be disposed above the first linear track 14. The coating platform 2 may drive the substrate to move relative to the coating die 32 along the coating direction, and the coating die 32 coats the substrate. In this embodiment, the support 31 of the coating assembly 3 is, for example, a gantry support 31. In the coating direction, the position of the support 31 is preferably fixed, that is, the coating platform 2 drives the substrate to move from below the coating die 32, and the coating die 32 coats the substrate.

[0040] refer to Figure 1 , Figure 2 , Figure 5The coating die 32 can have multiple discharge slits 321 on the side facing the substrate. Each discharge slit 321 corresponds one-to-one with a ring track 1, meaning one discharge slit 321 corresponds to one ring track 1. Multiple discharge slits 321 can simultaneously coat multiple substrates located at the coating station. Multiple discharge slits 321 can be located on the same coating die 32, or multiple coating dies 32 can be used, each with one discharge slit 321, and multiple coating dies 32 can be simultaneously mounted on the same support 31. In this embodiment, there is only one coating die 32, with multiple discharge slits 321 simultaneously mounted on the same coating die 32. This means that the coating die 32 on one support 31 can simultaneously coat multiple substrates, significantly reducing the number of supports 31 and thus reducing the volume of the parallel multi-track coating equipment 100. In this embodiment, there are two discharge slits 321, including a first discharge slit 3211 and a second discharge slit 3212. The two discharge slits 321 can simultaneously coat the substrates located on the first annular track 11 and the second annular track 12, respectively. That is, while the first discharge slit 3211 coats the substrate on the first annular track 11, the second discharge slit 3212 coats the substrate on the second annular track 12. Compared to coating a single substrate with a coating die 32, the coating efficiency of the coating die 32 is twice that of the original, meaning the production capacity of the parallel multi-track coating equipment 100 is twice that of the original. This can meet the growing demand for perovskite solar cells and reduce the number of parallel multi-track coating equipment 100 units, thus reducing the cost and space occupied by the parallel multi-track coating equipment 100, and consequently lowering the production cost of perovskite solar cells.

[0041] The coating width of the discharge slit 321 is greater than the width of the corresponding substrate. Mask assemblies 4 are provided at both ends of the discharge slit 321. The mask assemblies 4 are used for coating the liquid exiting the discharge slit 321 beyond the substrate width; that is, the coating liquid at both ends of the discharge slit 321 is coated onto the mask assemblies 4. Because the coating liquid distribution at both ends of the discharge slit 321 is uneven, the coating liquid distribution on the substrate near the ends of the discharge slit 321 is also uneven, thus affecting the quality of the perovskite solar cell. In this application, the two ends of the discharge slit 321 can protrude from both ends of the substrate, meaning that the coating liquid at both ends of the discharge slit 321 will not be coated onto the substrate, resulting in a uniform distribution of coating liquid on the substrate and avoiding uneven coating at the substrate edges. Simultaneously, the two ends of the discharge slit 321 extending beyond the substrate edges also prevents missed coating at the substrate edges, thereby improving the quality of the perovskite solar cell. By setting mask assemblies 4 at both ends of the discharge slit 321, the coating liquid at both ends of the discharge slit 321 is applied to the mask assemblies 4, and the mask assemblies 4 carry away the excess coating liquid. The widths of the multiple discharge slits 321 can be the same or different, as long as the coating width of the discharge slit 321 is greater than the width of the corresponding substrate.

[0042] The width of each discharge slit 321 can be the same or different. In this embodiment, the width of each discharge slit 321 is the same, so that multiple discharge slits 321 can coat the same type of substrate simultaneously, avoiding material mixing. In some embodiments, the widths of multiple discharge slits 321 can also be different to meet the needs of different coating scenarios.

