Transport robot

Abstract

The utility model provides a kind of handling robot, handling robot includes accommodating module, transfer module and chassis module, wherein, accommodating module includes accommodating assembly and cover plate assembly, accommodating assembly forms the accommodating cavity with first opening, accommodating cavity is used to accommodate target material and at least part of liquid that immerses target material, cover plate assembly is movably connected in accommodating assembly to close or open first opening, transfer module includes clamping assembly and mechanical arm, mechanical arm is connected with clamping assembly, and by driving clamping assembly to in the liquid of accommodating cavity clamping and transferring target material, chassis module is connected to the bottom end of accommodating module, and it is used to drive handling robot movement.Such setting, by accommodating cavity with liquid as the storage position of carrying target material, it is realized that target material is always wrapped by liquid in accommodating cavity during handling robot moving carrying process, to prevent dust pollution target material, to play the role of protecting target material.

Description

Technical Field

[0001] This utility model relates to the field of automation equipment technology, and in particular to a material handling robot. Background Technology

[0002] In current semiconductor manufacturing processes, production lines are largely automated. However, in specialized processes such as cleaning and polishing, which require operation in water, manual loading and unloading are still the primary methods. This approach suffers from long worker movement distances, low efficiency, and is prone to water pollution and product defect rates. Furthermore, as production scales up, multiple operators are often required, placing a heavy cost burden on companies.

[0003] Furthermore, since the materials and finished products in the semiconductor field are relatively fragile and brittle, vibrations and collisions during handling and movement can easily cause the materials and finished products to break or be damaged, thereby affecting the yield rate and production costs. Utility Model Content

[0004] In view of the above problems, this utility model proposes a handling robot, which aims to provide a handling robot that can provide buffer protection for target materials during the moving and handling process, so as to reduce the damage and pollution to the target materials.

[0005] To achieve the above objectives, this utility model proposes a handling robot, comprising: The accommodating module includes an accommodating component and a cover assembly. The accommodating component forms an accommodating cavity with a first opening. The cover assembly is movably connected to the accommodating component to close or open the first opening. The accommodating cavity is used to accommodate a target material and a liquid, and under the condition that the target material is accommodating the accommodating cavity, at least a portion of the target material is immersed in the liquid. The transfer module includes a gripping component and a robotic arm. The gripping component can be used to grip or release the target material. The robotic arm is connected to the receiving component and the gripping component and is used to drive the gripping component to move relative to the receiving component, so as to cooperate with the gripping component to transfer the target material into the receiving cavity or remove it from the receiving cavity. The chassis module is connected to the bottom of the housing module and is used to drive the movement of the handling robot.

[0006] In one embodiment, the cover assembly has a switchable first state and a second state. In the first state, the cover assembly blocks the first opening, and the projection of the cover assembly and the first opening in the opening direction of the first opening has a first projection overlap. In the second state, the first opening is at least partially exposed, and the transfer module can take and put the target material in the accommodating cavity through the first opening. The projection of the cover plate assembly and the first opening in the opening direction of the first opening has a second projection overlap, and the first projection overlap is greater than the second projection overlap.

[0007] In one embodiment, the cover plate assembly includes at least a first cover plate, a second cover plate, and a driving member. The driving member is connected to at least one of the first cover plate and the second cover plate to drive the first cover plate and the second cover plate to move relative to the first opening, so that the cover plate assembly switches between a first state and a second state.

[0008] In one embodiment, the receiving module includes a limiting member, which is configured to correspond to the first opening and has a switchable limiting state and a release state; In the first state of the cover plate assembly, the limiting component switches to the limiting state, and in the second state of the cover plate assembly, the limiting component switches to the releasing state. Furthermore, in the limited position, the limiting component engages with the target material to prevent the target material from leaving the receiving cavity.

[0009] In one embodiment, the handling robot further includes a drainage module, which forms a drainage channel communicating with the accommodating cavity. The drainage channel has a switchable on state and an off state. When the drainage channel is in the on state, the liquid in the accommodating cavity can be discharged from the accommodating cavity through the drainage channel.

[0010] In one embodiment, the handling robot includes a housing that forms a main chamber with a drainage opening, and at least a housing module is disposed within the main chamber; The drainage module has a drainage pipe, which forms a drainage channel. The drainage pipe can extend relative to the shell to extend out of the main chamber through the drainage opening.

[0011] In one embodiment, the housing and the accommodating component are spaced apart to form a liquid storage tank with a second opening, which is located around the periphery of the first opening and is used to collect liquid generated during the process of the transfer module moving the target material into the liquid storage tank.

