A silicon rod sample wafer double-sided polishing machine and a silicon rod sample wafer processing system

Abstract

The utility model relates to a kind of silicon rod sample piece double-sided grinding machine and silicon rod sample piece processing system, silicon rod sample piece double-sided grinding machine includes lower grinding head and upper grinding head;Lower grinding head includes the lower grinding disc that can revolve around vertical axis;Upper grinding head is located in lower grinding head side, and it includes upper grinding disc and driver;Upper grinding disc can revolve around a vertical axis, driver drives and connects upper grinding disc, driver is used to drive upper grinding disc rotates to be located in avoidance position and working position around another vertical axis, and upper grinding disc can be driven to lift;When upper grinding disc is located in avoidance position, upper grinding disc is located in lower grinding disc side;When upper grinding disc is located in working position, upper grinding disc coaxially is located above lower grinding disc, detection sample piece can be clamped between upper grinding disc and lower grinding disc, and upper grinding disc and lower grinding disc can revolve to grind both sides of detection sample piece.It has beneficial effect, realize the mechanization of detection sample piece grinding, improve grinding efficiency and precision, replace artificial, reduce labor intensity, avoid harm to human body.

Description

Technical Field

[0001] This utility model relates to the field of silicon rod processing technology, and in particular to a double-sided grinding machine and silicon rod sample processing system for silicon rods. Background Technology

[0002] Silicon rod samples are silicon wafers formed by wire cutting silicon rods and are used to test the carbon and oxygen content of the silicon rods. Since the diameter of the silicon rod sample is approximately 300mm or greater, only a square or round wafer of approximately 50×50mm from the center of the silicon rod sample is needed for testing. After obtaining the test sample, both sides need to be ground to ensure that both sides meet the roughness requirements, allowing the test light to pass through during subsequent carbon and oxygen content testing. The traditional grinding method involves manually acid etching or polishing the test sample before testing. This method has the following problems: it is time-consuming and inefficient; it involves high labor intensity for workers; the acid etching and polishing process is harmful to human health; and the dust generated during the polishing process can affect worker health. Utility Model Content

[0003] (a) Technical problems to be solved

[0004] In view of the above-mentioned shortcomings and deficiencies of the prior art, this utility model provides a double-sided grinding machine for silicon rod samples and a silicon rod sample processing system, which solves the technical problems of low efficiency, high labor intensity and great harm to human health in manual grinding of test samples.

[0005] (II) Technical Solution

[0006] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0007] In a first aspect, the present invention provides a double-sided grinding machine for silicon rod samples, comprising a lower grinding head and an upper grinding head;

[0008] The lower grinding head includes a lower grinding disc capable of rotating about a vertical axis;

[0009] The upper grinding head is located on one side of the lower grinding head and includes an upper grinding disc and a driver. The upper grinding disc is rotatable about a vertical axis. The driver is connected to the upper grinding disc and is used to drive the upper grinding disc to rotate about another vertical axis to a clearance position and a working position. The driver is also able to drive the upper grinding disc to rise and fall.

[0010] When the upper grinding disc is in the avoidance position, the upper grinding disc is located on one side of the lower grinding disc; when the upper grinding disc is in the working position, the upper grinding disc is coaxially located above the lower grinding disc, the test sample can be clamped between the upper grinding disc and the lower grinding disc, and the upper grinding disc and the lower grinding disc can rotate to grind the test sample on both sides.

[0011] According to this utility model, the lower grinding head further includes at least one planetary gear;

[0012] The planetary gear is mounted on the lower grinding disc, and an insertion hole is provided on it for accommodating the test sample.

[0013] The planetary gear can drive the test sample contained therein to revolve around the axis of the lower grinding disk; or, the planetary gear can drive the test sample contained therein to revolve around the axis of the lower grinding disk and rotate on its own axis.

[0014] According to this utility model, the driver includes an upper grinding disc support, a rotary rod, a rotary drive component, a lifting drive component, and a lifting seat;

[0015] The rotating rod is vertically oriented and capable of rotating on its own axis, and is mounted on the upper grinding disc support;

[0016] The main body of the rotary drive component is fixed on the upper grinding disc support, and the drive end is connected to the rotary rod to drive the rotary rod to rotate.

[0017] The lifting seat is vertically and flexibly fitted onto the outside of the rotary rod;

[0018] The main body of the lifting drive component is fixedly connected to the rotary rod, and the drive end is connected to the lifting seat for driving the lifting seat to rise and fall.

[0019] The upper grinding disc is rotatably connected to the lifting seat.