[0043] As a preferred method, refer to Figure 2 The mask assembly 4 consists of a rotating shaft 43 and a third driving device 44. The third driving device 44 can drive the rotating shaft 43 to rotate, and the coating liquid at both ends of the discharge slit 321 is coated on the outer circumferential surface of the rotating shaft 43. The mask assembly 4 may include a single-sided mask assembly 41 and a double-sided mask assembly 42. The two single-sided mask assemblies 41 can be respectively set close to both ends of the coating die head 32, that is, the two single-sided mask assemblies 41 can be respectively set at the outermost ends of multiple coating slits, and are used to provide liquid for coating at the discharge slits 321 located at both ends of the coating die head 32. The double-sided mask assembly 42 can be set between adjacent annular tracks 1, and is used to provide liquid for coating at the common discharge slits 321 of adjacent tracks.

[0044] As an example, a single-sided mask assembly 41 may include a rotating shaft 43 and a third driving device 44, and a double-sided mask assembly 42 may include two rotating shafts 43 and a third driving device 44, that is, the third driving device 44 of the double-sided mask assembly 42 can simultaneously drive the two rotating shafts 43 to rotate synchronously. One single-sided mask assembly 41 is disposed at the end of the first discharge slit 3211 away from the second discharge slit 3212, and the other single-sided mask assembly 41 is disposed at the end of the second discharge slit 3212 away from the first discharge slit 3211. The double-sided mask assembly 42 is disposed at a position adjacent to the first discharge slit 3211 and the second discharge slit 3212, and allows liquid to be discharged and coated simultaneously from the first discharge slit 3211 and the second discharge slit 3212. The volume of a single-sided mask assembly 42 is smaller than that of two single-sided mask assemblies 41. The double-sided mask assembly 42 not only reduces the overall volume of the parallel multi-track coating equipment 100, but also ensures consistent pre-coating at the adjacent ends of the first and second discharge slits 3211 and 3212, improving the coating quality of the first and second discharge slits 3211 and 3212. In some embodiments, the single-sided mask assembly 41 may also be disposed between adjacent annular tracks 1. In some embodiments, the side mask assembly 4 may also include only a rotating shaft 43 and a third drive device 44, with the same rotating shaft 43 supplying liquid for simultaneous coating from the first and second discharge slits 3211 and 3212.

[0045] refer to Figure 2 Cleaning components 5 can also be provided at both ends of the discharge slit 321. The cleaning components 5 are used to clean the rotating shaft 43 of the mask assembly 4. The cleaning components 5 can remove foreign matter such as coating liquid from the rotating shaft 43, ensuring that the surface of the rotating shaft 43 remains clean and preventing foreign matter on the surface of the rotating shaft 43 from contaminating the coating die 32. This ensures the uniformity of coating on the coating die 32 and further improves the quality of the perovskite solar cell.

[0046] refer to Figure 1 , Figure 2The support 31 may include a crossbeam 311 and a first column 312 and a second column 313 respectively disposed at both ends of the crossbeam 311. The extension direction of the crossbeam 311 is perpendicular or approximately perpendicular to the extension direction of the first linear track 14. The crossbeam 311 may be disposed above the first linear track 14 of the first annular track 11 and the first linear track 14 of the second annular track 12. The coating die 32 may be disposed on the crossbeam 311 and may simultaneously coat substrates located on multiple annular tracks 1. The first column 312 and the second column 313 are respectively located on the outermost sides of the first linear track 14 of the multiple annular tracks 1. In this embodiment, the first column 312 and the second column 313 are respectively located outside the first linear track 14 of the first annular track 11 and outside the first linear track 14 of the second annular track 12.

[0047] The loading assembly is used to transfer the substrate to be coated onto the coating platform 2, and the unloading assembly is used to transfer the coated substrate from the coating platform 2. The loading assembly and the unloading assembly can be arranged close to the first arc-shaped track 16 and the second arc-shaped track 17, respectively. In this embodiment, in the coating direction, the loading assembly and the unloading assembly are respectively arranged on both sides of the coating assembly 3. The number of loading assemblies and unloading assemblies preferably corresponds one-to-one with the number of annular tracks 1, that is, one loading assembly and one unloading assembly are arranged for one annular track. In some embodiments, the number of loading assemblies and unloading assemblies can also be different from the number of annular tracks 1, and can be set according to actual needs. For example, one loading assembly and one unloading assembly can simultaneously load and unload multiple annular tracks 1, or multiple loading assemblies and multiple unloading assemblies can simultaneously load and unload one annular track 1.