[0012] In one embodiment, the liquid storage tank is connected to a drain pipe so that the liquid collected in the liquid storage tank can be discharged through the drain pipe.

[0013] In one embodiment, the accommodating module includes a material clamp disposed in the accommodating cavity for fixing the target material at a target storage position in the accommodating cavity, so that there is a gap between the target material and the side wall of the accommodating cavity.

[0014] In one embodiment, the handling robot includes an information acquisition component, which is disposed in the transfer module and is used to acquire information to be acquired about the transfer location of the target material.

[0015] This invention provides a handling robot, comprising a containing module, a transfer module, and a chassis module. The containing module includes a containing component and a cover assembly. The containing component forms a containing cavity with a first opening, used to contain target material and a liquid at least partially submerging the target material. The cover assembly is movably connected to the containing component to close or open the first opening. The transfer module includes a gripping component and a robotic arm. The robotic arm is connected to the gripping component and drives the gripping component to grip and transfer the target material in the liquid within the containing cavity. The chassis module is connected to the bottom of the containing module and is used to drive the movement of the handling robot. This configuration, using the liquid-filled containing cavity as a storage location for the target material, ensures that the target material is always enveloped in liquid within the containing cavity during the robot's movement, thus preventing dust contamination and protecting the target material. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This application provides a schematic diagram of the first three-dimensional structure of a handling robot in a first state, as shown in the embodiments of the present application. Figure 2 This application provides a schematic diagram of the second three-dimensional structure of a handling robot in a second state, as shown in an embodiment of the present application. Figure 3 This is a cross-sectional three-dimensional structural diagram of a handling robot provided in an embodiment of this application.

[0018] Explanation of reference numerals in the attached figures: 10. Handling robot; 20. Target material; 100. Containment module; 110. Containment component; 111. Containment cavity; 1111. First opening; 120. Cover plate assembly; 121. First cover plate; 122. Second cover plate; 130. Limiting component; 200. Transfer module; 210. Gripping component; 220. Robotic arm; 300. Chassis module; 400. Drainage module; 500. Housing; 510. Second opening; 600. Material clamp.

[0019] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0021] It is understood that descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0022] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0023] Figure 1 This is a schematic diagram of the first three-dimensional structure of a handling robot in a first state, provided in an embodiment of this application. Figure 2 This is a schematic diagram of the second three-dimensional structure of a handling robot in a first state, provided in an embodiment of this application. Figure 3 This is a cross-sectional three-dimensional structural diagram of a handling robot provided in an embodiment of this application.

[0024] like Figures 1 to 3 As shown, the present invention proposes a handling robot 10, which includes a accommodating module 100, a transfer module 200, and a chassis module 300.

[0025] The accommodating module 100 includes an accommodating component 110 and a cover assembly 120. The accommodating component 110 forms an accommodating cavity 111 with a first opening 1111. The cover assembly 120 is movably connected to the accommodating component 110 to close or open the first opening 1111. The accommodating cavity 111 is used to accommodate the target material 20 and the liquid. Under the condition that the target material 20 is accommodating the accommodating cavity 111, at least a portion of the target material 20 is immersed in the liquid. The cover assembly 120 closes the first opening 1111 to seal and protect the liquid and the target material 20 in the accommodating cavity 111.

[0026] In one embodiment, a first opening 1111 is disposed on the top of the receiving assembly 110, and a cover assembly 120 is disposed corresponding to the first opening 1111 of the receiving assembly 110, so that the cover assembly 120 can seal and protect the receiving cavity 111 and the liquid and target material 20 contained in the receiving cavity 111 when the first opening 1111 is closed.

[0027] The transfer module 200 includes a gripping component 210 and a robotic arm 220. The gripping component 210 can be used to grip or release the target material 20. The robotic arm 220 is connected to the receiving component 110 and the gripping component 210 and is used to drive the gripping component 210 to move relative to the receiving component 110. When the cover plate component 120 opens the first opening 1111, the gripping component 210 can be driven to at least partially enter the receiving cavity 111 and contact and fix with the target material 20 immersed in the liquid in the receiving cavity 111, thereby cooperating to move the target material 20 out of the receiving cavity 111 through the first opening 1111. Alternatively, the gripping component 210 and the robotic arm 220 cooperate to fix the external target material 20 and transfer it into the receiving cavity 111 through the first opening 1111.

