A laser drilling jig

Abstract

The utility model belongs to the field of laser processing technology discloses a kind of laser trepanning fixture, including jig body, supporting piece, sealing element and suction device.Jig body is provided with support plane and suction recess. Supporting piece is arranged in support plane, and a plurality of first suction holes are arranged on supporting piece, a plurality of first suction holes are all communicated with suction recess, and supporting piece is used to place ceramic substrate.Sealing element is surrounded in the circumferential side of jig body and supporting piece, to seal the connection of jig body and supporting piece.Suction device is connected to the lower surface of jig body, and suction device is communicated with suction recess, and suction device can generate negative pressure and suction ceramic substrate on support frame.The utility model can be applied to the ceramic substrate of relatively thick thickness, and when ceramic substrate is trepanned, ceramic substrate can be avoided directly with jig body contact, prevent ceramic substrate from being damaged, protect trepanning quality.

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to a laser drilling fixture. Background Technology

[0002] Laser drilling technology is widely used in industrial production due to its advantages of high speed, high efficiency, good economic benefits, and wide range of applications. Especially in the field of multilayer electronic components, where drilling holes in ceramic substrates is required, laser drilling is an important process.

[0003] Laser drilling of ceramic substrates requires the use of a drilling fixture to fix the ceramic substrate. However, existing drilling fixtures typically have a vacuum adsorption cavity and a support plane. The support plane is located on the outer periphery of the vacuum adsorption cavity. The ceramic substrate is fixed by drawing a vacuum in the vacuum adsorption cavity, and a support column is set inside the vacuum adsorption cavity to support the ceramic substrate and prevent the middle of the ceramic substrate from being completely suspended and bending.

[0004] However, this type of opening fixture cannot be applied to thick ceramic substrates, and placing the ceramic substrate directly on the support plane can easily damage the ceramic substrate.

[0005] Therefore, there is an urgent need for a laser drilling fixture to solve the above problems. Utility Model Content

[0006] The purpose of this utility model is to provide a laser drilling fixture to solve the technical problems in the prior art that it cannot be applied to thick ceramic substrates, and that placing the ceramic substrate directly on the support plane can easily damage the ceramic substrate.

[0007] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0008] A laser drilling fixture, comprising:

[0009] The fixture body is provided with a support plane and an adsorption cavity;

[0010] A support member is disposed on the support plane. The support member is provided with a plurality of first adsorption holes, all of which are connected to the adsorption cavity. The support member is used to place a ceramic substrate.

[0011] A sealing element is disposed around the periphery of the fixture body and the support member to seal the fixture body and the support member together.

[0012] An adsorption device is connected to the lower surface of the fixture body. The adsorption device is connected to the adsorption cavity and can generate negative pressure to adsorb the ceramic substrate onto the support frame.

[0013] Optionally, the adsorption cavity is a plurality of second adsorption holes provided on the fixture body, and the first adsorption hole and the second adsorption hole are provided in a one-to-one correspondence.

[0014] Optionally, the diameter of the first adsorption pore is larger than the diameter of the second adsorption pore.

[0015] Optionally, the support member includes a plurality of first support rods and a plurality of second support rods, the plurality of first support rods and the plurality of second support rods being arranged in a cross pattern to form the first adsorption hole.

[0016] Optionally, the adsorption device further includes a collection hopper and a negative pressure generator, wherein the inlet of the collection hopper is connected to the fixture body, and the outlet of the collection hopper is connected to the negative pressure generator.

[0017] Optionally, a filter element is provided between the collection hopper and the negative pressure generator.

[0018] Optionally, the fixture body and the support member are detachably connected.

[0019] Optionally, the support member is a honeycomb aluminum plate.

[0020] Optionally, the seal is connected to the adsorption device, and the seal can seal the fixture body to the adsorption device.

[0021] Optionally, the fixture body is further provided with a positioning element, which is used to abut against the adjacent two sides of the ceramic substrate.

[0022] The beneficial effects of this utility model are:

[0023] The laser drilling fixture proposed in this utility model, by placing the support member on the support plane of the fixture body, enables the ceramic substrate to be subjected to more uniform force and obtain good support. At the same time, the first adsorption holes on the support member can adsorb the ceramic substrate, so that the laser drilling fixture can be used for ceramic substrates with a large thickness. Moreover, by setting the support member, the ceramic substrate can be prevented from directly contacting the fixture body, which can prevent the ceramic substrate from being burned and damaged by laser due to excessive contact between the ceramic substrate and the fixture body. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of the laser drilling fixture provided in this embodiment of the utility model;

[0026] Figure 2 This is a top view of the laser drilling fixture provided in this embodiment of the utility model;

[0027] Figure 3 yes Figure 2 Sectional view along the middle AA.