[0048] When the coating die 32 coats the substrate located at the coating station, the substrate on the coating platform 2 at the coating station is placed close to the substrate to be coated on the adjacent coating platform 2, meaning there is no gap or almost no gap between adjacent substrates. During operation, the loading and unloading components preferably operate synchronously with the coating die 32. Specifically, the loading component transfers the substrate to be coated onto the coating platform 2, and the coating platform 2 moves the substrate to the coating station, i.e., below the coating die 32. While the coating die 32 coats the substrate, the loading component continues to transfer the substrate to be coated onto the next coating platform 2. The coating platform 2 moves the substrate closer to the previous coating platform 2, so that the substrate to be coated is placed close to the substrate being coated. In this way, the coating die 32 can achieve continuous coating, which is equivalent to adjacent substrates being coated together. The boards are spliced ​​together to form a continuous whole. Compared with discontinuous coating, in discontinuous coating, adjacent substrates are spaced apart, and there are pauses between coating the different substrates by the coating die 32. When the coating die 32 starts coating and ends coating, it is easy to cause incomplete coating or even missed coating of the front and rear ends of the substrate in the coating direction. Continuous coating can avoid the problems of incomplete coating and missed coating of the substrate. After the substrate coating is completed, the unloading component transfers the coated substrate from the coating platform 2. The coating platform 2 of the transferred substrate moves to the first arc track 16 to continue to participate in the cycle operation.

[0049] As a preferred embodiment, when the coating die 32 coats the substrate located at the coating station, the coating platforms 2 located at the coating stations of the multiple annular tracks 1 move at the same speed. That is, when the discharge speeds of the first discharge slit 3211 and the second discharge slit 3212 are the same, the substrates located on the first annular track 11 and the substrates located on the second annular track 12 move at the same speed. Therefore, the coating thicknesses of the substrates on the first annular track 11 and the substrates located on the second annular track 12 are the same or approximately the same, which can improve the consistency of substrate coating and thus improve the quality and consistency of perovskite solar cells.

[0050] In this application, multiple coating platforms 2 circulate on a ring track 1. When the coating die 32 coats the substrate located at the coating station, the substrate on the coating platform 2 at the coating station is placed close to the substrate to be coated on the adjacent coating platform 2. That is, under the drive of the coating platform 2, the substrate being coated and the substrate to be coated can be spliced ​​together. The feeding component, coating die 32 and unloading component can operate synchronously. The coating die 32 can continuously coat the substrate, which not only shortens the production cycle of perovskite solar cells and improves production efficiency, but also makes the coating of each substrate more uniform, improving the quality of perovskite solar cells. Moreover, when the coating die 32 coats different substrates, it does not need to pre-coat on the pre-coating device, reducing the waste of coating liquid and the amount of cleaning liquid used in the pre-coating device, thereby reducing the production cost of perovskite solar cells. By setting multiple discharge slits 321, the parallel multi-track coating equipment 100 can coat multiple substrates simultaneously, increasing the production capacity of perovskite solar cells. This reduces the number of parallel multi-track coating equipment 100 units, lowering their cost and space requirements, thereby reducing the production cost of perovskite solar cells. By setting mask assemblies 4 at both ends of the discharge slits 321, the mask assemblies 4 prevent the coating liquid from being applied to the substrate, ensuring uniform distribution of the coating liquid on the substrate and avoiding uneven coating at the substrate edges. This also prevents missed coating at the substrate edges, thus improving the quality of the perovskite solar cells.