[0020] According to this utility model, the upper grinding head further includes an upper grinding disc rotating sleeve, which is fixedly connected to a lifting seat; the top of the upper grinding disc is fixedly connected to the upper grinding disc seat, which is inserted into the upper grinding disc rotating sleeve and rotatably connected to the upper grinding disc rotating sleeve through a self-aligning roller bearing.

[0021] According to this utility model, a medium channel is formed on the upper grinding disc base and the upper grinding disc, the medium channel is connected to the bottom of the upper grinding disc, and the medium channel is used to introduce cutting fluid or air into the test sample.

[0022] According to this utility model, the lower grinding head further includes an upper grinding disc drive shaft, an internal gear ring, and an external gear ring;

[0023] The upper grinding disc drive shaft and the lower grinding disc are coaxial and can rotate through the lower grinding disc; the inner gear ring is coaxially sleeved outside the upper grinding disc drive shaft and can rotate around the upper grinding disc drive shaft; the outer gear ring is coaxially sleeved outside the inner gear ring and can rotate around the upper grinding disc drive shaft; the peripheral wall of the planetary gear meshes with the inner gear ring and the outer gear ring.

[0024] The upper grinding disc has a mating hole at its center, and the mating hole can be detachably fitted onto the top of the upper grinding disc drive shaft;

[0025] When the upper grinding disc is in the working position, the mating hole is sleeved outside the upper grinding disc drive shaft, and the upper grinding disc drive shaft can drive the upper grinding disc to rotate.

[0026] According to this utility model, the mating hole is a spline hole, and a spline is provided on the top peripheral wall of the upper grinding disc drive shaft, and the spline hole can be fitted onto the outside of the spline.

[0027] According to this utility model, a vertically oriented elastic probe is provided inside the upper grinding disc seat, and the elastic probe is located above the mating hole; when the upper grinding disc is in the working position, the lifting drive can drive the lifting seat and the upper grinding disc to descend, and the elastic probe can press against the top of the upper grinding disc drive shaft;

[0028] The lifting drive component is a cylinder, and an electromagnetic proportional valve is configured in the air circuit system of the lifting drive component. The electromagnetic proportional valve is used to adjust the extension amount, output pressure and extension speed of the drive end of the lifting drive component.

[0029] According to this utility model, the lower grinding head further includes:

[0030] The lower grinding disc support, and the first drive motor, the second drive motor, the third drive motor and the fourth drive motor, whose main bodies are all fixed on the lower grinding disc support and whose drive ends are all vertically oriented;

[0031] The drive end of the first drive motor is connected to the upper grinding disc drive shaft via a gear set, and is used to drive the upper grinding disc drive shaft to rotate.

[0032] The drive end of the second drive motor is connected to the internal gear ring seat fixed at the bottom of the internal gear ring through a gear set, and is used to drive the internal gear ring to rotate.

[0033] The drive end of the third drive motor is connected to the lower grinding disc seat at the bottom of the lower grinding disc via a gear set, and is used to drive the lower grinding disc to rotate.

[0034] The drive end of the fourth drive motor is connected to the outer gear ring seat fixed at the bottom of the outer gear ring through a gear set, and is used to drive the outer gear ring to rotate.

[0035] Secondly, this utility model also provides a silicon rod sample processing system, including the aforementioned silicon rod sample double-sided grinding machine, and also includes a robot component;

[0036] When the upper grinding disc is in the avoidance position, the robot component is used to transfer the silicon rod sample to be cut to the lower grinding disc, and remove the test sample formed by cutting and the remaining silicon rod sample.

[0037] (III) Beneficial Effects

[0038] The beneficial effects of this utility model are as follows: The silicon rod sample double-sided grinding machine provided by this utility model has a driver that can switch the upper grinding disc between a clearance position and a working position. When the upper grinding disc is in the clearance position, it can avoid the lower grinding disc to provide loading space for the lower grinding disc. After the lower grinding disc is loaded, the upper grinding disc is in the working position, coaxially positioned above the lower grinding disc, and the test sample to be ground is clamped between the upper and lower grinding discs. The upper and lower grinding discs can rotate to grind the test sample on both sides. After the test sample is ground on both sides, the upper grinding disc can switch from the working position to the clearance position to avoid the lower grinding disc and provide loading space for the lower grinding disc. Therefore, this silicon rod sample double-sided grinding machine can realize mechanized grinding of test samples, improve grinding efficiency and grinding accuracy, replace manual labor, reduce labor intensity, and avoid harm to the human body. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the silicon rod sample processing system of this utility model;

[0040] Figure 2 This is a schematic diagram of a double-sided grinding machine (the upper grinding disc is located in a clearance position).

