Safety protection mechanism of plasma degreasing device

Abstract

The application relates to the technical field of mechanical protection, in particular to a safety protection mechanism of a plasma degreasing device, which comprises a cabin body, a cabin door, a plurality of first driving assemblies and a plurality of second driving assemblies. The cabin body is provided with an opening, the cabin body is used for accommodating the plasma degreasing device, the cabin door is connected with the cabin body, and the cabin door is used for closing the opening. The first driving assembly is connected with the cabin body and the cabin door, and the first driving assembly is used for driving the cabin door to move away from and close to the opening. The cabin door is connected with the first driving assembly through the second driving assembly, and the second driving assembly is used for driving the cabin door to move. The application has the effect that the first driving assembly and the second driving assembly cooperate with each other, so that the cabin door can accurately seal the cabin body.

Description

Technical Field

[0001] This application relates to the field of mechanical protection technology, and in particular to a safety protection mechanism for a plasma adhesive removal device. Background Technology

[0002] With the continuous development of electronic technology, plasma cleaning technology has been widely used in the field of plasma adhesive removal equipment. As technology advances, to ensure cleaning efficiency, multi-layer PCB carriers are added inside plasma cleaning equipment, leading to a continuous increase in equipment size. Because the internal cavity is under high temperature and vacuum conditions during operation, its safety has become increasingly important. Related technologies generally prevent cavity leakage and structural damage by strengthening the cavity's sealing structure and conducting regular inspections. Regarding the control of the chamber door, manual operation or simple electric drive is usually used, lacking precise linkage control, making it difficult to ensure that the chamber door can accurately seal the cavity.

[0003] The aforementioned technologies suffer from low precision in controlling the movement of the hatch, resulting in poor sealing. Utility Model Content

[0004] In order to precisely control the movement of the hatch and seal the cavity, this application provides a safety protection mechanism for a plasma degumming device.

[0005] The safety protection mechanism of the plasma adhesive removal device provided in this application adopts the following technical solution: A safety protection mechanism for a plasma adhesive removal device includes: The chamber has an opening and is used to house the plasma degumming device. A hatch, connected to the cabin body, is used to close the opening; Multiple first drive components are connected to the cabin body and the hatch. Each first drive component includes a first connecting plate connected to the cabin body, a first slide rail disposed on the first connecting plate, a first slider disposed on the hatch, and a cylinder disposed on the first connecting plate. The first slide rail is slidably connected to the first slider, and the telescopic shaft of the cylinder is connected to the hatch. The drive cylinder is used to drive the hatch away from and towards the opening. Multiple second drive components are provided. The hatch is connected to the first drive component via the second drive components. The second drive components include a second connecting plate disposed on the hatch body, a second slide rail disposed on the second connecting plate, a second slider disposed on the first connecting plate, a second connector disposed on the first connecting plate, and a lead screw rotatably disposed on the second connecting plate. The second slide rail is slidably connected to the second slider, and the second connector is rotatably connected to the lead screw. The lead screw is used to drive the second connector to move, thereby moving the hatch.

[0006] By adopting the above technical solution, the lead screw in the second drive assembly drives the hatch to move along the second slide rail, ensuring that the hatch is accurately aligned with the opening, laying a solid foundation for subsequent sealing operations. The cylinder in the first drive assembly drives the hatch to move along the first slide rail, pressing the hatch tightly against the opening of the chamber, ensuring the sealing performance of the safety protection mechanism of the plasma degumming device.

[0007] Optionally, the second drive assembly further includes a drive motor disposed on the second connecting plate, the output shaft of the drive motor being connected to the first end of the lead screw, and the drive motor being used to drive the lead screw to rotate.

[0008] By adopting the above technical solution, the drive motor drives the lead screw to rotate, which allows the speed and rotation angle of the drive motor to be precisely programmed through the electrical control system. This enables precise control of the door lifting speed and start / stop position (e.g., soft start and soft stop), improving the ease of operation and intelligence of the equipment.

[0009] Optionally, the second connecting plate is further provided with a lead screw connector, which is rotatably connected to the second end of the lead screw.