[0051] In one specific implementation, reference is made to Figure 1 , Figure 2 The parallel multi-track coating equipment 100 may further include a measurement module 6, which measures the surface height of the substrate to be coated located on the coating platform 2. The measurement module 6 can be mounted on the crossbeam 311 or it can be set independently. In this embodiment, the measurement module 6 is set independently between the coating die head 32 and the feeding assembly. The measurement module 6 is, for example, a laser sensor. Each annular track 1 may have one or more measurement modules 6. In this embodiment, each annular track 1 may have three measurement modules 6, which can be triangularly distributed and measure three positions on the surface of the substrate to be coated.

[0052] As a preferred method, refer to Figure 1 , Figure 3 , Figure 4The coating platform 2 may include a support platform 21 and a support portion 22, as well as a first driving device 23 disposed between the support platform 21 and the support portion 22. The first driving device 23 can drive the support platform 21 to move up and down according to the measurement data of the measurement module 6, thereby driving the substrate to move up and down, so that the distance from the upper surface of the substrate located on different coating platforms 2 to the coating die head 32 is equal. This not only adjusts the thickness of the coating liquid on the substrate, but also makes the coating liquid uniformly coated on the substrate, thereby improving the photoelectric conversion efficiency of the perovskite solar cell. The first driving device 23 may be a piezoelectric ceramic adjusting screw. When a voltage is applied to the piezoelectric ceramic adjusting screw, the piezoelectric ceramic adjusting screw will produce a slight elongation or shortening, thereby driving the substrate to move up and down. The piezoelectric ceramic adjusting screw is preferably a piezoelectric ceramic adjusting screw with a power-off self-holding function. When a voltage is applied to the piezoelectric ceramic adjusting screw, the piezoelectric ceramic adjusting screw will extend or retract. When the voltage is removed, the piezoelectric ceramic adjusting screw can maintain the position, realizing power-off self-holding.

[0053] Specifically, the number of first drive devices 23 is two or three; of course, the number of first drive devices 23 can also be one or more than three. (Reference) Figure 3 , Figure 4 When there are three first driving devices 23, the three first driving devices 23 are triangularly distributed and selectively corresponding to the three measuring modules 6. Preferably, the three first driving devices 23 are independent of each other. Three points can determine a plane, and the three first driving devices 23 can adjust the position of the support platform 21 from three different positions, making the distance from each point on the upper surface of the substrate to the coating die head 32 equal. This not only adjusts the thickness of the coating liquid on the substrate but also ensures that the coating liquid is evenly applied to the substrate, improving the photoelectric conversion efficiency of the perovskite solar cell. The three first driving devices 23 ensure that the support platform 21 remains balanced, making its lifting and lowering more stable. They also ensure that each first driving device 23 is subjected to uniform force, meaning that the load on each first driving device 23 is uniform, making its operation more stable and smooth. Furthermore, they prevent the first driving device 23 from being damaged due to excessive load affecting its positioning accuracy.

[0054] When there are two first driving devices 23, the two first driving devices 23 are respectively disposed at both ends of the carrier stage 21. That is, in the direction perpendicular to the coating direction, the two first driving devices 23 are respectively disposed at both ends of the carrier stage 21, or in the width direction of the substrate, the two first driving devices 23 are respectively disposed at both ends of the carrier stage 21. The two first driving devices 23 can simultaneously drive both ends of the carrier stage 21 to move in the same direction, or simultaneously drive both ends of the carrier stage 21 to move in opposite directions, or one of the first driving devices 23 can drive one end of the carrier stage 21 to move while the other first driving device 23 remains stationary. In other words, the two first driving devices 23 are independent of each other; they can drive the carrier stage 21 together simultaneously or drive the carrier stage 21 independently.

[0055] An adsorption device (not shown) may be provided on the support stage 21. When the substrate is placed on the support stage 21, the adsorption device can fix the substrate, prevent the substrate from shifting, and prevent the substrate from warping, making the substrate surface smoother and thus improving the uniformity of coating. In some embodiments, the support stage 21 itself is an adsorption device.