[0028] In the picture:

[0029] 1. Fixture body; 11. Second adsorption hole; 2. Support; 21. First adsorption hole; 3. Sealing element; 4. Collection hopper. Detailed Implementation

[0030] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] like Figures 1 to 3As shown, this embodiment discloses a laser drilling fixture, which includes a fixture body 1, a support member 2, a sealing member 3, and an adsorption device. The fixture body 1 is provided with a support plane and an adsorption cavity. The support member 2 is disposed on the support plane and is provided with a plurality of first adsorption holes 21, all of which communicate with the adsorption cavity. The support member 2 is used to place a ceramic substrate. The sealing member 3 surrounds the fixture body 1 and the support member 2 to seal the fixture body 1 and the support member 2. The adsorption device is connected to the lower surface of the fixture body 1 and communicates with the adsorption cavity. The adsorption device can generate negative pressure to adsorb the ceramic substrate onto the support.

[0034] It is understood that the laser drilling fixture proposed in this utility model, by placing the support member 2 on the support plane of the fixture body 1, enables the ceramic substrate to be subjected to more uniform force and obtain good support. At the same time, the first adsorption holes 21 on the support member 2 can adsorb the ceramic substrate, so that the laser drilling fixture can be used for ceramic substrates with larger thickness. Moreover, by setting the support member 2, the ceramic substrate can be prevented from directly contacting the fixture body 1, which can prevent the ceramic substrate from being damaged by laser burning due to excessive contact between the ceramic substrate and the fixture body 1, and can effectively ensure the drilling quality of the laser drilling fixture.

[0035] Furthermore, such as Figure 2 As shown, in this embodiment, the adsorption cavity is a plurality of second adsorption holes 11 provided on the fixture body 1, with the first adsorption hole 21 corresponding to the second adsorption hole 11 one-to-one. It can be understood that the plurality of second adsorption holes 11 are all connected to the adsorption device. Each first adsorption hole 21 is connected to the adsorption device through a corresponding second adsorption hole 11, ensuring that each first adsorption hole 21 can adsorb the ceramic substrate, significantly improving the fixing effect of the laser-drilled fixture on the ceramic substrate. Simultaneously, this arrangement allows the waste generated by the laser drilling of the ceramic substrate to be absorbed by the adsorption device through the second adsorption hole 11 corresponding to the first adsorption hole 21, preventing residue from remaining in the fixture body 1 or the opening of the ceramic substrate.

[0036] For example, such as Figure 2 and Figure 3 As shown, the fixture body 1 is a rectangular plate, and multiple second adsorption holes 11 are provided on the fixture body 1 through the top and bottom. The support member 2 is provided on the fixture body 1, and the first adsorption hole 21 and the second adsorption hole 11 correspond to each other and are connected.

[0037] Furthermore, in some embodiments, the diameter of the first adsorption hole 21 is larger than the diameter of the second adsorption hole 11. It is understood that this arrangement can further ensure that each first adsorption hole 21 has a corresponding second adsorption hole 11 connected to the adsorption device, thereby further ensuring the fixing effect of the laser-drilled fixture on the ceramic substrate.

[0038] For example, in this embodiment, the pore size of the first adsorption pore 21 is three times the pore size of the second adsorption pore 11.

[0039] Furthermore, in some embodiments, the support member 2 includes a plurality of first support rods and a plurality of second support rods, which are arranged in a cross pattern to form a first adsorption hole 21.

[0040] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, the support member 2 can also be a thin plate with multiple first adsorption holes 21. The multiple first adsorption holes 21 are all hexagonal holes arranged in a honeycomb pattern. More specifically, the support member 2 is a honeycomb aluminum plate. This configuration ensures the lightweight and high strength of the support member 2, allowing for better support and fixation of the ceramic substrate.

[0041] Of course, in other embodiments, multiple first support rods are evenly arranged along the long side of the fixture body 1, multiple second support rods are evenly arranged along the wide side of the fixture body 1, and multiple first support rods and multiple second support rods are arranged perpendicularly to form multiple rectangular first adsorption holes 21.

[0042] Furthermore, in some embodiments, the adsorption device further includes a collection hopper 4 and a negative pressure generator, wherein the inlet of the collection hopper 4 is connected to the fixture body 1, and the outlet of the collection hopper 4 is connected to the negative pressure generator.

[0043] Specifically, such as Figure 1 and Figure 3 As shown, the collection hopper 4 is located below the fixture body 1, and multiple second adsorption holes 11 are connected to the collection hopper 4.

[0044] It is understandable that the residue generated during the laser drilling process on the ceramic substrate can fall into the collection hopper 4 through the first adsorption hole 21 and the second adsorption hole 11 under the action of the adsorption device. By setting the collection hopper 4, the collection efficiency of the residue generated during drilling can be further improved.