[0010] By adopting the above technical solution, the lead screw connector provides a support point for the second end of the lead screw, which greatly enhances the stability of the lead screw operation, ensures smooth lead screw transmission, and reduces noise and wear.

[0011] Optionally, the second connecting plate is further provided with a lead screw limiting member, which is sleeved on the lead screw and is used to prevent the second connecting member from moving excessively.

[0012] By adopting the above technical solution, the lead screw limiter can physically prevent the second connecting member from exceeding the preset movement range, effectively preventing mechanical damage caused by overtravel and improving the safety of the equipment.

[0013] Optionally, the first drive assembly further includes a first connector disposed on the hatch, the first connector being connected to the first slider.

[0014] By adopting the above technical solution, the hatch and the first slider are connected by an independent first connector, which reduces the assembly difficulty and makes it easier to disassemble the hatch during maintenance, thus improving the maintainability of the equipment.

[0015] Optionally, the second connecting plate is provided with an upper hatch limiter and a lower hatch limiter, and the hatch is provided with a hatch limiter block. The upper hatch limiter and the hatch limiter block are used to prevent the hatch from rising excessively, and the lower hatch limiter and the hatch limiter block are used to prevent the hatch from falling excessively.

[0016] By adopting the above technical solutions, the upper hatch limiter, lower hatch limiter, and hatch limit block provide a more direct and reliable protection method. No matter which link in the conveyor chain has a problem, as long as the hatch reaches the limit position, it will be physically stopped to prevent the hatch from rising too high or falling too low and hitting the equipment, thus providing multiple safety guarantees.

[0017] Optionally, the second connecting plate is provided with a telescopic air rod, wherein when the hatch rises to a preset position, the telescopic air rod and the hatch limiting block are used to prevent the hatch from descending.

[0018] By adopting the above technical solution, when the hatch is open, the operator may need to operate and maintain at the opening. The telescopic air rod provides a mechanical rigid support for the hatch. Even if the drive motor loses power, the lead screw nut fails, or any other malfunction occurs, the telescopic air rod can ensure that the hatch will not fall accidentally, thereby protecting the personal safety of the operator.

[0019] Optionally, the second connecting plate is provided with a hinge track and a cable bundle, and a tank chain is slidably arranged on the hinge track. The tank chain and the cable bundle are used to integrate the cable bundle and the conduit.

[0020] By adopting the above technical solution, various electrical components may be integrated on the hatch. During the reciprocating movement of the hatch, tank chains and cable bundles are used to collect these cables and pipes, which move in an orderly manner with the hatch, effectively preventing the cables and pipes from being tangled, pulled, worn or broken.

[0021] Optionally, the hatch is equipped with an observation window and a handle.

[0022] By adopting the above technical solution, the observation window allows operators to directly observe the plasma state and workpiece processing status inside the equipment without opening the hatch or disrupting the cavity environment, facilitating process monitoring and fault diagnosis. The handle provides the ability to manually move or assist in securing the hatch in case of power failure, maintenance, or emergencies, enhancing the equipment's applicability and maintainability.

[0023] Optionally, the hull is provided with hull reinforcing ribs, and the hatch is provided with hatch reinforcing ribs.

[0024] By adopting the above technical solutions, the chamber and door of the plasma degumming device need to withstand the pressure difference between the inside and outside (vacuum environment), as well as their own weight and dynamic loads during movement. Adding door and chamber reinforcing ribs can significantly improve the bending and deformation resistance of the sheet metal with minimal material, ensuring the structural strength and rigidity of the chamber and door.