[0028] In one embodiment, a robotic arm 220 is connected to the top of the receiving assembly 110 near the first opening 1111, so that the gripping assembly 210 can be quickly entered or removed from the receiving cavity 111 by the drive of the robotic arm 220.

[0029] The chassis module 300 is connected to the bottom of the accommodating module 100 and is used to drive the handling robot 10 to move between the location where the target material 20 is to be moved in and the location where the target material 20 is to be moved out, thereby realizing the transfer of the target material 20 in the accommodating cavity 111.

[0030] With this configuration, the liquid-containing cavity 111 serves as the storage location for the target material 20. This ensures that the target material 20 remains encased in liquid within the cavity 111 during the movement and transport of the material by the handling robot 10. This prevents damage to the target material 20 caused by vibrations during movement and also prevents airborne dust from contaminating the target material 20, thus protecting it. Furthermore, the liquid in the cavity 111 provides relatively uniform pressure to the target material 20 by encasing it. This uniform pressure distribution helps to counteract localized stress concentrations caused by vibrations, thereby effectively protecting the target workpiece.

[0031] In some embodiments, the cover assembly 120 has a switchable first state and a second state, and the switching between the first state and the second state can be done manually or automatically. In the first state, the cover assembly 120 blocks the first opening 1111 to block the accommodating cavity 111 and the liquid and target material 20 in the accommodating cavity 111, and the projection of the cover assembly 120 and the first opening 1111 in the opening direction of the first opening 1111 has a first projection overlap.

[0032] In the second state, the first opening 1111 is at least partially exposed, so that the accommodating cavity 111 and the liquid and target material 20 in the accommodating cavity 111 are at least partially exposed, thereby allowing the transfer module 200 to take and put the target material 20 in the accommodating cavity 111 through the first opening 1111, and the cover plate assembly 120 and the first opening 1111 have a second projection overlap in the opening direction of the first opening 1111, and the first projection overlap is greater than the second projection overlap.

[0033] With this configuration, the liquid inside the accommodating cavity 111 can be protected from the target material 20 by the first state of the cover assembly 120, and the liquid inside the accommodating cavity 111 can be prevented from flowing to the outside of the accommodating cavity 111 through the first opening 1111 during the movement of the handling robot 10. Alternatively, the second state of the cover assembly 120 can be used to transfer the liquid from the accommodating cavity 111 to the outside through the first opening 1111.

[0034] It is understood that the switching methods of the first and second states of the cover plate assembly 120 include, but are not limited to, translation switching and rotation switching.

[0035] Preferably, the cover plate assembly 120 includes at least a first cover plate 121, a second cover plate 122, and a driving member. The driving member is connected to at least one of the first cover plate 121 and the second cover plate 122 to drive at least one of the first cover plate 121 and the second cover plate 122 to move relative to the first opening 1111, so that the cover plate assembly 120 switches between a first state and a second state.

[0036] In one embodiment, the driving member is connected to the first cover plate 121 and the second cover plate 122, and can drive the first cover plate 121 and the second cover plate 122 to move relative to the first opening 1111, respectively.

[0037] This configuration improves the switching speed between the first and second states of the cover assembly 120, and the automatic switching via the drive unit can improve the transfer efficiency of the target material 20 within the accommodating cavity 111.

[0038] In some embodiments, the accommodating module 100 includes a plurality of limiting members 130, which are disposed between the first cover plate 121 and the second cover plate 122 and the first opening 1111, and have switchable limiting state and release state.

[0039] In the first state of the cover plate assembly 120, the limiting member 130 switches to the limiting state. In the limiting state of the limiting member 130, the limiting member 130 engages with the target material 20 to restrict the target material 20. Thus, during the movement of the handling robot 10, the limiting member 130 can reduce the vibration of the target material 20 in the liquid in the accommodating cavity 111.

[0040] In the second state of the cover plate assembly 120, the limiting member 130 switches to the released state. In the released state of the limiting member 130, the limiting member 130 is disengaged from the target material 20, so that the transfer module 200 can transfer the target material 20.

[0041] Preferably, multiple limiting members 130 can be respectively disposed on the side of the first cover plate 121 and the second cover plate 122 near the first opening 1111, so that in the first state of the cover plate assembly 120, the first cover plate 121 and the second cover plate 122 cover the first opening 1111, thereby allowing the limiting members 130 to restrict the target material 20 through the first opening 1111, and when the cover plate assembly 120 switches to the second state, the first cover plate 121 and the second cover plate 122 move, thereby causing the limiting members 130 to detach from the target material 20.

