Silicon core taper hole processing tooling

CN224867616UActive Publication Date: 2026-10-20NINGXIA HEGUANG NEW MATERIALS CO LTD
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Patent Information

Application Number
CN202522536302.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-28
Publication Date
2026-10-20
Estimated Expiration
2035-11-28

AI Technical Summary

Technical Problem

针对现有技术的不足,本实用新型提供了一种硅芯锥孔加工工装,具备便于收集碎屑的优点,解决了硅芯受到钻孔作业的加工件会产生碎屑,该部分碎屑一旦具有一定的回收价值,但是现有的加工工装不便于对碎屑进行统一的收集的问题

Benefits of technology

该加工工装,具备便于收集碎屑的优点,硅芯被加工时产生的碎屑通过通槽掉落至收集框内,工作人员通过外部控制器启动电机,驱动机构联动连接板左右往复移动,柔性刮板可将加工台顶部未通过通槽的残留的碎屑推动至收集框内,从而提高碎屑的收集效果,设备停机后,工作人员打开框门后便于对收集框内部收集的碎屑统一进行处理。解决了硅芯受到钻孔作业的加工件会产生碎屑,该部分碎屑一旦具有一定的回收价值,但是现有的加工工装不便于对碎屑进行统一的收集的问题。

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Abstract

The utility model relates to the technical field of silicon core taper hole processing, and disclose a kind of silicon core taper hole processing frock, including through slot, symmetrically set up on processing table;Collecting frame, fixedly connected in processing table bottom;Flexible scraper, slidingly connected in processing table top;Connecting plate, set in flexible scraper one end;Reciprocating screw rod, rotationally connected in cavity;Moving block, set in reciprocating screw rod outside, moving block and the curve groove on reciprocating screw rod are matched, and moving block and connecting plate are fixedly connected.Silicon core is produced when the chip of being processed through through slot falls into collecting frame, and staff starts motor by external controller, and driving mechanism links connecting plate and reciprocates left and right, and flexible scraper can push the residual chip that has not passed through through slot on the top of processing table into collecting frame, to improve the collection effect of chip, after equipment shutdown, staff opens frame door, and it is convenient to uniformly process the chip collected in the inside of collecting frame.
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Description

Technical Field

[0001] This utility model relates to the field of silicon core tapered hole processing technology, specifically a silicon core tapered hole processing tooling. Background Technology

[0002] A silicon core is a slender, rod-shaped component made of high-purity monocrystalline silicon, primarily used in semiconductors, photovoltaics, and other fields. It serves as the core "carrier" for producing polycrystalline silicon. During chemical vapor deposition (CVD), polycrystalline silicon is deposited on the surface of the silicon core, ultimately forming a polycrystalline silicon ingot. Tapered holes in the silicon core are tapered through-holes or blind holes machined at both ends. Their core function is to secure the silicon core and ensure its conductivity. They are typically used for precise alignment with fixtures and electrodes, ensuring stable positioning and uniform current conduction during the deposition process.

[0003] Silicon cores are processed by drilling, which generates debris. This debris has some recycling value, but existing processing equipment is not convenient for the unified collection of the debris. Utility Model Content

[0004] (a) Technical problems to be solved To address the shortcomings of existing technologies, this utility model provides a silicon core tapered hole machining fixture, which has the advantage of facilitating the collection of debris. This solves the problem that silicon cores are processed by drilling, which generates debris that has certain recycling value, but existing machining fixtures are not convenient for unified collection of the debris.

[0005] (II) Technical Solution To achieve the above objectives, this utility model provides the following technical solution: a silicon core tapered hole processing fixture, comprising a main body assembly, wherein the main body assembly includes: A processing table, with a processing mechanism installed on its top; The processing table is equipped with a collection component, which includes: Through slots are symmetrically formed on the processing table; A collection frame is fixedly connected to the bottom of the processing table; The frame door is hinged to the outer wall of the collection frame; A flexible scraper is slidably connected to the top of the processing table; A connecting plate is disposed at one end of the flexible scraper; A drive mechanism is disposed on the processing table and the connecting plate.

[0006] Preferably, the drive mechanism includes: The frame is fixedly connected to the top of the processing table; A cavity is formed in the front sidewall of the frame; A reciprocating lead screw is rotatably connected within the cavity; A movable block is disposed outside the reciprocating lead screw, the movable block cooperates with the curved groove on the reciprocating lead screw, and the movable block is fixedly connected to the connecting plate; The motor is located on the outer wall of the frame, and the output shaft of the motor is fixedly connected to one end of the reciprocating lead screw.