[0041] Figure 3 This is a schematic diagram of a double-sided grinding machine (the upper grinding disc is in the working position).

[0042] Figure 4 This is a cross-sectional view of the upper grinding head;

[0043] Figure 5 This is an assembly drawing of the upper grinding disc, the upper grinding disc base, and the upper grinding disc rotating sleeve.

[0044] Figure 6 for Figure 5 A bottom view;

[0045] Figure 7 for Figure 5 A sectional view;

[0046] Figure 8 This is a top view of the lower grinding head;

[0047] Figure 9 This is a bottom view of the lower grinding head;

[0048] Figure 10 This is a cross-sectional view of the lower grinding head;

[0049] Figure 11 A schematic diagram of robot components;

[0050] Figure 12 This is a schematic diagram of the silicon rod sample processing system of this utility model, including a support frame and a dust collection component.

[0051] [Explanation of Labels in the Attached Image]

[0052] 11: Base; 12: Support frame;

[0053] 4: Double-sided grinding machine; 41: Lower grinding head; 411: Lower grinding disc; 4111: Lower grinding disc seat; 412: Planetary gear; 413: Upper grinding disc drive shaft; 414: Internal gear ring; 4141: Internal gear ring seat; 415: External gear ring; 4151: External gear ring seat; 416: Lower grinding disc support; 4161: Inner ring; 4162: Outer ring; 4171: First drive motor; 4172: Second drive motor; 4173: Third drive motor; 4174: Fourth drive motor; 42: Upper grinding head; 421 4211: Upper grinding disc; 4212: Mating hole; 422: Upper grinding disc seat; 422: Driver; 4221: Upper grinding disc support; 4222: Rotary rod; 42221: Gear; 42222: Sliding sleeve; 42223: Guide rod; 4223: Rotary drive component; 42231: Rack; 4224: Lifting drive component; 4225: Elastic probe; 4226: Lifting seat; 4227: Sliding bushing; 4228: Self-aligning roller bearing; 4229: Upper grinding disc rotating sleeve; A: Media channel;

[0054] 5: Robot components; 51: Four-axis robotic arm; 52: Material gripper; 521: First gripper arm; 522: Second gripper arm; 523: Vacuum suction cup; 524: Air blower head;

[0055] 8: Vacuum cleaning component. Detailed Implementation

[0056] To better explain and facilitate understanding of this utility model, a detailed description of its specific embodiments is provided below with reference to the accompanying drawings. In this document, directional terms such as "upper" and "lower" are used interchangeably with... Figure 2 The orientation is used as a reference.

[0057] Example 1

[0058] See Figure 1-10 This invention provides a double-sided grinding machine for silicon rod samples, used for double-sided grinding and testing of samples.

[0059] The double-sided grinding machine 4 includes a lower grinding head 41 and an upper grinding head 42.

[0060] The lower grinding head 41 includes a lower grinding disc 411 capable of rotating about a vertical axis. The upper grinding head 42 is located on one side of the lower grinding head 41 and includes an upper grinding disc 421 and a driver 422. The upper grinding disc 421 is capable of rotating about a vertical axis, and the driver 422 is connected to drive the upper grinding disc 421 to rotate about another vertical axis to a clearance position and a working position, and is also capable of driving the upper grinding disc 421 to rise and fall.

[0061] When the upper grinding disc 421 is in the avoidance position, the upper grinding disc 421 is located on one side of the lower grinding disc 411.

[0062] When the upper grinding disc 421 is in the working position, it is coaxially positioned above the lower grinding disc 411. The test sample can be clamped between the upper grinding disc 421 and the lower grinding disc 411. The upper grinding disc 421 and the lower grinding disc 411 can rotate to grind the test sample on both sides.

[0063] In this double-sided grinding machine for silicon rod samples, the driver 422 can drive the upper grinding disc 421 to switch between a clearance position and a working position. When the upper grinding disc 421 is in the clearance position, it can avoid the lower grinding disc 411 to provide loading space for the lower grinding disc 411. After the lower grinding disc 411 has finished loading, the upper grinding disc 421 is in the working position, coaxially positioned above the lower grinding disc 411, and the test sample to be ground is clamped between the upper grinding disc 421 and the lower grinding disc 411. The upper grinding disc 421 and the lower grinding disc 411 can rotate to grind the test sample on both sides. After the test sample has finished grinding on both sides, the upper grinding disc 421 can switch from the working position to the clearance position to avoid the lower grinding disc 411 and provide unloading space for the lower grinding disc 411. Therefore, this double-sided grinding machine for silicon rod samples can realize the mechanized grinding of test samples, improve grinding efficiency and grinding accuracy, replace manual labor, reduce labor intensity, and avoid harm to the human body.