[0056] As a preferred method, refer to Figure 3 , Figure 4 The parallel multi-track coating equipment 100 may further include a power supply module 7 and a docking module 8. The docking module 8 can be disposed on the coating platform 2 and connected to the first driving device 23, that is, each coating platform 2 can be provided with a docking module 8. The power supply module 7 can supply power to the first driving device 23 through the docking module 8. The power supply module 7 can be provided with a power supply terminal 71, such as a probe, and the docking module 8 can be provided with a docking terminal 81, such as a probe. The power supply module 7 and the docking module 8 are connected through the power supply terminal 71 and the docking terminal 81. When the coating platform 2 moves the substrate to below the measurement module 6, the measurement module 6 can measure the substrate. The power supply terminal 71 and the docking terminal 81 can be connected. The power supply module 7 can supply power to the first driving device 23 through the docking module 8. The first driving device 23 can adjust the height of the support platform 21, thereby adjusting the height of the substrate. After all points on the upper surface of the substrate are coplanar, the power supply terminal 71 and the docking terminal 81 can be separated from each other. Since the first drive device 23 has a power-off self-holding function, after the power supply terminal 71 and the docking terminal 81 are separated from each other, the substrate can still remain in the position before the power is cut off, ensuring that all points on the upper surface of the substrate remain coplanar.

[0057] The coating assembly 3 may further include a second driving device (not shown), which may be mounted on the bracket 31. The second driving device can drive the coating die 32 to rise and fall according to the measurement data from the measurement module 6. The number of second driving devices can be one or more. In this embodiment, there are two second driving devices, respectively mounted on the first column 312 and the second column 313. The two second driving devices can drive both ends of the crossbeam 311 to rise and fall, and the crossbeam 311 drives the coating die 32 to rise and fall. Preferably, the two second driving devices are independent of each other. The second driving device can be a servo module, or other types of driving components. As an example, the second driving device includes a motor and a guide rail. The driving end of the motor rises and falls or extends and retracts along the guide rail, and the crossbeam 311 is connected to the driving end of the motor.

[0058] In the width direction of the substrate, the two second driving devices can eliminate problems such as uneven height at both ends of the support platform 21 or the two ends of the substrate caused by part processing errors or assembly errors. When the surface of the substrate is not parallel to the coating die 32 in the width direction of the substrate, the two second driving devices can drive the two ends of the coating die 32 to move in different directions, or one of the second driving devices can remain stationary while the other second driving device drives one end of the coating die 32 to rise and fall, so that the surface of the substrate is parallel to the coating die 32 in the width direction of the substrate. This ensures that the distance from the upper surface of the substrate located on different coating platforms 2 to the coating die 32 is equal. This not only adjusts the thickness of the coating liquid on the substrate, but also makes the coating liquid uniformly coated on the substrate, thereby improving the photoelectric conversion efficiency of the perovskite solar cell.

[0059] Along the length of the substrate, the two second driving devices can also eliminate problems such as uneven heights at both ends of the support platform 21 or the substrate caused by part processing errors or assembly errors. When the surface of the substrate is not parallel to the coating die 32 along the length of the substrate, the length of the substrate is the coating direction. The two second driving devices can simultaneously drive the coating die 32 to move in the same direction so that the distance between the surface of the substrate and the coating die 32 along the length of the substrate remains equal. This ensures that the distance from the upper surface of the substrate located on different coating platforms 2 to the coating die 32 is equal. This not only adjusts the thickness of the coating liquid on the substrate, but also makes the coating liquid uniformly coated on the substrate, thereby improving the photoelectric conversion efficiency of the perovskite solar cell.