[0042] With this configuration, the limiting member 130 limits the contact between the receiving cavity 111 and the target in the liquid within the receiving cavity 111, thereby preventing the target material 20 from shifting due to motion inertia or liquid buoyancy during the movement of the handling robot 10, thus protecting the target material 20.

[0043] In some embodiments, the handling robot 10 further includes at least one drainage module 400, which is disposed on at least one side of the handling robot 10 and forms a drainage channel communicating with the receiving cavity 111. The drainage module 400 also includes a power component communicating with the drainage channel. The power component is communicating with the drainage channel to provide power for the discharge of liquid in the drainage channel and to enable the drainage channel to have a switchable on state and off state. When the drainage channel is in the on state, the liquid in the receiving cavity 111 can be discharged from the receiving cavity 111 through the drainage channel.

[0044] In one embodiment, the handling robot 10 includes two drainage modules 400, which are respectively disposed on both sides of the handling robot 10 to improve the convenience and efficiency of drainage operation.

[0045] In one embodiment, the drainage module 400 further includes a control component, which includes, but is not limited to, a solenoid valve, a pneumatic valve, and an electric valve, for switching the flow channel between the open and closed states.

[0046] This configuration allows the liquid in the accommodating cavity 111 to be quickly discharged through the drainage module 400, making it easier to replace the liquid in the accommodating cavity 111 and clean the accommodating cavity 111, thereby improving the functionality of the handling robot 10 and reducing the maintenance cost of the handling robot 10.

[0047] In some embodiments, the handling robot 10 includes a housing 500 that forms a main chamber with a drainage opening. The housing 500 is disposed around the periphery of the handling robot 10, and at least the housing module 100 is disposed within the main chamber.

[0048] The drain module 400 has a drain pipe and a pipe drive, and the drain pipe forms a drain flow channel. The pipe drive is used to drive the drain pipe to move so that the drain pipe can extend relative to the housing 500 to extend out of the main chamber through the drain opening.

[0049] This configuration allows the handling robot 10 to move to the drainage point via the chassis module 300, and then the drainage module 400 can extend the drainage pipe outside the housing 500 via the pipe drive to drain the water. This enables the drainage operation of the drainage module 400 to be automated, reducing manual operation.

[0050] In some embodiments, the housing 500 and the accommodating assembly 110 are spaced apart to form a liquid storage tank with a second opening 510. The second opening 510 is disposed around the first opening 1111 and is used to collect the liquid dripped from the target material 20 during the process of the transfer module 200 transferring the target material 20 from the liquid in the accommodating cavity 111, and to store the collected liquid in the liquid storage tank.

[0051] Preferably, the second opening 510 is arranged around the periphery of the first opening 1111, so that the second opening 510 can collect the liquid dripping from the target material 20 no matter which direction the transfer module 200 transfers the target material 20.

[0052] In one embodiment, a sensor is provided in the liquid storage tank to obtain the volume of the liquid collected in the liquid storage tank, so as to ensure that the liquid in the liquid storage tank does not overflow.

[0053] This configuration allows the second opening 510 to collect dripping liquid during the transfer of target material 20, and to store it in the liquid storage tank, thereby preventing the dripping liquid from contaminating the handling robot 10 and the working environment.

[0054] In some implementations, the storage tank is connected to a drain pipe so that the liquid collected in the storage tank can be discharged through the drain pipe.

[0055] This configuration allows the liquid in the accommodating cavity 111 and the liquid storage tank to be discharged through the drainage module 400, improving the convenience of the drainage operation and reducing the number of drainage components.

[0056] In some embodiments, the accommodating module 100 includes a material clamp 600 disposed in the accommodating cavity 111 for fixing the target material 20 in the target storage position in the accommodating cavity 111, so that there is a gap between the target material 20 and the side wall of the accommodating cavity 111, thereby allowing the liquid in the accommodating cavity 111 to have a larger contact area with the target material 20, thereby more fully encapsulating the target material 20.

[0057] In one embodiment, the material clamp 600 may be fixedly placed with at least one target material 20, and the material clamp 600 may be placed and removed from the receiving cavity 111. The gripping component 210 of the transfer module 200 may be configured corresponding to the material clamp 600, so that the transfer module 200 can move by gripping the material clamp 600, thereby moving the target material 20 in the material clamp 600.