[0025] In summary, this application includes at least one of the following beneficial technical effects: 1. The lead screw in the second drive assembly drives the hatch to move along the second slide rail, ensuring that the hatch is accurately aligned with the opening, laying a solid foundation for subsequent sealing operations. The cylinder in the first drive assembly drives the hatch to move along the first slide rail, pressing the hatch tightly against the opening of the chamber, ensuring the sealing performance of the plasma degumming device's safety protection mechanism; 2. By driving the lead screw to rotate through the drive motor, the speed and rotation angle of the drive motor can be precisely programmed through the electrical control system, thereby achieving precise control of the door lifting speed and start / stop position (e.g., achieving soft start and soft stop), improving the ease of operation and intelligence level of the equipment; 3. The upper hatch limiter, lower hatch limiter, and hatch limit block provide a more direct and reliable protection method. No matter which link in the conveyor chain has a problem, as long as the hatch reaches the limit position, it will be physically stopped to prevent the hatch from rising too high or falling too low and hitting the equipment, thus providing multiple safety guarantees. 4. The observation window allows operators to directly observe the plasma state and workpiece processing status inside the equipment without opening the hatch or disrupting the cavity environment, facilitating process monitoring and fault diagnosis. The handle provides the ability to manually move or assist in securing the hatch in case of power failure, maintenance, or emergencies, enhancing the equipment's applicability and maintainability. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the safety protection mechanism of a plasma degumming device according to an embodiment of this application when it is opened; Figure 2 This is a schematic diagram of the structure of a plasma degumming device with its safety protection mechanism closed according to an embodiment of this application; Figure 3 yes Figure 2 Enlarged view of area A in the middle; Figure 4 yes Figure 2 Enlarged diagram of area B in the middle; Figure 5 This is a schematic diagram of the structure of a plasma adhesive removal device with its safety protection mechanism activated from another angle, according to an embodiment of this application.

[0027] Explanation of reference numerals in the attached drawings: 10. Hull; 11. Opening; 12. Hull reinforcing rib; 13. Sealing gasket; 14. Corner block; 20. Hatch door; 21. Hatch door reinforcing rib; 22. Observation window; 23. Handle; 24. Hatch door limiting block; 30. First drive assembly; 31. First connecting plate; 32. First slide rail; 33. First slider; 34. Cylinder; 35. First connector; 40. Second drive assembly; 41. Second connecting plate; 42. Second slide rail; 43. Second slider; 44. Second connector; 45. Drive motor; 46. Lead screw; 46a. Lead screw connector; 47. Lead screw limiting component; 48a. Upper hatch limiting component; 48b. Lower hatch limiting component; 49. Telescopic pneumatic rod; 51. Hinge rail; 52. Tank chain; 53. Cable bundle. Detailed Implementation

[0028] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0029] This application discloses a safety protection mechanism for a plasma adhesive removal device.

[0030] Figure 1 This is a schematic diagram of the structure of the safety protection mechanism of a plasma degumming device according to an embodiment of this application when it is activated. Figure 2 This is a schematic diagram of the structure of a plasma degumming device with its safety protection mechanism closed, according to an embodiment of this application. Figure 3 yes Figure 2 Enlarged diagram of area A in the middle, Figure 4 yes Figure 2 Enlarged diagram of area B in the middle, Figure 5 This is a schematic diagram of the structure of a plasma adhesive removal device according to an embodiment of this application, showing the safety protection mechanism open at another angle. (Refer to...) Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The safety protection mechanism of the plasma adhesive removal device includes a chamber 10, a door 20, multiple first drive components 30, and multiple second drive components 40. The chamber 10 is connected to the first drive components 30 via the second drive components 40, and the first drive components 30 are connected to the door 20. The first drive components 30 drive the door 20 away from the chamber 10, and the second drive components 40 drive the door 20 to move and open the safety protection mechanism of the plasma adhesive removal device. The chamber 10 has an opening 11, and the door 20 seals the opening 11.

[0031] The first drive assembly 30 includes a first connecting plate 31, a plurality of first slide rails 32, a plurality of first sliders 33, a cylinder 34, and a plurality of first connecting members 35. The first connecting plate 31 is connected to the second drive assembly 40. The first slide rails 32 are disposed on the first connecting plate 31. The first sliders 33 are connected to the hatch 20 via the first connecting members 35, and the first sliders 33 are slidably disposed on the first slide rails 32. The first connecting plate 31 is also provided with a cylinder 34, the output shaft of which is connected to the hatch 20. The cylinder 34 is used to drive the hatch 20 to slide along the first slide rails 32. The first connecting plate 31 is typically made of high-strength metal sheet, and the first slide rails 32 are generally made of high-precision linear guides with precision-machined surfaces, exhibiting good wear resistance and guiding properties. The first connecting members 35 may be metal connecting blocks.