[0060] The coating assembly 3 may also include a balancing device (not shown), which can be mounted on the support 31. The balancing device applies a force against gravity to the coating die 32. There may be one or more balancing devices. In this embodiment, there are two balancing devices, respectively mounted on the first column 312 and the second column 313. Preferably, the two balancing devices are independent of each other. The balancing device can be a cylinder module, or other types of balancing components. For example, the balancing device includes a cylinder and a push rod. The cylinder drives the push rod to rise or fall or extend and retract. The cylinder can also keep the push rod stationary and maintain a certain tension or thrust. The two balancing devices can be connected to both ends of the crossbeam 311, meaning the balancing device can apply a certain tension or thrust to the crossbeam 311. The balancing device can at least share part of the load of the second drive device, thus reducing the load on the second drive device, thereby improving the repeatability of the second drive device or ensuring that the second drive device always maintains high repeatability, improving product quality, extending the service life of the second drive device, reducing the replacement frequency of the second drive device, improving equipment efficiency, and reducing equipment operating and maintenance costs. The load mainly refers to the weight of the crossbeam 311 or the weight of the coating die 32, or it can refer to the weight of both the crossbeam 311 and the coating die 32.

[0061] refer to Figure 6 The present invention also provides a coating method using a parallel multi-track coating device 100 as described in any of the above claims. The coating method includes steps S10-S30.

[0062] Step S10: The loading assembly transfers the substrate to be coated to the coating platform 2.

[0063] Specifically, when the coating platform 2 moves to one end of the first linear track 14 and closes to the first arc track 16, the feeding assembly transports the substrate to be coated to the coating platform 2.

[0064] Step S20: The substrate to be coated moves with the coating platform 2 to below the coating die head 32, and the coating die head 32 coats the substrate to be coated. The next substrate to be coated moves with the coating platform 2 and is placed against the substrate being coated. The coating platforms 2 located at the coating stations of the multiple annular tracks 1 move at the same speed.

[0065] Specifically, the substrate to be coated moves with the coating platform 2. When the coating platform 2 moves the substrate below the measurement module 6, the measurement module 6 measures the surface of the substrate to be coated. The power supply terminal 71 and the docking terminal 81 can be connected. The power supply module 7 can supply power to the first driving device 23 through the docking module 8. The first driving device 23 can drive the support platform 21 to rise and fall according to the measurement data of the measurement module 6, thereby driving the substrate to rise and fall. The second driving device can also drive the coating die head 32 to rise and fall according to the measurement data of the measurement module 6, so that the distance from the upper surface of the substrates located on different coating platforms 2 to the coating die head 32 is equal. The next substrate to be coated moves with the coating platform 2 and is set against the substrate being coated, and moves at the same speed as the substrate being coated. That is to say, adjacent substrates are spliced ​​together, and there is no gap between adjacent substrates in the coating direction. The coating die head 32 can continuously coat the substrates, that is, there is no pause when the coating die head 32 coats different substrates, which not only improves the coating efficiency, but also improves the coating quality.

[0066] As a preferred embodiment, when the coating die 32 coats the substrate located at the coating station, the coating platforms 2 located at the coating stations of the multiple annular tracks 1 move at the same speed. That is, when the discharge speeds of the first discharge slit 3211 and the second discharge slit 3212 are the same, the substrates located on the first annular track 11 and the substrates located on the second annular track 12 move at the same speed. Therefore, the coating thicknesses of the substrates on the first annular track 11 and the substrates located on the second annular track 12 are the same or approximately the same, which can improve the consistency of substrate coating and thus improve the quality and consistency of perovskite solar cells.

[0067] Step S30: The unloading assembly transfers the coated substrate from the coating platform 2.

[0068] Specifically, after the substrate coating is completed, the unloading component transfers the coated substrate from the coating platform 2. The empty coating platform 2 continues to move to one end of the first linear track 14 near the first arc track 16, and the loading component transfers the substrate to be coated to the coating platform 2. The coating platform 2 then operates in a cyclical manner. Preferably, after the substrate coating is completed, the coating platform 2 can be accelerated to the unloading section, which can improve the operating efficiency of the equipment.