[0045] Furthermore, in some embodiments, a filter element is provided between the collection hopper 4 and the negative pressure generator. It is understood that by providing a filter element, residue is prevented from entering the adsorption device and causing damage, effectively ensuring the stability of the laser-drilled fixture's operation and improving its service life.

[0046] Specifically, in this embodiment, the filter element is a filter screen installed at the discharge port of the collection hopper 4, and the negative pressure generator is a vacuum pump, which is detachably installed at the discharge port of the collection hopper 4. After a period of use, the vacuum pump is disassembled to clean the residue collected in the collection hopper 4.

[0047] Furthermore, in some embodiments, the fixture body 1 and the support 2 are detachably connected to facilitate the replacement of different support members 2.

[0048] For example, in this embodiment, the fixture body 1 and the support member 2 are bonded together. This arrangement can further improve the sealing effect between the fixture body 1 and the support member 2, thereby improving the adsorption force of the laser drilling fixture on the ceramic substrate, ensuring the fixing effect on the ceramic substrate, and thus improving the subsequent drilling quality.

[0049] Of course, in other embodiments, the fixture body 1 and the support 2 can also be connected by screws and threaded holes.

[0050] Furthermore, to further improve the adsorption force of the laser-drilled fixture on the ceramic substrate, in some embodiments, the sealing member 3 is connected to the adsorption device, and the sealing member 3 can seal the fixture body 1 and the adsorption device. It is understood that while the sealing member 3 surrounds the side circumferential surfaces of the fixture body 1 and the adsorption device, it can also seal the fixture body 1 and the collection hopper 4, ensuring that gaps between the fixture body 1 and the collection hopper 4 do not result in poor adsorption of the ceramic substrate.

[0051] Furthermore, in some embodiments, to further improve the quality of the opening, the fixture body 1 is also provided with positioning members, which are used to abut against the adjacent two sides of the ceramic substrate. It is understood that before placing the ceramic substrate, the ceramic substrate is positioned by abutting against the adjacent two sides of the ceramic substrate with the positioning members. Once the ceramic substrate is correctly positioned, the vacuum pump is activated to adsorb the ceramic substrate onto the support member 2, and laser opening is performed on the ceramic substrate. This ensures the accuracy of the opening position and improves the quality of the opening.

[0052] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above embodiments. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A laser-drilled fixture, characterized in that, include: The fixture body (1) is provided with a support plane and an adsorption cavity; A support member (2) is provided on the support plane. The support member (2) is provided with a plurality of first adsorption holes (21). The plurality of first adsorption holes (21) are all connected to the adsorption cavity. The support member (2) is used to place a ceramic substrate. A sealing element (3) is disposed around the jig body (1) and the support element (2) to seal the jig body (1) and the support element (2) together. An adsorption device is connected to the lower surface of the fixture body (1). The adsorption device is connected to the adsorption cavity. The adsorption device can generate negative pressure to adsorb the ceramic substrate onto the support frame.

2. The laser drilling fixture according to claim 1, characterized in that, The adsorption cavity is a plurality of second adsorption holes (11) provided on the fixture body (1), and the first adsorption hole (21) and the second adsorption hole (11) are provided in a one-to-one correspondence.

3. The laser drilling fixture according to claim 2, characterized in that, The diameter of the first adsorption pore (21) is larger than the diameter of the second adsorption pore (11).

4. The laser drilling fixture according to claim 1, characterized in that, The support member (2) includes a plurality of first support rods and a plurality of second support rods, which are arranged in a cross pattern to form the first adsorption hole (21).

5. The laser drilling fixture according to claim 1, characterized in that, The adsorption device also includes a collection hopper (4) and a negative pressure generator. The inlet of the collection hopper (4) is connected to the fixture body (1), and the outlet of the collection hopper (4) is connected to the negative pressure generator.

6. The laser drilling fixture according to claim 5, characterized in that, A filter element is provided between the collection hopper (4) and the negative pressure generator.

7. The laser drilling fixture according to any one of claims 1-6, characterized in that, The fixture body (1) and the support member (2) are detachably connected.

8. The laser drilling fixture according to any one of claims 1-6, characterized in that, The support member (2) is a honeycomb aluminum plate.

9. The laser drilling fixture according to any one of claims 1-6, characterized in that, The sealing element (3) is connected to the adsorption device, and the sealing element (3) can seal the fixture body (1) to the adsorption device.

10. The laser drilling fixture according to any one of claims 1-6, characterized in that, The fixture body (1) is also provided with a positioning element, which is used to abut against the adjacent two sides of the ceramic substrate.

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