[0032] The second drive assembly 40 includes a second connecting plate 41, a second slide rail 42, multiple second sliders 43, a second connector 44, a drive motor 45, and a lead screw 46. The cabin 10 has multiple corner blocks 14, and the second connecting plate 41 is connected to the cabin 10 via the corner blocks 14. The second slide rail 42 and the drive motor 45 are both mounted on the second connecting plate 41. The second sliders 43 are connected to the first connecting plate 31 and are slidably connected to the second slide rail 42. The first connecting plate 31 can also be made of high-strength metal to provide mounting support for other components, and the second slide rail 42 can also be a high-precision linear guide. The second sliders 43 and the second slide rail 42 are precisely fitted (gap 0.01-0.03mm) to limit the lateral swing of the hatch 20 and ensure that the straightness of the hatch 20's movement trajectory is ≤0.02mm / 1000mm. When the weight of the hatch 20 exceeds the load-bearing capacity of the lead screw 46, the second slider 43 can bear part of the vertical load, extending the life of the lead screw 46 (for example, in a certain industrial equipment, the load distribution ratio between the slider and the lead screw is 3:7, which increases the fatigue life of the lead screw by 2.3 times).

[0033] The output end of the drive motor 45 is connected to the first end of the lead screw 46. A lead screw connector 46a is rotatably connected to the second end of the lead screw 46 away from the first end, and the lead screw connector 46a is fixed on the second connecting plate 41. The second connector 44 is sleeved on the lead screw 46 and threadedly connected to the lead screw 46. The second connector 44 is also connected to the first connecting plate 31. The second connecting plate 41 is also provided with a lead screw limiting member 47, which is sleeved on the lead screw 46 and is used to prevent the second connector 44 from moving excessively. The drive motor 45 can be a servo motor, which has precise speed and torque control capabilities. The lead screw 46 is usually a preloaded ball screw with precision threads machined on its surface. A double nut structure eliminates transmission backlash, and the positioning accuracy can reach ±0.01mm. The lead screw connector 46a can be a bearing seat to ensure that the lead screw 46 can rotate stably.

[0034] When the hatch 20 needs to be opened, the drive motor 45 drives the lead screw 46 to rotate, the second connecting member 44 is pushed by the lead screw 46, and the hatch 20 moves. When the hatch 20 needs to be closed, the drive motor 45 drives the lead screw 46 to rotate, the second connecting member 44 is pushed by the lead screw 46, and the hatch 20 moves.

[0035] The cabin 10 is provided with cabin reinforcing ribs 12, and the hatch 20 is provided with hatch reinforcing ribs 21. The cabin reinforcing ribs 12 and 21 are used to withstand high pressure. A sealing gasket 13 is provided at the opening 11 of the cabin 10 to enhance the sealing between the hatch 20 and the cabin 10. The hatch 20 is also provided with an observation window 22 and a handle 23. The observation window 22 is used to observe the situation inside the cabin 10, and the handle 23 is used to move the hatch 20.

[0036] The second connecting plate 41 is provided with an upper hatch limiter 48a and a lower hatch limiter 48b, and the hatch 20 is provided with a hatch limiter block 24. When the hatch 20 moves upward, the hatch limiter block 24 and the upper hatch limiter 48a are used to limit the hatch 20 from moving excessively upward. When the hatch 20 moves downward, the hatch limiter block 24 and the lower hatch limiter 48b are used to limit the hatch 20 from moving excessively downward. The second connecting plate 41 is also provided with a telescopic gas spring 49, which is used to prevent the hatch 20 from falling accidentally when it rises to a preset position.

[0037] The second connecting plate 41 is also equipped with a hinge rail 51, a tank chain 52, and a cable bundle 53. The tank chain 52 is slidably mounted on the hinge rail 51, and the tank chain 52 and the cable bundle 53 are used to fix the connecting lines and connecting pipes. During the raising and lowering of the hatch 20, the tank chain 52 absorbs changes in pitch through pitch expansion and contraction, ensuring that the cables and pipes are always in a slack state. For the heavy hatch 20 (>500kg), the tank chain 52 can also provide additional traction force through a tension adjustment device, reducing the load on the lead screw 46.