[0069] The coating equipment of this invention is not limited to coating perovskite solution onto the crystalline silicon wafers mentioned in the above embodiments to prepare crystalline silicon perovskite tandem perovskite solar cells. It can also be used to coat conductive glass substrates with perovskite solution to prepare perovskite solar cells. In addition, it can be applied to any solution coating process, such as coating processes for display screen manufacturing and semiconductor packaging.

[0070] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A parallel multi-track coating device, characterized in that, include: Multiple annular tracks are arranged side by side, and each annular track is provided with at least one coating platform. The coating platform is used to place the substrate to be coated, and the coating platform circulates on the corresponding annular track. A coating die head includes multiple discharge slits for discharging coating slurry. Each discharge slit is used to coat a substrate supported by the coating platform. The coating width of each discharge slit is greater than the width of the corresponding substrate. Mask assemblies are provided at both ends of each discharge slit. The mask assemblies are used to provide liquid coating for discharge slits that exceed the width of the substrate. The mask assemblies include single-sided mask assemblies and double-sided mask assemblies. The two single-sided mask assemblies are respectively located near both ends of the coating die head and are used to provide liquid coating for discharge slits located at both ends of the coating die head. The double-sided mask assemblies are located between adjacent annular tracks and are used to provide liquid coating for adjacent discharge slits.

2. The parallel multi-track coating equipment according to claim 1, characterized in that, When the coating die head coats the substrate located at the coating station, the coating platforms located at the coating stations of the multiple annular tracks move at the same speed.

3. The parallel multi-track coating equipment according to claim 1, characterized in that, It also includes a measurement module for measuring the surface height of the substrate to be coated on the coating platform.

4. The parallel multi-track coating equipment according to claim 3, characterized in that, The coating platform includes a carrier platform and a support section, and a first driving device disposed between the carrier platform and the support section. The first driving device drives the carrier platform to move up and down according to the measurement data of the measurement module. The number of the first driving devices is two or three. When there are two first driving devices, the two first driving devices are respectively located at both ends of the support platform. When there are three first driving devices, the three first driving devices are arranged in a triangular distribution.

5. The parallel multi-track coating equipment according to claim 4, characterized in that, It also includes a power supply module and a docking module. The docking module is disposed on the coating platform and connected to the first driving device. The power supply module supplies power to the first driving device through the docking module. And / or, The first driving device is a piezoelectric ceramic adjusting screw.

6. The parallel multi-track coating equipment according to claim 1, characterized in that, Multiple magnetically driven sub-sliders are arranged on the annular track, and the coating platform is arranged on the magnetically driven sub-sliders. The magnetically driven sub-sliders drive the coating platform to circulate on the annular track.

7. The parallel multi-track coating equipment according to claim 6, characterized in that, It also includes a loading assembly and a unloading assembly, wherein the loading assembly is used to transfer the substrate to be coated to the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform. The annular track has a first straight track and a second straight track arranged opposite to each other, as well as a first arc track and a second arc track arranged opposite to each other. The first straight track is located above the second straight track. The coating die head is located above the first straight track. The feeding assembly and the unloading assembly are respectively located close to the first arc track and the second arc track. When the magnetic drive sub-slider is located on the first straight track, the upper surface of the coating platform faces upward. When the magnetic drive sub-slider is located on the second straight track, the upper surface of the coating platform faces downward.

8. The parallel multi-track coating equipment according to claim 1, characterized in that, Cleaning components are also provided at both ends of the discharge slit, which are used to clean the mask assembly.

9. The parallel multi-track coating equipment according to claim 1, characterized in that, It also includes a liquid supply system, which is connected to the coating die and provides coating liquid to the coating die.

10. The parallel multi-track coating equipment according to claim 1, characterized in that, Each of the aforementioned annular tracks is provided with multiple coating platforms; when the coating die head coats the substrate located at the coating station, the substrate on the coating platform at the coating station is placed in close contact with the substrate to be coated on the adjacent coating platform on the same annular track.

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