[0064] Specifically, the lower grinding head 41 also includes at least one planetary gear 412.

[0065] Planetary gear 412 is located on the top of the lower grinding disc 411, and has an insertion hole for receiving a test sample. Planetary gear 412 can drive the received test sample to revolve around the axis of the lower grinding disc 411. Alternatively, planetary gear 412 can drive the received test sample to revolve around the axis of the lower grinding disc 411 and rotate on its own axis.

[0066] Therefore, during the double-sided grinding of the silicon rod sample in this machine, there are three rotational components: the upper grinding disc 421, the lower grinding plate 411, and the planetary gears 412. The relatively high speed of these components improves the grinding effect and precision of the sample. Furthermore, the multiple planetary gears 412 allow for the simultaneous grinding of multiple sample pieces, resulting in a compact overall structure and enhanced grinding efficiency.

[0067] Furthermore, to drive the planetary gear 412 to rotate, the lower grinding head 41 also includes an upper grinding disc drive shaft 413, an internal gear ring 414, and an external gear ring 415.

[0068] The upper grinding disc drive shaft 413 and the lower grinding disc 411 are coaxial, and the lower grinding disc 411 is rotatably mounted on it. An internal gear ring 414 is coaxially fitted around the upper grinding disc drive shaft 413 and can rotate around it. An external gear ring 415 is coaxially fitted around the internal gear ring 414 and can rotate around the upper grinding disc drive shaft 413. The peripheral walls of the planetary gear 412 mesh with the internal gear ring 414 and the external gear ring 415.

[0069] When the internal gear ring 414 and external gear ring 415 rotate, they can drive the planetary gear 412 to revolve around the axis of the lower grinding disc 411. Alternatively, they can drive the planetary gear 412 to revolve around the axis of the lower grinding disc 411 and rotate on its own axis. For example, when the internal gear ring 414 and external gear ring 415 rotate in the same direction and at the same speed, the planetary gear 412 can drive the contained test sample to revolve around the axis of the lower grinding disc 411. When the internal gear ring 414 and external gear ring 415 rotate in opposite directions, or when the internal gear ring 414 and external gear ring 415 rotate at different speeds, or when the internal gear ring 414 and external gear ring 415 rotate in opposite directions and at different speeds, the planetary gear 412 can drive the contained test sample to revolve around the axis of the lower grinding disc 411 and rotate on its own axis.

[0070] Furthermore, in order to drive the upper grinding disc 421 to rotate, a mating hole 4211 is opened in the center of the upper grinding disc 421, and the mating hole 4211 is detachably sleeved on the top of the upper grinding disc drive shaft 413.

[0071] When the upper grinding disc 421 is in the working position, the mating hole 4211 is sleeved on the upper grinding disc drive shaft 413, and the upper grinding disc drive shaft 413 can drive the upper grinding disc 421 to rotate.

[0072] Specifically, to facilitate the insertion of the top of the upper grinding disc drive shaft 413 and the mating hole 4211 of the upper grinding disc 421, the mating hole 4211 is a spline hole, and a spline is provided on the top peripheral wall of the upper grinding disc drive shaft 413, and the spline hole can be fitted outside the spline.

[0073] Furthermore, to support the rotation of the upper grinding disc drive shaft 413, the internal gear ring 414, and the external gear ring 415, the lower grinding head 41 also includes a lower grinding disc support 416, which is fixed on the base 11.

[0074] The top of the lower grinding disc support 416 is coaxially arranged with an inner ring 4161 and an outer ring 4162 from the inside to the outside. The bottom of the lower grinding disc 411 is fixedly connected to the lower grinding disc seat 4111. An annular slot is opened at the bottom of the lower grinding disc seat 4111, and the inner ring 4161 is inserted into the annular slot. The lower grinding disc seat 4111 is rotatably connected to the inner ring 4161 through a bearing. The lower grinding disc seat 4111 can drive the lower grinding disc 411 to rotate around the upper grinding disc drive shaft 413. The upper grinding disc drive shaft 413 is inserted into the inner ring 4161, and the top of the upper grinding disc drive shaft 413 extends out of the inner ring 4161. The bottom of the internal gear ring 414 is fixedly connected to the internal gear ring seat 4141. Both the internal gear ring 414 and the internal gear ring seat 4141 are sleeved on the outside of the upper grinding disc drive shaft 413. The inner circumference of the internal gear ring seat 4141 is rotatably connected to the upper grinding disc drive shaft 413 through a bearing, and the outer circumference of the internal gear ring seat 4141 is rotatably connected to the lower grinding disc seat 4111 through a bearing. The internal gear ring seat 4141 can drive the internal gear ring 414 to rotate around the upper grinding disc drive shaft 413. The bottom of the external gear ring 415 is fixedly connected to the external gear ring seat 4151. The external gear ring seat 4151 is inserted into the outer ring 4162 and rotatably connected to the inner wall of the outer ring 4162 through a bearing. The external gear ring seat 4151 can drive the external gear ring 415 to rotate around the upper grinding disc drive shaft 413.