[0038] Both sides of the cabin 10 are equipped with detection gratings, which are used to detect whether someone is approaching during operation and to issue a warning.

[0039] The implementation principle of the safety protection mechanism of the plasma adhesive removal device according to an embodiment of this application is as follows: the lead screw in the second drive assembly 40 drives the hatch 20 to move along the second slide rail, so that the hatch 20 can be accurately aligned with the opening 11, laying a solid foundation for the subsequent sealing action. The cylinder 34 in the first drive assembly 30 drives the hatch 20 to move along the first slide rail 32, so that the hatch 20 is tightly abutted against the opening 11, ensuring the sealing performance of the safety protection mechanism of the plasma adhesive removal device.

[0040] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A safety protection mechanism for a plasma adhesive removal device, characterized in that, include: The chamber (10) has an opening (11) for accommodating the plasma degumming device; A hatch (20) is connected to the cabin (10) and is used to close the opening (11). Multiple first drive components (30) are connected to the cabin body (10) and the hatch (20). Each first drive component (30) includes a first connecting plate (31) connected to the cabin body (10), a first slide rail (32) disposed on the first connecting plate (31), a first slider (33) disposed on the hatch (20), and a cylinder (34) disposed on the first connecting plate (31). The first slide rail (32) is slidably connected to the first slider (33). The telescopic shaft of the cylinder (34) is connected to the hatch (20). The drive cylinder (34) is used to drive the hatch (20) away from and towards the opening (11). Multiple second drive components (40) are provided. The hatch (20) is connected to the first drive component (30) through the second drive components (40). The second drive component (40) includes a second connecting plate (41) disposed on the cabin body (10), a second slide rail (42) disposed on the second connecting plate (41), a second slider (43) disposed on the first connecting plate (31), a second connector (44) disposed on the first connecting plate (31), and a lead screw (46) rotatably disposed on the second connecting plate (41). The second slide rail (42) is slidably connected to the second slider (43), and the second connector (44) is rotatably connected to the lead screw (46). The lead screw (46) is used to drive the second connector (44) to move, thereby driving the hatch (20) to move.

2. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The second drive assembly (40) further includes a drive motor (45) disposed on the second connecting plate (41), the output shaft of the drive motor (45) being connected to the first end of the lead screw (46), and the drive motor (45) being used to drive the lead screw (46) to rotate.

3. The safety protection mechanism of the plasma degumming device according to claim 2, characterized in that, The second connecting plate (41) is also provided with a lead screw connector (46a), which is rotatably connected to the second end of the lead screw (46).

4. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The second connecting plate (41) is also provided with a lead screw limiting member (47), which is sleeved on the lead screw (46) and is used to prevent the second connecting member (44) from moving excessively.

5. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The first drive assembly (30) also includes a first connector (35) disposed on the hatch (20), the first connector (35) being connected to the first slider (33).

6. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The second connecting plate (41) is provided with an upper hatch limiter (48a) and a lower hatch limiter (48b), and the hatch (20) is provided with a hatch limiter (24). The upper hatch limiter (48a) and the hatch limiter (24) are used to prevent the hatch (20) from rising excessively, and the lower hatch limiter (48b) and the hatch limiter (24) are used to prevent the hatch (20) from falling excessively.

7. The safety protection mechanism of the plasma degumming device according to claim 6, characterized in that, The second connecting plate (41) is provided with a telescopic air rod (49), wherein when the hatch (20) rises to a preset position, the telescopic air rod (49) and the hatch limiting block (24) are used to prevent the hatch (20) from falling.

8. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The second connecting plate (41) is provided with a hinge track (51) and a cable bundle (53). A tank chain (52) is slidably arranged on the hinge track (51). The tank chain (52) and the cable bundle (53) are used to integrate the cable bundle and the pipeline.

9. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The hatch (20) is equipped with an observation window (22) and a handle (23).

10. The safety protection mechanism of the plasma degumming device according to claim 1, characterized in that, The cabin (10) is provided with cabin reinforcing ribs (12), and the cabin door (20) is provided with cabin reinforcing ribs (21).

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