[0007] Preferably, the processing mechanism is equipped with an air pump, and the air pump output end is symmetrically provided with air blowing pipes.

[0008] Preferably, the inner wall of the cavity and the facing surface of the moving block are both provided with telescopic shells.

[0009] Preferably, the flexible scraper has symmetrically attached inclined plates on its outer side wall.

[0010] Preferably, the top of the connecting plate has a connecting groove, and a connecting block is fixedly connected to one end of the flexible scraper near the connecting plate.

[0011] (III) Beneficial Effects Compared with the prior art, this utility model provides a tooling for machining tapered holes in silicon cores, which has the following beneficial effects: This processing fixture has the advantage of facilitating debris collection. Debris generated during silicon core processing falls through a channel into a collection frame. The operator starts a motor via an external controller, driving the linkage plate to move left and right. A flexible scraper pushes any remaining debris from the top of the processing table that hasn't passed through the channel into the collection frame, thus improving collection efficiency. After the equipment stops, the operator can open the frame door for convenient and unified processing of the collected debris. This solves the problem of existing processing fixtures being inconvenient for the unified collection of debris generated during silicon core drilling operations, which has some recycling value. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the frame door opening structure in this utility model; Figure 3 This is a top view cross-sectional structural diagram of the frame in this utility model; Figure 4 This is a schematic diagram of the flexible scraper and connecting plate structure in this utility model.

[0013] In the picture: 1. Main components; 11. Machining table; 12. Machining mechanism; 2. Collection component; 21. Through slot; 22. Collection frame; 23. Frame door; 24. Flexible scraper; 25. Connecting plate; 26. Drive mechanism; 261. Frame body; 262. Cavity; 263. Reciprocating screw; 264. Moving block; 265. Motor; 3. Telescopic shell; 41. Connecting groove; 4. Connecting block; 5. Inclined plate; 6. Air blowing pipe; 61. Air pump. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Example 1 See Figure 1-4 A silicon core tapered hole processing fixture includes a main component 1, which includes: a processing table 11 with a processing mechanism 12 on its top; a collection component 2 on the processing table 11, which includes: a through groove 21 symmetrically opened on the processing table 11; a collection frame 22 fixedly connected to the bottom of the processing table 11; a frame door 23 hinged to the outer wall of the collection frame 22; a flexible scraper 24 slidably connected to the top of the processing table 11; a connecting plate 25 disposed at one end of the flexible scraper 24; and a driving mechanism 26 disposed on the processing table 11 and the connecting plate 25. The drive mechanism 26 includes: a frame 261, fixedly connected to the top of the processing table 11; a cavity 262, formed in the front side wall of the frame 261; a reciprocating lead screw 263, rotatably connected to the cavity 262; a moving block 264, disposed outside the reciprocating lead screw 263, the moving block 264 cooperating with the curved groove on the reciprocating lead screw 263, and the moving block 264 fixedly connected to the connecting plate 25; and a motor 265, disposed on the outer side wall of the frame 261, the output shaft of the motor 265 fixedly connected to one end of the reciprocating lead screw 263. An air pump 61 is provided on the processing mechanism 12, and air blowing pipes 6 are symmetrically arranged at the output end of the air pump 61.

[0016] In use, a worker first fixes the silicon core in the processing mechanism 12, and the processing mechanism 12 then performs taper hole machining on the silicon core. Debris generated during machining falls into the collection frame 22 through the through groove 21. The worker starts the motor 265 via an external controller, and the drive mechanism 26 interlocks the connection plate 25 to move reciprocally left and right: the motor 265 drives the reciprocating screw 263 to rotate. When the reciprocating screw 263 rotates, the curved groove on the exterior of the reciprocating screw 263 forces the moving block 264 to perform reciprocating linear motion along the axis of the reciprocating screw 263. The moving block 264 drives the flexible scraper 24 to move via the connection plate 25, and the flexible scraper 24 can push residual debris on the top of the processing table 11 that has not passed through the through groove 21 into the collection frame 22, thereby improving the debris collection effect. After the equipment stops operating, the worker opens the frame door 23 to facilitate unified treatment of the debris collected inside the collection frame 22. When the processing mechanism 12 machines the silicon core, the worker simultaneously activates the power supply of the air pump 61, and gas is ejected from the blowing pipe 6 to blow out the debris inside the taper hole of the silicon core, preventing the debris inside the taper hole from affecting the machining effect on the silicon core.