[0075] Furthermore, in order to drive the upper grinding disc 421, the lower grinding disc 411, the internal gear ring 414, the external gear ring 415 and the upper grinding disc drive shaft 413 to rotate, the lower grinding head 41 also includes a first drive motor 4171, a second drive motor 4172, a third drive motor 4173 and a fourth drive motor 4174.

[0076] The main bodies of the first drive motor 4171, the second drive motor 4172, the third drive motor 4173, and the fourth drive motor 4174 are all fixed on the lower grinding disc support 416, and their drive ends are all vertically oriented. The drive end of the first drive motor 4171 is connected to the lower peripheral wall of the upper grinding disc drive shaft 413 via a gear set, and is used to drive the upper grinding disc drive shaft 413 to rotate. The drive end of the second drive motor 4172 is connected to the lower peripheral wall of the internal gear ring seat 4141 via a gear set, and is used to drive the internal gear ring seat 4141 to drive the internal gear ring 414 to rotate around the upper grinding disc drive shaft 413. The drive end of the third drive motor 4173 is connected to the lower grinding disc seat 4111 via a gear set, and is used to drive it to rotate around the upper grinding disc drive shaft 413. The drive end of the fourth drive motor 4174 is connected to the external gear ring seat 4151 via a gear set, and is used to drive the external gear ring 415 to rotate around the upper grinding disc drive shaft 413.

[0077] The drive system, composed of four motors, allows for stepless adjustment of the relative speed of the test sample held by the upper and lower grinding discs and planetary gears. The four motors drive the rotation of the upper and lower grinding discs and planetary gears via gear sets, ensuring smooth and unimpeded rotation. This results in a stable and vibration-free grinding process, preventing uneven grinding and improving both grinding efficiency and precision. Furthermore, the direct drive of the upper and lower grinding discs and planetary gears by the motors via gear sets results in a shorter transmission chain and a simpler structure.

[0078] Furthermore, the drive unit 422 includes an upper grinding disc support 4221, a rotary rod 4222, a rotary drive unit 4223, a lifting drive unit 4224, and a lifting seat 4226.

[0079] The rotary rod 4222 is vertically oriented and rotatable on the upper grinding disc support 4221. The main body of the rotary drive component 4223 is fixed on the upper grinding disc support 4221, and its drive end is connected to the rotary rod 4222 for driving the rotary rod 4222 to rotate. The lifting seat 4226 is rotatably sleeved on the rotary rod 4222. The main body of the lifting drive component 4224 is fixedly connected to the rotary rod 4222, and its drive end is connected to the lifting seat 4226 for driving the lifting seat 4226 to rise and fall. The upper grinding disc 421 is rotatably connected to the lifting seat 4226.

[0080] In the initial state, the rotary drive 4223 drives the rotary rod 4222, which in turn drives the lifting drive 4224, the lifting seat 4226, and the upper grinding disc 421 to rotate synchronously until the upper grinding disc 421 is in a clearance position. After the lower grinding disc 411 is loaded, the rotary drive 4223 drives the rotary rod 4222, which in turn drives the lifting drive 4224, the lifting seat 4226, and the upper grinding disc 421 to rotate synchronously until the upper grinding disc 421 is in the working position, with the upper grinding disc 421 coaxially positioned above the lower grinding disc 411. Subsequently, the lifting drive 4224 drives the lifting seat 4226 to lower the upper grinding disc 421. The mating hole 4211 of the upper grinding disc 421 is fitted onto the top of the upper grinding disc drive shaft 413, and the test sample to be ground is clamped between the upper grinding disc 421 and the lower grinding disc 411 for double-sided grinding of the test sample. After the sample to be tested is ground on both sides, the lifting drive 4224 drives the upper grinding disc 421 to rise and disengage from the upper grinding disc drive shaft 413. Then, the rotary drive 4223 drives the upper grinding disc 421 to rotate to a clearance position so that the robot component 5 can unload the sample to be tested after the double-sided grinding.