[0058] This configuration not only allows the material clamp 600 to work with the limiting member 130 to limit the target material 20 in multiple directions, preventing the target material 20 from colliding and shifting in the receiving cavity 111, thereby improving the yield rate of production, but also prevents the gripping component 210 of the transfer module 200 from directly contacting the target material 20, thus protecting the target material 20. Furthermore, the material clamp 600 can be used to transfer multiple target materials 20 at once, thereby improving work efficiency.

[0059] In some embodiments, the handling robot 10 includes an information acquisition component disposed in the transfer module 200, which is used to acquire information to be acquired about the transfer location of the target material 20.

[0060] In one embodiment, the information acquisition component is disposed on the robotic arm 220 so that the information acquisition component moves under the drive of the robotic arm 220, thereby improving the convenience of acquiring the location information to be acquired.

[0061] In one embodiment, the information acquisition component may be a camera.

[0062] It should be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0063] It should also be understood that the term "and / or" as used in this specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations. It should be noted that, herein, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0064] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. The above descriptions are merely specific implementations of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A transport robot, characterized in that, include: A receiving module, the receiving module including a receiving component and a cover plate assembly, the receiving component forming a receiving cavity with a first opening, the cover plate assembly being movably connected to the receiving component to close or open the first opening, wherein the receiving cavity is used to receive a target material and a liquid, and under the condition that the target material is received in the receiving cavity, at least a portion of the target material is immersed in the liquid; The transfer module includes a gripping component and a robotic arm. The gripping component can be used to grip or release the target material. The robotic arm is connected to the receiving component and the gripping component and is used to drive the gripping component to move relative to the receiving component, so as to cooperate with the gripping component to transfer the target material into the receiving cavity or remove it from the receiving cavity. A chassis module is connected to the bottom of the housing module and is used to drive the movement of the transport robot.

2. The handling robot as described in claim 1, characterized in that, The cover plate assembly has a switchable first state and a second state. In the first state, the cover plate assembly blocks the first opening, and the projection of the cover plate assembly and the first opening in the opening direction of the first opening has a first projection overlap. In the second state, the first opening is at least partially exposed, and the transfer module can take and put the target material in the accommodating cavity through the first opening. The projection of the cover plate assembly and the first opening in the opening direction of the first opening has a second projection overlap, and the first projection overlap is greater than the second projection overlap.

3. The handling robot as described in claim 2, characterized in that, The cover plate assembly includes at least a first cover plate, a second cover plate, and a driving member. The driving member is connected to at least one of the first cover plate and the second cover plate to drive the first cover plate and the second cover plate to move relative to the first opening, so that the cover plate assembly switches between the first state and the second state.

4. The handling robot as described in claim 2, characterized in that, The accommodating module includes a limiting member, which is configured corresponding to the first opening and has a switchable limiting state and a release state. In the first state of the cover plate assembly, the limiting member switches to the limiting state; in the second state of the cover plate assembly, the limiting member switches to the releasing state. Furthermore, in the limited position, the limiting member engages with the target material to prevent the target material from leaving the receiving cavity.

5. The handling robot as described in claim 1, characterized in that, The handling robot also includes a drainage module, which forms a drainage channel communicating with the accommodating cavity. The drainage channel has a switchable on state and an off state. When the drainage channel is in the on state, the liquid in the accommodating cavity can be discharged from the accommodating cavity through the drainage channel.

6. The handling robot as described in claim 5, characterized in that, The transport robot includes a housing that forms a main chamber with a drainage opening, and at least the housing module is disposed within the main chamber. The drainage module has a drainage pipe, which forms the drainage channel. The drainage pipe can extend relative to the housing to extend out of the main chamber through the drainage opening.

7. The handling robot as described in claim 6, characterized in that, The housing and the accommodating component are spaced apart to form a liquid storage tank with a second opening. The second opening is located around the periphery of the first opening and is used to collect the liquid generated during the process of the transfer module moving the target material into the liquid storage tank.

8. The handling robot as described in claim 7, characterized in that, The storage tank is connected to the drainage pipe so that the liquid collected in the storage tank can be discharged through the drainage pipe.

9. The handling robot as described in claim 1, characterized in that, The accommodating module includes a material clamp, which is disposed in the accommodating cavity to fix the target material in the target storage position in the accommodating cavity, so that there is a gap between the target material and the side wall of the accommodating cavity.

10. The handling robot as described in claim 1, characterized in that, The handling robot includes an information acquisition component, which is disposed in the transfer module and is used to acquire information to be acquired about the transfer location of the target material.

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