[0017] The aforementioned processing mechanism 12 adopts conventional technologies, such as a positioning component, a clamping component, a tool guide sleeve, a limit block, a connection and adjustment component, and the like. The silicon core is placed into the positioning component of the fixture, and the clamping mechanism is activated to gently fix the silicon core. The adjustment screws of the fixture are adjusted to align the axis of the silicon core with the movement direction of the tool, ensuring the accuracy of the taper hole machining angle. A special tool with a matching taper is loaded into the guide sleeve, and it is confirmed that the tool length matches the machining depth. The processing equipment is started, and the tool moves along the guide sleeve to perform drilling or grinding on the end of the silicon core to form a taper hole. After machining is completed, the clamping mechanism is loosened to take out the silicon core, the dimensions and taper of the taper hole are inspected to verify compliance with requirements, and the silicon core proceeds to the next process if qualified. Any structure that can realize taper hole machining on the silicon core is acceptable, and the specific structure will not be elaborated further herein.

[0018] Second Embodiment Auxiliary functions are added on the basis of the first embodiment.

[0019] Refer to Figure 1-4 , the opposing surfaces of the inner wall of the cavity 262 and the moving block 264 are both provided with a telescopic shell 3. The outer side wall of the flexible scraper 24 is symmetrically and fixedly connected with inclined plates 5. The top of the connection plate 25 is provided with a connection groove 41, and the end of the flexible scraper 24 close to the connection plate 25 is fixedly connected with a connection block 4.

[0020] When the moving block 264 moves the connecting plate 25 to the left, the telescopic shell 3 fixed on the left side of the moving block 264 retracts, and the telescopic shell 3 fixed on the right side extends. When the moving block 264 moves the connecting plate 25 to the right, the telescopic shell 3 fixed on the right side of the moving block 264 retracts, and the telescopic shell 3 fixed on the left side extends. The telescopic shell 3 blocks the cavity 262, preventing debris from entering the cavity 262 and affecting the normal operation of the reciprocating screw 263 and the moving block 264. When the flexible scraper 24 reciprocates to push the debris, the flexible scrapers 24 at both ends guide the debris on both sides of the through groove 21 into the through groove 21, thereby improving the cleaning effect of the flexible scraper 24. The worker pulls the flexible scraper 24 upwards, and the flexible scraper 24 drives the connecting block 4 to detach from the connecting groove 41. At this time, the worker can clean or replace the flexible scraper 24. The connecting block 4 on the clean flexible scraper 24 is directly inserted into the connecting groove 41 to connect the flexible scraper 24 with the connecting plate 25, so as to avoid the wear or contamination of the flexible scraper 24 from affecting the cleaning effect of the debris.

[0021] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A tooling for machining tapered holes in silicon cores, comprising a main body assembly (1), wherein the main body assembly (1) includes: A processing table (11) with a processing mechanism (12) on its top; The feature is that a collection component (2) is provided on the processing table (11), and the collection component (2) includes: Through slots (21) are symmetrically opened on the processing table (11); The collection frame (22) is fixedly connected to the bottom of the processing table (11); The frame door (23) is hinged to the outer wall of the collection frame (22); A flexible scraper (24) is slidably connected to the top of the processing table (11); A connecting plate (25) is disposed at one end of the flexible scraper (24); The drive mechanism (26) is disposed on the processing table (11) and the connecting plate (25).

2. The silicon core tapered hole machining fixture according to claim 1, characterized in that: The drive mechanism (26) includes: The frame (261) is fixedly connected to the top of the processing table (11); A cavity (262) is formed in the front side wall of the frame (261); A reciprocating lead screw (263) is rotatably connected to the cavity (262); A movable block (264) is disposed outside the reciprocating lead screw (263). The movable block (264) cooperates with the curved groove on the reciprocating lead screw (263). The movable block (264) is fixedly connected to the connecting plate (25). The motor (265) is located on the outer wall of the frame (261), and the output shaft of the motor (265) is fixedly connected to one end of the reciprocating lead screw (263).

3. The silicon core tapered hole machining fixture according to claim 2, characterized in that: An air pump (61) is provided on the processing mechanism (12), and an air blowing pipe (6) is symmetrically provided at the output end of the air pump (61).

4. The silicon core tapered hole machining fixture according to claim 3, characterized in that: The inner wall of the cavity (262) and the facing surfaces of the moving block (264) are both provided with telescopic shells (3).

5. The silicon core tapered hole machining fixture according to claim 4, characterized in that: The flexible scraper (24) has an inclined plate (5) symmetrically connected to its outer wall.

6. The silicon core tapered hole machining fixture according to claim 5, characterized in that: The top of the connecting plate (25) is provided with a connecting groove (41), and the flexible scraper (24) is fixedly connected to a connecting block (4) at one end near the connecting plate (25).