[0081] Specifically, the rotary drive component 4223 is a cylinder. The drive end of the rotary drive component 4223 is fixedly connected to a horizontally oriented rack 42231. The rack 42231 is slidably mounted on a rack guide rail fixed to the upper grinding disc support 4221 via a slider, thereby limiting the horizontal movement of the rack 42231. A gear 42221 is arranged on the outer periphery of the rotary rod 4222. When the drive end of the rotary drive component 4223 extends, it can drive the rotary rod 4222 to rotate through the meshing of the rack 42231 and the gear 42221.

[0082] Specifically, the rotary rod 4222 is rotatably connected to the upper grinding disc support 4221 via a bearing. The lifting seat 4226 is slidably sleeved on the outside of the rotary rod 4222 via a sliding bushing 4227.

[0083] More specifically, a vertically oriented sliding sleeve 42222 is fixedly mounted on the rotary rod 4222, and a guide rod 42223 is slidably mounted inside the sliding sleeve 42222. The guide rod 42223 is fixedly connected to the lifting seat 4226. When the lifting drive component 4224 drives the lifting seat 4226 to rise or fall, the lifting seat 4227 can drive the guide rod 42223 to rise or fall along the sliding sleeve 42222, thereby improving the lifting accuracy of the lifting seat 4226.

[0084] Specifically, the upper grinding head 42 also includes an upper grinding disc rotating sleeve 4229, which is fixedly connected to the lifting seat 4226. The top of the upper grinding disc 421 is fixedly connected to the upper grinding disc seat 4212, which is inserted into and rotatably connected to the upper grinding disc rotating sleeve 4229. When the top of the upper grinding disc drive shaft 413 is inserted into the mating hole 4211 of the upper grinding disc 421, the upper grinding disc drive shaft 413 can drive the upper grinding disc 421 and the upper grinding disc seat 4212 to rotate relative to the upper grinding disc rotating sleeve 4229.

[0085] Preferably, the upper grinding disc seat 4212 is rotatably connected to the upper grinding disc rotating sleeve 4229 via a self-aligning roller bearing 4228, so as to allow a certain amount of floating when the upper grinding disc 421 rotates, thereby keeping it parallel to the lower grinding disc 411.

[0086] Preferably, to improve grinding quality and facilitate separation of the upper grinding disc from the ground test sample, a communicating medium channel A is provided on the upper grinding disc base 4212 and the upper grinding disc, extending to the bottom of the upper grinding disc. Medium channel A is used to introduce cutting fluid into the test sample during the grinding process. Alternatively, it is used to blow air onto the test sample after grinding to prevent the test sample from sticking to the upper grinding disc, thus facilitating separation of the upper grinding disc from the test sample.

[0087] Specifically, the upper grinding disc seat 4212 has a cutting fluid medium channel A for introducing cutting fluid and a ventilation medium channel A for ventilation.

[0088] Specifically, the upper grinding disc seat 4212 and the medium channel A on the upper grinding disc are connected by a pipeline.

[0089] Furthermore, to improve the accuracy of double-sided grinding of the test sample, this embodiment further specifies:

[0090] A vertically oriented elastic probe 4225 is provided inside the upper grinding disc seat 4212, and the elastic probe 4225 is located above the mating hole 4211. When the upper grinding disc 421 is in the working position, the lifting drive 4224 can drive the upper grinding disc seat 4212 and the upper grinding disc 421 to descend. The elastic probe 4225 is used to detect the positioning information when it presses against the top of the upper grinding disc drive shaft 413, the pressure information of the upper grinding disc 421 pressing against the test sample, and the grinding thickness information of the test sample.

[0091] Specifically, the lifting drive component 4224 is a cylinder. An electromagnetic proportional valve is configured in the pneumatic system of the lifting drive component 4224.

[0092] The electromagnetic proportional valve is used to adjust the extension speed of the drive end of the lifting drive component 4224 according to the positioning information, thereby adjusting the descent speed of the upper grinding disc 421 and preventing damage from excessive speed impact. The electromagnetic proportional valve is also used to adjust the output pressure and speed of the drive end of the lifting drive component 4224 according to the pressure information, so that the mating hole 4211 of the upper grinding disc 421 can be properly engaged with the upper grinding disc drive shaft 413, and to adjust the pressure of the upper grinding disc 421 against the test sample to prevent damage to the test sample. The electromagnetic proportional valve is also used to adjust the extension amount of the drive end of the lifting drive component 4224 according to the grinding thickness information, thereby improving the accuracy of the grinding thickness of the test sample.

[0093] Specifically, the upper grinding head 41 also includes a controller, and the elastic probe 4225 and the electromagnetic proportional valve are all connected to the controller via wires.

[0094] When the elastic probe 4225 presses against the top of the upper grinding disc drive shaft 413, it can transmit readings to the controller. The controller obtains positioning information, pressure information and grinding thickness information based on the readings, and sends a control signal to the electromagnetic proportional valve. The electromagnetic proportional valve adjusts the extension amount, output pressure and speed of the lifting drive 4224 drive end.

[0095] It should be noted that all structures in this utility model are implemented in hardware. Each component is physically connected and drives its operation to realize all information processing processes. No program content is involved in this process.

[0096] Example 2

[0097] See Figure 11 This embodiment also provides a silicon rod sample processing system, including a silicon rod sample double-sided grinding machine, and a robot component 5.

[0098] When the upper grinding disc 421 is in the avoidance position, the robot component 5 is used to transfer the silicon rod sample to be cut to the lower grinding disc 411 and remove the test sample formed by cutting and the remaining silicon rod sample.

[0099] Furthermore, the robot component 5 includes a four-axis robotic arm 51 and a gripper 52 mounted on the four-axis robotic arm 51. The four-axis robotic arm 51 is used to drive the gripper 52 to move.

[0100] The gripper 52 includes a gripping arm 521, which is equipped with a vacuum suction cup 523, and uses the vacuum suction cup 523 to adsorb silicon rod samples and test samples.

[0101] Preferably, the robot assembly 5 further includes an air blowing head 224 disposed on the four-axis robotic arm 51, the air blowing head 224 being connected to an air passage. The air blowing head 524 is used to blow air onto the silicon rod sample and the test sample before adsorbing them to clean them, so as to avoid interference from dust and debris.

[0102] See Figure 1 Furthermore, this silicon rod sample processing system also includes a base 11.

[0103] The double-sided grinding machine for silicon rod samples and the robot component 5 are both mounted on the base 11.

[0104] See Figure 12 Furthermore, this silicon rod sample processing system also includes a support frame 12 and a dust collection assembly 8.

[0105] The support frame 12 is fixed to the top of the base 11. The dust collection assembly 8 is fixed to the support frame 12 to collect the dust generated during the grinding mechanism 4, preventing environmental pollution. Support frame 12.

[0106] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0107] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0108] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0109] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0110] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A double-sided grinding machine for silicon rod samples, characterized in that, Including the lower grinding head (41) and the upper grinding head (42); The lower grinding head (41) includes a lower grinding disc (411) that is capable of rotating about a vertical axis. The upper grinding head (42) is located on one side of the lower grinding head (41), and includes an upper grinding disc (421) and a driver (422); the upper grinding disc (421) is capable of rotating around a vertical axis, and the driver (422) drives the upper grinding disc (421) to rotate around another vertical axis to a clearance position and a working position, and is capable of driving the upper grinding disc (421) to rise and fall; When the upper grinding disc (421) is in the avoidance position, the upper grinding disc (421) is located on one side of the lower grinding disc (411); when the upper grinding disc (421) is in the working position, the upper grinding disc (421) is coaxially located above the lower grinding disc (411), and the test sample can be clamped between the upper grinding disc (421) and the lower grinding disc (411). The upper grinding disc (421) and the lower grinding disc (411) can rotate to grind the test sample on both sides.

2. The double-sided grinding machine for silicon rod samples as described in claim 1, characterized in that, The lower grinding head (41) also includes at least one planetary gear (412). The planetary gear (412) is disposed on the lower grinding disc (411), and an insertion hole is provided on it for accommodating the test sample; The planetary gear (412) can drive the test sample contained therein to revolve around the axis of the lower grinding disk (411); or, the planetary gear (412) can drive the test sample contained therein to revolve around the axis of the lower grinding disk (411) and rotate on its own axis.

3. The double-sided grinding machine for silicon rod samples as described in claim 2, characterized in that, The driver (422) includes an upper grinding disc support (4221), a rotary rod (4222), a rotary drive (4223), a lifting drive (4224), and a lifting seat (4226). The rotating rod (4222) is vertically oriented and rotatable on the upper grinding disc support (4221); The main body of the rotary drive (4223) is fixed on the upper grinding disc support (4221), and the drive end is connected to the rotary rod (4222) to drive the rotary rod (4222) to rotate. The lifting seat (4226) is movably sleeved on the outside of the rotary rod (4222); The main body of the lifting drive component (4224) is fixedly connected to the rotary rod (4222), and the driving end is connected to the lifting seat (4226) for driving the lifting seat (4226) to rise and fall; The upper grinding disc (421) is rotatably connected to the lifting seat (4226).

4. The double-sided grinding machine for silicon rod samples as described in claim 3, characterized in that, The upper grinding head (42) also includes an upper grinding disc rotating sleeve (4229), which is fixedly connected to a lifting seat (4226); the top of the upper grinding disc (421) is fixedly connected to an upper grinding disc seat (4212), which is inserted into the upper grinding disc rotating sleeve (4229) and rotatably connected to the upper grinding disc rotating sleeve (4229) through a self-aligning roller bearing (4228).

5. The double-sided grinding machine for silicon rod samples as described in claim 4, characterized in that, A medium channel (A) is provided on the upper grinding disc base (4212) and the upper grinding disc (421). The medium channel (A) is connected to the bottom of the upper grinding disc (421). The medium channel (A) is used to introduce cutting fluid or air into the test sample.

6. The double-sided grinding machine for silicon rod samples as described in claim 4, characterized in that, The lower grinding head (41) also includes an upper grinding disc drive shaft (413), an internal gear ring (414), and an external gear ring (415). The upper grinding disc drive shaft (413) and the lower grinding disc (411) are coaxial and can rotate through the lower grinding disc (411); the inner gear ring (414) is coaxially sleeved outside the upper grinding disc drive shaft (413) and can rotate around the upper grinding disc drive shaft (413); the outer gear ring (415) is coaxially sleeved outside the inner gear ring (414) and can rotate around the upper grinding disc drive shaft (413); the peripheral wall of the planetary gear (412) meshes with the inner gear ring (414) and the outer gear ring (415). The upper grinding disc (421) has a mating hole (4211) at its center, and the mating hole (4211) is detachably fitted onto the top of the upper grinding disc drive shaft (413); When the upper grinding disc (421) is in the working position, the mating hole (4211) is sleeved on the upper grinding disc drive shaft (413), and the upper grinding disc drive shaft (413) can drive the upper grinding disc (421) to rotate.

7. The double-sided grinding machine for silicon rod samples as described in claim 6, characterized in that, The mating hole is a spline hole, and the top peripheral wall of the upper grinding disc drive shaft (413) is provided with a spline, and the spline hole can be fitted onto the outside of the spline.

8. The double-sided grinding machine for silicon rod samples as described in claim 6, characterized in that, A vertically oriented elastic probe (4225) is provided inside the upper grinding disc seat (4212), and the elastic probe (4225) is located above the mating hole; when the upper grinding disc (421) is in the working position, the lifting drive (4224) can drive the lifting seat (4226) and the upper grinding disc (421) to descend, and the elastic probe (4225) can press against the top of the upper grinding disc drive shaft (413); The lifting drive (4224) is a cylinder. The air circuit system of the lifting drive (4224) is equipped with an electromagnetic proportional valve. The electromagnetic proportional valve is used to adjust the extension amount, output pressure and extension speed of the drive end of the lifting drive (4224).

9. The double-sided grinding machine for silicon rod samples as described in claim 6, characterized in that, The lower grinding head (41) also includes: The lower grinding disc support (416), and the first drive motor (4171), the second drive motor (4172), the third drive motor (4173) and the fourth drive motor (4174), whose main bodies are all fixed on the lower grinding disc support (416) and whose drive ends are all vertically oriented. The drive end of the first drive motor (4171) is connected to the upper grinding disc drive shaft (413) through a gear set, and is used to drive the upper grinding disc drive shaft (413) to rotate. The drive end of the second drive motor (4172) is connected to the internal gear ring seat (4141) fixed at the bottom of the internal gear ring (414) through a gear set, and is used to drive the internal gear ring (414) to rotate. The drive end of the third drive motor (4173) is connected to the lower grinding disc seat fixed at the bottom of the lower grinding disc (411) through a gear set, and is used to drive the lower grinding disc (411) to rotate. The drive end of the fourth drive motor (4174) is connected to the outer gear ring seat (4151) fixed at the bottom of the outer gear ring (415) through a gear set, and is used to drive the outer gear ring (415) to rotate.

10. A silicon rod sample processing system, characterized in that, The silicon rod sample double-sided polishing machine according to any one of claims 1-9 further includes a robot component (5). When the upper grinding disc (421) is in the avoidance position, the robot component (5) is used to transfer the silicon rod sample to be cut to the lower grinding disc (411) and remove the test sample formed by cutting and the remaining silicon rod sample.

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